EP3067565B1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP3067565B1 EP3067565B1 EP15158925.6A EP15158925A EP3067565B1 EP 3067565 B1 EP3067565 B1 EP 3067565B1 EP 15158925 A EP15158925 A EP 15158925A EP 3067565 B1 EP3067565 B1 EP 3067565B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- groove
- vacuum pump
- base element
- depression
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Description
Die vorliegende Erfindung betrifft eine Vakuumpumpe mit einem Gehäuse.The present invention relates to a vacuum pump with a housing.
Vakuumpumpen gelangen in den unterschiedlichsten Anwendungen zum Einsatz. Sie können mit den verschiedensten Geräten gekoppelt werden, um ein für einen bestimmten Prozess benötigtes Vakuum bereitzustellen. Die jeweilige An- oder Einbausituation hängt dabei maßgeblich von dem zur Verfügung stehenden Bauraum ab. Außerdem können Vakuumpumpen mit einer Vielzahl von unterschiedlichen Zubehörbauteilen versehen werden. Hierzu gehören unter anderem Lüfter, Luftleitbleche, Kühlkörper oder Komponenten einer Wasserkühlung.Vacuum pumps are used in a wide variety of applications. They can be coupled with a wide variety of devices to provide the vacuum required for a particular process. The respective mounting or installation situation depends largely on the available installation space. In addition, vacuum pumps can be equipped with a variety of different accessories. These include fans, air baffles, heat sinks or components of a water cooling system.
Zur Befestigung von Komponenten an der Vakuumpumpe oder der Vakuumpumpe an anderen Einheiten werden in das Gehäuse der Vakuumpumpe herkömmlicherweise an den jeweils erforderlichen Stellen Gewindebohrungen eingebracht. Dies ermöglicht die zuverlässige Befestigung der genannten Komponenten bzw. der Vakuumpumpe in der jeweils gewünschten Einbaulage. Allerdings müssen die Bohrungen für jeden Anwendungsfall spezifisch platziert werden.To attach components to the vacuum pump or the vacuum pump to other units, threaded holes are conventionally made in the housing of the vacuum pump at the required points. This enables the aforementioned components or the vacuum pump to be reliably attached in the desired installation position. However, the holes must be placed specifically for each application.
Die
Es ist eine Aufgabe der vorliegenden Erfindung, eine Vakuumpumpe zu schaffen, die auf einfache Weise flexibel einsetzbar ist. Mit anderen Worten soll die Vakuumpumpe auf möglichst einfache Weise an die jeweils vorliegenden Umstände anpassbar sein.It is an object of the present invention to provide a vacuum pump that can be flexibly used in a simple manner. In other words, the vacuum pump should be adaptable to the prevailing circumstances in the simplest possible way.
Diese Aufgabe wird durch eine Vakuumpumpe mit den Merkmalen des Anspruchs 1 gelöst.This object is achieved by a vacuum pump with the features of claim 1.
Erfindungsgemäß weist das Gehäuse der Vakuumpumpe zumindest eine nutartige Vertiefung auf, mit der zumindest ein Basiselement zur Befestigung von Komponenten an der Vakuumpumpe oder der Vakuumpumpe an anderen Einheiten gekoppelt ist. Zusätzlich oder alternativ ist das Gehäuse mit einem Element verbunden, das zumindest eine nutartige Verbindung aufweist, mit der das vorstehend genannte Basiselement gekoppelt ist. Das Element kann beispielsweise eine mit dem Gehäuse auf beliebige Weise verbundene Leiste sein, die mit der nutartigen Vertiefung versehen ist. Grundsätzlich können die Formgebung und Größe des Elements sowie die Anzahl und Ausgestaltung der an dem Element vorgesehenen Vertiefungen an die jeweils vorliegenden Anforderungen angepasst sein.According to the invention, the housing of the vacuum pump has at least one groove-like recess, with which at least one base element for fastening components to the vacuum pump or the vacuum pump to other units is coupled. Additionally or alternatively, the housing is connected to an element which has at least one groove-like connection to which the above-mentioned base element is coupled. The element can, for example, be a bar connected to the housing in any way and provided with the groove-like depression. In principle, the shape and size of the element and the number and configuration of the depressions provided on the element can be adapted to the respective requirements.
