EP1101944A2 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

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Publication number
EP1101944A2
EP1101944A2 EP00124676A EP00124676A EP1101944A2 EP 1101944 A2 EP1101944 A2 EP 1101944A2 EP 00124676 A EP00124676 A EP 00124676A EP 00124676 A EP00124676 A EP 00124676A EP 1101944 A2 EP1101944 A2 EP 1101944A2
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
pump according
components
stator
seals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00124676A
Other languages
German (de)
French (fr)
Other versions
EP1101944A3 (en
EP1101944B1 (en
Inventor
Heinrich Lotz
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1101944A2 publication Critical patent/EP1101944A2/en
Publication of EP1101944A3 publication Critical patent/EP1101944A3/en
Application granted granted Critical
Publication of EP1101944B1 publication Critical patent/EP1101944B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first Claim.
  • the active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are.
  • the rotor and stator disks generally each have an inner one Support ring, which is equipped with blades on the outside.
  • the shovels of the Rotor disks that rotate at high speed result in interaction with the stator blades the pump effect.
  • spacer rings which on outer circumference between the rotor disks, they are spaced maintained that the rotor disks can rotate between them without contact.
  • Stator disks and spacer rings together form the stator through the inner wall the pump housing is centered and z. B. with springs additionally axially is compressed so that stator washers and spacers form a firm bond form.
  • turbomolecular pump which consists of a arranged in a housing and a stator cooperating therewith Rotor consists, the stator composed of two cylindrical shells is.
  • the disadvantage is that the stator is installed in a separate housing radial centering and axial fixation must be carried out have to. This means high manufacturing costs and assembly times as well as time-consuming Maintenance work. Inevitable gaps between the stator and housing lead to disturbing backflows. Furthermore, the removal of the during pump operation in The heat generated inside is hampered by insufficient heat conduction to the outside.
  • EP 07 51 297 A1 shows a turbomolecular pump, the stator of which consists of two parts consists. This pump is designed without a housing. It is intended to be direct to immerse into a recipient. Should it be provided with a housing, you experience the problems described above.
  • the object of the invention is to present a turbomolecular pump, where the number of components is clear compared to conventional designs is reduced. This should reduce manufacturing costs and assembly times as well the maintenance work is simplified. An improvement in heat conduction will strives for what contributes to the safety of pump operation. Backflows are also intended be reduced within the pump.
  • the arrangement according to the invention increases the number of components of a turbomolecular pump significantly reduced.
  • Spacer rings which have a conventional design lying on the outer circumference between the stator washers are completely eliminated. Thereby can simplify production and enable easier, time-saving assembly become. This leads to the simplification and reduction of maintenance work.
  • the reduced number ensures compliance with the necessary tolerances of components much easier.
  • the radial centering and the axial fixation are specified by the invention itself and do not require any further adjustment work. Internal leaks caused by gaps between the numerous Stator components are eliminated, so that disturbing back flows in this area can be largely avoided.
  • the transportation of the in operation of the The heat generated outside can be pumped through the compact design and by avoiding thermal conduction-inhibiting transitions between the parts conventional design can be significantly improved.
  • Attaching cooling or heating elements in the area of the stator components a very effective temperature control of the entire pump structure, but especially of the pump-active parts, depending on the operating conditions of the pump respectively.
  • Figure 1 shows a section of the arrangement according to the invention from A - A Figure 2.
  • Figure 2 shows a top view of the arrangement according to the invention.
  • the suction opening is 1 and Gas outlet opening designated 2.
  • the rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6.
  • Rotor disks 10 are on the rotor shaft 4 attached.
  • the two shell-shaped housing parts each form with the two Halves of the stator disks 14 two one-piece units 12 and 12 '. These two Units are connected to each other by tangential connecting elements 18 connected. Between the connecting elements there are seals in the axial direction 26 attached.
  • the structural units 12 and 12 ' are also vacuum-tightly glued or welded together become.
  • the structural units 12 and 12 ' are on the high vacuum side with the suction flange 22 and on the fore-vacuum side with the lower part 24 screwed.
  • seals 28 and 30 are attached between the components 12 and 12 'and the intake flange 22 and the lower part 24, on the other hand. These seals 28 and 30 can with the axial seals 26 as a coherent be formed in one piece sealing element.
  • the invention is illustrated using the example of a two-part embodiment. Also three-part or multi-part embodiments are possible within the scope of the invention, if, for example, manufacturing technology should require it.

