EP2149710A2 - Vacuum pump arrangement - Google Patents

Vacuum pump arrangement Download PDF

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Publication number
EP2149710A2
EP2149710A2 EP09008725A EP09008725A EP2149710A2 EP 2149710 A2 EP2149710 A2 EP 2149710A2 EP 09008725 A EP09008725 A EP 09008725A EP 09008725 A EP09008725 A EP 09008725A EP 2149710 A2 EP2149710 A2 EP 2149710A2
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EP
European Patent Office
Prior art keywords
flange
ring
vacuum chamber
vacuum pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09008725A
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German (de)
French (fr)
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EP2149710A3 (en
EP2149710B1 (en
Inventor
Robert Watz
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2149710A2 publication Critical patent/EP2149710A2/en
Publication of EP2149710A3 publication Critical patent/EP2149710A3/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a Vakuumpumpan extract according to the preamble of the first claim.
  • Vacuum pumps with fast rotating rotors have become indispensable in many vacuum-assisted manufacturing processes.
  • the rotors rotate at speeds of tens of thousands of revolutions per minute to produce the pumping action. Due to these speeds and the weight of the rotor, this thus stores a high kinetic energy. If there is a blocking of the rotor, this energy is released. There are numerous measures taken to prevent the blocking of the rotor or detect a leading malfunction early. Nevertheless, vacuum arrangements have to be designed in such a way that they are safe even when the worst-case scenario is an accident. Safe means that no parts fly around or dangerous substances are released.
  • the solution with the features of the first claim has the advantage that it is inexpensive to implement and can be easily retrofitted to existing facilities. Due to the design of the retaining element such that the flange is secured by positive engagement against movement perpendicular to the flange plane, the safety is increased according to the following principle. The resistance of the arrangement against forces and moments which lead to a tearing of the vacuum pump in a direction perpendicular to the flange plane is greatly increased. It is easy to completely prevent this movement by the design, because the design options are not limited by standards. The yielding of individual screws by overloading does not lead to a subsequent failure of the complete screw through the retaining element according to the invention. A further advantage of the invention is that the vacuum pumping arrangement is secured in the axial direction against the axial forces occurring during blocking of the rotor by the positive locking.
  • the holding element has a ring connected to the vacuum chamber and a stop element.
  • the stop element produces the positive connection.
  • the ring is advantageous because only this one component is to be aligned exactly opposite the flange opening.
  • Another advantage is that only remains a rotation about the axis perpendicular to the ring by the ring and the stop element of the vacuum pump after the yielding of the screw as the last degree of freedom. Their consequences can be easily countered by long lines and similar measures. It can be easily retrofitted to existing vacuum chambers. Overall, only a few structurally simple and easy-to-install components are necessary, so that the security is increased and In addition, costs are saved.
  • This development increases the safety in particular for vacuum pump arrangements, in which the vacuum chamber has only one flange opening and a threaded hole circle surrounding it.
  • the vacuum chamber has a chamber flange and the holding element is designed such that the flange and chamber flange positively connects and allows rotation about the axis of symmetry.
  • the symmetry axis coincides with single-suction vacuum pumps with the rotor axis.
  • the vacuum pump can rotate about this axis and convert the kinetic energy into other forms of energy, for example heat, during the rotation by friction. Due to the positive connection, it is held in the axial direction and can not tear away from the Vakuumpumpan ever. Thus, safety is increased by preventing part tearing and lowering the load on the chamber flange.
  • the holding element has a plurality of circumferentially offset from one another and interconnected ring segments. This is an inexpensive to manufacture and easy to install arrangement that increases safety. Increased safety also contributes that the mutual connection of the ring segments causes the rotation of the vacuum pump is their only free degree of freedom.
  • All of the aforementioned design forms can be further developed by the strength of the screw is dimensioned such that the screw yields at a predefined shearing load.
  • This predefined shear load is dimensioned so that the screw only the maximum for the vacuum chamber tolerable moment transfers to this. If the torque created during blocking exceeds the maximum tolerable moment, the screw will yield. This will cause the vacuum pump to move according to its degrees of freedom.
  • the only degree of freedom of all developments is the rotation about the axis of symmetry, so that a tearing of the vacuum pump can not take place and kinetic energy is safely degraded by the braked rotation.
  • Another refinement proposes providing the surface of the holding element which is in contact with the flange with a defined and constant coefficient of friction. This makes it possible to allow a rotation, which rubs the surfaces of flange and retaining element against each other, take place in a defined manner. This makes it possible, in particular, to make necessary measures cost-effective during a rotation of the vacuum pump. These measures include flexible prevacuum lines and excess length of the electrical connections.
  • the vacuum pumping arrangement according to the first embodiment is shown in FIG. 1 initially shown in section. It has a vacuum chamber 100 and a vacuum pump 102.
  • the vacuum pump has a flange 108, which is detachably connected to a screw 110 with the vacuum chamber. Normally, twelve screws are distributed symmetrically over the circumference of the flange.