D.h. die jeweils erforderlichen Zubehörkomponenten werden erfindungsgemäß über das mit der Vertiefung gekoppelte Basiselement an dem Gehäuse fixiert. Analoges gilt für die Befestigung der Pumpe an anderen Einheiten. Um die Vakuumpumpe an die kundenspezifischen Bedingungen bzw. Wünsche anzupassen, muss das Gehäuse in der Regel nicht mehr oder zumindest deutlich weniger bearbeitet werden, sondern es reicht zumeist aus, das Basiselement anzupassen.I.e. the accessory components required in each case are fixed according to the invention to the housing via the base element coupled to the recess. The same applies to the attachment of the pump to other units. In order to adapt the vacuum pump to the customer-specific conditions or requirements, the housing generally does not have to be machined more or at least significantly less, but it is usually sufficient to adapt the base element.
Weitere Ausführungsformen der Erfindung sind in der Beschreibung, den Ansprüchen und den Zeichnungen angegeben.Further embodiments of the invention are specified in the description, the claims and the drawings.
Gemäß einer vorteilhaften Ausführungsform ist das Basiselement lösbar mit der nutartigen Vertiefung verbunden. Wenn die Vakuumpumpe an einem anderen Ort verbaut werden soll und/oder mit anderen Zubehörkomponenten verbunden werden soll, so müssen keine zusätzlichen Befestigungspunkte direkt am Gehäuse der Pumpe geschaffen werden, da das Basiselement schnell und einfach ausgetauscht werden kann.According to an advantageous embodiment, the base element is detachably connected to the groove-like depression. If the vacuum pump is to be installed at another location and / or is to be connected to other accessory components, no additional fastening points have to be created directly on the housing of the pump, since the base element can be replaced quickly and easily.
Insbesondere ist das Basiselement in die nutartige Vertiefung einschiebbar. Zu diesem Zweck kann die nutartige Vertiefung einseitig offen sein. Es versteht sich, dass die einseitige Öffnung der nutartigen Vertiefung bei Bedarf mit einer Kappe oder ähnlichem geschlossen werden kann.In particular, the base element can be inserted into the groove-like recess. For this purpose, the groove-like depression can be open on one side. It is understood that the one-sided opening of the groove-like depression can be closed with a cap or the like if necessary.
Es ist auch möglich, das Basiselement so auszugestalten, dass es in die nutartige Vertiefung einklipsbar ist. Insbesondere für eine Vormontage ist eine solche Ausgestaltung vorteilhaft, da sie eine einfache und schnelle Kopplung des Basiselements mit der nutartigen Vertiefung ermöglicht.It is also possible to design the base element such that it can be clipped into the groove-like recess. Such a configuration is particularly advantageous for pre-assembly, since it enables simple and quick coupling of the base element to the groove-like recess.
Die nutartige Vertiefung erstreckt sich zumindest abschnittsweise, insbesondere vollständig parallel zu einer Längsachse des Gehäuses. Die nutartige Vertiefung (oder eine zusätzliche nutartige Vertiefung) kann sich auch zumindest abschnittsweise, insbesondere vollständig in Umfangsrichtung des Gehäuses erstrecken. Grundsätzlich können der Verlauf und die Anordnung der Nut so gewählt werden, dass eine höchstmögliche Flexibilität hinsichtlich der Bereitstellung von Befestigungspunkten erreicht wird. Gleiches gilt für die Anzahl von an dem Gehäuse vorgesehenen nutartigen Vertiefungen.The groove-like depression extends at least in sections, in particular completely parallel to a longitudinal axis of the housing. The groove-like depression (or an additional groove-like depression) can also extend at least in sections, in particular completely, in the circumferential direction of the housing. In principle, the course and the arrangement of the groove can be selected so that the greatest possible flexibility with regard to the provision of fastening points is achieved. The same applies to the number of groove-like depressions provided on the housing.
Das Basiselement kann im Wesentlichen vollständig von der nutartigen Vertiefung aufgenommen werden, so dass das Basiselement keine aus dem Gehäuse hervorstehende Kontur bildet, die eventuell störend ist.The base element can essentially be completely accommodated by the groove-like depression, so that the base element does not form a contour which protrudes from the housing and which may be disruptive.
