EP2290242B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2290242B1
EP2290242B1 EP10008413.6A EP10008413A EP2290242B1 EP 2290242 B1 EP2290242 B1 EP 2290242B1 EP 10008413 A EP10008413 A EP 10008413A EP 2290242 B1 EP2290242 B1 EP 2290242B1
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EP
European Patent Office
Prior art keywords
collar
flange
vacuum pump
pump
housing
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Application number
EP10008413.6A
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German (de)
French (fr)
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EP2290242A3 (en
EP2290242A2 (en
Inventor
Robert Watz
Michael Schweighöfer
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2290242A2 publication Critical patent/EP2290242A2/en
Publication of EP2290242A3 publication Critical patent/EP2290242A3/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • Vacuum pumps for the molecular flow area in particular turbomolecular vacuum pumps, have a rapidly rotating rotor. The rotation is so fast that the blades connected to the rotor reach a speed close to the speed of sound.
  • the speed values are in the range of tens of thousands of revolutions per minute.
  • the measure to arrange on the side facing away from the housing of the pump flange a collar associated with the suction reduces the forces introduced into the fastening means. While the state of the art is aimed at coping with the torques occurring in the event of a fault, which follow from the conservation of angular momentum, the radial forces, which according to the findings of the inventors are not negligible, are handled with the aid of the invention. By reducing the radial forces introduced into the fasteners, a failure mechanism is turned off. Another advantage of the measure is that further components such as arranged between the pump flange and chamber flange centering omitted. These cost on the one hand money, on the other hand, they weaken the connection in addition.
  • a sealing element can be integrated in the pump flange so that the number of parts can be further reduced.
  • a relief groove is provided, which is arranged in the radial direction outside of the collar adjacent. This improves the flow of force within the collar in case of failure and reduces the risk of shearing the collar. This will make the connection even safer.
  • a further development proposes to provide a damping element, in which kinetic energy is converted into deformation energy, so that the resulting forces and moments are reduced.
  • FIG. 1 A section through an arrangement with vacuum pump 1 and chamber flange 2 shows Fig. 1 ,
  • the vacuum pump has a pump flange 4, which is detachably connected to the chamber flange 2 and surrounds the suction opening 5 of the vacuum pump.
  • a screw 30 provides this releasable connection ago.
  • the chamber flange is shown here as an opening in a wall which is surrounded by an annular surface. However, the chamber flange may also be provided on a tube piece connected to the chamber.
  • the pump flange is arranged on the housing 6 of the vacuum pump.
  • This housing encloses vacuum-tight the vacuum generating components.
  • These are in particular the stator disks 8, which are axially spaced apart by spacers 9.
  • the blades 14 attached to the bell rotor 12 move together with the stator disks to move the gas.
  • the bell-rotor 12 is connected to a shaft 10, the connection being produced by one or more screws 16 or equivalent means.
  • the shaft is rotatably supported, for example, as shown here by an active radial magnetic bearing 18, and is set by a drive 20 in rapid rotation.
  • the worst case of error in this example is the rupture of the bell rotor along its longitudinal axis, ie in the axial direction 24. Two or more fragments of the bell rotor then move largely in the radial direction 22 due to the centrifugal forces. In this case, the connection between pump flange and chamber flange must not be completely solved.
  • the Fig. 2 shows the in Fig. 1 by a dashed line framed part in a cut and with more details.
  • the screw 30 passes through a channel 32, for example a through-hole, and engages with a thread 34. As a result, the pump flange 4 is pulled against the chamber flange 2 and so made the connection.
  • a sealing groove 50 is provided, in which a sealing ring 52, for example, an elastomeric ring is located.
  • the pump flange has a relief groove 44 which adjoins the collar in the radial direction outside.
  • This relief groove causes a more favorable distribution of the resulting in the event of a fault by the contact with the chamber flange forces and thus counteracts the shearing off of the collar.
  • it allows to choose the collar gap 42 as closely as possible, since the production-related curvature 46 is not on the collar foot with the chamber flange in a plane.
  • a narrow collar gap means that the diameter of the through-bore 32 can be kept small.
  • Fig. 3 A development of the pump flange and the arrangement according to Fig. 2 is in Fig. 3 shown, wherein the same section is shown.
  • the collar 40 ' has on its radially outer side on a damping element 60. By this arrangement, it faces the chamber flange 2 'and is located between chamber flange and collar.
  • This damping element is chosen so that it is deformable and at the same time suitable for the high-vacuum range. The latter means that it contains as few virtual leaks as possible and has a low outgassing rate.
  • the final pressure reached by the vacuum pump should be influenced by less than half a decade. These requirements for the damping element are achieved, for example, when it is designed as a copper ring. In the event of a fault, the damping element initially comes into contact with the chamber flange and is subsequently deformed, as a result of which a portion of the kinetic energy is dissipated.
  • a step 56 may be arranged on the pump flange 4 '. This serves a sealing ring 52 'in the radial direction 22' as an inner boundary. Radially outward it is limited by a support ring 54th
  • the step creates an axial gap 66 in the region of the screw 30 '. This has an advantageous effect in the event of a fault since the screw receives additional deformation latitude, which is equally present in all directions of force.
  • the connection of the chamber flange and pump flange becomes more resistant in both the radial and circumferential directions, as the shearing action on the screws is distributed on their axial-gap section.
  • a bracket 70 comprises a hook bolt 72 and a counter hook 84, wherein the hook bolt has a threaded portion which passes through a cylindrical channel of a counter hook.
  • a nut 76 is engaged with the threaded portion.
  • the hook screw engages in a groove 82 of the chamber flange 2 "arranged on a pipe section 38.
  • the counter hook engages in a groove 84 of the pump flange 4".
  • a collar 40 is on the side facing away from the housing of the pump flange and associated with the suction port. By this arrangement, it protrudes into the space surrounded by the chamber flange.
  • the collar moves through the above-mentioned forces in the radial direction 22 "and comes into contact with the chamber flange, which drastically reduces the shearing load acting on the boundaries of the grooves 82 and 84 and on hooks and hooks Act essentially only forces in the axial direction 24 "and along the grooves, ie in the circumferential direction.
  • the clamp is designed by default.

