EP2068000B1 - Vacuum pump mounting arrangement - Google Patents

Vacuum pump mounting arrangement Download PDF

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Publication number
EP2068000B1
EP2068000B1 EP08020361.5A EP08020361A EP2068000B1 EP 2068000 B1 EP2068000 B1 EP 2068000B1 EP 08020361 A EP08020361 A EP 08020361A EP 2068000 B1 EP2068000 B1 EP 2068000B1
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EP
European Patent Office
Prior art keywords
vacuum
chamber
vacuum pump
flange
arrangement
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EP08020361.5A
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German (de)
French (fr)
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EP2068000A2 (en
EP2068000A3 (en
Inventor
Robert Watz
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2068000A3 publication Critical patent/EP2068000A3/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to an arrangement with a vacuum pump according to the preamble of the first claim.
  • Vacuum pumps with fast-rotating rotors store high energies due to the high rotational frequency of the rotor.
  • the rotational frequency is often at some 10,000 revolutions per minute.
  • rotor-stator crash there is contact between rotor and stator.
  • pump components e.g. Pump flange issued in the form of a torque.
  • the rotation of the pump in such a rotor-stator crash must be avoided as this creates a risk of injury to persons and damage to the system is expected. As a result of this rotation of the pump may also lead to leakage or tearing of the pump.
  • the vacuum pumps are mounted with the high vacuum flange on pipe components, slides or directly to the recipient.
  • the vacuum pumps are mounted with the high vacuum flange on pipe components, slides or directly to the recipient.
  • the flanges of the recipient and pipe components are usually not able to take the high moments.
  • vacuum pumps can also be fastened to the floor in addition to the flange, which can lead to tensioning of the pump or the slide due to non-aligned attachment points, so that trouble-free operation is not ensured.
  • EP 1 795 757 A2 an assembly having a vacuum pump connected to a chamber flange via a ring of a harder material than the remaining housing of the vacuum pump.
  • the object of the invention is to provide an arrangement with a vacuum pump with fast-rotating rotor, wherein in the case of a rotor-stator crash, the vacuum tightness is maintained.
  • Rotor-stator crash refers to the jamming of rotor and stator during operation of the rotor at high speeds with their subsequent mechanical deformation.
  • the rotational energy of the rotor is partly converted into this deformation, in part delivered to the housing of the vacuum pump.
  • Crash-torque safe therefore designates a A compound designed to transmit these torques without the elements connected by them rotating relative to each other. Beyond the vacuum tightness, the intermediate component is protected from damage.
  • connection means is designed inexpensively and technically simply as a support arranged between the vacuum pump and the intermediate component. This avoids changes to the vacuum pump and intermediate component.
  • the carrier and the chamber flange are connected by a screw which is inserted through a spacer sleeve.
  • Screw and spacer sleeve form a rigid system, which is due to the bias by tightening the screw is very resistant to rotation of the assembly about the vertical plane to the chamber flange plane.
  • carrier and vacuum pump are made in one piece. This can be achieved by materially joining the two parts, for example by friction welding and equivalent methods. This achieves a low-cost crash-proof connection.
  • Another development relates to the chamber flange. This is connected to a arranged on the vacuum chamber web. This results in a connection between the vacuum chamber and the chamber flange with a larger one Distance to the chamber flange center. This additionally increases the crash torque safety.
  • the chamber flange is arranged on a flat wall of the vacuum chamber. These walls should be as thin as possible on the one hand for cost reasons, on the other hand are exposed to the air pressure. This leads to deflections of the wall. Due to the small footprint, the arrangement is insensitive to such deflections, it will be introduced no tension in the arrangement. It is possible to arrange several arrangements side by side on the wall, without mutual interference.
  • FIG. 1 shows a section through the arrangement along its axis perpendicular to the chamber flange. Along this axis, the following components are arranged and connected to one another in the stated sequence: the vacuum pump 1, the carrier 7, the intermediate component 6, the chamber flange 5 and the vacuum chamber 4.
  • the vacuum pump has a high-speed rotor 2. This cooperates with a stator 3 to pump gas from the vacuum chamber 4. Of the Pump flange 25 of the vacuum pump is releasably secured by means of pump screws 12 to a support 7. This connection is dimensioned so that the maximum crash moment does not lead to a rotation of vacuum pump and carrier against each other.
  • the intermediate member 6 which is designed as a vacuum slide valve, connected by slide bolts 14.
  • the vacuum slide valve is detachably fastened to the chamber flange 5 via further slide screws 14.
  • similarly acting means known in the art such as clamps, may be used.
  • sealing means are provided, for example, elastomeric O-rings.
  • the chamber flange 5 is secured to a cylindrical portion 26 crashworthy, for example, by a cohesive connection.
  • a web is provided between a wall 16 of the vacuum chamber and the chamber flange. It is connected with both force, material or form-fitting, so that it can absorb crash moments.
  • Carrier 7 and chamber flange 5 are connected by a screw 11, which is inserted through a spacer sleeve 10 therethrough.
  • the carrier 7 it is guided in a through hole and screwed into a thread 15 on the chamber flange.
  • the screw can receive bias, ie be tightened with high torque without the distance between the carrier and chamber flange is reduced. Tensions of the vacuum slide valve are therefore avoided.
  • the spacer sleeve surrounding the screw increases the security against rotation: at a torque about the axis of the arrangement, a tilting moment is created on the spacer sleeve, which receives the Pretension of the screw counteracts.
  • this arrangement is able to safely pick up a large crash torque from the vacuum pump and pass without loss of vacuum tightness on the carrier, screw and chamber flange to the vacuum chamber.
  • the crash moment does not lead to a load on the intermediate component, in this example, the vacuum slide valve.
  • FIG. 2 is a section through the arrangement along the line II 'shown.
  • the chamber wall 16 of the vacuum chamber has by way of example a rectangular shape with the shortest edge length W.
  • the chamber flange 5, which is connected to three webs 13, 13 'and 13 ", is arranged on this wall, and the chamber flange also has screwing holes 27, 27' and 27", in which the screws are screwed in between the carrier and chamber flange. It has a free diameter F, which allows the gas connection to the vacuum chamber.
  • the advantages of the arrangement come in such walls to advantage, in which the edge length W is much larger than the free diameter F. In the size ratio is also the wall thickness. A much larger ratio is when the deflection of the wall due to the air pressure exceeds the manufacturing tolerances of the flange, ie position on the wall, diameter, position of the screw holes 27, 27 ', 27 ".