Alternativ kann aber auch bewusst vorgesehen sein, dass das Basiselement eine Anlagefläche aufweist oder bildet, die von der Oberfläche des Gehäuses beabstandet ist. Das Basiselement dient in diesem Fall - neben seiner Funktion als flexibel konfigurierbare Komponente des Befestigungskonzepts - als Abstandshalter, so dass das Gehäuse der Pumpe vor Oberflächenbeschädigungen (z.B. Kratzer) geschützt wird.Alternatively, however, it can also be deliberately provided that the base element has or forms a contact surface that is spaced from the surface of the housing. In this case, the basic element - in addition to its function as a flexibly configurable component of the fastening concept - serves as a spacer, so that the housing of the pump is protected from surface damage (eg scratches).
Erfindungsgemäß weist die nutartige Vertiefung einen Hinterschnitt auf, der mit zumindest einer Ausbuchtung oder einem Vorsprung des Basiselements zusammenwirkt. Insbesondere ist die nutartige Vertiefung in einem Querschnitt senkrecht zu der Längserstreckung T-förmig ausgebildet.According to the invention, the groove-like recess has an undercut which interacts with at least one bulge or a projection of the base element. In particular, the groove-like recess is T-shaped in a cross section perpendicular to the longitudinal extent.
Das Basiselement kann im Wesentlichen die gleiche Länge wie die nutartige Vertiefung aufweisen, so dass es diese zumindest in Längsrichtung praktisch vollständig ausfüllt. Grundsätzlich ist es aber natürlich auch möglich, ein kürzeres Basiselement zu verwenden. In diesem Fall können auch mehrere Basiselemente verwendet werden, um die benötigte Anzahl von Befestigungspunkten bereit zu stellen.The base element can have essentially the same length as the groove-like depression, so that it practically completely fills it at least in the longitudinal direction. In principle, however, it is of course also possible to use a shorter base element. In this case, several basic elements can also be used to provide the required number of fastening points.
Das Basiselement kann in der nutartigen Vertiefung frei verschiebbar sein und erst bei der Montage in ihrer vorgesehenen Lage fixiert werden, beispielsweise durch einen Kraftschluss.The base element can be freely displaceable in the groove-like depression and can only be fixed in its intended position during assembly, for example by a force fit.
Um das Eindringen von Verschmutzungen in die nutartige Vertiefung zu verhindern und der Vakuumpumpe auch eine optisch ansprechende Prägung zu geben, kann das Basiselement ein Abdeckprofil umfassen, das die nutartige Vertiefung im Wesentlichen abdeckt und/oder verschließt.In order to prevent dirt from penetrating into the groove-like depression and to give the vacuum pump an optically appealing embossing, the base element can comprise a cover profile which essentially covers and / or closes the groove-like depression.
Gemäß einer Ausführungsform weist das Basiselement zumindest eine Gewindebohrung auf, mit Hilfe derer die Vakuumpumpe an anderen Einheiten befestigbar ist und/oder Komponenten an der Vakuumpumpe befestigt werden können. Das Basiselement kann auch eine Ausnehmung aufweisen, die sich entlang deren Längserstreckung erstreckt. Beispielsweise ist das Basiselement eine Schraubleiste, in die an beliebigen Stellen eine Schraube einschraubbar ist.According to one embodiment, the base element has at least one threaded bore, with the aid of which the vacuum pump can be attached to other units and / or components can be attached to the vacuum pump. The base element can also have a recess which extends along its longitudinal extent. For example, the base element is a screw strip into which a screw can be screwed in at any point.
Das Gehäuse ist gemäß einer vorteilhaften Ausführungsform zumindest teilweise durch einen Strangpressprozess geformt, wobei die nutartige Vertiefung bereits im Zuge dieses Prozesses in das Gehäuse eingebracht wird. Grundsätzlich ist es auch möglich, die nutartige Vertiefung durch einen spanenden Prozess in das Gehäuse einzubringen und/oder anzupassen.According to an advantageous embodiment, the housing is at least partially shaped by an extrusion process, the groove-like depression already being in the Is brought into the housing during this process. In principle, it is also possible to introduce and / or adapt the groove-like depression in the housing by means of a machining process.
Neben ihrer Funktion als Bestandteil des Befestigungskonzepts kann die nutartige Vertiefung auch andere vorteilhafte Funktionen bereitstellen. Beispielsweise kann sie als Kabelkanal dienen.In addition to its function as a component of the fastening concept, the groove-like recess can also provide other advantageous functions. For example, it can serve as a cable duct.
Nachfolgend wird die vorliegende Erfindung rein beispielhaft anhand vorteilhafter Ausführungsformen unter Bezugnahme auf die beigefügten Zeichnungen erläutert. Es zeigen:
- Fig. 1
- eine Ausführungsform der erfindungsgemäßen Vakuumpumpe und
- Fig. 2 bis 5
- verschiedene Ausführungsformen des Basiselements.
