GB2607605B - Apparatus and vacuum system - Google Patents

Apparatus and vacuum system Download PDF

Info

Publication number
GB2607605B
GB2607605B GB2108154.2A GB202108154A GB2607605B GB 2607605 B GB2607605 B GB 2607605B GB 202108154 A GB202108154 A GB 202108154A GB 2607605 B GB2607605 B GB 2607605B
Authority
GB
United Kingdom
Prior art keywords
vacuum system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2108154.2A
Other versions
GB202108154D0 (en
GB2607605A (en
Inventor
Christian Kalisch Dirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to GB2108154.2A priority Critical patent/GB2607605B/en
Publication of GB202108154D0 publication Critical patent/GB202108154D0/en
Priority to PCT/EP2022/064540 priority patent/WO2022258410A1/en
Publication of GB2607605A publication Critical patent/GB2607605A/en
Application granted granted Critical
Publication of GB2607605B publication Critical patent/GB2607605B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/33—Retaining components in desired mutual position with a bayonet coupling

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2108154.2A 2021-06-08 2021-06-08 Apparatus and vacuum system Active GB2607605B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2108154.2A GB2607605B (en) 2021-06-08 2021-06-08 Apparatus and vacuum system
PCT/EP2022/064540 WO2022258410A1 (en) 2021-06-08 2022-05-30 Apparatus and vacuum system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2108154.2A GB2607605B (en) 2021-06-08 2021-06-08 Apparatus and vacuum system

Publications (3)

Publication Number Publication Date
GB202108154D0 GB202108154D0 (en) 2021-07-21
GB2607605A GB2607605A (en) 2022-12-14
GB2607605B true GB2607605B (en) 2023-07-05

Family

ID=76838765

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2108154.2A Active GB2607605B (en) 2021-06-08 2021-06-08 Apparatus and vacuum system

Country Status (2)

Country Link
GB (1) GB2607605B (en)
WO (1) WO2022258410A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1795757A2 (en) * 2005-12-12 2007-06-13 Pfeiffer Vacuum GmbH Vacuum casing
GB2587366A (en) * 2019-09-24 2021-03-31 Edwards Ltd Vibration damping connector systems

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004143999A (en) * 2002-10-23 2004-05-20 Boc Edwards Kk Molecule pump, and relay member for molecule pump
DE102005059636A1 (en) * 2005-12-14 2007-06-21 Pfeiffer Vacuum Gmbh vacuum pump
DE102008035972A1 (en) * 2008-07-31 2010-02-04 Pfeiffer Vacuum Gmbh Vacuum pumping arrangement

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1795757A2 (en) * 2005-12-12 2007-06-13 Pfeiffer Vacuum GmbH Vacuum casing
GB2587366A (en) * 2019-09-24 2021-03-31 Edwards Ltd Vibration damping connector systems

Also Published As

Publication number Publication date
WO2022258410A1 (en) 2022-12-15
GB202108154D0 (en) 2021-07-21
GB2607605A (en) 2022-12-14

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