EP2149710A3 - Agencement de pompe à vide - Google Patents
Agencement de pompe à vide Download PDFInfo
- Publication number
- EP2149710A3 EP2149710A3 EP09008725.5A EP09008725A EP2149710A3 EP 2149710 A3 EP2149710 A3 EP 2149710A3 EP 09008725 A EP09008725 A EP 09008725A EP 2149710 A3 EP2149710 A3 EP 2149710A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- flange
- vacuum pump
- pump arrangement
- vacuum chamber
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000903 blocking effect Effects 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008035972A DE102008035972A1 (de) | 2008-07-31 | 2008-07-31 | Vakuumpumpanordnung |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2149710A2 EP2149710A2 (fr) | 2010-02-03 |
EP2149710A3 true EP2149710A3 (fr) | 2017-03-15 |
EP2149710B1 EP2149710B1 (fr) | 2019-01-16 |
Family
ID=41228592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09008725.5A Not-in-force EP2149710B1 (fr) | 2008-07-31 | 2009-07-03 | Agencement de pompe à vide |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2149710B1 (fr) |
DE (1) | DE102008035972A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014104161A1 (de) * | 2014-03-26 | 2015-10-01 | Pfeiffer Vacuum Gmbh | Wälzkolbenvakuumpumpe |
EP3749993A1 (fr) | 2018-02-09 | 2020-12-16 | Neiser, Paul | Appareil et procédé de filtration |
US11260330B2 (en) | 2018-02-09 | 2022-03-01 | Paul NEISER | Filtration apparatus and method |
CN112041724A (zh) | 2018-02-15 | 2020-12-04 | P·奈瑟 | 用于选择性透射对象的设备和方法 |
CN111868378A (zh) * | 2018-02-23 | 2020-10-30 | P·奈瑟 | 相互作用方法和设备 |
EP3617523A1 (fr) * | 2019-02-12 | 2020-03-04 | Pfeiffer Vacuum Gmbh | Appareil à vide et système à vide |
GB2607605B (en) * | 2021-06-08 | 2023-07-05 | Leybold Gmbh | Apparatus and vacuum system |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1258634A1 (fr) * | 2001-04-27 | 2002-11-20 | BOC Edwards Technologies, Limited | Pompe à vide |
US6485254B1 (en) * | 2000-10-19 | 2002-11-26 | Applied Materials, Inc. | Energy dissipating coupling |
US20030175113A1 (en) * | 2002-03-12 | 2003-09-18 | Tooru Miwata | Turbo-molecular pump |
EP1413761A2 (fr) * | 2002-10-23 | 2004-04-28 | BOC Edwards Technologies, Limited | Pompe turbomoléculaire et bride |
US20050029417A1 (en) * | 2003-08-08 | 2005-02-10 | Richard Scheps | Mounting bracket for a rotary pump |
EP1933037A2 (fr) * | 2006-12-13 | 2008-06-18 | Pfeiffer Vacuum Gmbh | Dispositif de montage pour pompe à vide |
-
2008
- 2008-07-31 DE DE102008035972A patent/DE102008035972A1/de not_active Ceased
-
2009
- 2009-07-03 EP EP09008725.5A patent/EP2149710B1/fr not_active Not-in-force
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6485254B1 (en) * | 2000-10-19 | 2002-11-26 | Applied Materials, Inc. | Energy dissipating coupling |
EP1258634A1 (fr) * | 2001-04-27 | 2002-11-20 | BOC Edwards Technologies, Limited | Pompe à vide |
US20030175113A1 (en) * | 2002-03-12 | 2003-09-18 | Tooru Miwata | Turbo-molecular pump |
EP1413761A2 (fr) * | 2002-10-23 | 2004-04-28 | BOC Edwards Technologies, Limited | Pompe turbomoléculaire et bride |
US20050029417A1 (en) * | 2003-08-08 | 2005-02-10 | Richard Scheps | Mounting bracket for a rotary pump |
EP1933037A2 (fr) * | 2006-12-13 | 2008-06-18 | Pfeiffer Vacuum Gmbh | Dispositif de montage pour pompe à vide |
Also Published As
Publication number | Publication date |
---|---|
EP2149710A2 (fr) | 2010-02-03 |
EP2149710B1 (fr) | 2019-01-16 |
DE102008035972A1 (de) | 2010-02-04 |
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