- Fig. 1
- an embodiment of the vacuum pump according to the invention and
- 2 to 5
- different embodiments of the base element.
Der Gehäuseendabschnitt 18 weist ebenfalls eine Nut 14' auf, in die bei Bedarf ein Basiselement in der Art der Basiselemente 22a, 22b, 22c, 22d eingesteckt bzw. eingeschoben werden kann.The
Es versteht sich, dass die Anordnung und/oder Ausgestaltung der Nuten 14, 14' so gewählt werden kann, dass im Wesentlichen alle vernünftigerweise zu erwartenden/benötigten Konfigurationen von Befestigungspunkten bereitgestellt werden können.It goes without saying that the arrangement and / or configuration of the
Der Gehäusegrundkörper 16 des Gehäuses 12 ist bei dem Ausführungsbeispiel durch einen Strangpressprozess hergestellt worden. Bei diesem Herstellungsprozess können die Nuten 14 gleich direkt in das Halbzeug eingebracht werden. Die Nut 14' des Gehäuseendabschnitts 18 des Gehäuses 12 kann beispielsweise durch einen spanenden Prozess erzeugt worden sein.The
Das Basiselement 22a dient aber insbesondere dazu, kunden- oder anwendungsspezifische Befestigungspunkte bereitzustellen. Zu diesem Zweck werden an den gewünschten Stellen in den Deckabschnitt 28 des Basiselements 22a Bohrungen (nicht gezeigt) eingebracht, in die Befestigungsschrauben (nicht gezeigt) geschraubt werden können. Die Befestigungsschrauben wirken bei ihrer Montage mit von den Schenkeln 30 nach innen ragenden und geneigt zu diesen angeordneten Spreizabschnitten 32 zusammen. Die Spreizabschnitte 32 bewirken, dass die eingeschraubten Befestigungsschrauben die Schenkel 32 auseinanderdrücken, wodurch die Ausbuchtungen 26 noch effizienter mit den Hinterschnitte bildenden Vorsprüngen 24 zusammenwirken, um das Basiselement 22a zuverlässig mit dem Gehäuse 12 zu koppeln.The
Die Bohrung in dem Deckabschnitt 28 können in beliebiger Position vor oder nach dem Einbringen des Basiselements 22a in die Nut 14 eingebohrt werden. Das Einbringen des Basiselements 22a in die Nut 14 kann durch seitliches Einschieben oder - bei entsprechender Elastizität des Basiselements 22a - durch Einklipsen realisiert werden.The bore in the
Abweichend von der in
Im Gegensatz dazu sind bei der in
Anstelle eines durchgehenden leistenförmigen Basiselements 22c, das im Wesentlichen die volle Länge der Nut 14 ausfüllt, können auch einzelne Nutensteine 22d vorgesehen sein (siehe
Das erfindungsgemäße Befestigungskonzept, das auf einer Kopplung eines kostengünstig herzustellenden Basiselements und einer in das Gehäuse der Vakuumpumpe eingebrachten nutartigen Vertiefung beruht, ermöglicht eine sehr flexible Bereitstellung von Befestigungspunkten, ohne dass Abstriche bei der Zuverlässigkeit der Befestigung gemacht werden müssen.The fastening concept according to the invention, which is based on a coupling of an inexpensive base element and a groove-like depression made in the housing of the vacuum pump, enables fastening points to be provided very flexibly without having to compromise on the reliability of the fastening.