  • the flange is part of the housing 104 of the vacuum pump.
  • This housing houses a rotor 106 which includes a fast rotating shaft 161 and a rotor disk 162 carrying blades.
  • a stator disk 130 which likewise carries blades, is arranged at a small axial distance from the rotor disk.
  • Rotor disk and stator disc can come into contact with each other in the worst possible accident so that blocked in the wake of the rotor.
  • Rotor and stator are designed according to Becker in the example shown. Alternatively, they may be designed in whole or in part according to Holweck or Gaede, since these also require a fast rotation of the rotor.
  • a centering ring 140 and a seal 142 are seated, which effect a precise alignment of the vacuum pump to the vacuum chamber and a vacuum-tight seal of the arrangement.
  • the arrangement has a holding element 120, which is designed such that the flange is secured by positive engagement against movement perpendicular to the flange plane.
  • This configuration is achieved in the first embodiment by a ring 122 and a stop element 124.
  • the ring surrounds the flange and centering ring and has an axial thickness equal to the sum of the thickness of the centering ring and the thickness of the flange.
  • a stop element 124 is connected to the ring.
  • this compound in the example shown is releasably generated by stopper screws 128.
  • Flange and stop element touch each other.
  • the contact surface 126 is provided with a coating which has a defined and constant coefficient of friction.
  • FIG. 2 is a section through the vacuum arrangement along the line II 'shown.
  • This cutting line is perpendicular to the rotor axis and to the axis of symmetry of flange and ring. It lies in a plane parallel to the flange plane.
  • the housing 104 can be seen cut.
  • On the flange 108 results in a plan view.
  • the flange is surrounded by the ring 122. Between them is a gap that is not drawn to scale. This gap allows easy movements in the flange plane, which simplifies the mounting of the vacuum pump to the vacuum chamber.
  • the gap also compensates for slight inaccuracies in the centering of the ring and centering ring. This reduces the requirements for precision in the assembly of the ring.
  • a stop member 124 is releasably connected to the ring by stopper screws 128.
  • the stop members have recesses 170 leaving room for the screws 110.
  • the recesses may be designed as elongated recesses 171, wherein the screw 110 is seated at that end of the recess, which comes first with respect to the rotor rotation direction. This allows a rotation of the vacuum pump relative to the stop element by a defined angle, should the screws 110 already be destroyed. Together with the coating, the maximum twist angle can be determined for the worst case to be assumed.
  • FIG. 3 shows a section through the arrangement in a plane in which the symmetry axis lies.
  • the vacuum pump 202 has a housing 204, in which in particular the stator disk 230 and the rotor 206 are arranged.
  • the rotor has a shaft 261 and at least one rotor disk 262, which is equipped with blades.
  • Rotor and stator are designed according to Becker in the example shown. Alternatively, they can be designed in whole or in part according to Holweck or Gaede, as these too rapid rotation of the rotor presuppose.
  • To the housing 204, a flange 208 is connected to the housing 204.
  • the vacuum chamber 200 has a tubular neck with a chamber flange 201. Between the chamber flange and flange are a centering ring 240 for mutual alignment of the flanges and a sealing ring 242 for vacuum-tight sealing of the flange connection. Screws 210 releasably connect the flanges. Both flanges are surrounded by the components of the support member 220, which is designed such that the flange is secured by positive engagement against movement perpendicular to the flange plane.
  • the retaining element comprises the ring segments 222a, 222c, 224a and 224c.
  • the fit is achieved by contacting a portion of the ring segments 222a and 222c with the chamber flange and another portion of the ring segments 224a and 224c with the flange in touching contact.
  • the ring segments engage positively in one another and are interconnected.
  • a part of the ring segments on threaded portions 228 which are inserted through holes in the other part of the ring segments.
  • the connection is secured by nuts 229 engaged with the threaded portions.
  • FIG. 4 shows a section along the line II-II 'by the arrangement of FIG. 3 ,
  • the cutting plane lies in the plane of the flange of the vacuum pump.
  • the flange 208 can be seen centrally, which has twelve distributed on the circumference holes through which screws 210 are inserted.
  • the flange is surrounded by four ring segments 222a, 222b, 222c and 222d. In the circumferential direction offset from these four further ring segments 224a, 224b, 224c and 224d are arranged.
  • the ring segments 222a, 222b, 222c, 222d and 224a, 224b, 224c and 224d are according to FIG FIG. 3 screwed together, thus forming a closed ring surrounding the flanges 201 and 208.
  • FIG. 5 shows a section along the line III-III '.
  • a partial settlement of the interconnected ring segments can be seen.
  • Each of the ring segments 222a, 222b and 22d has a plurality of threaded portions 228. These pass through holes 250 in the ring segments 224a, 224b and 224d. With the threaded portions nuts 229 are engaged, so that a fuse of the ring segments is effected against each other.
  • the ring segments are offset from one another. This means that each of the threaded sections ring segments is connected to two drilled ring segments. Likewise, each of the drilled ring segments is connected to two ring segments provided with threaded portions.
  • the vacuum pump can now only rotate about its axis.
  • the flanges turn against each other.
  • a complete tearing of the vacuum pump is excluded even in the worst case.
  • the coefficient of friction is such that the angle of rotation in the worst case, only a few degrees, in particular about 5 degrees. The friction must at the same time be low enough to avoid the introduction of excessive torque in the chamber flange.

