EP2149710A2 - Agencement de pompe à vide - Google Patents

Agencement de pompe à vide Download PDF

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Publication number
EP2149710A2
EP2149710A2 EP09008725A EP09008725A EP2149710A2 EP 2149710 A2 EP2149710 A2 EP 2149710A2 EP 09008725 A EP09008725 A EP 09008725A EP 09008725 A EP09008725 A EP 09008725A EP 2149710 A2 EP2149710 A2 EP 2149710A2
Authority
EP
European Patent Office
Prior art keywords
flange
ring
vacuum chamber
vacuum pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09008725A
Other languages
German (de)
English (en)
Other versions
EP2149710B1 (fr
EP2149710A3 (fr
Inventor
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2149710A2 publication Critical patent/EP2149710A2/fr
Publication of EP2149710A3 publication Critical patent/EP2149710A3/fr
Application granted granted Critical
Publication of EP2149710B1 publication Critical patent/EP2149710B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a Vakuumpumpan extract according to the preamble of the first claim.
  • Vacuum pumps with fast rotating rotors have become indispensable in many vacuum-assisted manufacturing processes.
  • the rotors rotate at speeds of tens of thousands of revolutions per minute to produce the pumping action. Due to these speeds and the weight of the rotor, this thus stores a high kinetic energy. If there is a blocking of the rotor, this energy is released. There are numerous measures taken to prevent the blocking of the rotor or detect a leading malfunction early. Nevertheless, vacuum arrangements have to be designed in such a way that they are safe even when the worst-case scenario is an accident. Safe means that no parts fly around or dangerous substances are released.
  • the solution with the features of the first claim has the advantage that it is inexpensive to implement and can be easily retrofitted to existing facilities. Due to the design of the retaining element such that the flange is secured by positive engagement against movement perpendicular to the flange plane, the safety is increased according to the following principle. The resistance of the arrangement against forces and moments which lead to a tearing of the vacuum pump in a direction perpendicular to the flange plane is greatly increased. It is easy to completely prevent this movement by the design, because the design options are not limited by standards. The yielding of individual screws by overloading does not lead to a subsequent failure of the complete screw through the retaining element according to the invention. A further advantage of the invention is that the vacuum pumping arrangement is secured in the axial direction against the axial forces occurring during blocking of the rotor by the positive locking.
  • the holding element has a ring connected to the vacuum chamber and a stop element.
  • the stop element produces the positive connection.
  • the ring is advantageous because only this one component is to be aligned exactly opposite the flange opening.
  • Another advantage is that only remains a rotation about the axis perpendicular to the ring by the ring and the stop element of the vacuum pump after the yielding of the screw as the last degree of freedom. Their consequences can be easily countered by long lines and similar measures. It can be easily retrofitted to existing vacuum chambers. Overall, only a few structurally simple and easy-to-install components are necessary, so that the security is increased and In addition, costs are saved.
  • This development increases the safety in particular for vacuum pump arrangements, in which the vacuum chamber has only one flange opening and a threaded hole circle surrounding it.
  • the vacuum chamber has a chamber flange and the holding element is designed such that the flange and chamber flange positively connects and allows rotation about the axis of symmetry.
  • the symmetry axis coincides with single-suction vacuum pumps with the rotor axis.
  • the vacuum pump can rotate about this axis and convert the kinetic energy into other forms of energy, for example heat, during the rotation by friction. Due to the positive connection, it is held in the axial direction and can not tear away from the Vakuumpumpan ever. Thus, safety is increased by preventing part tearing and lowering the load on the chamber flange.
  • the holding element has a plurality of circumferentially offset from one another and interconnected ring segments. This is an inexpensive to manufacture and easy to install arrangement that increases safety. Increased safety also contributes that the mutual connection of the ring segments causes the rotation of the vacuum pump is their only free degree of freedom.
  • All of the aforementioned design forms can be further developed by the strength of the screw is dimensioned such that the screw yields at a predefined shearing load.
  • This predefined shear load is dimensioned so that the screw only the maximum for the vacuum chamber tolerable moment transfers to this. If the torque created during blocking exceeds the maximum tolerable moment, the screw will yield. This will cause the vacuum pump to move according to its degrees of freedom.
  • the only degree of freedom of all developments is the rotation about the axis of symmetry, so that a tearing of the vacuum pump can not take place and kinetic energy is safely degraded by the braked rotation.
  • Another refinement proposes providing the surface of the holding element which is in contact with the flange with a defined and constant coefficient of friction. This makes it possible to allow a rotation, which rubs the surfaces of flange and retaining element against each other, take place in a defined manner. This makes it possible, in particular, to make necessary measures cost-effective during a rotation of the vacuum pump. These measures include flexible prevacuum lines and excess length of the electrical connections.
  • the vacuum pumping arrangement according to the first embodiment is shown in FIG. 1 initially shown in section. It has a vacuum chamber 100 and a vacuum pump 102.
  • the vacuum pump has a flange 108, which is detachably connected to a screw 110 with the vacuum chamber. Normally, twelve screws are distributed symmetrically over the circumference of the flange.
  • the flange is part of the housing 104 of the vacuum pump.