- 1010th
- VakuumpumpeVacuum pump
- 1212th
- Gehäusecasing
- 14, 14'14, 14 '
- NutGroove
- 1616
- GehäusegrundkörperBasic body
- 1818th
- GehäuseendabschnittHousing end section
- 2020
- Deckelcover
- 22a, 22b, 22c, 22d22a, 22b, 22c, 22d
- BasiselementBasic element
- 24, 24'24, 24 '
- Vorsprunghead Start
- 2626
- Ausbuchtungbulge
- 2828
- DeckabschnittDeck section
- 3030th
- Schenkelleg
- 3232
- SpreizabschnittSpreading section
- 3434
- GewindebohrungTapped hole
Claims (13)
- A vacuum pump comprising a housing (12) which has at least one groove-like depression (14, 14') and/or which is connected to an element which has at least one groove-like depression, wherein at least one base element (22a, 22b, 22c, 22d) for fastening components to the vacuum pump or for fastening the vacuum pump to other units is coupled to the groove-like depression,
characterized in that
the groove-like depression (14) extends at least sectionally, in particular completely, in parallel with a longitudinal axis of the housing (12) and has an undercut (24) which cooperates with at least one bulge (26, 24') or a projection of the base element (22a, 22b). - A vacuum pump in accordance with claim 1,
characterized in that
the base element (22a, 22b, 22c, 22d) is releasably connected to the groove-like depression (14, 14'). - A vacuum pump in accordance with claim 1 or claim 2,
characterized in that
the base element (22a, 22b, 22c, 22d) can be inserted into the groove-like depression (14, 14') which is in particular open at at least one side. - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the base element (22a, 22b) can be clipped into the groove-like depression (14, 14'). - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the base element (22a, 22b, 22c, 22d) is substantially completely received by the groove-like depression (14, 14'). - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the groove-like depression (14') extends at least sectionally, in particular completely, in the peripheral direction of the housing (12). - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the base element (22a) has a contact surface (28) which is spaced apart from the surface of the housing. - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the groove-like depression (14, 14') is T-shaped in a cross-section perpendicular to its longitudinal extent. - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the base element (22a, 22b, 22c) has substantially the same length as the groove-like depression (14, 14'). - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the base element (22a, 22c) comprises a cover section which substantially covers and/or closes the groove-like depression (14, 14'). - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the base element (22c, 22d) comprises at least one threaded bore (34). - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the base element (22b) has a recess which extends along its longitudinal extent. - A vacuum pump in accordance with at least one of the preceding claims,
characterized in that
the housing (12) is at least partly formed by an extrusion process, with the groove-like depression (14, 14') having been introduced into the housing (12) in the course of this process.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15158925.6A EP3067565B1 (en) | 2015-03-13 | 2015-03-13 | Vacuum pump |
JP2016039623A JP6195638B2 (en) | 2015-03-13 | 2016-03-02 | Vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15158925.6A EP3067565B1 (en) | 2015-03-13 | 2015-03-13 | Vacuum pump |
Publications (2)
Publication Number | Publication Date |
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EP3067565A1 EP3067565A1 (en) | 2016-09-14 |
EP3067565B1 true EP3067565B1 (en) | 2020-07-22 |
Family
ID=52648934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP15158925.6A Active EP3067565B1 (en) | 2015-03-13 | 2015-03-13 | Vacuum pump |
Country Status (2)
Country | Link |
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EP (1) | EP3067565B1 (en) |
JP (1) | JP6195638B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3564538B1 (en) * | 2019-02-20 | 2021-04-07 | Pfeiffer Vacuum Gmbh | Vacuum system and method for manufacturing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2789889A1 (en) * | 2013-04-11 | 2014-10-15 | Pfeiffer Vacuum GmbH | Vacuum system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6182013A (en) * | 1984-09-28 | 1986-04-25 | 株式会社日立製作所 | Pawl clamp for clamping flange |
JPS63111631U (en) * | 1987-01-12 | 1988-07-18 | ||
US20050029417A1 (en) * | 2003-08-08 | 2005-02-10 | Richard Scheps | Mounting bracket for a rotary pump |
DE102005020904A1 (en) * | 2005-05-07 | 2006-11-09 | Leybold Vacuum Gmbh | Vacuum pump assembly |
EP2017480A1 (en) * | 2007-06-15 | 2009-01-21 | VARIAN S.p.A. | Split joint for vacuum pumps and method for obtaining said joint |
DE102008028199A1 (en) * | 2008-06-12 | 2009-12-17 | Pfeiffer Vacuum Gmbh | connecting element |
DE102009039120A1 (en) * | 2009-08-28 | 2011-03-03 | Pfeiffer Vacuum Gmbh | vacuum pump |
-
2015
- 2015-03-13 EP EP15158925.6A patent/EP3067565B1/en active Active
-
2016
- 2016-03-02 JP JP2016039623A patent/JP6195638B2/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2789889A1 (en) * | 2013-04-11 | 2014-10-15 | Pfeiffer Vacuum GmbH | Vacuum system |
Also Published As
Publication number | Publication date |
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JP2016169732A (en) | 2016-09-23 |
EP3067565A1 (en) | 2016-09-14 |
JP6195638B2 (en) | 2017-09-13 |
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