EP1936200A3 - Pompe à vide à palettes étanchéifiée à l'aide de lubrifiants - Google Patents

Pompe à vide à palettes étanchéifiée à l'aide de lubrifiants Download PDF

Info

Publication number
EP1936200A3
EP1936200A3 EP07022562A EP07022562A EP1936200A3 EP 1936200 A3 EP1936200 A3 EP 1936200A3 EP 07022562 A EP07022562 A EP 07022562A EP 07022562 A EP07022562 A EP 07022562A EP 1936200 A3 EP1936200 A3 EP 1936200A3
Authority
EP
European Patent Office
Prior art keywords
lubricant
pump
vacuum pump
sealed rotary
safety valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07022562A
Other languages
German (de)
English (en)
Other versions
EP1936200B1 (fr
EP1936200A2 (fr
Inventor
Jürgen Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=39217919&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1936200(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1936200A2 publication Critical patent/EP1936200A2/fr
Publication of EP1936200A3 publication Critical patent/EP1936200A3/fr
Application granted granted Critical
Publication of EP1936200B1 publication Critical patent/EP1936200B1/fr
Revoked legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
EP07022562A 2006-12-13 2007-11-21 Pompe à vide à palettes étanchéifiée à l'aide de lubrifiants Revoked EP1936200B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006058837.1A DE102006058837C5 (de) 2006-12-13 2006-12-13 Schmiermittelgedichtete Drehschiebervakuumpumpe

Publications (3)

Publication Number Publication Date
EP1936200A2 EP1936200A2 (fr) 2008-06-25
EP1936200A3 true EP1936200A3 (fr) 2009-12-16
EP1936200B1 EP1936200B1 (fr) 2012-09-12

Family

ID=39217919

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07022562A Revoked EP1936200B1 (fr) 2006-12-13 2007-11-21 Pompe à vide à palettes étanchéifiée à l'aide de lubrifiants

Country Status (4)

Country Link
US (1) US7854601B2 (fr)
EP (1) EP1936200B1 (fr)
JP (1) JP5106077B2 (fr)
DE (1) DE102006058837C5 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101100828B1 (ko) * 2010-01-14 2012-01-02 주식회사 프로텍 리니어 펌프
CN102725532B (zh) * 2010-01-29 2015-09-23 Ulvac机工株式会社 泵
US20140363319A1 (en) * 2013-06-07 2014-12-11 Agilent Technologies, Inc Rotary vane vacuum pump
DE102014208775A1 (de) * 2014-05-09 2015-11-12 Magna Powertrain Bad Homburg GmbH Gasflügelpumpe und Verfahren zum Betrieb der Gasflügelpumpe
WO2015197138A1 (fr) * 2014-06-27 2015-12-30 Ateliers Busch Sa Méthode de pompage dans un système de pompes à vide et système de pompes à vide
DE102014109383B4 (de) * 2014-07-04 2022-03-24 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3156653B1 (fr) * 2015-10-15 2020-07-29 Pfeiffer Vacuum Gmbh Pompe à vide volumétrique tournante
CN105889071B (zh) * 2016-04-15 2018-04-17 浙江飞越机电有限公司 采用屏蔽电机的旋片式真空泵

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3825690A1 (de) * 1987-08-10 1989-02-23 Hitachi Ltd Oelzufuehrungsvorrichtung fuer einen spiralkompressor
US4968223A (en) * 1988-02-04 1990-11-06 Empresa Brasiliera de Compressores Gas and oil cooling system for a hermetic compressor
US5232355A (en) * 1991-05-17 1993-08-03 Mitsubishi Denki K.K. Scroll-type fluid apparatus having a labyrinth and oil seals surrounding a scroll shaft
DE4443387C1 (de) * 1994-12-06 1996-01-18 Saskia Hochvakuum Und Labortec Zweistufige mechanische Vakuumpumpanordnung
DE102004024554A1 (de) * 2004-05-18 2005-12-15 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1303430A (fr) 1969-06-12 1973-01-17
US3838950A (en) * 1970-06-18 1974-10-01 Cenco Inc Vacuum pump with lubricant metering groove
US4276005A (en) * 1979-04-26 1981-06-30 Varian Associates, Inc. Oil flow metering structure for oil sealed mechanical vacuum vane pump
DE3150033A1 (de) * 1981-12-17 1983-07-14 Leybold-Heraeus GmbH, 5000 Köln Vakuumpumpe mit einem saugstutzen-ventil und betriebsverfahren dafuer
JPS6090998A (ja) * 1983-10-24 1985-05-22 Shinko Seiki Kk 多段油回転真空ポンプ
DE3710869A1 (de) * 1987-04-01 1988-10-20 Bosch Gmbh Robert Antiblockierregelsystem
GB9223806D0 (en) * 1992-11-13 1993-01-06 Boc Group Plc Improvements in vacuum pumps
JPH06159279A (ja) * 1992-11-27 1994-06-07 Shimadzu Corp 真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3825690A1 (de) * 1987-08-10 1989-02-23 Hitachi Ltd Oelzufuehrungsvorrichtung fuer einen spiralkompressor
US4968223A (en) * 1988-02-04 1990-11-06 Empresa Brasiliera de Compressores Gas and oil cooling system for a hermetic compressor
US5232355A (en) * 1991-05-17 1993-08-03 Mitsubishi Denki K.K. Scroll-type fluid apparatus having a labyrinth and oil seals surrounding a scroll shaft
DE4443387C1 (de) * 1994-12-06 1996-01-18 Saskia Hochvakuum Und Labortec Zweistufige mechanische Vakuumpumpanordnung
DE102004024554A1 (de) * 2004-05-18 2005-12-15 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe

Also Published As

Publication number Publication date
US20080145209A1 (en) 2008-06-19
DE102006058837A1 (de) 2008-06-19
JP5106077B2 (ja) 2012-12-26
JP2008151127A (ja) 2008-07-03
EP1936200B1 (fr) 2012-09-12
DE102006058837B4 (de) 2020-03-05
EP1936200A2 (fr) 2008-06-25
DE102006058837C5 (de) 2022-05-05
US7854601B2 (en) 2010-12-21

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