  • This housing houses a rotor 106 which includes a fast rotating shaft 161 and a rotor disk 162 carrying blades.
  • a stator disk 130 which likewise carries blades, is arranged at a small axial distance from the rotor disk.
  • Rotor disk and stator disc can come into contact with each other in the worst possible accident so that blocked in the wake of the rotor.
  • Rotor and stator are designed according to Becker in the example shown. Alternatively, they may be designed in whole or in part according to Holweck or Gaede, since these also require a fast rotation of the rotor.
  • a centering ring 140 and a seal 142 are seated, which effect a precise alignment of the vacuum pump to the vacuum chamber and a vacuum-tight seal of the arrangement.
  • the arrangement has a holding element 120, which is designed such that the flange is secured by positive engagement against movement perpendicular to the flange plane.
  • This configuration is achieved in the first embodiment by a ring 122 and a stop element 124.
  • the ring surrounds the flange and centering ring and has an axial thickness equal to the sum of the thickness of the centering ring and the thickness of the flange.
  • a stop element 124 is connected to the ring.
  • this compound in the example shown is releasably generated by stopper screws 128.
  • Flange and stop element touch each other.
  • the contact surface 126 is provided with a coating which has a defined and constant coefficient of friction.
  • FIG. 2 is a section through the vacuum arrangement along the line II 'shown.
  • This cutting line is perpendicular to the rotor axis and to the axis of symmetry of flange and ring. It lies in a plane parallel to the flange plane.
  • the housing 104 can be seen cut.
  • On the flange 108 results in a plan view.
  • the flange is surrounded by the ring 122. Between them is a gap that is not drawn to scale. This gap allows easy movements in the flange plane, which simplifies the mounting of the vacuum pump to the vacuum chamber.
  • the gap also compensates for slight inaccuracies in the centering of the ring and centering ring. This reduces the requirements for precision in the assembly of the ring.
  • a stop member 124 is releasably connected to the ring by stopper screws 128.
  • the stop members have recesses 170 leaving room for the screws 110.
  • the recesses may be designed as elongated recesses 171, wherein the screw 110 is seated at that end of the recess, which comes first with respect to the rotor rotation direction. This allows a rotation of the vacuum pump relative to the stop element by a defined angle, should the screws 110 already be destroyed. Together with the coating, the maximum twist angle can be determined for the worst case to be assumed.
  • FIG. 3 shows a section through the arrangement in a plane in which the symmetry axis lies.
  • the vacuum pump 202 has a housing 204, in which in particular the stator disk 230 and the rotor 206 are arranged.
  • the rotor has a shaft 261 and at least one rotor disk 262, which is equipped with blades.
  • Rotor and stator are designed according to Becker in the example shown. Alternatively, they can be designed in whole or in part according to Holweck or Gaede, as these too rapid rotation of the rotor presuppose.
  • To the housing 204, a flange 208 is connected to the housing 204.
  • the vacuum chamber 200 has a tubular neck with a chamber flange 201. Between the chamber flange and flange are a centering ring 240 for mutual alignment of the flanges and a sealing ring 242 for vacuum-tight sealing of the flange connection. Screws 210 releasably connect the flanges. Both flanges are surrounded by the components of the support member 220, which is designed such that the flange is secured by positive engagement against movement perpendicular to the flange plane.
  • the retaining element comprises the ring segments 222a, 222c, 224a and 224c.
  • the fit is achieved by contacting a portion of the ring segments 222a and 222c with the chamber flange and another portion of the ring segments 224a and 224c with the flange in touching contact.
  • the ring segments engage positively in one another and are interconnected.
  • a part of the ring segments on threaded portions 228 which are inserted through holes in the other part of the ring segments.
  • the connection is secured by nuts 229 engaged with the threaded portions.
  • FIG. 4 shows a section along the line II-II 'by the arrangement of FIG. 3 ,
  • the cutting plane lies in the plane of the flange of the vacuum pump.
  • the flange 208 can be seen centrally, which has twelve distributed on the circumference holes through which screws 210 are inserted.
  • the flange is surrounded by four ring segments 222a, 222b, 222c and 222d. In the circumferential direction offset from these four further ring segments 224a, 224b, 224c and 224d are arranged.
  • the ring segments 222a, 222b, 222c, 222d and 224a, 224b, 224c and 224d are according to FIG FIG. 3 screwed together, thus forming a closed ring surrounding the flanges 201 and 208.
  • FIG. 5 shows a section along the line III-III '.
  • a partial settlement of the interconnected ring segments can be seen.
  • Each of the ring segments 222a, 222b and 22d has a plurality of threaded portions 228. These pass through holes 250 in the ring segments 224a, 224b and 224d. With the threaded portions nuts 229 are engaged, so that a fuse of the ring segments is effected against each other.
  • the ring segments are offset from one another. This means that each of the threaded sections ring segments is connected to two drilled ring segments. Likewise, each of the drilled ring segments is connected to two ring segments provided with threaded portions.
  • the vacuum pump can now only rotate about its axis.
  • the flanges turn against each other.
  • a complete tearing of the vacuum pump is excluded even in the worst case.
  • the coefficient of friction is such that the angle of rotation in the worst case, only a few degrees, in particular about 5 degrees. The friction must at the same time be low enough to avoid the introduction of excessive torque in the chamber flange.
EP09008725.5A 2008-07-31 2009-07-03 Agencement de pompe à vide Active EP2149710B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008035972A DE102008035972A1 (de) 2008-07-31 2008-07-31 Vakuumpumpanordnung