Abstract

The arrangement has a vacuum chamber (100) and a vacuum pump (102), which has a rotatable rotor (106) arranged in a housing (104). The pump includes a flange (108) connected with the housing. A retaining element (120) is formed such that the flange is protected against the movement provided perpendicular to a flange plane by rotation of the rotor. The retaining element has a ring (122) connected with the vacuum chamber, and a stopper (124). The retaining element connects the flange and a chamber flange in a form fit manner.

Description

Die Erfindung betrifft eine Vakuumpumpanordnung nach dem Oberbegriff des ersten Patentanspruchs.The invention relates to a Vakuumpumpanordnung according to the preamble of the first claim.

Aus vielen vakuumunterstützten Herstellungsprozessen sind Vakuumpumpen mit schnell drehenden Rotoren heute nicht mehr wegzudenken. Die Rotoren drehen dabei mit Drehzahlen von einigen zehntausend Umdrehungen pro Minute, um die Pumpwirkung zu erzeugen. Aufgrund dieser Drehzahlen und dem Eigengewicht des Rotors speichert dieser somit eine hohe kinetische Energie. Kommt es zu einem Blockieren des Rotors, wird diese Energie freigesetzt. Es werden zahlreiche Maßnahmen ergriffen, die das Blockieren des Rotors verhindern oder eine dazu führende Fehlfunktion frühzeitig erkennen. Trotzdem müssen Vakuumanordnungen so gestaltet werden, dass sie auch dann sicher sind, wenn als schlimmster anzunehmender Unfall das Blockieren eintritt. Sicher bedeutet, dass keine Teile umherfliegen oder gefährliche Stoffe freigesetzt werden.Vacuum pumps with fast rotating rotors have become indispensable in many vacuum-assisted manufacturing processes. The rotors rotate at speeds of tens of thousands of revolutions per minute to produce the pumping action. Due to these speeds and the weight of the rotor, this thus stores a high kinetic energy. If there is a blocking of the rotor, this energy is released. There are numerous measures taken to prevent the blocking of the rotor or detect a leading malfunction early. Nevertheless, vacuum arrangements have to be designed in such a way that they are safe even when the worst-case scenario is an accident. Safe means that no parts fly around or dangerous substances are released.

Erschwert wird die Konstruktion sicherer Verbindungen durch Vorgaben aus Normen. Insbesondere gilt dies für Vakuumpumpanordnungen, in denen Vakuumpumpe und Vakuumkammer durch eine Schraubverbindung lösbar miteinander verbunden sind. Die Normen schreiben Anzahl und Durchmesser der Schrauben vor. Dies setzt den übertragbaren Drehmomenten Grenzen.The design of secure connections is made more difficult by specifications from standards. This applies in particular to vacuum pump arrangements in which the vacuum pump and vacuum chamber are detachably connected to one another by a screw connection. The standards prescribe the number and diameter of the screws. This limits the transferable torques.

Es ist daher Aufgabe der Erfindung, eine Vakuumpumpanordnung mit Schraubverbindung zwischen Vakuumkammer und Vakuumpumpe vorzustellen, die die im Schadensfall eine erhöhte Sicherheit gewährleistet.It is therefore an object of the invention to provide a vacuum pump assembly with screw connection between the vacuum chamber and the vacuum pump, which ensures increased safety in the event of damage.

Diese Aufgabe wird gelöst durch eine Vakuumpumpanordnung mit den Merkmalen des ersten Anspruchs. Die abhängigen Ansprüche 2 bis 6 geben vorteilhafte Weiterbildung an.This object is achieved by a vacuum pump arrangement having the features of the first claim. The dependent claims 2 to 6 indicate advantageous development.

Die Lösung mit den Merkmalen des ersten Anspruchs bietet den Vorteil, dass sie kostengünstig umzusetzen ist und an bereits bestehenden Anlagen leicht nachgerüstet werden kann. Durch die Gestaltung des Halteelements derart, dass der Flansch durch Formschluss gegen eine Bewegung senkrecht zur Flanschebene gesichert ist, wird die Sicherheit nach dem folgenden Prinzip erhöht. Die Widerstandsfähigkeit der Anordnung gegen Kräfte und Momente, die zu einem Abreißen der Vakuumpumpe in eine Richtung senkrecht zur Flanschebene führen, wird sehr stark erhöht. Es ist leicht, durch die Gestaltung diese Bewegung komplett zu verhindern, denn die Gestaltungsmöglichkeiten sind nicht durch Normen begrenzt. Das Nachgeben einzelner Schrauben durch Überlastung führt durch das erfindungsgemäße Halteelement nicht zu einem nachfolgenden Versagen der kompletten Schraubverbindung. Ein weiterer Vorteil der Erfindung ist, dass die Vakuumpumpanordnung gegen bei einem Blockieren des Rotors auftretende axiale Kräfte durch den Formschluss in axialer Richtung gesichert wird.The solution with the features of the first claim has the advantage that it is inexpensive to implement and can be easily retrofitted to existing facilities. Due to the design of the retaining element such that the flange is secured by positive engagement against movement perpendicular to the flange plane, the safety is increased according to the following principle. The resistance of the arrangement against forces and moments which lead to a tearing of the vacuum pump in a direction perpendicular to the flange plane is greatly increased. It is easy to completely prevent this movement by the design, because the design options are not limited by standards. The yielding of individual screws by overloading does not lead to a subsequent failure of the complete screw through the retaining element according to the invention. A further advantage of the invention is that the vacuum pumping arrangement is secured in the axial direction against the axial forces occurring during blocking of the rotor by the positive locking.

In einer ersten Weiterbildung weist das Halteelement einen mit der Vakuumkammer verbundenen Ring und ein Stoppelement auf. Das Stoppelement stellt dabei den Formschluss her. Der Ring ist vorteilhaft, da nur dieses eine Bauteil genau gegenüber der Flanschöffnung auszurichten ist. Ein weiterer Vorteil ist, dass durch den Ring und dem Stoppelement der Vakuumpumpe nach dem Nachgeben der Schraubverbindung als letzter Freiheitsgrad lediglich eine Drehung um die zum Ring senkrechte Achse bleibt. Deren Folgen kann leicht durch lange Zuleitungen und ähnliche Maßnahmen begegnet werden. Es lässt sich leicht an bestehenden Vakuumkammern nachrüsten. Insgesamt sind nur wenige konstruktiv einfache und leicht zu montierenden Bauteile notwendig, so dass die Sicherheit erhöht wird und zudem Kosten eingespart werden. Diese Weiterbildung erhöht die Sicherheit insbesondere für Vakuumpumpanordnungen, in denen die Vakuumkammer lediglich eine Flanschöffnung und einen diesen umgebenden Gewindebohrungskreis aufweist.In a first development, the holding element has a ring connected to the vacuum chamber and a stop element. The stop element produces the positive connection. The ring is advantageous because only this one component is to be aligned exactly opposite the flange opening. Another advantage is that only remains a rotation about the axis perpendicular to the ring by the ring and the stop element of the vacuum pump after the yielding of the screw as the last degree of freedom. Their consequences can be easily countered by long lines and similar measures. It can be easily retrofitted to existing vacuum chambers. Overall, only a few structurally simple and easy-to-install components are necessary, so that the security is increased and In addition, costs are saved. This development increases the safety in particular for vacuum pump arrangements, in which the vacuum chamber has only one flange opening and a threaded hole circle surrounding it.