Description

Die Erfindung betrifft eine Vakuumpumpe nach dem Oberbegriff des ersten Anspruchs.The invention relates to a vacuum pump according to the preamble of the first claim.

Vakuumpumpen für den molekularen Strömungsbereich, insbesondere Turbomolekularvakuumpumpen, weisen einen schnell drehenden Rotor auf. Die Drehung ist dabei so schnell, dass die mit dem Rotor verbundenen Schaufeln eine Geschwindigkeit nahe der Schallgeschwindigkeit erreichen. Die Drehzahlwerte liegen im Bereich von einigen zehntausend Umdrehungen pro Minute.Vacuum pumps for the molecular flow area, in particular turbomolecular vacuum pumps, have a rapidly rotating rotor. The rotation is so fast that the blades connected to the rotor reach a speed close to the speed of sound. The speed values are in the range of tens of thousands of revolutions per minute.

Diese hohen Drehzahlwerte sind für das Erreichen guter Vakuumdaten wie Saugvermögen und erreichbarer Enddruck wichtig. Jedoch führen sie zu einer sehr hohen in dem Rotor gespeicherten Energie. Sollte im zwar unwahrscheinlichen, jedoch nicht völlig auszuschließenden Fehlerfall diese Energie an das Gehäuse der Vakuumpumpe abgegeben werden, sind die Befestigungsmittel, welche die Verbindung der Vakuumpumpe mit der zu evakuierender Kammer bewirken, einer sehr hohen Belastung ausgesetzt. Eine Überbeanspruchung der Befestigungsmittel im Fehlerfall ist zu vermeiden.These high speed values are important for achieving good vacuum data such as pumping speed and attainable ultimate pressure. However, they lead to a very high energy stored in the rotor. If, in the unlikely, but not completely excluded error case, this energy is delivered to the housing of the vacuum pump, the fastening means, which cause the connection of the vacuum pump with the chamber to be evacuated, a very high load. An overuse of the fasteners in case of failure is to be avoided.