Description

Die Erfindung betrifft eine Anordnung mit Vakuumpumpe nach dem Oberbegriff des ersten Anspruches.The invention relates to an arrangement with a vacuum pump according to the preamble of the first claim.

Vakuumpumpen mit schnelldrehenden Rotoren, beispielsweise Turbomolekularpumpen, speichern aufgrund der hohen Drehfrequenz des Rotors hohe Energien. Die Drehfrequenz liegt oftmals bei einigen 10 000 Umdrehungen pro Minute. Bei einem so genannten Rotor-Stator-Crash kommt es zu einem Kontakt von Rotor und Stator. Dabei werden diese hohen Energien über Pumpenbauteile wie z.B. Pumpenflansch in Form eines Drehmomentes abgegeben. Das Verdrehen der Pumpe bei einem solchen Rotor-Stator Crash muss vermieden werden, da dabei eine Verletzungsgefahr für Personen entsteht und eine Beschädigung der Anlage zu erwarten ist. In Folge dieser Verdrehung der Pumpe kann es außerdem zum Leckschlagen oder Abreißen der Pumpe kommen. In der Prozesstechnik werden zum Teil toxische Gase gepumpt, was dann zu einer Kontamination der Umgebung führt. Bei einem Leckschlagen der Anlage wird auch der laufende Prozess des Anwenders so stark beeinflusst, dass er in der Regel abgebrochen werden muss. Dadurch fallen Kosten an, die bei großen Prozessen, beispielsweise in der Halbleiterindustrie, sehr hohe Beträge erreichen können.Vacuum pumps with fast-rotating rotors, for example turbomolecular pumps, store high energies due to the high rotational frequency of the rotor. The rotational frequency is often at some 10,000 revolutions per minute. In a so-called rotor-stator crash, there is contact between rotor and stator. At the same time, these high energies are transmitted via pump components, e.g. Pump flange issued in the form of a torque. The rotation of the pump in such a rotor-stator crash must be avoided as this creates a risk of injury to persons and damage to the system is expected. As a result of this rotation of the pump may also lead to leakage or tearing of the pump. In process technology, toxic gases are sometimes pumped, which then leads to contamination of the environment. If the system leaks, the current process of the user is influenced so much that it usually has to be aborted. This results in costs that can reach very high amounts in large processes, for example in the semiconductor industry.