In einer anderen Weiterbildung weist die Vakuumkammer einen Kammerflansch auf und das Halteelement ist derart gestaltet, dass Flansch und Kammerflansch formschlüssig verbindet und eine Drehung um die Symmetrieachse zulässt. Die Symmetrieachse fällt bei einflutigen Vakuumpumpen mit der Rotorachse zusammen. Im Falle des Blockierens des Rotors kann sich die Vakuumpumpe um diese Achse drehen und bei der Drehung durch Reibung Bewegungsenergie in andere Energieformen umsetzen, beispielsweise Wärme. Durch den Formschluss wird sie in axialer Richtung gehalten und kann sich nicht von der Vakuumpumpanordnung losreißen. Somit wird die Sicherheit erhöht, indem Abreißen von Teilen verhindert und die Belastung für den Kammerflansch gesenkt wird.In another development, the vacuum chamber has a chamber flange and the holding element is designed such that the flange and chamber flange positively connects and allows rotation about the axis of symmetry. The symmetry axis coincides with single-suction vacuum pumps with the rotor axis. In the case of blocking the rotor, the vacuum pump can rotate about this axis and convert the kinetic energy into other forms of energy, for example heat, during the rotation by friction. Due to the positive connection, it is held in the axial direction and can not tear away from the Vakuumpumpanordnung. Thus, safety is increased by preventing part tearing and lowering the load on the chamber flange.

Eine einfache Ausführungsform dieser Weiterbildung ist gegeben, wenn das Halteelement eine Mehrzahl von in Umfangsrichtung zueinander versetzt angeordneten und miteinander verbundenen Ringsegmenten aufweist. Dies ist eine kostengünstig herzustellende und leicht zu montierenden Anordnung, die die Sicherheit erhöht. Zur erhöhten Sicherheit trägt auch bei, dass die gegenseitige Verbindung der Ringsegmente bewirkt, dass die Drehung der Vakuumpumpe deren einziger freie Freiheitsgrad ist.A simple embodiment of this development is given if the holding element has a plurality of circumferentially offset from one another and interconnected ring segments. This is an inexpensive to manufacture and easy to install arrangement that increases safety. Increased safety also contributes that the mutual connection of the ring segments causes the rotation of the vacuum pump is their only free degree of freedom.

Alle vorgenannten Gestaltungsformen können weitergebildet werden, indem die Festigkeit der Schraube derart bemessen ist, dass die Schraubverbindung bei einer vordefinierten Scherbelastung nachgibt. Diese vordefinierte Scherbelastung ist dabei so bemessen, dass die Schraube nur das für die Vakuumkammer maximal verträgliche Moment auf diese überträgt. Übersteigt das beim Blockieren entstehenden Moment das maximal verträgliche Moment, gibt die Schraube nach. Dadurch wird die Vakuumpumpe eine Bewegung gemäß ihrer Freiheitsgrade ausführen. Der einzige Freiheitsgrad aller Weiterbildungen ist jedoch die Drehung um die Symmetrieachse, so dass ein Abreißen der Vakuumpumpe nicht stattfinden kann und durch die gebremste Drehung kinetische Energie ungefährlich abgebaut wird.All of the aforementioned design forms can be further developed by the strength of the screw is dimensioned such that the screw yields at a predefined shearing load. This predefined shear load is dimensioned so that the screw only the maximum for the vacuum chamber tolerable moment transfers to this. If the torque created during blocking exceeds the maximum tolerable moment, the screw will yield. This will cause the vacuum pump to move according to its degrees of freedom. However, the only degree of freedom of all developments is the rotation about the axis of symmetry, so that a tearing of the vacuum pump can not take place and kinetic energy is safely degraded by the braked rotation.

Ein andere Weiterbildung schlägt vor, die mit dem Flansch in Kontakt stehende Oberfläche des Halteelements mit einem definierten und konstanten Reibwert zu versehen. Dies erlaubt es, eine Drehung, welche die Oberflächen von Flansch und Halteelement gegeneinander Reiben lässt, in definierter Weise stattfinden zu lassen. Dies ermöglicht insbesondere, bei einer Drehung der Vakuumpumpe notwendige Maßnahmen kostengünstig zu gestalten. Zu diesen Maßnahmen gehören flexible Vorvakuumleitungen und Überlängen der elektrischen Verbindungen.Another refinement proposes providing the surface of the holding element which is in contact with the flange with a defined and constant coefficient of friction. This makes it possible to allow a rotation, which rubs the surfaces of flange and retaining element against each other, take place in a defined manner. This makes it possible, in particular, to make necessary measures cost-effective during a rotation of the vacuum pump. These measures include flexible prevacuum lines and excess length of the electrical connections.

