JP5106077B2 - 潤滑剤シール式回転翼形油回転真空ポンプ - Google Patents
潤滑剤シール式回転翼形油回転真空ポンプ Download PDFInfo
- Publication number
- JP5106077B2 JP5106077B2 JP2007320604A JP2007320604A JP5106077B2 JP 5106077 B2 JP5106077 B2 JP 5106077B2 JP 2007320604 A JP2007320604 A JP 2007320604A JP 2007320604 A JP2007320604 A JP 2007320604A JP 5106077 B2 JP5106077 B2 JP 5106077B2
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- Prior art keywords
- lubricant
- pump
- vacuum pump
- rotary vacuum
- shaft
- Prior art date
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- 239000000314 lubricant Substances 0.000 claims description 98
- 238000009434 installation Methods 0.000 claims description 8
- 239000003921 oil Substances 0.000 description 8
- 230000008901 benefit Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
- F04C11/001—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
- F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
- F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/06—Silencing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Description
潤滑剤ポンプの出口および安全弁の間において油圧配管から分岐された配管は、加圧された潤滑剤が潤滑剤タンク内に流入することを可能にする。流入するこの潤滑剤は、潤滑剤が潤滑剤タンク内に静止することなく運動するという結果をもたらす。特に、この運動により、ポンプ段ハウジングに接触した潤滑剤がこのポンプ段ハウジングから離れるように供給され、および潤滑剤タンクを包囲するポンプ・ハウジングに到達するという結果が得られる。ここで、ポンプ・ハウジングは、ポンプ段ハウジングにおいて受け取られた熱を再び排出することができる。このようにして、潤滑剤の過熱が阻止される。
安全弁は一般にモータの近くに配置されているので、本発明の第1の変更態様により、モータおよびポンプ段の間の軸上に潤滑剤ポンプを配置することは、油圧配管の長さを短縮させる。
以下の図において同じ符号は同じ部品を示す。
2 ガス出口
3 安全弁
4 ガス配管
5 分離要素
6 制御電子装置
7 コイル
8 永久磁石
9 設置面
10 ポンプ段ハウジング
11、12、24 吸込室
13、14、23 翼板
15 軸
16 連絡配管
17、18 ポンプ段
21 入口
22 出口
30 潤滑剤タンク
31 油圧配管
32 配管
32a 水平配管部分
33 配管流出口
34 潤滑剤流動抵抗
35、36 滑り軸受
40 ポンプ・ハウジング
Claims (6)
- モータと、ポンプ段ハウジング(10)を有する少なくとも1つのポンプ段(17、18)と、安全弁(3)と、入口(21)および出口(22)を有する潤滑剤ポンプと、ポンプ段ハウジングを少なくとも一部包囲する潤滑剤タンク(30)と、および油圧配管(31)とを備え、この場合、油圧配管内を通して供給された潤滑剤が安全弁を開放させる、潤滑剤シール式回転翼形油回転真空ポンプにおいて、
潤滑剤ポンプの出口および安全弁の間において、油圧配管から、加圧された潤滑剤がその中を通って潤滑剤タンク内に流入する配管(32)が分岐していることを特徴とする潤滑剤シール式回転翼形油回転真空ポンプ。 - モータおよびポンプ段(17、18)が1個または複数個の軸(15)により貫通され、および潤滑剤ポンプがモータおよびポンプ段の間の軸上に配置されていることを特徴とする請求項1の回転翼形油回転真空ポンプ。
- 潤滑剤ポンプおよびポンプ段(17、18)の間に潤滑剤流動抵抗(34)が配置されていることを特徴とする請求項1または2の回転翼形油回転真空ポンプ。
- 潤滑剤ポンプおよびポンプ段(17、18)の間に軸(15)を支持するための滑り軸受(35)が配置されていることを特徴とする請求項3の回転翼形油回転真空ポンプ。
- 潤滑剤ポンプの出口(22)が、軸(15)の、回転翼形油回転真空ポンプ設置面(9)に向く側に位置することを特徴とする請求項1ないし4のいずれかの回転翼形油回転真空ポンプ。
- 配管が、回転翼形油回転真空ポンプの軸中心線および設置面(9)の間の高さにおいて潤滑剤タンク(30)内に入り込むことを特徴とする請求項1ないし5のいずれかの回転翼形油回転真空ポンプ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006058837.1A DE102006058837C5 (de) | 2006-12-13 | 2006-12-13 | Schmiermittelgedichtete Drehschiebervakuumpumpe |
DE102006058837.1 | 2006-12-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008151127A JP2008151127A (ja) | 2008-07-03 |
JP5106077B2 true JP5106077B2 (ja) | 2012-12-26 |
Family
ID=39217919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007320604A Active JP5106077B2 (ja) | 2006-12-13 | 2007-12-12 | 潤滑剤シール式回転翼形油回転真空ポンプ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7854601B2 (ja) |
EP (1) | EP1936200B1 (ja) |
JP (1) | JP5106077B2 (ja) |