Die Vakuumpumpen werden mit dem Hochvakuumflansch an Rohrbauteile, Schieber oder direkt an den Rezipienten montiert. Insbesondere bei der Montage an einem Schieber besteht im Falle eines plötzlichen Blockierens die Gefahr einer Verdrehung oder Leckage des Schiebers. Auch sind die Flansche der Rezipienten und auch Rohrbauteile in der Regel nicht in der Lage, die hohen Momente aufzunehmen.The vacuum pumps are mounted with the high vacuum flange on pipe components, slides or directly to the recipient. In particular, when mounted on a slide there is a risk of twisting or leakage of the slider in the case of a sudden blocking. Also, the flanges of the recipient and pipe components are usually not able to take the high moments.

Zum Teil können Vakuumpumpen zusätzlich zum Flansch auch am Boden befestigt werden, was aufgrund von nicht-fluchtenden Befestigungspunkten zu einer Verspannung der Pumpe oder des Schiebers führen kann, so dass ein störungsfreier Betrieb nicht sichergestellt ist.In some cases, vacuum pumps can also be fastened to the floor in addition to the flange, which can lead to tensioning of the pump or the slide due to non-aligned attachment points, so that trouble-free operation is not ensured.

Aus der EP 1 580 477 A1 ist eine Anordnung gemäß dem Oberbegriff des Anspruchs 1 bekannt.From the EP 1 580 477 A1 An arrangement according to the preamble of claim 1 is known.

Ferner beschreibt die EP 1 795 757 A2 eine Anordnung mit einer Vakuumpumpe, die über einen Ring aus einem härteren Material als das restliche Gehäuse der Vakuumpumpe mit einem Kammerflansch verbunden ist.Furthermore, the describes EP 1 795 757 A2 an assembly having a vacuum pump connected to a chamber flange via a ring of a harder material than the remaining housing of the vacuum pump.

Aufgabe der Erfindung ist es, eine Anordnung mit einer Vakuumpumpe mit schnelldrehendem Rotor vorzustellen, bei der im Falle eines Rotor-Stator-Crashes die Vakuumdichtheit erhalten bleibt.The object of the invention is to provide an arrangement with a vacuum pump with fast-rotating rotor, wherein in the case of a rotor-stator crash, the vacuum tightness is maintained.

Diese Aufgabe wird gelöst durch eine Anordnung mit den Merkmalen des ersten Anspruches. Die Ansprüche 2 bis 6 geben vorteilhafte Weiterbildungen der Erfindung an.This object is achieved by an arrangement having the features of the first claim. The claims 2 to 6 indicate advantageous developments of the invention.