Anhand zweier Ausführungsbeispiele soll die Erfindung näher erläutert und die Darstellung der Vorteile vertieft werden. Es zeigen:

Fig. 1:
Schnitt durch eine Vakuumpumpanordnung in einem ersten Ausführungsbeispiel.
Fig. 2:
Schnitt durch die Anordnung entlang der Linie I-I' des ersten Ausführungsbeispiels.
Fig. 3:
Schnitt durch eine Vakuumpumpanordnung gemäß eines zweiten Ausführungsbeispiels.
Fig. 4:
Schnitt durch die Anordnung des zweiten Ausführungsbeispiels entlang der Linie II-II'.
Fig. 5:
Schnitt durch die Anordnung des zweiten Ausführungsbeispiels entlang der Linie III-III'.
Based on two embodiments, the invention will be explained in more detail and the representation of the benefits to be deepened. Show it:
Fig. 1:
Section through a vacuum pumping arrangement in a first embodiment.
Fig. 2:
Section through the arrangement along the line II 'of the first embodiment.
3:
Section through a vacuum pumping arrangement according to a second embodiment.
4:
Section through the arrangement of the second embodiment along the line II-II '.
Fig. 5:
Section through the arrangement of the second embodiment along the line III-III '.

Die Vakuumpumpanordnung gemäß dem ersten Ausführungsbeispiel ist in Figur 1 zunächst im Schnitt gezeigt. Sie weist eine Vakuumkammer 100 und eine Vakuumpumpe 102 auf. Die Vakuumpumpe besitzt einen Flansch 108, welcher mit einer Schraube 110 lösbar mit der Vakuumkammer verbunden ist. Normgerecht sind zwölf Schrauben symmetrisch über den Umfang des Flansches verteilt. Der Flansch ist Teil des Gehäuses 104 der Vakuumpumpe. Dieses Gehäuse beherbergt einen Rotor 106, welcher eine sich schnell drehende Welle 161 und eine Schaufeln tragende Rotorscheibe 162 umfasst. Zum Erzeugen der Pumpwirkung ist eine ebenfalls Schaufeln tragende Statorscheibe 130 in geringem axialem Abstand zur Rotorscheibe angeordnet. Rotorscheibe und Statorscheibe können im schlimmsten anzunehmenden Unfall miteinander derart in Kontakt kommen, dass in der Folge der Rotor blockiert. Rotor und Stator sind im gezeigten Beispiel nach Becker gestaltet. Sie können alternativ ganz oder teilweise nach Holweck oder Gaede gestaltet sein, da auch diese eine schnelle Drehung des Rotors voraussetzen.The vacuum pumping arrangement according to the first embodiment is shown in FIG FIG. 1 initially shown in section. It has a vacuum chamber 100 and a vacuum pump 102. The vacuum pump has a flange 108, which is detachably connected to a screw 110 with the vacuum chamber. Normally, twelve screws are distributed symmetrically over the circumference of the flange. The flange is part of the housing 104 of the vacuum pump. This housing houses a rotor 106 which includes a fast rotating shaft 161 and a rotor disk 162 carrying blades. To generate the pumping action, a stator disk 130, which likewise carries blades, is arranged at a small axial distance from the rotor disk. Rotor disk and stator disc can come into contact with each other in the worst possible accident so that blocked in the wake of the rotor. Rotor and stator are designed according to Becker in the example shown. Alternatively, they may be designed in whole or in part according to Holweck or Gaede, since these also require a fast rotation of the rotor.

Zwischen Vakuumpumpe und Vakuumkammer sitzen ein Zentrierring 140 und eine Dichtung 142, die eine genaue Ausrichtung von Vakuumpumpe zu Vakuumkammer und eine vakuumdichte Abdichtung der Anordnung bewirken.Between the vacuum pump and the vacuum chamber, a centering ring 140 and a seal 142 are seated, which effect a precise alignment of the vacuum pump to the vacuum chamber and a vacuum-tight seal of the arrangement.

Die Anordnung weist ein Halteelement 120 auf, welches derart gestaltet ist, dass der Flansch durch Formschluss gegen eine Bewegung senkrecht zur Flanschebene gesichert ist. Diese Gestaltung wird im ersten Ausführungsbeispiel durch einen Ring 122 und ein Stoppelement 124 erreicht. Der Ring umgibt Flansch und Zentrierring und besitzt eine axiale Dicke, die der Summe aus Dicke des Zentrierrings und Dicke des Flansches entspricht. Mit dem Ring ist ein Stoppelement 124 verbunden. Zur besseren Montier- und Demontierbarkeit der Vakuumpumpe ist diese Verbindung im gezeigten Beispiel lösbar durch Stoppelementschrauben 128 erzeugt. Flansch und Stoppelement berühren sich. Die Kontaktfläche 126 ist mit einer Beschichtung versehen, welche einen definierten und konstanten Reibwert aufweist.The arrangement has a holding element 120, which is designed such that the flange is secured by positive engagement against movement perpendicular to the flange plane. This configuration is achieved in the first embodiment by a ring 122 and a stop element 124. The ring surrounds the flange and centering ring and has an axial thickness equal to the sum of the thickness of the centering ring and the thickness of the flange. A stop element 124 is connected to the ring. For better mounting and dismounting of the vacuum pump, this compound in the example shown is releasably generated by stopper screws 128. Flange and stop element touch each other. The contact surface 126 is provided with a coating which has a defined and constant coefficient of friction.

