EP3067565B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3067565B1
EP3067565B1 EP15158925.6A EP15158925A EP3067565B1 EP 3067565 B1 EP3067565 B1 EP 3067565B1 EP 15158925 A EP15158925 A EP 15158925A EP 3067565 B1 EP3067565 B1 EP 3067565B1
Authority
EP
European Patent Office
Prior art keywords
groove
vacuum pump
base element
depression
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15158925.6A
Other languages
German (de)
English (en)
Other versions
EP3067565A1 (fr
Inventor
Mirko Mekota
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15158925.6A priority Critical patent/EP3067565B1/fr
Priority to JP2016039623A priority patent/JP6195638B2/ja
Publication of EP3067565A1 publication Critical patent/EP3067565A1/fr
Application granted granted Critical
Publication of EP3067565B1 publication Critical patent/EP3067565B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (13)

  1. Pompe à vide comportant un boîtier (12) pourvu d'au moins une cavité (14, 14') en forme de gorge et/ou relié à un élément présentant au moins une cavité en forme de gorge,
    au moins un élément de base (22a, 22b, 22c, 22d) destiné à fixer des composants sur la pompe à vide ou à fixer la pompe à vide sur d'autres unités étant couplé à la cavité en forme de gorge,
    caractérisée en ce que
    la cavité (14) en forme de gorge s'étend au moins localement, en particulier complètement parallèlement à un axe longitudinal du boîtier (12) et présente une contre-dépouille (24) qui coopère avec au moins un renflement (26, 24') ou avec une saillie de l'élément de base (22a, 22b).
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    l'élément de base (22a, 22b, 22c, 22d) est relié de manière amovible à la cavité (14, 14') en forme de gorge.
  3. Pompe à vide selon la revendication 1 ou 2,
    caractérisée en ce que
    l'élément de base (22a, 22b, 22c, 22d) peut être poussé dans la cavité (14, 14') en forme de gorge qui est ouverte en particulier sur au moins un côté.
  4. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    l'élément de base (22a, 22b) peut être clipsé dans la cavité (14, 14') en forme de gorge.
  5. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    l'élément de base (22a, 22b, 22c, 22d) est reçu sensiblement complètement par la cavité (14, 14') en forme de gorge.
  6. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la cavité (14') en forme de gorge s'étend au moins localement, en particulier complètement en direction périphérique du boîtier (12).
  7. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    l'élément de base (22a) comprend une surface d'appui (28) qui est espacée de la surface du boîtier.
  8. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la cavité (14, 14') en forme de gorge est réalisée en forme de T en section transversale perpendiculaire à son extension longitudinale.
  9. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    l'élément de base (22a, 22b, 22c) présente sensiblement la même longueur que la cavité (14, 14') en forme de gorge.
  10. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    l'élément de base (22a, 22c) comprend un profilé de couverture qui recouvre et/ou referme sensiblement la cavité (14, 14') en forme de gorge.
  11. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    l'élément de base (22c, 22d) présente au moins un perçage taraudé (34).
  12. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    l'élément de base (22b) présente un évidement qui s'étend le long de son extension longitudinale.
  13. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le boîtier (12) est formé au moins partiellement par un processus d'extrusion, la cavité (14, 14') en forme de gorge ayant état ménagée dans le boîtier (12) au cours dudit processus.
EP15158925.6A 2015-03-13 2015-03-13 Pompe à vide Active EP3067565B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15158925.6A EP3067565B1 (fr) 2015-03-13 2015-03-13 Pompe à vide
JP2016039623A JP6195638B2 (ja) 2015-03-13 2016-03-02 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15158925.6A EP3067565B1 (fr) 2015-03-13 2015-03-13 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3067565A1 EP3067565A1 (fr) 2016-09-14
EP3067565B1 true EP3067565B1 (fr) 2020-07-22

Family

ID=52648934

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15158925.6A Active EP3067565B1 (fr) 2015-03-13 2015-03-13 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3067565B1 (fr)
JP (1) JP6195638B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3564538B1 (fr) * 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Système à vide et procédé de fabrication d'un tel système à vide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2789889A1 (fr) * 2013-04-11 2014-10-15 Pfeiffer Vacuum GmbH Système à vide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182013A (ja) * 1984-09-28 1986-04-25 株式会社日立製作所 フランジ締付用爪付クランプ
JPS63111631U (fr) * 1987-01-12 1988-07-18
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
EP2017480A1 (fr) * 2007-06-15 2009-01-21 VARIAN S.p.A. Joint divisé pour pompes sous vide et procédé d'obtention d'un tel joint
DE102008028199A1 (de) * 2008-06-12 2009-12-17 Pfeiffer Vacuum Gmbh Verbindungselement
DE102009039120A1 (de) * 2009-08-28 2011-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2789889A1 (fr) * 2013-04-11 2014-10-15 Pfeiffer Vacuum GmbH Système à vide

Also Published As

Publication number Publication date
EP3067565A1 (fr) 2016-09-14
JP2016169732A (ja) 2016-09-23
JP6195638B2 (ja) 2017-09-13

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