Durch Anordnen der Vakuumpumpe an einem Verbindungsmittel, welches crashmomentsicher mit dem Kammerflansch verbunden ist, wird die bei einem sogenannten Rotor-Stator-Crash freigesetzte Rotationsenergie sicher auf die Vakuumkammer übergeleitet, und dadurch werden die Verbindungen zwischen den Bauteilen und damit die gesamte Anordnung vakuumdicht gehalten. Rotor-Stator-Crash bezeichnet dabei das Verklemmen von Rotor und Stator während des Betriebes des Rotors bei hohen Drehzahlen mit deren anschließender mechanischer Verformung. Die Rotationsenergie des Rotors wird zum Teil in diese Verformung umgesetzt, zum Teil an das Gehäuse der Vakuumpumpe abgegeben. Es treten große Drehmomente auf. Crashmomentsicher bezeichnet daher eine Verbindung, die so gestaltet ist, dass sie diese Drehmomente übertragen kann, ohne dass sich durch sie verbundene Elemente gegeneinander verdrehen. Über die Vakuumdichtheit hinaus wird das Zwischenbauteil vor Beschädigung geschützt. Erfindungsgemäß ist das Verbindungsmittel kostengünstig und technisch einfach als ein zwischen Vakuumpumpe und Zwischenbauteil angeordneter Träger gestaltet. Dies vermeidet Änderungen an Vakuumpumpe und Zwischenbauteil. Der Träger und der Kammerflansch sind durch eine Schraube, welche durch eine Abstandshülse hindurch gesteckt ist, miteinander verbunden.By arranging the vacuum pump on a connecting means, which is crashworthy connected to the chamber flange, the rotational energy released in a so-called rotor-stator crash is safely transferred to the vacuum chamber, and thereby the connections between the components and thus the entire assembly are kept vacuum-tight. Rotor-stator crash refers to the jamming of rotor and stator during operation of the rotor at high speeds with their subsequent mechanical deformation. The rotational energy of the rotor is partly converted into this deformation, in part delivered to the housing of the vacuum pump. There are great torques. Crash-torque safe therefore designates a A compound designed to transmit these torques without the elements connected by them rotating relative to each other. Beyond the vacuum tightness, the intermediate component is protected from damage. According to the invention, the connection means is designed inexpensively and technically simply as a support arranged between the vacuum pump and the intermediate component. This avoids changes to the vacuum pump and intermediate component. The carrier and the chamber flange are connected by a screw which is inserted through a spacer sleeve.

Dies ermöglicht eine sichere Verschraubung und damit Verbindung von Träger und Kammerflansch, ohne dass das Zwischenbauteil verspannt wird. Fehlfunktionen aufgrund von Verspannungen des Zwischenbauteils werden daher vermieden.This allows a secure screw connection and thus connection of support and chamber flange, without the intermediate component is braced. Malfunctions due to tension of the intermediate component are therefore avoided.

Schraube und Abstandshülse bilden ein steifes System, das aufgrund der Vorspannung durch Anziehen der Schraube sehr widerstandsfähig gegen Verdrehungen der Anordnung um die zur Kammerflanschebene senkrechte Achse ist.Screw and spacer sleeve form a rigid system, which is due to the bias by tightening the screw is very resistant to rotation of the assembly about the vertical plane to the chamber flange plane.

In einer anderen Weiterbildung sind Träger und Vakuumpumpe einstückig ausgeführt. Dies kann durch stoffschlüssiges Verbinden der beiden Teile erreicht werden, beispielsweise durch Reibschweißen und gleichwirkende Verfahren. Dies erreicht kostengünstig eine sehr crashmomentsichere Verbindung.In another embodiment, carrier and vacuum pump are made in one piece. This can be achieved by materially joining the two parts, for example by friction welding and equivalent methods. This achieves a low-cost crash-proof connection.

Eine weitere Weiterbildung bezieht sich auf den Kammerflansch. Dieser ist mit einem an der Vakuumkammer angeordneten Steg verbunden. Daraus ergibt sich eine Verbindung zwischen Vakuumkammer und Kammerflansch mit einem größeren Abstand zur Kammerflanschmitte. Dies erhöht die Crashmomentsicherheit zusätzlich.Another development relates to the chamber flange. This is connected to a arranged on the vacuum chamber web. This results in a connection between the vacuum chamber and the chamber flange with a larger one Distance to the chamber flange center. This additionally increases the crash torque safety.

Die bisher genannten Vorteile der Anordnung kommen insbesondere zur Geltung, wenn das Zwischenbauteil als Vakuumschieberventil ausgeführt ist, da bei diesen Verspannungen besonders leicht zu Fehlfunktionen führen und Crashmomentsicherheit nur konstruktiv aufwändig und teuer zu bewerkstelligen ist.The above-mentioned advantages of the arrangement are particularly evident when the intermediate component is designed as a vacuum slide valve, since these tensions particularly easily lead to malfunction and crash torque safety is only structurally complex and expensive to accomplish.