In Figur 2 ist ein Schnitt durch die Vakuumanordnung entlang der Linie I-I' gezeigt. Diese Schnittlinie ist senkrecht zur Rotorachse und zur Symmetrieachse von Flansch und Ring. Sie liegt in einer Ebene parallel der Flanschebene. In dieser Darstellung ist das Gehäuse 104 geschnitten zu sehen. Auf den Flansch 108 ergibt sich ein Draufblick. Der Flansch ist vom Ring 122 umgeben. Zwischen ihnen ist ein Spalt, der nicht maßstäblich dargestellt ist. Dieser Spalt erlaubt leichte Bewegungen in der Flanschebene, was das Montieren der Vakuumpumpe an der Vakuumkammer vereinfacht. Durch den Spalt werden zudem leichte Ungenauigkeiten bei der Zentrierung von Ring und Zentrierring ausgeglichen. Dies senkt die Anforderungen an die Präzision bei der Montage des Ringes. Mit dem Ring ist ein Stoppelement 124 durch Stoppelementschrauben 128 lösbar verbunden. Entlang des Umfangs des Ringes sind mehrere Stoppelemente angeordnet. Um einen großen Überlapp mit dem Flansch zu erzeugen, weisen die Stoppelemente Ausnehmungen 170 auf, die Raum für die Schrauben 110 lassen. Die Ausnehmungen können als längliche Ausnehmungen 171 ausgeführt sein, wobei die Schraube 110 an jenem Ende der Ausnehmung sitzt, welches bezogen auf die Rotordrehrichtung zuerst kommt. Dies erlaubt eine Verdrehung der Vakuumpumpe gegenüber dem Stoppelement um einen definierten Winkel, sollte die Schrauben 110 bereits zerstört sein. Zusammen mit der Beschichtung kann der maximale Verdrehwinkel für den schlimmsten anzunehmenden Fall bestimmt werden.In FIG. 2 is a section through the vacuum arrangement along the line II 'shown. This cutting line is perpendicular to the rotor axis and to the axis of symmetry of flange and ring. It lies in a plane parallel to the flange plane. In this illustration, the housing 104 can be seen cut. On the flange 108 results in a plan view. The flange is surrounded by the ring 122. Between them is a gap that is not drawn to scale. This gap allows easy movements in the flange plane, which simplifies the mounting of the vacuum pump to the vacuum chamber. The gap also compensates for slight inaccuracies in the centering of the ring and centering ring. This reduces the requirements for precision in the assembly of the ring. A stop member 124 is releasably connected to the ring by stopper screws 128. Along the circumference of the ring several stop elements are arranged. In order to create a large overlap with the flange, the stop members have recesses 170 leaving room for the screws 110. The recesses may be designed as elongated recesses 171, wherein the screw 110 is seated at that end of the recess, which comes first with respect to the rotor rotation direction. This allows a rotation of the vacuum pump relative to the stop element by a defined angle, should the screws 110 already be destroyed. Together with the coating, the maximum twist angle can be determined for the worst case to be assumed.

Ein zweites Ausführungsbeispiel ist in den Figuren 3 bis 5 gezeigt. Figur 3 zeigt einen Schnitt durch die Anordnung in einer Ebene, in der die Symmetrieachse liegt. Die Vakuumpumpe 202 weist ein Gehäuse 204 auf, in welchem insbesondere die Statorscheibe 230 und der Rotor 206 angeordnet sind. Der Rotor besitzt eine Welle 261 und wenigstens eine Rotorscheibe 262, welche mit Schaufeln bestückt ist. Rotor und Stator sind im gezeigten Beispiel nach Becker gestaltet. Sie können alternativ ganz oder teilweise nach Holweck oder Gaede gestaltet sein, da auch diese eine schnelle Drehung des Rotors voraussetzen. Mit dem Gehäuse 204 ist ein Flansch 208 verbunden.A second embodiment is in the FIGS. 3 to 5 shown. FIG. 3 shows a section through the arrangement in a plane in which the symmetry axis lies. The vacuum pump 202 has a housing 204, in which in particular the stator disk 230 and the rotor 206 are arranged. The rotor has a shaft 261 and at least one rotor disk 262, which is equipped with blades. Rotor and stator are designed according to Becker in the example shown. Alternatively, they can be designed in whole or in part according to Holweck or Gaede, as these too rapid rotation of the rotor presuppose. To the housing 204, a flange 208 is connected.

Die Vakuumkammer 200 besitzt einen rohrförmigen Stutzen mit einem Kammerflansch 201. Zwischen Kammerflansch und Flansch befinden sich ein Zentrierring 240 zum gegenseitigen Ausrichten der Flansche und ein Dichtring 242 zum vakuumdichten Abdichten der Flanschverbindung. Schrauben 210 verbinden die Flansche lösbar miteinander. Beide Flansche sind von den Bauteilen des Halteelements 220 umgeben, welches derart gestaltet ist, dass der Flansch durch Formschluss gegen eine Bewegung senkrecht zur Flanschebene gesichert ist. Das Halteelement umfasst die Ringsegmente 222a, 222c, 224a und 224c. Der Formschluss wird erreicht, indem ein Teil der Ringsegmente 222a und 222c mit dem Kammerflansch und ein anderer Teil der Ringsegmente 224a und 224c mit dem Flansch in berührendem Kontakt stehen. Die Ringsegmente greifen formschlüssig ineinander und sind miteinander verbunden. Zum Herstellen der Verbindung weist ein Teil der Ringsegmente Gewindeabschnitte 228 auf, die durch Bohrungen im anderen Teil der Ringsegmente gesteckt werden. Die Verbindung wird durch mit den Gewindeabschnitten in Eingriff stehenden Muttern 229 gesichert.The vacuum chamber 200 has a tubular neck with a chamber flange 201. Between the chamber flange and flange are a centering ring 240 for mutual alignment of the flanges and a sealing ring 242 for vacuum-tight sealing of the flange connection. Screws 210 releasably connect the flanges. Both flanges are surrounded by the components of the support member 220, which is designed such that the flange is secured by positive engagement against movement perpendicular to the flange plane. The retaining element comprises the ring segments 222a, 222c, 224a and 224c. The fit is achieved by contacting a portion of the ring segments 222a and 222c with the chamber flange and another portion of the ring segments 224a and 224c with the flange in touching contact. The ring segments engage positively in one another and are interconnected. To make the connection, a part of the ring segments on threaded portions 228 which are inserted through holes in the other part of the ring segments. The connection is secured by nuts 229 engaged with the threaded portions.