Im Stand der Technik sind einige Lösungen für den Ansatz bekannt, Schrauben, welche als Befestigungsmittel verwendet werden, einen Verformungsraum zu geben. Beispiele solcher Lösungen stellen die EP-A 1 537 336 und die EP-A 1 312 804 vor. In beiden Fällen weisen die Durchgangsbohrungen Abschnitte auf, in denen der Bohrungsdurchmesser deutlich über dem Schraubendurchmesser liegt.In the prior art some solutions have been known for the approach of giving screws, which are used as fasteners, a deformation space. Examples of such solutions are the EP-A 1 537 336 and the EP-A 1 312 804 in front. In both cases, the through holes have sections in which the bore diameter is well above the screw diameter.

Aus der EP 1 258 634 A1 ist eine Vakuumpumpe gemäß dem Oberbegriff des Anspruchs 1 bekannt.From the EP 1 258 634 A1 a vacuum pump according to the preamble of claim 1 is known.

Eine ähnliche Vakuumpumpe ist in der GB 1 297 740 A beschreiben.A similar vacuum pump is in the GB 1 297 740 A describe.

Es ist Aufgabe der Erfindung, eine Vakuumpumpe vorzustellen, bei welcher die Überbeanspruchung der Befestigungsmittel im Fehlerfall vermieden wird.It is an object of the invention to provide a vacuum pump, in which the overuse of the fastening means is avoided in the event of a fault.

Diese Aufgabe wird gelöst durch eine Anordnung mit Vakuumpumpe mit den Merkmalen des ersten Anspruchs. Die Ansprüche 2 und 3 geben vorteilhafte Weiterbildungen an.This object is achieved by an arrangement with a vacuum pump having the features of the first claim. Claims 2 and 3 indicate advantageous developments.

Die Maßnahme, auf der dem Gehäuse abgewandten Seite des Pumpenflansches einen der Ansaugöffnung zugeordneten Kragen anzuordnen, reduziert die in die Befestigungsmittel eingeleiteten Kräfte. Während der Stand der Technik auf die Bewältigung der im Fehlerfall auftretenden Drehmomente, welche aus der Drehimpulserhaltung folgen, abzielt, werden mit Hilfe der Erfindung die nach Erkenntnissen der Erfinder nicht zu vernachlässigenden Radialkräfte gehandhabt. Durch Reduzieren der in die Befestigungsmittel eingeleiteten Radialkräfte wird ein Versagensmechanismus ausgeschaltet. Ein weiterer Vorteil der Maßnahme ist, dass weitergehende Bauteile wie zwischen Pumpenflansch und Kammerflansch angeordnete Zentrierringe entfallen. Diese kosten zum einen Geld, zum anderen schwächen sie die Verbindung zusätzlich.The measure to arrange on the side facing away from the housing of the pump flange a collar associated with the suction, reduces the forces introduced into the fastening means. While the state of the art is aimed at coping with the torques occurring in the event of a fault, which follow from the conservation of angular momentum, the radial forces, which according to the findings of the inventors are not negligible, are handled with the aid of the invention. By reducing the radial forces introduced into the fasteners, a failure mechanism is turned off. Another advantage of the measure is that further components such as arranged between the pump flange and chamber flange centering omitted. These cost on the one hand money, on the other hand, they weaken the connection in addition.

In den Pumpenflansch kann aufgrund der Nut oder Stufe ein Dichtungselement integriert werden, so dass die Teilezahl weiter verringert werden kann.Due to the groove or step, a sealing element can be integrated in the pump flange so that the number of parts can be further reduced.