In einer anderen Weiterbildung ist der Kammerflansch auf einer ebenen Wand der Vakuumkammer angeordnet. Diese Wände sollen einerseits aus Kostengründen möglichst dünnwandig sein, sind andererseits dem Luftdruck ausgesetzt. Dies führt zu Durchbiegungen der Wand. Aufgrund der geringen Grundfläche ist die Anordnung unempfindlich gegen solche Durchbiegungen, es werden keine Verspannungen in die Anordnung eingeleitet. Es wird möglich, mehrere Anordnungen nebeneinander auf der Wand anzuordnen, ohne dass es zur gegenseitigen Beeinflussung kommt.In another development, the chamber flange is arranged on a flat wall of the vacuum chamber. These walls should be as thin as possible on the one hand for cost reasons, on the other hand are exposed to the air pressure. This leads to deflections of the wall. Due to the small footprint, the arrangement is insensitive to such deflections, it will be introduced no tension in the arrangement. It is possible to arrange several arrangements side by side on the wall, without mutual interference.

Anhand eines Ausführungsbeispieles soll die Erfindung näher erläutert und die Vorteile vertieft werden. Es zeigen:

  • Fig. 1: : Schnitt durch eine Anordnung mit Vakuumpumpe
  • Fig. 2: : Draufblick auf die entlang der Linie I-I' geschnittene Anordnung
Reference to an embodiment, the invention will be explained in more detail and the benefits are deepened. Show it:
  • Fig. 1 :: Section through an arrangement with vacuum pump
  • Fig. 2 :: Look at the arrangement cut along the line II '

Die Figur 1 zeigt einen Schnitt durch die Anordnung entlang ihrer zum Kammerflansch senkrechten Achse. Entlang dieser Achse sind in der genannten Reihenfolge folgende Bauteile angeordnet und miteinander verbunden: die Vakuumpumpe 1, der Träger 7, das Zwischenbauteil 6, der Kammerflansch 5 und die Vakuumkammer 4.The FIG. 1 shows a section through the arrangement along its axis perpendicular to the chamber flange. Along this axis, the following components are arranged and connected to one another in the stated sequence: the vacuum pump 1, the carrier 7, the intermediate component 6, the chamber flange 5 and the vacuum chamber 4.

Die Vakuumpumpe weist einen schnelldrehenden Rotor 2 auf. Dieser wirkt mit einem Stator 3 zusammen, um Gas aus der Vakuumkammer 4 abzupumpen. Der Pumpenflansch 25 der Vakuumpumpe ist mittels Pumpenschrauben 12 an einem Träger 7 lösbar befestigt. Diese Verbindung ist so dimensioniert, dass das maximale Crashmoment nicht zu einer Verdrehung von Vakuumpumpe und Träger gegeneinander führt.The vacuum pump has a high-speed rotor 2. This cooperates with a stator 3 to pump gas from the vacuum chamber 4. Of the Pump flange 25 of the vacuum pump is releasably secured by means of pump screws 12 to a support 7. This connection is dimensioned so that the maximum crash moment does not lead to a rotation of vacuum pump and carrier against each other.

Mit dem Träger ist das Zwischenbauteil 6, welches als Vakuumschieberventil ausgeführt ist, durch Schieberschrauben 14 verbunden. Das Vakuumschieberventil wiederum ist über weitere Schieberschrauben 14 am Kammerflansch 5 lösbar befestigt. Anstelle der Pumpen- und Schieberschrauben können gleichwirkende und im Stand der Technik bekannte Mittel wie Klammern verwendet werden. Zwischen den Flanschverbindungen von Vakuumpumpe, Träger, Zwischenbauteil und Vakuumkammer sind nicht gezeigte und im Stand der Technik bekannte Dichtmittel vorgesehen, beispielsweise elastomere Rundschnurringe.With the carrier, the intermediate member 6, which is designed as a vacuum slide valve, connected by slide bolts 14. The vacuum slide valve, in turn, is detachably fastened to the chamber flange 5 via further slide screws 14. Instead of the pump and pusher screws, similarly acting means known in the art, such as clamps, may be used. Between the flange of vacuum pump, carrier, intermediate member and vacuum chamber not shown and known in the art sealing means are provided, for example, elastomeric O-rings.

