EP2565463A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2565463A3
EP2565463A3 EP12180536.0A EP12180536A EP2565463A3 EP 2565463 A3 EP2565463 A3 EP 2565463A3 EP 12180536 A EP12180536 A EP 12180536A EP 2565463 A3 EP2565463 A3 EP 2565463A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
section
fiber
aligned
composite material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12180536.0A
Other languages
German (de)
French (fr)
Other versions
EP2565463A2 (en
EP2565463B1 (en
Inventor
Armin Conrad
Jörg Stanzel
Aleksandr Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012193204A priority Critical patent/JP5468117B2/en
Publication of EP2565463A2 publication Critical patent/EP2565463A2/en
Publication of EP2565463A3 publication Critical patent/EP2565463A3/en
Application granted granted Critical
Publication of EP2565463B1 publication Critical patent/EP2565463B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/04—Composite, e.g. fibre-reinforced
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced
    • F05D2300/6034—Orientation of fibres, weaving, ply angle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe mit einem Rotor, welcher einen Abschnitt aus einem Faserverbundwerkstoff mit wenigstens einer Faserrichtung umfasst, wobei der Abschnitt wenigstens eine schraubenlinienartig angeordnete Nut aufweist und die Fasern des Faserverbundwerkstoffes derart ausgerichtet sind, dass wenigstens ein Teil der Faser mit der Faserrichtung parallel zu der Nut ausgerichtet ist, so dass der Abschnitt dem Einwirken von Fliehkräften bei Betrieb der Vakuumpumpe widersteht. Die Erfindung betrifft auch einen derartigen Abschnitt und ein Verfahren zum Herstellen eines solchen Abschnittes.

Figure imgaf001
The invention relates to a vacuum pump with a rotor, which comprises a section of a fiber composite material with at least one fiber direction, wherein the section has at least one helically arranged groove and the fibers of the fiber composite material are aligned such that at least a portion of the fiber with the fiber direction parallel to the groove is aligned so that the portion resists the action of centrifugal forces during operation of the vacuum pump. The invention also relates to such a section and a method for producing such a section.
Figure imgaf001
EP12180536.0A 2011-09-05 2012-08-15 Vacuum pump Active EP2565463B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012193204A JP5468117B2 (en) 2011-09-05 2012-09-03 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011112691A DE102011112691A1 (en) 2011-09-05 2011-09-05 vacuum pump

Publications (3)

Publication Number Publication Date
EP2565463A2 EP2565463A2 (en) 2013-03-06
EP2565463A3 true EP2565463A3 (en) 2015-10-14
EP2565463B1 EP2565463B1 (en) 2019-01-23

Family

ID=46963388

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12180536.0A Active EP2565463B1 (en) 2011-09-05 2012-08-15 Vacuum pump

Country Status (3)

Country Link
EP (1) EP2565463B1 (en)
JP (1) JP5468117B2 (en)
DE (1) DE102011112691A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI586893B (en) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
DE202013009660U1 (en) * 2013-10-31 2015-02-03 Oerlikon Leybold Vacuum Gmbh Bearing holding element for a bearing element of a rotor shaft of a vacuum pump and vacuum pump
DE102013114290A1 (en) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh vacuum pump
JP2016166594A (en) * 2015-03-10 2016-09-15 株式会社島津製作所 Vacuum pump
CN106015034A (en) * 2016-07-11 2016-10-12 中国工程物理研究院机械制造工艺研究所 High-pressure ratio compound molecular pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419444B1 (en) * 1999-05-24 2002-07-16 Seiko Instruments Inc. Screw groove type vacuum pump, complex vacuum pump and vacuum pump system
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
DE102005008643A1 (en) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck vacuum pump has shoulders on rotor side of vanes of vane disc to support supporting ring
WO2006090103A1 (en) * 2005-02-25 2006-08-31 Edwards Limited Vacuum pump
DE60319585T2 (en) * 2002-12-17 2009-03-26 Edwards Ltd., Crawley VACUUM PUMP
JP2009108752A (en) * 2007-10-30 2009-05-21 Edwards Kk Vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (en) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gas friction pump
FR2845737B1 (en) 2002-10-11 2005-01-14 Cit Alcatel TURBOMOLECULAR PUMP WITH COMPOSITE SKIRT

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419444B1 (en) * 1999-05-24 2002-07-16 Seiko Instruments Inc. Screw groove type vacuum pump, complex vacuum pump and vacuum pump system
DE60319585T2 (en) * 2002-12-17 2009-03-26 Edwards Ltd., Crawley VACUUM PUMP
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
DE102005008643A1 (en) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck vacuum pump has shoulders on rotor side of vanes of vane disc to support supporting ring
WO2006090103A1 (en) * 2005-02-25 2006-08-31 Edwards Limited Vacuum pump
JP2009108752A (en) * 2007-10-30 2009-05-21 Edwards Kk Vacuum pump

Also Published As

Publication number Publication date
EP2565463A2 (en) 2013-03-06
JP5468117B2 (en) 2014-04-09
DE102011112691A1 (en) 2013-03-07
JP2013053627A (en) 2013-03-21
EP2565463B1 (en) 2019-01-23

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