EP2290242A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2290242A3
EP2290242A3 EP20100008413 EP10008413A EP2290242A3 EP 2290242 A3 EP2290242 A3 EP 2290242A3 EP 20100008413 EP20100008413 EP 20100008413 EP 10008413 A EP10008413 A EP 10008413A EP 2290242 A3 EP2290242 A3 EP 2290242A3
Authority
EP
European Patent Office
Prior art keywords
housing
vacuum pump
suction opening
pump
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20100008413
Other languages
German (de)
English (en)
Other versions
EP2290242A2 (fr
EP2290242B1 (fr
Inventor
Robert Watz
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2290242A2 publication Critical patent/EP2290242A2/fr
Publication of EP2290242A3 publication Critical patent/EP2290242A3/fr
Application granted granted Critical
Publication of EP2290242B1 publication Critical patent/EP2290242B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
EP10008413.6A 2009-08-28 2010-08-12 Pompe à vide Active EP2290242B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910039120 DE102009039120A1 (de) 2009-08-28 2009-08-28 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2290242A2 EP2290242A2 (fr) 2011-03-02
EP2290242A3 true EP2290242A3 (fr) 2014-07-02
EP2290242B1 EP2290242B1 (fr) 2017-02-08

Family

ID=43216148

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10008413.6A Active EP2290242B1 (fr) 2009-08-28 2010-08-12 Pompe à vide

Country Status (2)

Country Link
EP (1) EP2290242B1 (fr)
DE (1) DE102009039120A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013214743A1 (de) * 2013-07-29 2015-01-29 Siemens Aktiengesellschaft Konzentrische Einfräsung an einem Abdampfgehäuse
DE102014102680A1 (de) * 2014-02-28 2015-09-03 Pfeiffer Vacuum Gmbh Vakuumpumpenanordnung
DE102014103510B4 (de) * 2014-03-14 2016-02-25 Pfeiffer Vacuum Gmbh Vakuumpumpen-Dämpfer
EP3067565B1 (fr) * 2015-03-13 2020-07-22 Pfeiffer Vacuum Gmbh Pompe à vide
DE102015104438B4 (de) * 2015-03-24 2023-06-15 Pfeiffer Vacuum Gmbh Vakuumsystem
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position
EP3617523A1 (fr) * 2019-02-12 2020-03-04 Pfeiffer Vacuum Gmbh Appareil à vide et système à vide

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1297740A (fr) * 1970-04-01 1972-11-29
EP1041287A2 (fr) * 1999-03-31 2000-10-04 Seiko Seiki Kabushiki Kaisha Pompe à vide
EP1258634A1 (fr) * 2001-04-27 2002-11-20 BOC Edwards Technologies, Limited Pompe à vide

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4004779B2 (ja) 2001-11-16 2007-11-07 Ｂｏｃエドワーズ株式会社 真空ポンプ
FR2844016B1 (fr) 2002-08-29 2004-11-19 Cit Alcatel Dispositif de fixation de pompe a vide

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1297740A (fr) * 1970-04-01 1972-11-29
EP1041287A2 (fr) * 1999-03-31 2000-10-04 Seiko Seiki Kabushiki Kaisha Pompe à vide
EP1258634A1 (fr) * 2001-04-27 2002-11-20 BOC Edwards Technologies, Limited Pompe à vide

Also Published As

Publication number Publication date
EP2290242A2 (fr) 2011-03-02
EP2290242B1 (fr) 2017-02-08
DE102009039120A1 (de) 2011-03-03

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