Der Kammerflansch 5 ist an einem zylindrischen Abschnitt 26 crashmomentsicher befestigt, beispielsweise durch eine stoffschlüssige Verbindung. Ein Steg ist zwischen einer Wand 16 der Vakuumkammer und dem Kammerflansch vorgesehen. Er ist mit beiden kraft-, stoff- oder formschlüssig verbunden, so dass er Crashmomente aufnehmen kann.The chamber flange 5 is secured to a cylindrical portion 26 crashworthy, for example, by a cohesive connection. A web is provided between a wall 16 of the vacuum chamber and the chamber flange. It is connected with both force, material or form-fitting, so that it can absorb crash moments.

Träger 7 und Kammerflansch 5 sind durch eine Schraube 11 miteinander verbunden, welche durch eine Abstandshülse 10 hindurch gesteckt ist. Im Träger 7 ist sie in einem Durchgangsloch geführt und am Kammerflansch in ein Gewinde 15 eingeschraubt. Durch die Abstandshülse kann die Schraube Vorspannung erhalten, d.h. mit hohem Drehmoment angezogen werden, ohne dass der Abstand zwischen Träger und Kammerflansch verringert wird. Verspannungen des Vakuumschieberventils werden daher vermieden. Gleichzeitig erhöht die die Schraube umgebende Abstandshülse die Verdrehsicherheit: bei einem Drehmoment um die Achse der Anordnung entsteht ein Kippmoment auf die Abstandshülse, dem die Vorspannung der Schraube entgegenwirkt. Daher ist diese Anordnung in der Lage, ein großes Crashmoment sicher von der Vakuumpumpe aufzunehmen und ohne Verlust der Vakuumdichtheit über Träger, Schraube und Kammerflansch auf die Vakuumkammer überzuleiten. Das Crashmoment führt dabei nicht zu einer Belastung des Zwischenbauteils, in diesem Beispiel des Vakuumschieberventils.Carrier 7 and chamber flange 5 are connected by a screw 11, which is inserted through a spacer sleeve 10 therethrough. In the carrier 7, it is guided in a through hole and screwed into a thread 15 on the chamber flange. Through the spacer sleeve, the screw can receive bias, ie be tightened with high torque without the distance between the carrier and chamber flange is reduced. Tensions of the vacuum slide valve are therefore avoided. At the same time, the spacer sleeve surrounding the screw increases the security against rotation: at a torque about the axis of the arrangement, a tilting moment is created on the spacer sleeve, which receives the Pretension of the screw counteracts. Therefore, this arrangement is able to safely pick up a large crash torque from the vacuum pump and pass without loss of vacuum tightness on the carrier, screw and chamber flange to the vacuum chamber. The crash moment does not lead to a load on the intermediate component, in this example, the vacuum slide valve.

In Fig. 2 ist ein Schnitt durch die Anordnung entlang der Linie I-I' gezeigt. Die Kammerwand 16 der Vakuumkammer weist beispielhaft eine rechteckige Form mit der kürzesten Kantenlänge W auf. Auf dieser Wand ist der Kammerflansch 5 angeordnet, der mit drei Stegen 13, 13' und 13" verbunden ist. Der Kammerflansch weist zudem Verschraubungslöcher 27, 27' und 27" auf, in welche die Schrauben zwischen Träger und Kammerflansch eingeschraubt werden. Er weist einen freien Durchmesser F auf, der die Gasverbindung zur Vakuumkammer ermöglicht. Die Vorteile der Anordnung kommen bei solchen Wänden zur Geltung, bei der die Kantenlänge W wesentlich grösser als der freie Durchmesser F ist. In das Größenverhältnis geht zusätzlich die Wandstärke ein. Ein wesentlich größeres Verhältnis liegt vor, wenn die Durchbiegung der Wand aufgrund des Luftdrucks die Fertigungstoleranzen der Flanschmasse übersteigt, d.h. Position auf der Wand, Durchmesser, Lage der Verschraubungslöcher 27, 27', 27".In Fig. 2 is a section through the arrangement along the line II 'shown. The chamber wall 16 of the vacuum chamber has by way of example a rectangular shape with the shortest edge length W. The chamber flange 5, which is connected to three webs 13, 13 'and 13 ", is arranged on this wall, and the chamber flange also has screwing holes 27, 27' and 27", in which the screws are screwed in between the carrier and chamber flange. It has a free diameter F, which allows the gas connection to the vacuum chamber. The advantages of the arrangement come in such walls to advantage, in which the edge length W is much larger than the free diameter F. In the size ratio is also the wall thickness. A much larger ratio is when the deflection of the wall due to the air pressure exceeds the manufacturing tolerances of the flange, ie position on the wall, diameter, position of the screw holes 27, 27 ', 27 ".