DE (1) | DE102006058837C5 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101100828B1 (ko) * | 2010-01-14 | 2012-01-02 | 주식회사 프로텍 | 리니어 펌프 |
WO2011092930A1 (ja) * | 2010-01-29 | 2011-08-04 | アルバック機工株式会社 | ポンプ |
US20140363319A1 (en) * | 2013-06-07 | 2014-12-11 | Agilent Technologies, Inc | Rotary vane vacuum pump |
DE102014208775A1 (de) * | 2014-05-09 | 2015-11-12 | Magna Powertrain Bad Homburg GmbH | Gasflügelpumpe und Verfahren zum Betrieb der Gasflügelpumpe |
ES2774438T3 (es) * | 2014-06-27 | 2020-07-21 | Ateliers Busch S A | Método de bombeo en un sistema de bombas de vacío y sistema de bombas de vacío |
DE102014109383B4 (de) * | 2014-07-04 | 2022-03-24 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP3156653B1 (de) * | 2015-10-15 | 2020-07-29 | Pfeiffer Vacuum Gmbh | Rotationsverdrängervakuumpumpe |
CN105889071B (zh) * | 2016-04-15 | 2018-04-17 | 浙江飞越机电有限公司 | 采用屏蔽电机的旋片式真空泵 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1303430A (ja) | 1969-06-12 | 1973-01-17 | ||
US3838950A (en) * | 1970-06-18 | 1974-10-01 | Cenco Inc | Vacuum pump with lubricant metering groove |
US4276005A (en) * | 1979-04-26 | 1981-06-30 | Varian Associates, Inc. | Oil flow metering structure for oil sealed mechanical vacuum vane pump |
DE3150033A1 (de) * | 1981-12-17 | 1983-07-14 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumpumpe mit einem saugstutzen-ventil und betriebsverfahren dafuer |
JPS6090998A (ja) * | 1983-10-24 | 1985-05-22 | Shinko Seiki Kk | 多段油回転真空ポンプ |
DE3710869A1 (de) * | 1987-04-01 | 1988-10-20 | Bosch Gmbh Robert | Antiblockierregelsystem |
KR910001824B1 (ko) * | 1987-08-10 | 1991-03-26 | 가부시기가이샤 히다찌세이사꾸쇼 | 스크롤 압축기의 급유장치 |
BR8800512A (pt) * | 1988-02-04 | 1989-09-12 | Brasil Compressores Sa | Sistema de resfriamento de gas e oleo de um compressor hermetico |
US5232355A (en) * | 1991-05-17 | 1993-08-03 | Mitsubishi Denki K.K. | Scroll-type fluid apparatus having a labyrinth and oil seals surrounding a scroll shaft |
GB9223806D0 (en) * | 1992-11-13 | 1993-01-06 | Boc Group Plc | Improvements in vacuum pumps |
JPH06159279A (ja) * | 1992-11-27 | 1994-06-07 | Shimadzu Corp | 真空ポンプ |
DE4443387C1 (de) * | 1994-12-06 | 1996-01-18 | Saskia Hochvakuum Und Labortec | Zweistufige mechanische Vakuumpumpanordnung |
DE102004024554B4 (de) * | 2004-05-18 | 2018-01-25 | Pfeiffer Vacuum Gmbh | Ölgedichtete Drehschiebervakuumpumpe |
-
2006
- 2006-12-13 DE DE102006058837.1A patent/DE102006058837C5/de active Active
-
2007
- 2007-11-21 EP EP07022562A patent/EP1936200B1/de not_active Revoked
- 2007-12-12 JP JP2007320604A patent/JP5106077B2/ja active Active
- 2007-12-12 US US12/001,892 patent/US7854601B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20080145209A1 (en) | 2008-06-19 |
EP1936200B1 (de) | 2012-09-12 |
EP1936200A2 (de) | 2008-06-25 |
DE102006058837C5 (de) | 2022-05-05 |
US7854601B2 (en) | 2010-12-21 |
EP1936200A3 (de) | 2009-12-16 |
DE102006058837A1 (de) | 2008-06-19 |
DE102006058837B4 (de) | 2020-03-05 |
JP2008151127A (ja) | 2008-07-03 |
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