Erfindungsgemäß ist eine Entlastungsnut vorgesehen, welche in radialer Richtung außerhalb an den Kragen angrenzend angeordnet ist. Diese verbessert den Kraftfluss innerhalb des Kragens im Fehlerfall und verringert die Gefahr des Abscherens des Kragens. Hierdurch wird die Verbindung nochmals sicherer.According to the invention a relief groove is provided, which is arranged in the radial direction outside of the collar adjacent. This improves the flow of force within the collar in case of failure and reduces the risk of shearing the collar. This will make the connection even safer.

Eine Weiterbildung schlägt vor, ein Dämpfungselement vorzusehen, in welchem kinetische Energie in Verformungsenergie umgesetzt wird, so dass die entstehenden Kräfte und Momente verringert werden.A further development proposes to provide a damping element, in which kinetic energy is converted into deformation energy, so that the resulting forces and moments are reduced.

Gemäß einer anderen Weiterbildung wird vorgeschlagen, durch eine konische Fläche Saugvermögensverluste der Vakuumpumpe, die durch den Kragen entstehen, klein zu halten.According to another embodiment, it is proposed to keep through a conical surface Saugvermögensverluste the vacuum pump, which arise through the collar, small.

An Hand von Ausführungsbeispielen und deren Weiterbildungen soll die Erfindung näher erläutert und die Darstellung ihrer Vorteile vertieft werden.With reference to embodiments and their developments, the invention will be explained in more detail and the representation of its benefits to be deepened.

Es zeigen:

Fig. 1:
Schnitt durch eine Anordnung mit Vakuumpumpe,
Fig. 2:
Schnitt durch die Flanschverbindung der Anordnung,
Fig. 3:
   Schnitt durch die Flanschverbindung in einer Weiterbildung,
Fig. 4:
   Schnitt durch eine Flanschverbindung mit einer    Klammerverbindung.
Show it:
Fig. 1:
Section through an arrangement with vacuum pump,
Fig. 2:
Section through the flange connection of the arrangement,
3:
Section through the flange connection in a development,
4:
Section through a flange connection with a clamp connection.

Einen Schnitt durch eine Anordnung mit Vakuumpumpe 1 und Kammerflansch 2 zeigt Fig. 1. Die Vakuumpumpe besitzt einen Pumpenflansch 4, der mit dem Kammerflansch 2 lösbar verbunden ist und den Ansaugöffnung 5 der Vakuumpumpe umgibt. Eine Schraube 30 stellt diese lösbare Verbindung her. Der Kammerflansch ist hier als Öffnung in einer Wandung dargestellt, die von einer ringförmigen Fläche umgeben ist. Der Kammerflansch kann jedoch auch an einem mit der Kammer verbundenen Rohrstück vorgesehen sein.A section through an arrangement with vacuum pump 1 and chamber flange 2 shows Fig. 1 , The vacuum pump has a pump flange 4, which is detachably connected to the chamber flange 2 and surrounds the suction opening 5 of the vacuum pump. A screw 30 provides this releasable connection ago. The chamber flange is shown here as an opening in a wall which is surrounded by an annular surface. However, the chamber flange may also be provided on a tube piece connected to the chamber.

Der Pumpenflansch ist am Gehäuse 6 der Vakuumpumpe angeordnet. Dieses Gehäuse umschließt vakuumdicht die der Vakuumerzeugung dienenden Komponenten. Dies sind insbesondere die Statorscheiben 8, welche durch Distanzringe 9 axial voneinander beabstandet werden. In den axialen Freiräumen bewegen sich die am Glockenrotor 12 angebrachten Schaufeln 14 und bewirken zusammen mit den Statorscheiben die Gasförderung. Der Glockenrotor 12 ist mit einer Welle 10 verbunden, wobei die Verbindung durch eine oder mehrere Schrauben 16 oder gleichwirkenden Mitteln erzeugt wird. Die Welle ist drehbar gelagert, beispielsweise wie hier gezeigt durch ein aktives radiales Magnetlager 18, und wird durch einen Antrieb 20 in schnelle Drehung versetzt.The pump flange is arranged on the housing 6 of the vacuum pump. This housing encloses vacuum-tight the vacuum generating components. These are in particular the stator disks 8, which are axially spaced apart by spacers 9. In the axial free spaces, the blades 14 attached to the bell rotor 12 move together with the stator disks to move the gas. The bell-rotor 12 is connected to a shaft 10, the connection being produced by one or more screws 16 or equivalent means. The shaft is rotatably supported, for example, as shown here by an active radial magnetic bearing 18, and is set by a drive 20 in rapid rotation.