Claims (4)

  1. An arrangement comprising a vacuum pump (1) having a fast-rotating rotor (2) and a stator (3); a vacuum chamber (4) having a chamber flange (5); and an intermediate component (6) provided between the vacuum pump (1) and the vacuum chamber (4), wherein the vacuum chamber (1), the vacuum pump (4) and the intermediate component (6) are releasably connected to one another,
    wherein the vacuum pump (1) is arranged at a connection means (7) which is connected to the chamber flange (5) in a manner secure with respect to a momentum following a crash,
    characterized in that
    the connection means (7) comprises a support (7) which is arranged between the vacuum pump (1) and the intermediate component (6) and to which the vacuum pump (1) and the intermediate component (6) are releasably connected; and
    in that the support (7) and the chamber flange (5) are connected to one another by a screw (11) which is inserted through a spacer sleeve (10).
  2. An arrangement in accordance with claim 1,
    characterized in that
    the chamber flange (5) and a web (13, 13', 13") arranged at the vacuum chamber (4) are connected to one another.
  3. An arrangement in accordance with any one of the preceding claims,
    characterized in that
    the intermediate component (6) comprises a vacuum slide valve.
  4. An arrangement in accordance with any one of the preceding claims,
    characterized in that
    the chamber flange (5) is arranged at a planar wall (16) of the vacuum chamber (4).
EP08020361.5A 2007-12-08 2008-11-22 Vacuum pump mounting arrangement Active EP2068000B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200710059257 DE102007059257A1 (en) 2007-12-08 2007-12-08 Arrangement with vacuum pump

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EP2068000A2 EP2068000A2 (en) 2009-06-10
EP2068000A3 EP2068000A3 (en) 2014-01-22
EP2068000B1 true EP2068000B1 (en) 2018-08-15

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EP08020361.5A Active EP2068000B1 (en) 2007-12-08 2008-11-22 Vacuum pump mounting arrangement

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EP (1) EP2068000B1 (en)
JP (1) JP5467758B2 (en)
DE (1) DE102007059257A1 (en)

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Publication number Priority date Publication date Assignee Title
DE102016114709A1 (en) 2016-08-09 2018-02-15 Karlsruher Institut für Technologie Torque protection and flange connection with such
JP6729408B2 (en) * 2017-01-13 2020-07-22 株式会社島津製作所 Valve device
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve

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JP3426734B2 (en) * 1994-10-17 2003-07-14 三菱重工業株式会社 Turbo molecular pump
JP4484470B2 (en) * 2002-10-23 2010-06-16 エドワーズ株式会社 Molecular pump and flange
FR2867823B1 (en) * 2004-03-22 2006-07-14 Cit Alcatel SHOCK ABSORBER CONNECTION FOR VACUUM PUMP
JP4609082B2 (en) * 2005-01-25 2011-01-12 株式会社島津製作所 Flange and turbomolecular pump with this flange
DE102005059208A1 (en) * 2005-12-12 2007-06-28 Pfeiffer Vacuum Gmbh vacuum housing
JP2007278164A (en) * 2006-04-06 2007-10-25 Shimadzu Corp Fastening structure and rotary vacuum pump

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EP2068000A2 (en) 2009-06-10
JP5467758B2 (en) 2014-04-09
DE102007059257A1 (en) 2009-06-10
JP2009138740A (en) 2009-06-25
EP2068000A3 (en) 2014-01-22

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