Abstract

The pump has a rotor disk (10) and a stator disk (14) one behind the other in a cylindrical casing acting with each other to create a pumping effect. The casing consists of at least two parts divided along the cylinder axis (5), forming one-piece components with the corresponding separate parts of the stator disk.

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a turbomolecular pump according to the preamble of the first Claim.

Die aktiven Pumpelemente einer Turbomolekularpumpe bestehen aus mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd hintereinander angeordnet sind. Die Rotor- und Statorscheiben weisen im allgemeinen jeweils einen inneren Tragring auf, der auf der Außenseite mit Schaufeln bestückt ist. Die Schaufeln der Rotorscheiben, welche mit hoher Geschwindigkeit umlaufen, ergeben im Zusammenwirken mit den Statorschaufeln den Pumpeffekt. Durch Distanzringe, welche am äußeren Umfang zwischen den Rotorscheiben liegen, werden diese so auf Abstand gehalten, dass die Rotorscheiben zwischen ihnen berührungsfrei rotieren können. Statorscheiben und Distanzringe bilden so gemeinsam den Stator, der durch die Innenwand des Pumpengehäuses zentriert wird und z. B. mit Federn zusätzlich axial so zusammengedrückt wird, dass Statorscheiben und Distanzringe einen festen Verbund bilden.The active pump elements of a turbomolecular pump consist of with blades provided rotor and stator disks, which are arranged alternately one behind the other are. The rotor and stator disks generally each have an inner one Support ring, which is equipped with blades on the outside. The shovels of the Rotor disks that rotate at high speed result in interaction with the stator blades the pump effect. By spacer rings, which on outer circumference between the rotor disks, they are spaced maintained that the rotor disks can rotate between them without contact. Stator disks and spacer rings together form the stator through the inner wall the pump housing is centered and z. B. with springs additionally axially is compressed so that stator washers and spacers form a firm bond form.

Diese herkömmliche Art einer Konstruktion von Turbomolekularpumpen ist jedoch mit einer Reihe von Nachteilen behaftet, welche zum großen Teil auf die hohe Anzahl der Bauteile zurückzuführen ist. Als Folge entstehen hohe Fertigungskosten und lange Montagezeiten, die sich wiederum auf die Reparatur- und Wartungsarbeiten nachteilig auswirken. Die exakte Einhaltung von Toleranzen, welche für einen sicheren Betrieb einer Turbomolekularpumpe notwendig sind, erfordert mit steigender Anzahl von Bauteilen einen extrem hohen Aufwand. Die radiale Zentrierung und die axiale Fixierung der Statorscheiben bedeuten zusätzliche Justierarbeiten.However, this conventional type of construction of turbomolecular pumps is common a number of disadvantages, largely due to the high number of the components is due. As a result, there are high manufacturing costs and long Assembly times, which in turn affect the repair and maintenance work adversely affect. The exact observance of tolerances, which for a safe Operation of a turbomolecular pump are necessary with increasing numbers of components is extremely expensive. The radial centering and the Axial fixation of the stator disks means additional adjustment work.

In der DE-OS 22 18 615 wird eine Turbomolekularpumpe vorgestellt, welche aus einem in einem Gehäuse angeordneten Stator und einem damit zusammen wirkenden Rotor besteht, wobei der Stator aus zwei zylindrischen Schalen zusammengesetzt ist. Der Nachteil dabei ist, dass der Stator in einem separaten Gehäuse montiert werden muss und radiale Zentrierung sowie axiale Fixierung vorgenommen werden müssen. Dies bedeutet hohe Fertigungskosten und Montagezeiten sowie aufwendige Wartungsarbeiten. Unvermeidliche Spalte zwischen Stator und Gehäuse führen zu störenden Rückströmungen. Weiterhin wird die Abfuhr der beim Pumpenbetrieb im Inneren entstehenden Wärme durch unzureichende Wärmeleitung nach außen behindert.In DE-OS 22 18 615 a turbomolecular pump is presented, which consists of a arranged in a housing and a stator cooperating therewith Rotor consists, the stator composed of two cylindrical shells is. The disadvantage is that the stator is installed in a separate housing radial centering and axial fixation must be carried out have to. This means high manufacturing costs and assembly times as well as time-consuming Maintenance work. Inevitable gaps between the stator and housing lead to disturbing backflows. Furthermore, the removal of the during pump operation in The heat generated inside is hampered by insufficient heat conduction to the outside.

