EP2039941A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2039941A3
EP2039941A3 EP08016073.2A EP08016073A EP2039941A3 EP 2039941 A3 EP2039941 A3 EP 2039941A3 EP 08016073 A EP08016073 A EP 08016073A EP 2039941 A3 EP2039941 A3 EP 2039941A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
chambers
gas inlet
partition
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08016073.2A
Other languages
German (de)
French (fr)
Other versions
EP2039941B1 (en
EP2039941A2 (en
Inventor
Andreas Zipp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2039941A2 publication Critical patent/EP2039941A2/en
Publication of EP2039941A3 publication Critical patent/EP2039941A3/en
Application granted granted Critical
Publication of EP2039941B1 publication Critical patent/EP2039941B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Abstract

Die Erfindung betrifft eine Vakuumpumpe (100) mit Gaseinlass und schnelldrehendem Rotor (124), welche mit einem mit mehreren durch eine Trennwand (106) getrennten Ansaugöffnungen versehenen Flansch (118) einer Mehrkammervakuumanlage verbindbar ist. Um bei einem einfachen Aufbau in der Lage einen Druckunterschied zwischen den Kammern (102,103) aufrecht zu erhalten, wird vorgeschlagen, im Gaseinlass eine diesen in Ansaugbereiche unterteilende Gaswegtrennstruktur (127,128,129) angeordnet ist, welche derart gestaltet ist, dass sie zusammen mit der Trennwand (106) eine Abdichtung der Kammern bewirkt.

Figure imgaf001
The invention relates to a vacuum pump (100) with gas inlet and fast rotating rotor (124) which is connectable to a flange (118) of a multi - chamber vacuum system provided with a plurality of suction openings separated by a partition (106). In order to maintain a pressure difference between the chambers (102, 103) in a simple structure, it is proposed to arrange in the gas inlet a gas path separating structure (127, 128, 129) subdividing these into suction regions, which is designed such that, together with the partition wall (106 ) causes a seal of the chambers.
Figure imgaf001
EP08016073.2A 2007-09-20 2008-09-12 Vacuum pump Active EP2039941B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007044945A DE102007044945A1 (en) 2007-09-20 2007-09-20 vacuum pump

Publications (3)

Publication Number Publication Date
EP2039941A2 EP2039941A2 (en) 2009-03-25
EP2039941A3 true EP2039941A3 (en) 2016-06-01
EP2039941B1 EP2039941B1 (en) 2017-11-08

Family

ID=40019211

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08016073.2A Active EP2039941B1 (en) 2007-09-20 2008-09-12 Vacuum pump

Country Status (3)

Country Link
US (1) US8070418B2 (en)
EP (1) EP2039941B1 (en)
DE (1) DE102007044945A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5315100B2 (en) * 2009-03-18 2013-10-16 株式会社ニューフレアテクノロジー Drawing device
JP6113071B2 (en) * 2011-06-03 2017-04-12 エドワーズ株式会社 Vacuum pump
DE102014117487A1 (en) * 2014-11-28 2016-06-02 Von Ardenne Gmbh Vacuum pump assembly and vacuum chamber assembly
EP3112688B2 (en) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Split flow vacuum pump and vacuum system with a split flow vacuum pump
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
EP3693610B1 (en) * 2020-01-27 2021-12-22 Pfeiffer Vacuum Technology AG Molecular vacuum pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3713534A1 (en) * 1986-05-08 1987-11-12 Mitsubishi Electric Corp TURBO MOLECULAR PUMP
DE19901340A1 (en) * 1998-05-26 1999-12-09 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor and housing as well as device, equipped with a frictional vacuum pump of this type
GB2360066A (en) * 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
DE60002966T2 (en) * 1999-09-16 2004-02-26 The Boc Group Plc, Windlesham vacuum pumps
WO2006000745A1 (en) * 2004-06-25 2006-01-05 The Boc Group Plc Vaccum pump
EP1992822A1 (en) * 2007-05-15 2008-11-19 Agilent Technologies Inc Vacuum divider for differential pumping of a vacuum system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2337226A1 (en) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag VACUUM PUMP WITH A RUNNER MOUNTED INSIDE THEIR HOUSING
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
DE4331589C2 (en) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vacuum pumping system
DE19632375A1 (en) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gas friction pump
JP2002327698A (en) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd Vacuum pump
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3713534A1 (en) * 1986-05-08 1987-11-12 Mitsubishi Electric Corp TURBO MOLECULAR PUMP
DE19901340A1 (en) * 1998-05-26 1999-12-09 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor and housing as well as device, equipped with a frictional vacuum pump of this type
DE60002966T2 (en) * 1999-09-16 2004-02-26 The Boc Group Plc, Windlesham vacuum pumps
GB2360066A (en) * 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
WO2006000745A1 (en) * 2004-06-25 2006-01-05 The Boc Group Plc Vaccum pump
EP1992822A1 (en) * 2007-05-15 2008-11-19 Agilent Technologies Inc Vacuum divider for differential pumping of a vacuum system

Also Published As

Publication number Publication date
EP2039941B1 (en) 2017-11-08
US8070418B2 (en) 2011-12-06
EP2039941A2 (en) 2009-03-25
US20090092484A1 (en) 2009-04-09
DE102007044945A1 (en) 2009-04-09

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