Der schlimmste Fehlerfall ist in diesem Beispiel das Zerreißen des Glockenrotors entlang seiner Längsachse, also in axialer Richtung 24. Zwei oder mehr Bruchstücke des Glockenrotors bewegen sich dann aufgrund der Fliehkräfte weitgehend in radialer Richtung 22. In diesem Fehlerfall darf die Verbindung von Pumpenflansch und Kammerflansch nicht vollständig gelöst werden.The worst case of error in this example is the rupture of the bell rotor along its longitudinal axis, ie in the axial direction 24. Two or more fragments of the bell rotor then move largely in the radial direction 22 due to the centrifugal forces. In this case, the connection between pump flange and chamber flange must not be completely solved.

Die Fig. 2 zeigt den in Fig. 1 durch eine gestrichelte Linie eingerahmten Teil in einem Schnitt und mit weiteren Details. Die Schraube 30 durchsetzt einen Kanal 32, beispielsweise eine Durchgangsbohrung, und steht mit einem Gewinde 34 im Eingriff. Hierdurch wird der Pumpenflansch 4 gegen den Kammerflansch 2 gezogen und so die Verbindung hergestellt.The Fig. 2 shows the in Fig. 1 by a dashed line framed part in a cut and with more details. The screw 30 passes through a channel 32, for example a through-hole, and engages with a thread 34. As a result, the pump flange 4 is pulled against the chamber flange 2 and so made the connection.

Im Fehlerfall bewegen sich Teile des Glockenrotors, darunter die Schaufeln 14, in radialer Richtung 22 nach außen und schlagen in Distanzringen 9 und Gehäuse 6 ein. Hierdurch entsteht ein große in radialer Richtung wirkende Kraft, welche auf den Pumpenflansch und die Verbindung zwischen Pumpenflansch und Kammerflansch übertragen wird. Ein Kragen 40 ist auf der dem Gehäuse abgewandten Seite des Pumpenflansches angeordnet und der Ansaugöffnung zugeordnet. Durch diese Anordnung ragt er in den vom Kammerflansch umgebenen Freiraum hinein. Im Fehlerfall bewegt sich der Kragen durch die oben genannten Kräfte in radialer Richtung und kommt in Kontakt mit dem Kammerflansch. Zwischen Kragen und Kammerflansch besteht der Kragenspalt 42. Der Durchmesser der Durchgangsbohrung ist so gewählt, dass der Abstand von Schraubenschaft zu Innenwand der Durchgangsbohrung größer als der Kragenspalt ist. Durch Kragen und Dimensionierung von Kragenspalt und Durchgangsbohrung wird die Schraube 30 im Fehlerfall von den radialen Kräften entlastet.In case of failure, parts of the bell rotor, including the blades 14, move in the radial direction 22 to the outside and strike in spacers 9 and 6 housing. This creates a large force acting in the radial direction, which is transmitted to the pump flange and the connection between the pump flange and the chamber flange. A collar 40 is arranged on the side facing away from the housing of the pump flange and associated with the suction opening. By this arrangement, it protrudes into the space surrounded by the chamber flange. In the event of a fault, the collar moves in the radial direction due to the abovementioned forces and comes into contact with the chamber flange. Between collar and chamber flange of the collar gap 42. The diameter of the through hole is selected so that the distance from the screw shaft to the inner wall of the through hole is greater than the collar gap. By collar and dimensioning collar collar and through hole, the screw 30 is relieved of the radial forces in case of failure.