Die EP 07 51 297 A1 zeigt eine Turbomolekularpumpe, deren Stator aus zwei Teilen besteht. Diese Pumpe ist ohne Gehäuse konzipiert. Sie ist dafür vorgesehen, direkt in eine Rezipienten einzutauchen. Sollte sie mit einem Gehäuse versehen werden, treten die oben beschriebenen Probleme auf.EP 07 51 297 A1 shows a turbomolecular pump, the stator of which consists of two parts consists. This pump is designed without a housing. It is intended to be direct to immerse into a recipient. Should it be provided with a housing, you experience the problems described above.

Die Erfindung hat sich zur Aufgabe gestellt, eine Turbomolekularpumpe vorzustellen, bei der die Anzahl der Bauteile gegenüber herkömmlichen Konstruktionen deutlich reduziert ist. Dadurch sollen Fertigungskosten und Montagezeiten verringert sowie die Wartungsarbeiten vereinfacht werden. Eine Verbesserung der Wärmeleitung wird angestrebt, was zur Sicherheit des Pumpenbetriebs beiträgt. Weiterhin sollen Rückströmungen innerhalb der Pumpe reduziert werden.The object of the invention is to present a turbomolecular pump, where the number of components is clear compared to conventional designs is reduced. This should reduce manufacturing costs and assembly times as well the maintenance work is simplified. An improvement in heat conduction will strives for what contributes to the safety of pump operation. Backflows are also intended be reduced within the pump.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 - 8 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characterizing features of the first claim solved. Claims 2-8 represent further embodiments of the invention.

Durch die erfindungsgemäße Anordnung wird die Anzahl der Bauteile einer Turbomolekularpumpe erheblich verringert. Distanzringe, welche in herkömmlicher Bauweise am äußeren Umfang zwischen den Statorscheiben liegen, entfallen ganz. Dadurch kann die Fertigung vereinfacht und eine leichtere, zeitsparende Montage ermöglicht werden. Dies führt zur Vereinfachung und Reduzierung der Wartungsarbeiten. Die Einhaltung der notwendigen Toleranzen wird durch die reduzierte Anzahl von Bauteilen wesentlich erleichtert. Die radiale Zentrierung und die axiale Fixierung werden durch die Erfindung an sich vorgegeben und bedürfen keiner weiteren Justierarbeit. Innere Undichtigkeiten, welche durch Spalte zwischen den zahlreichen Statorbauteilen verursacht werden, entfallen, so dass störende Rückströmungen in diesem Bereich weitgehend vermieden werden. Der Transport der beim Betrieb der Pumpe entstehenden Wärme nach außen kann durch die kompakte Bauweise und durch die Vermeidung wärmeleitungshemmender Übergänge zwischen den Teilen herkömmlicher Bauweise erheblich verbessert werden. Darüber hinaus kann durch Anbringen von Kühl- oder Heizelementen im Bereich der Statorbauteile eine sehr wirksame Temperaturregelung des gesamten Pumpenaufbaues, besonders jedoch der pumpaktiven Teile, in Abhängigkeit von den Betriebsbedingungen der Pumpe erfolgen.The arrangement according to the invention increases the number of components of a turbomolecular pump significantly reduced. Spacer rings, which have a conventional design lying on the outer circumference between the stator washers are completely eliminated. Thereby can simplify production and enable easier, time-saving assembly become. This leads to the simplification and reduction of maintenance work. The reduced number ensures compliance with the necessary tolerances of components much easier. The radial centering and the axial fixation are specified by the invention itself and do not require any further adjustment work. Internal leaks caused by gaps between the numerous Stator components are eliminated, so that disturbing back flows in this area can be largely avoided. The transportation of the in operation of the The heat generated outside can be pumped through the compact design and by avoiding thermal conduction-inhibiting transitions between the parts conventional design can be significantly improved. In addition, by Attaching cooling or heating elements in the area of the stator components a very effective temperature control of the entire pump structure, but especially of the pump-active parts, depending on the operating conditions of the pump respectively.

Anhand der Abbildungen 1 und 2 soll die Erfindung an einem Beispiel näher erläutert werden.On the basis of Figures 1 and 2, the invention will be explained in more detail using an example become.