Figur 4 zeigt einen Schnitt entlang der Linie II-II' durch die Anordnung der Figur 3. Die Schnittebene liegt in der Ebene des Flansches der Vakuumpumpe. In der Darstellung der Figur 3 ist daher zentral der Flansch 208 zu sehen, der zwölf auf den Umfang verteilte Bohrungen aufweist, durch die Schrauben 210 hindurchgesteckt sind. Der Flansch ist von vier Ringsegmenten 222a, 222b, 222c und 222d umgeben. In Umfangsrichtung versetzt zu diesen sind weitere vier Ringsegmente 224a, 224b, 224c und 224d angeordnet. Die Ringsegmente 222a, 222b, 222c, 222d und 224a, 224b, 224c und 224d sind gemäß Figur 3 miteinander verschraubt und bilden so einen geschlossenen Ring, der die Flansche 201 und 208 umgibt. FIG. 4 shows a section along the line II-II 'by the arrangement of FIG. 3 , The cutting plane lies in the plane of the flange of the vacuum pump. In the presentation of the FIG. 3 Therefore, the flange 208 can be seen centrally, which has twelve distributed on the circumference holes through which screws 210 are inserted. The flange is surrounded by four ring segments 222a, 222b, 222c and 222d. In the circumferential direction offset from these four further ring segments 224a, 224b, 224c and 224d are arranged. The ring segments 222a, 222b, 222c, 222d and 224a, 224b, 224c and 224d are according to FIG FIG. 3 screwed together, thus forming a closed ring surrounding the flanges 201 and 208.

Figur 5 zeigt einen Schnitt enlang der Linie III-III'. In diesem Schnitt ist eine Teilabwicklung der miteinander verbunden Ringsegmente zu sehen. Jedes der Ringsegmente 222a, 222b und 22d weist eine Mehrzahl von Gewindeabschnitten 228 auf. Diese durchsetzen Bohrungen 250 in den Ringsegmenten 224a, 224b und 224d. Mit den Gewindeabschnitten stehen Muttern 229 im Eingriff, so dass eine Sicherung der Ringsegmente gegeneinander bewirkt wird. Die Ringsegmente sind versetzt zueinander angeordnet. Dies bedeutet, dass jedes der mit Gewindeabschnitten Ringsegmente mit zwei mit Bohrungen versehenen Ringsegmente verbunden ist. Ebenso ist jedes der mit Bohrungen versehenen Ringsegmente mit zwei mit Gewindeabschnitten versehenen Ringsegmente verbunden. Auf diese Art und Weise entsteht ein aus miteinander verbundenen Ringsegmenten aufgebauter, geschlossener Ring. Dieser bewirkt, dass die Flansche von Vakuumkammer und Vakuumpumpe durch Formschluss gegen eine Bewegung senkrecht zur Flanschebene gesichert sind. Der einzige freie Freiheitsgrad ist der einer Drehung um diese senkrechte Achse. Sollte der Rotor gegen den Stator blockieren und daher die im Rotor gespeicherte kinetische Energie frei werden, wird diese zunächst in Verformungsenergie von Rotor und Stator umgesetzt. Der Rest wird an das Gehäuse der Vakuumpumpe übergeben und damit an die Flanschverbindung. Innerhalb dieser Flanschverbindung sind die Schrauben 210 die übertragenden Elemente. Ist das zu übertragene Drehmoment zu groß, geben diese Schrauben nach, das heißt sie werden durch Scherbelastung zerstört. Die Vakuumpumpe kann sich nun dank des Halteelements lediglich um ihre Achse drehen. Somit drehen auch die Flansche gegeneinander. Ein vollständiges Abreißen der Vakuumpumpe ist jedoch selbst im schlimmst anzunehmenden Fall ausgeschlossen. Durch die Drehung der Flansche und die damit einhergehende Reibung der Teile aufeinander wird die Energie abgebaut. Vorteilhaft ist es, die mit dem Flansch in Kontakt stehende Oberfläche 226 des Halteelements mit einem definierten und konstanten Reibwert zu versehen. Dies gelingt beispielsweise mit einer Oberflächenbeschichtung. Der Reibwert ist so bemessen, dass der Drehwinkel im ungünstigsten Falle nur wenige Grad, insbesondere etwa 5 Grad, beträgt. Die Reibung muss gleichzeitig gering genug sein, um die Einleitung von zu hohen Drehmomenten in den Kammerflansch zu vermeiden. FIG. 5 shows a section along the line III-III '. In this section, a partial settlement of the interconnected ring segments can be seen. Each of the ring segments 222a, 222b and 22d has a plurality of threaded portions 228. These pass through holes 250 in the ring segments 224a, 224b and 224d. With the threaded portions nuts 229 are engaged, so that a fuse of the ring segments is effected against each other. The ring segments are offset from one another. This means that each of the threaded sections ring segments is connected to two drilled ring segments. Likewise, each of the drilled ring segments is connected to two ring segments provided with threaded portions. In this way, a built-up of interconnected ring segments, closed ring. This causes the flanges of vacuum chamber and vacuum pump are secured by positive engagement against movement perpendicular to the flange plane. The only free degree of freedom is that of a rotation about this vertical axis. Should the rotor block against the stator and therefore the kinetic energy stored in the rotor become free, this is first converted into deformation energy of rotor and stator. The rest is transferred to the housing of the vacuum pump and thus to the flange connection. Within this flange connection, the screws 210 are the transmitting elements. If the torque to be transmitted is too great, these screws yield, that is, they are destroyed by shear stress. Thanks to the retaining element, the vacuum pump can now only rotate about its axis. Thus, the flanges turn against each other. However, a complete tearing of the vacuum pump is excluded even in the worst case. The rotation of the flanges and the concomitant friction of the parts on each other, the energy is dissipated. It is advantageous to provide the surface 226 of the holding element that is in contact with the flange with a defined and constant coefficient of friction. This is achieved, for example, with a surface coating. The coefficient of friction is such that the angle of rotation in the worst case, only a few degrees, in particular about 5 degrees. The friction must at the same time be low enough to avoid the introduction of excessive torque in the chamber flange.