Auf der dem Gehäuse 6 abgewandten Seite des Pumpenflansches zwischen Kragen und Durchgangsbohrung ist eine Dichtungsnut 50 vorgesehen, in der ein Dichtring 52, beispielsweise ein Elastomerring, liegt. Hierdurch kann diese Anordnung beide Aufgaben, nämlich Verbinden der Vakuumpumpe mit der Kammer und Abdichten der Verbindung, ohne weitere Bauteile übernehmen.On the side facing away from the housing 6 of the pump flange between the collar and through hole, a sealing groove 50 is provided, in which a sealing ring 52, for example, an elastomeric ring is located. In this way, this arrangement can take on both tasks, namely connecting the vacuum pump with the chamber and sealing the connection without further components.

Der Pumpenflansch weist eine Entlastungsnut 44 auf, welche in radialer Richtung außerhalb an den Kragen angrenzt. Diese Entlastungsnut bewirkt eine günstigere Verteilung der im Fehlerfall durch den Kontakt mit dem Kammerflansch entstehenden Kräfte und wirkt so dem Abscheren des Kragens entgegen. Außerdem erlaubt sie, den Kragenspalt 42 möglichst eng zu wählen, da die fertigungsbedingte Krümmung 46 am Kragenfuß nicht mit dem Kammerflansch in einer Ebene liegt. Ein enger Kragenspalt bedeutet, dass der Durchmesser der Durchgangsbohrung 32 klein gehalten werden kann.The pump flange has a relief groove 44 which adjoins the collar in the radial direction outside. This relief groove causes a more favorable distribution of the resulting in the event of a fault by the contact with the chamber flange forces and thus counteracts the shearing off of the collar. In addition, it allows to choose the collar gap 42 as closely as possible, since the production-related curvature 46 is not on the collar foot with the chamber flange in a plane. A narrow collar gap means that the diameter of the through-bore 32 can be kept small.

Der Saugvermögensverlust durch den in die Ansaugöffnung 5 der Vakuumpumpe hineinreichenden Kragen gegenüber einer gleich großen Vakuumpumpe ohne Kragen kann reduziert werden, indem an den Kragen eine konische Fläche 48 grenzt, welche an ihrem kragenseitigen Ende den kleinsten Durchmesser aufweist. Sie bildet einen Übergang vom Innendurchmesser des Kragens zum Innendurchmesser des Distanzringes 9. Durch diese Öffnung des Konus in Richtung Glockenrotor wird der Leitwert für Gas verbessert und der Saugvermögensverlust verringert.The Saugvermögensverlust by reaching into the suction port 5 of the vacuum pump collar against a same sized vacuum pump without collar can be reduced by the collar has a conical surface 48 which has the smallest diameter at its collar end. It forms a transition from the inner diameter of the collar to the inner diameter of the spacer ring 9. This opening of the cone in the direction of bell rotor improves the conductance for gas and reduces the Saugvermögensverlust.

