EP2290242A3 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP2290242A3 EP2290242A3 EP20100008413 EP10008413A EP2290242A3 EP 2290242 A3 EP2290242 A3 EP 2290242A3 EP 20100008413 EP20100008413 EP 20100008413 EP 10008413 A EP10008413 A EP 10008413A EP 2290242 A3 EP2290242 A3 EP 2290242A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- housing
- vacuum pump
- suction opening
- pump
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Abstract
Die Erfindung betrifft Vakuumpumpe (1) mit einem Gehäuse (6), einer Ansaugöffnung (5), einem schnell drehenden Rotor (12) und einem mit einem Gegenflansch (2; 2'; 2") verbindbaren Pumpenflansch (4; 4'; 4"), welcher am Gehäuse vorgesehen ist. Um die Sicherheit der Flanschverbindung in einem Fehlerfal zu erhöhen, wird vorgeschlagen, dass auf der dem Gehäuse abgewandten Seite des Pumpenflansches ein der Ansaugöffnung zugeordneter Kragen (40; 40'; 40") angeordnet ist. The invention relates to a vacuum pump (1) comprising a housing (6), a suction opening (5), a rapidly rotating rotor (12) and a pump flange (4, 4 ', 4') which can be connected to a counterflange (2; 2 ', 2 ") "), which is provided on the housing. In order to increase the safety of the flange connection in the event of a fault, it is proposed that a collar (40, 40 ', 40 ") assigned to the suction opening be arranged on the side of the pump flange facing away from the housing.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910039120 DE102009039120A1 (en) | 2009-08-28 | 2009-08-28 | vacuum pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2290242A2 EP2290242A2 (en) | 2011-03-02 |
EP2290242A3 true EP2290242A3 (en) | 2014-07-02 |
EP2290242B1 EP2290242B1 (en) | 2017-02-08 |
Family
ID=43216148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10008413.6A Active EP2290242B1 (en) | 2009-08-28 | 2010-08-12 | Vacuum pump |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2290242B1 (en) |
DE (1) | DE102009039120A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013214743A1 (en) * | 2013-07-29 | 2015-01-29 | Siemens Aktiengesellschaft | Concentric milling on an exhaust steam housing |
DE102014102680A1 (en) * | 2014-02-28 | 2015-09-03 | Pfeiffer Vacuum Gmbh | vacuum pump arrangement |
DE102014103510B4 (en) * | 2014-03-14 | 2016-02-25 | Pfeiffer Vacuum Gmbh | Vacuum pump damper |
EP3067565B1 (en) * | 2015-03-13 | 2020-07-22 | Pfeiffer Vacuum Gmbh | Vacuum pump |
DE102015104438B4 (en) * | 2015-03-24 | 2023-06-15 | Pfeiffer Vacuum Gmbh | vacuum system |
GB2579791B (en) * | 2018-12-13 | 2021-07-14 | Edwards Ltd | Vacuum pump with variable axial position |
EP3617523A1 (en) * | 2019-02-12 | 2020-03-04 | Pfeiffer Vacuum Gmbh | Vacuum device and vacuum system |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1297740A (en) * | 1970-04-01 | 1972-11-29 | ||
EP1041287A2 (en) * | 1999-03-31 | 2000-10-04 | Seiko Seiki Kabushiki Kaisha | Vacuum pump |
EP1258634A1 (en) * | 2001-04-27 | 2002-11-20 | BOC Edwards Technologies, Limited | Vacuum pump |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4004779B2 (en) | 2001-11-16 | 2007-11-07 | Bocエドワーズ株式会社 | Vacuum pump |
FR2844016B1 (en) | 2002-08-29 | 2004-11-19 | Cit Alcatel | DEVICE FOR FIXING VACUUM PUMP |
-
2009
- 2009-08-28 DE DE200910039120 patent/DE102009039120A1/en active Pending
-
2010
- 2010-08-12 EP EP10008413.6A patent/EP2290242B1/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1297740A (en) * | 1970-04-01 | 1972-11-29 | ||
EP1041287A2 (en) * | 1999-03-31 | 2000-10-04 | Seiko Seiki Kabushiki Kaisha | Vacuum pump |
EP1258634A1 (en) * | 2001-04-27 | 2002-11-20 | BOC Edwards Technologies, Limited | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
DE102009039120A1 (en) | 2011-03-03 |
EP2290242B1 (en) | 2017-02-08 |
EP2290242A2 (en) | 2011-03-02 |
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