Publications (3)

Publication Number Publication Date
EP2149710A2 true EP2149710A2 (fr) 2010-02-03
EP2149710A3 EP2149710A3 (fr) 2017-03-15
EP2149710B1 EP2149710B1 (fr) 2019-01-16

Family

ID=41228592

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09008725.5A Active EP2149710B1 (fr) 2008-07-31 2009-07-03 Agencement de pompe à vide

Country Status (2)

Country Link
EP (1) EP2149710B1 (fr)
DE (1) DE102008035972A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019165391A1 (fr) * 2018-02-23 2019-08-29 Neiser Paul Procédé et appareil d'interaction
EP3617523A1 (fr) * 2019-02-12 2020-03-04 Pfeiffer Vacuum Gmbh Appareil à vide et système à vide
US11167313B2 (en) 2018-02-09 2021-11-09 Paul NEISER Filtration apparatus and method
US11260330B2 (en) 2018-02-09 2022-03-01 Paul NEISER Filtration apparatus and method
US11666924B2 (en) 2018-02-15 2023-06-06 Paul NEISER Apparatus and methods for selectively transmitting objects

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014104161A1 (de) * 2014-03-26 2015-10-01 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
GB2607605B (en) * 2021-06-08 2023-07-05 Leybold Gmbh Apparatus and vacuum system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4484470B2 (ja) * 2002-10-23 2010-06-16 エドワーズ株式会社 分子ポンプ、及びフランジ
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
DE102006058672B4 (de) * 2006-12-13 2016-09-15 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11167313B2 (en) 2018-02-09 2021-11-09 Paul NEISER Filtration apparatus and method
US11260330B2 (en) 2018-02-09 2022-03-01 Paul NEISER Filtration apparatus and method
US11666924B2 (en) 2018-02-15 2023-06-06 Paul NEISER Apparatus and methods for selectively transmitting objects
WO2019165391A1 (fr) * 2018-02-23 2019-08-29 Neiser Paul Procédé et appareil d'interaction
CN111868378A (zh) * 2018-02-23 2020-10-30 P·奈瑟 相互作用方法和设备
EP3617523A1 (fr) * 2019-02-12 2020-03-04 Pfeiffer Vacuum Gmbh Appareil à vide et système à vide

Also Published As

Publication number Publication date
DE102008035972A1 (de) 2010-02-04
EP2149710B1 (fr) 2019-01-16
EP2149710A3 (fr) 2017-03-15

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