Abbildung 1 zeigt einen Schnitt der erfindungsgemäßen Anordnung nach A - A aus Abbildung 2.Figure 1 shows a section of the arrangement according to the invention from A - A Figure 2.

Abbildung 2 zeigt eine Draufsicht der erfindungsgemäßen Anordnung.Figure 2 shows a top view of the arrangement according to the invention.

Bei der dargestellten Turbomolekularpumpe ist die Ansaugöffnung mit 1 und die Gasaustrittsöffnung mit 2 bezeichnet. Die Rotorwelle 4 ist in Lagern 8 und 9 fixiert und wird durch den Motor 6 angetrieben. Auf der Rotorwelle 4 sind Rotorscheiben 10 befestigt. Die beiden schalenförmigen Gehäuseteile bilden jeweils mit den beiden Hälften der Statorscheiben 14 zwei einstückige Baueinheiten 12 und 12'. Diese beiden Baueinheiten werden durch tangentiale Verbindungselemente 18 mit einander verbunden. Zwischen den Verbindungselementen sind in axialer Richtung Dichtungen 26 angebracht. Im Rahmen weiterer Ausführungsformen können die Baueinheiten 12 und 12' auch miteinander vakuumdicht zusammen geklebt oder verschweißt werden. In axialer Richtung sind die Baueinheiten 12 und 12' auf der Hochvakuumseite mit dem Ansaugflansch 22 und auf der Vorvakuumseite mit dem Unterteil 24 verschraubt. Zwischen den Bauteilen 12 und 12' und dem Ansaugflansch 22 und dem Unterteil 24 andererseits sind Dichtungen 28 bzw. 30 angebracht. Diese Dichtungen 28 und 30 können mit den axialen Dichtungen 26 als zusammenhängendes einstückiges Dichtelement ausgebildet sein.In the turbomolecular pump shown, the suction opening is 1 and Gas outlet opening designated 2. The rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6. Rotor disks 10 are on the rotor shaft 4 attached. The two shell-shaped housing parts each form with the two Halves of the stator disks 14 two one-piece units 12 and 12 '. These two Units are connected to each other by tangential connecting elements 18 connected. Between the connecting elements there are seals in the axial direction 26 attached. In the context of further embodiments, the structural units 12 and 12 'are also vacuum-tightly glued or welded together become. In the axial direction, the structural units 12 and 12 'are on the high vacuum side with the suction flange 22 and on the fore-vacuum side with the lower part 24 screwed. Between the components 12 and 12 'and the intake flange 22 and the lower part 24, on the other hand, seals 28 and 30 are attached. These seals 28 and 30 can with the axial seals 26 as a coherent be formed in one piece sealing element.

Die Darstellung der Erfindung erfolgt am Beispiel einer zweiteiligen Ausführung. Auch drei- oder mehrteilige Ausführungsformen sind im Rahmen der Erfindung möglich, wenn zum Beispiel die Fertigungstechnik es erfordern sollte.The invention is illustrated using the example of a two-part embodiment. Also three-part or multi-part embodiments are possible within the scope of the invention, if, for example, manufacturing technology should require it.

Claims (8)