Eine Weiterbildung des Pumpenflansches und der Anordnung nach Fig. 2 ist in Fig. 3 gezeigt, wobei der gleiche Ausschnitt dargestellt ist. Der Kragen 40' weist auf seiner in radialer Richtung außen liegenden Seite ein Dämpfungselement 60 auf. Durch diese Anordnung ist es dem Kammerflansch 2' zugewandt und befindet sich zwischen Kammerflansch und Kragen. Dieses Dämpfungselement ist so gewählt, dass es verformbar und gleichzeitig für den Hochvakuumbereich tauglich ist. Letzteres bedeutet, dass es möglichst wenige virtuelle Lecks beinhaltet und eine geringe Ausgasrate aufweist. Der durch die Vakuumpumpe erreichbare Enddruck sollte um weniger als eine halbe Dekade beeinflusst werden. Diese Anforderungen an das Dämpfungselement werden beispielsweise erreicht, wenn es als Kupferring ausgeführt ist. Im Fehlerfall kommt zunächst das Dämpfungselement mit dem Kammerflansch in Kontakt und wird nachfolgend verformt, wodurch ein Teil der Bewegungsenergie abgebaut wird.A development of the pump flange and the arrangement according to Fig. 2 is in Fig. 3 shown, wherein the same section is shown. The collar 40 'has on its radially outer side on a damping element 60. By this arrangement, it faces the chamber flange 2 'and is located between chamber flange and collar. This damping element is chosen so that it is deformable and at the same time suitable for the high-vacuum range. The latter means that it contains as few virtual leaks as possible and has a low outgassing rate. The final pressure reached by the vacuum pump should be influenced by less than half a decade. These requirements for the damping element are achieved, for example, when it is designed as a copper ring. In the event of a fault, the damping element initially comes into contact with the chamber flange and is subsequently deformed, as a result of which a portion of the kinetic energy is dissipated.

Auf dem Pumpenflansch 4' kann eine Stufe 56 angeordnet sein. Diese dient einem Dichtring 52' in radialer Richtung 22' als innere Begrenzung. Radial nach außen wird er begrenzt durch einen Stützring 54.On the pump flange 4 ', a step 56 may be arranged. This serves a sealing ring 52 'in the radial direction 22' as an inner boundary. Radially outward it is limited by a support ring 54th

Durch die Stufe entsteht im Bereich der Schraube 30' ein Axialspalt 66. Dieser wirkt sich im Fehlerfall vorteilhaft aus, da die Schraube zusätzlichen Verformungsspielraum bekommt, welcher in allen Kraftrichtungen gleichermaßen vorhanden ist. Die Verbindung von Kammerflansch und Pumpenflansch wird widerstandsfähiger sowohl in radialer als auch in Umfangsrichtung, da die Scherwirkung auf die Schrauben auf ihren im Axialspalt befindlichen Abschnitt verteilt wird.The step creates an axial gap 66 in the region of the screw 30 '. This has an advantageous effect in the event of a fault since the screw receives additional deformation latitude, which is equally present in all directions of force. The connection of the chamber flange and pump flange becomes more resistant in both the radial and circumferential directions, as the shearing action on the screws is distributed on their axial-gap section.

Anstelle einer Schraube als Befestigungsmittel können andere Mittel eingesetzt werden. Ein Beispiel zeigt Fig. 4. Eine Klammer 70 umfasst eine Hakenschraube 72 und einen Gegenhaken 84, wobei die Hakenschraube ein Gewindeabschnitt aufweist, welcher einen zylindrischen Kanal eines Gegenhakens durchsetzt. Eine Mutter 76 steht mit dem Gewindeabschnitt im Eingriff. Die Hakenschraube greift in eine Nut 82 des an einem Rohrstück 38 angeordneten Kammerflansches 2". Der Gegenhaken greift in eine Nut 84 des Pumpenflansches 4". Ein Kragen 40" ist auf der dem Gehäuse abgewandten Seite des Pumpenflansches angeordnet und der Ansaugöffnung zugeordnet. Durch diese Anordnung ragt er in den vom Kammerflansch umgebenen Freiraum hinein. Im Fehlerfall bewegt sich der Kragen durch die oben genannten Kräfte in radialer Richtung 22" und kommt in Kontakt mit dem Kammerflansch. Durch diesen Kontakt wird die auf die Begrenzungen der Nuten 82 und 84 und auf Haken und Gegenhaken einwirkende Scherbelastung drastisch reduziert. Auf die Klammer wirken im wesentlichen nur Kräfte in axialer Richtung 24" und entlang der Nuten, d.h. in Umfangsrichtung. Für die Aufnahme solcher Kräfte ist die Klammer standardmäßig ausgelegt.Instead of a screw as a fastener other means can be used. An example shows Fig. 4 , A bracket 70 comprises a hook bolt 72 and a counter hook 84, wherein the hook bolt has a threaded portion which passes through a cylindrical channel of a counter hook. A nut 76 is engaged with the threaded portion. The hook screw engages in a groove 82 of the chamber flange 2 "arranged on a pipe section 38. The counter hook engages in a groove 84 of the pump flange 4". A collar 40 "is on the side facing away from the housing of the pump flange and associated with the suction port. By this arrangement, it protrudes into the space surrounded by the chamber flange. In the event of a fault, the collar moves through the above-mentioned forces in the radial direction 22 "and comes into contact with the chamber flange, which drastically reduces the shearing load acting on the boundaries of the grooves 82 and 84 and on hooks and hooks Act essentially only forces in the axial direction 24 "and along the grooves, ie in the circumferential direction. To accommodate such forces, the clamp is designed by default.

