EP2149710A3 - Vacuum pump arrangement - Google Patents

Vacuum pump arrangement Download PDF

Info

Publication number
EP2149710A3
EP2149710A3 EP09008725.5A EP09008725A EP2149710A3 EP 2149710 A3 EP2149710 A3 EP 2149710A3 EP 09008725 A EP09008725 A EP 09008725A EP 2149710 A3 EP2149710 A3 EP 2149710A3
Authority
EP
European Patent Office
Prior art keywords
flange
vacuum pump
pump arrangement
vacuum chamber
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09008725.5A
Other languages
German (de)
French (fr)
Other versions
EP2149710B1 (en
EP2149710A2 (en
Inventor
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2149710A2 publication Critical patent/EP2149710A2/en
Publication of EP2149710A3 publication Critical patent/EP2149710A3/en
Application granted granted Critical
Publication of EP2149710B1 publication Critical patent/EP2149710B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Anordnung mit Vakuumkammer (100; 200) und Vakuumpumpe (102; 202), welche ein Gehäuse (104; 204), einen darin angeordneten, schnell drehenden Rotor (106; 206) und einen mit dem Gehäuse verbundenen Flansch (108; 208) aufweist, und mit einer Schraube (110; 210) zum Verbinden des Flansches mit der Vakuumkammer. Um die Sicherheit im Falle eines Blockierens des Rotors zu erhöhen, schlägt die Erfindung vor, die Anordnung ein Halteelement (120; 220) aufweist, welches derart gestaltet ist, dass der Flansch durch Formschluss gegen eine Bewegung senkrecht zur Flanschebene gesichert ist.

Figure imgaf001
The invention relates to a vacuum chamber assembly (100; 200) and vacuum pump (102; 202) comprising a housing (104; 204), a fast rotating rotor (106; 206) disposed therein, and a flange (108; 208), and a screw (110; 210) for connecting the flange to the vacuum chamber. In order to increase the safety in case of blocking of the rotor, the invention proposes that the arrangement comprises a holding element (120, 220), which is designed such that the flange is secured by a form fit against movement perpendicular to the flange plane.
Figure imgaf001
EP09008725.5A 2008-07-31 2009-07-03 Vacuum pump arrangement Active EP2149710B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008035972A DE102008035972A1 (en) 2008-07-31 2008-07-31 Vacuum pumping arrangement

Publications (3)

Publication Number Publication Date
EP2149710A2 EP2149710A2 (en) 2010-02-03
EP2149710A3 true EP2149710A3 (en) 2017-03-15
EP2149710B1 EP2149710B1 (en) 2019-01-16

Family

ID=41228592

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09008725.5A Active EP2149710B1 (en) 2008-07-31 2009-07-03 Vacuum pump arrangement

Country Status (2)

Country Link
EP (1) EP2149710B1 (en)
DE (1) DE102008035972A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014104161A1 (en) * 2014-03-26 2015-10-01 Pfeiffer Vacuum Gmbh Roots
JP2021514492A (en) 2018-02-09 2021-06-10 ニーサー，ポール Filtration equipment and methods
US11260330B2 (en) 2018-02-09 2022-03-01 Paul NEISER Filtration apparatus and method
WO2019161297A1 (en) 2018-02-15 2019-08-22 Neiser Paul Apparatus and methods for selectively transmitting objects
US20210164451A1 (en) * 2018-02-23 2021-06-03 Paul NEISER Interaction method and apparatus
EP3617523A1 (en) * 2019-02-12 2020-03-04 Pfeiffer Vacuum Gmbh Vacuum device and vacuum system
GB2607605B (en) * 2021-06-08 2023-07-05 Leybold Gmbh Apparatus and vacuum system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1258634A1 (en) * 2001-04-27 2002-11-20 BOC Edwards Technologies, Limited Vacuum pump
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
EP1413761A2 (en) * 2002-10-23 2004-04-28 BOC Edwards Technologies, Limited Molecular pump and flange
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
EP1933037A2 (en) * 2006-12-13 2008-06-18 Pfeiffer Vacuum Gmbh Vacuum pump mounting system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
EP1258634A1 (en) * 2001-04-27 2002-11-20 BOC Edwards Technologies, Limited Vacuum pump
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
EP1413761A2 (en) * 2002-10-23 2004-04-28 BOC Edwards Technologies, Limited Molecular pump and flange
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
EP1933037A2 (en) * 2006-12-13 2008-06-18 Pfeiffer Vacuum Gmbh Vacuum pump mounting system

Also Published As

Publication number Publication date
EP2149710B1 (en) 2019-01-16
EP2149710A2 (en) 2010-02-03
DE102008035972A1 (en) 2010-02-04

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