Turbomolekularpumpe mit Rotor (10) und Statorscheiben (14), welche abwechselnd hinter einander in einem zylindrischen Gehäuse angeordnet sind und durch ihr Zusammenwirken einen Pumpeffekt erzeugen, dadurch gekennzeichnet, dass das zylindrische Gehäuse aus mindestens zwei entlang der Zylinderachse (5) getrennten Teilen besteht, welche mit den entsprechend getrennten Teilen der Statorscheiben (14) jeweils einstückige Baueinheiten (12, 12') bilden.Turbomolecular pump with rotor (10) and stator disks (14), which alternate are arranged one behind the other in a cylindrical housing and through their interaction produce a pumping effect, characterized in that the cylindrical housing consists of at least two separate ones along the cylinder axis (5) Parts exist, which with the correspondingly separate parts of the Stator disks (14) each form one-piece units (12, 12 '). Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Bauelemente (12, 12') durch tangentiale Verbindungselemente (18) miteinander verbunden sind.Turbomolecular pump according to claim 1, characterized in that the components (12, 12 ') connected to one another by tangential connecting elements (18) are. Turbomolekularpumpe nach Anspruch 1 und 2, dadurch gekennzeichnet, dass zwischen den Verbindungselementen (12, 12') in axialer Richtung Dichtungen (26) angebracht sind.Turbomolecular pump according to claim 1 and 2, characterized in that Seals between the connecting elements (12, 12 ') in the axial direction (26) are attached. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Bauelemente (12, 12') vakuumdicht zusammengeklebt sind.Turbomolecular pump according to claim 1, characterized in that the components (12, 12 ') are glued together in a vacuum-tight manner. Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Bauelemente (12, 12') miteinander verschweißt sind.Turbomolecular pump according to claim 1, characterized in that the components (12, 12 ') are welded together. Turbomolekularpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die Bauelemente (12, 12') mit dem Ansaugflansch (22) und mit dem Unterteil (24) der Pumpe durch Verschraubungen (20) verbunden sind.Turbomolecular pump according to one of the preceding claims, characterized in that that the components (12, 12 ') with the intake flange (22) and are connected to the lower part (24) of the pump by screw connections (20). Turbomolekularpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass zwischen den Bauelementen (12, 12') und einerseits dem Ansaugflansch (22) sowie andererseits dem Unterteil (24) Dichtungen (28, 30) angebracht sind. Turbomolecular pump according to one of the preceding claims, characterized in that that between the components (12, 12 ') and on the one hand the intake flange (22) and on the other hand the lower part (24) seals (28, 30) attached are. Turbomolekularpumpe nach einem der Ansprüche 3 oder 7, dadurch gekennzeichnet, dass die Dichtungen (26) sowie (28) und (30) ein zusammenhängendes einstückiges Dichtelement bilden.Turbomolecular pump according to one of claims 3 or 7, characterized in that that the seals (26) and (28) and (30) a coherent form one-piece sealing element.
EP00124676A 1999-11-22 2000-11-11 Turbo molecular pump Expired - Lifetime EP1101944B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19956015A DE19956015A1 (en) 1999-11-22 1999-11-22 Turbomolecular pump
DE19956015 1999-11-22

Publications (3)

Publication Number Publication Date
EP1101944A2 true EP1101944A2 (en) 2001-05-23
EP1101944A3 EP1101944A3 (en) 2001-10-17
EP1101944B1 EP1101944B1 (en) 2006-07-19

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EP00124676A Expired - Lifetime EP1101944B1 (en) 1999-11-22 2000-11-11 Turbo molecular pump

Country Status (5)

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US (1) US6561755B1 (en)
EP (1) EP1101944B1 (en)
JP (1) JP2001153088A (en)
AT (1) ATE333590T1 (en)
DE (2) DE19956015A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (en) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump

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Publication number Priority date Publication date Assignee Title
DE10142567A1 (en) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE10351451A1 (en) * 2003-11-04 2005-06-16 Friesen, Waldemar Pneumatic motor employs a combination of atmospheric pressure and a vacuum to generate rotary motion
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
CN110043485A (en) * 2019-05-16 2019-07-23 江苏博联硕焊接技术有限公司 A kind of turbo-molecular pump rotor and its diffusion welding method
CN114673671B (en) * 2020-12-25 2024-04-02 广东美的白色家电技术创新中心有限公司 Blower and dust suction device

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DE2218615A1 (en) 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP WITH ROTOR AND STATOR
EP0751297A1 (en) 1995-06-30 1997-01-02 Alcatel Cit Turbo molecular pump

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Publication number Priority date Publication date Assignee Title
DE2218615A1 (en) 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP WITH ROTOR AND STATOR
EP0751297A1 (en) 1995-06-30 1997-01-02 Alcatel Cit Turbo molecular pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010023200A1 (en) * 2008-08-28 2010-03-04 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump
US8790070B2 (en) 2008-08-28 2014-07-29 Oerlikon Leybold Vacuum Gmbh Stator-rotor arrangement for a vacuum pump and vacuum pump

Also Published As

Publication number Publication date
JP2001153088A (en) 2001-06-05
ATE333590T1 (en) 2006-08-15
EP1101944A3 (en) 2001-10-17
EP1101944B1 (en) 2006-07-19
DE50013185D1 (en) 2006-08-31
US6561755B1 (en) 2003-05-13
DE19956015A1 (en) 2001-05-23

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