Claims (3)

  1. A vacuum pump (1) having a housing (6); a suction opening (5); a fast-rotating rotor (12); and a pump flange (4; 4'; 4") which can be connected to a counter-flange (2; 2'; 2") and which is provided at the housing (6), wherein a collar (40; 40'; 40") which is associated with the suction opening (5) and bounds the suction opening (5) is arranged at the side of the pump flange (4; 4'; 4") remote from the housing (6),
    characterized in that
    the pump flange (4) has a groove (50) or a step for receiving a seal (52) and has a relief groove (44) which is arranged adjacent to the collar at the outside in a radial direction.
  2. A vacuum pump in accordance with claim 1,
    characterized in that
    a damping element (60) is arranged at the side of the collar (40; 40'; 40") which is outwardly disposed in the radial direction.
  3. A vacuum pump in accordance with claim 1 or claim 2,
    characterized in that
    a conical surface (48) is adjacent to the collar (40; 40'; 40") and has a smallest diameter at its end at the collar side.
EP10008413.6A 2009-08-28 2010-08-12 Vacuum pump Active EP2290242B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910039120 DE102009039120A1 (en) 2009-08-28 2009-08-28 vacuum pump

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EP2290242A2 EP2290242A2 (en) 2011-03-02
EP2290242A3 EP2290242A3 (en) 2014-07-02
EP2290242B1 true EP2290242B1 (en) 2017-02-08

Family

ID=43216148

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10008413.6A Active EP2290242B1 (en) 2009-08-28 2010-08-12 Vacuum pump

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EP (1) EP2290242B1 (en)
DE (1) DE102009039120A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013214743A1 (en) * 2013-07-29 2015-01-29 Siemens Aktiengesellschaft Concentric milling on an exhaust steam housing
DE102014102680A1 (en) * 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh vacuum pump arrangement
DE102014103510B4 (en) * 2014-03-14 2016-02-25 Pfeiffer Vacuum Gmbh Vacuum pump damper
EP3067565B1 (en) * 2015-03-13 2020-07-22 Pfeiffer Vacuum Gmbh Vacuum pump
DE102015104438B4 (en) * 2015-03-24 2023-06-15 Pfeiffer Vacuum Gmbh vacuum system
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position
EP3617523A1 (en) * 2019-02-12 2020-03-04 Pfeiffer Vacuum Gmbh Vacuum device and vacuum system

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Publication number Priority date Publication date Assignee Title
FR2086526A5 (en) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
JP2002327698A (en) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd Vacuum pump
JP4004779B2 (en) 2001-11-16 2007-11-07 Ｂｏｃエドワーズ株式会社 Vacuum pump
FR2844016B1 (en) 2002-08-29 2004-11-19 Cit Alcatel DEVICE FOR FIXING VACUUM PUMP

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Title
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EP2290242A3 (en) 2014-07-02
DE102009039120A1 (en) 2011-03-03
EP2290242A2 (en) 2011-03-02

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