Claims (6)

Anordnung mit Vakuumkammer (100; 200) und Vakuumpumpe (102; 202), welche ein Gehäuse (104; 204), einen darin angeordneten, schnell drehenden Rotor (106; 206) und einen mit dem Gehäuse verbundenen Flansch (108; 208) aufweist, und mit einer Schraube (1 10; 210) zum Verbinden des Flansches mit der Vakuumkammer, dadurch gekennzeichnet, dass die Anordnung ein Halteelement (120; 220) aufweist, welches derart gestaltet ist, dass der Flansch durch Formschluss gegen eine Bewegung senkrecht zur Flanschebene gesichert ist.A vacuum chamber assembly (100; 200) and vacuum pump (102; 202) having a housing (104; 204), a fast rotating rotor (106; 206) disposed therein, and a flange (108; 208) connected to the housing , and with a screw (1 10; 210) for connecting the flange to the vacuum chamber, characterized in that the arrangement comprises a holding element (120; 220) which is designed such that the flange by positive engagement against movement perpendicular to the flange plane is secured. Anordnung nach Anspruch 1, dadurch gekennzeichnet, dass das Halteelement (120) einen mit der Vakuumkammer verbundenen Ring (122) und mit dem Ring verbundenes und den Formschluss herstellendes, verdrehsicheres Stoppelement (124) umfasst.Arrangement according to claim 1, characterized in that the holding element (120) comprises a connected to the vacuum chamber ring (122) and connected to the ring and the form-fitting producing, rotation-proof stop member (124). Anordnung nach Anspruch 1, dadurch gekennzeichnet, dass die Vakuumkammer einen Kammerflansch aufweist und das Halteelement (220) derart gestaltet ist, dass es Flansch (208) und Kammerflansch (201) formschlüssig verbindet und eine Drehung um die Symmetrieachse zulässt.Arrangement according to claim 1, characterized in that the vacuum chamber has a chamber flange and the holding element (220) is designed such that it positively connects the flange (208) and chamber flange (201) and permits rotation about the axis of symmetry. Anordnung nach Anspruch 3, dadurch gekennzeichnet, dass das Halteelement (220) eine Mehrzahl von in Umfangsrichtung zueinander versetzt angeordneten und miteinander verbundenen Ringsegmenten (222a, 222b, 222c, 222d, 224a, 224b, 224c, 224d) aufweist.Arrangement according to claim 3, characterized in that the holding element (220) has a plurality of circumferentially offset from each other and interconnected ring segments (222a, 222b, 222c, 222d, 224a, 224b, 224c, 224d). Anordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Festigkeit der Schraube (110; 220) derart bemessen ist, dass die Schraubverbindung bei einer Scherbelastung unterhalb oder gleich der maximal für die Vakuumkammer verträglichen Last durch Abscheren der Schraube nachgibt.Arrangement according to one of the preceding claims, characterized in that the strength of the screw (110; 220) is dimensioned such that the screw connection at a shear load below or equal to the maximum load acceptable for the vacuum chamber by shearing off the screw. Anordnung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die mit dem Flansch in Kontakt stehende Oberfläche (126; 226) des Halteelements einen definierten und konstanten Reibwert aufweist.Arrangement according to one of the preceding claims, characterized in that the surface (126; 226) of the holding element which is in contact with the flange has a defined and constant coefficient of friction.
EP09008725.5A 2008-07-31 2009-07-03 Vacuum pump arrangement Active EP2149710B1 (en)

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JP2002327698A (en) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd Vacuum pump
JP2003336597A (en) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd Turbo molecular pump
JP4484470B2 (en) * 2002-10-23 2010-06-16 エドワーズ株式会社 Molecular pump and flange
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
DE102006058672B4 (en) * 2006-12-13 2016-09-15 Pfeiffer Vacuum Gmbh Arrangement with vacuum pump

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US11167313B2 (en) 2018-02-09 2021-11-09 Paul NEISER Filtration apparatus and method
US11260330B2 (en) 2018-02-09 2022-03-01 Paul NEISER Filtration apparatus and method
US11666924B2 (en) 2018-02-15 2023-06-06 Paul NEISER Apparatus and methods for selectively transmitting objects
WO2019165391A1 (en) * 2018-02-23 2019-08-29 Neiser Paul Interaction method and apparatus
CN111868378A (en) * 2018-02-23 2020-10-30 P·奈瑟 Interaction method and apparatus
EP3617523A1 (en) * 2019-02-12 2020-03-04 Pfeiffer Vacuum Gmbh Vacuum device and vacuum system

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