EP3670924B1 - Vacuum pump and method for producing same - Google Patents

Vacuum pump and method for producing same Download PDF

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Publication number
EP3670924B1
EP3670924B1 EP19210020.4A EP19210020A EP3670924B1 EP 3670924 B1 EP3670924 B1 EP 3670924B1 EP 19210020 A EP19210020 A EP 19210020A EP 3670924 B1 EP3670924 B1 EP 3670924B1
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EP
European Patent Office
Prior art keywords
holweck
section
groove
vacuum pump
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19210020.4A
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German (de)
French (fr)
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EP3670924A1 (en
Inventor
Uwe Leib
Torsten Gogol
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19210020.4A priority Critical patent/EP3670924B1/en
Publication of EP3670924A1 publication Critical patent/EP3670924A1/en
Priority to JP2020159322A priority patent/JP7032500B2/en
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Publication of EP3670924B1 publication Critical patent/EP3670924B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material

Definitions

  • the present invention relates to a vacuum pump, for example a turbomolecular pump, comprising a Holweck pump stage with a Holweck stator and a Holweck rotor which rotates around a rotor axis during operation of the vacuum pump and which interacts with the Holweck stator to generate a pumping effect, the Holweck pump stage having at least one thread-like Holweck groove, which from at least one side wall is limited.
  • the invention also relates to a method for producing such a vacuum pump.
  • the invention relates in particular to a vacuum pump according to the preamble of claim 1.
  • a vacuum pump according to the preamble of claim 1.
  • Such is in US Pat GB 242,084 A disclosed.
  • Holweck grooves are usually formed by pushing. It can be desirable to produce a Holweck geometry with narrow but very deep grooves in relation to the width. Especially in the inlet area of a Holweck step, it can make sense to produce comparatively deep grooves. Such deep grooves in the inlet area prove to be advantageous, for example, when the gas conveyed by a turbomolecular pumping stage with high pumping speed is to be transferred to the Holweck pumping stage. Especially with regard to the manufacture of narrow but deep grooves in the inner diameter of a Holweck component, in particular a Holweck stator sleeve, the widespread method of pushing has disadvantages. On the one hand, very filigree tools that are prone to wear and failure must be used for this. On the other hand, only a small infeed can be achieved with each work step of the tool, which causes long production times and high costs.
  • the Holweck groove also has a groove base which defines a base envelope, the base envelope being designed to be cylindrical in at least one, in particular a second, section of the Holweck groove.
  • This geometry enables reliable and cost-effective production, in particular of Holweck grooves with great depth and relatively small width.
  • the invention is based on the idea that the side walls of the grooves do not have to be aligned straight or perpendicular to the rotor axis, as is customary in the prior art. Rather, the deviation from the vertical alignment results in considerable advantages in the manufacturing process.
  • the Holweck groove can thus be produced by a cutting process, in particular milled.
  • a cutting tool such as a milling cutter, can be aligned correspondingly at an angle during machining.
  • the Holwecknut is therefore particularly easily accessible.
  • section relates in particular to the rotor axis, that is to say to an axial section, and / or to the helical shape of the Holweck groove.
  • the Holwecknut can basically be designed differently in different sections.
  • the side wall is designed to be inclined at least in one section. For example, it can be designed to be inclined over its entire length, in particular at an angle that is the same over its length. However, it can also have different angles in different sections and / or, for example, also be arranged perpendicular to the rotor axis in at least one section.
  • the relevant cross-section is one in which the rotor axis lies. With regard to the rotor, it is ultimately a longitudinal section, which, however, runs transversely to the side wall.
  • the Holwecknut forms an internal thread.
  • the Holweck stator can have the Holweck groove.
  • the Holweck rotor can have the Holweck groove.
  • respective Holweck grooves on the rotor and stator can also be formed according to the invention.
  • the Holweck groove generally has a groove base. This can, in particular, be flat in cross section.
  • the groove base defines an envelope in particular over several turns of the groove, which can also be referred to as the base envelope.
  • the basic envelope is designed conically at least in a first section of the Holweck groove.
  • the groove base can be designed at least in a first section of the Holweck groove in the cross section obliquely with respect to the rotor axis. In the first section, in particular, the groove base can at least be arranged essentially perpendicular to the associated area of the side wall.
  • the first section is an inlet section of the Holweck pumping stage with respect to a pumping direction.
  • particularly deep grooves, in particular with a relatively small width can be produced in a simple manner in the inlet section.
  • the pump performance, in particular the pumping speed, can thus be improved in a simple manner.
  • the first section can, for example, be arranged at one end of the component which has the Holweck groove, one end being meant in relation to the rotor axis.
  • the base envelope can, in principle, independently of a first section with a conical base envelope or an inclined groove base, preferably be cylindrical in a second section of the Holweck groove.
  • the groove base can be formed, for example, in a, in particular a second, section of the Holweck groove parallel to the rotor axis.
  • The, in particular the second, section can be arranged, for example, following an inlet section and / or an outlet section of the Holweck pumping stage.
  • the side wall has, in particular, a radially inner end which, in particular, defines an inner envelope over several turns of the Holweck groove.
  • the inner envelope can preferably be cylindrical in at least one section, in particular in several sections.
  • the inner envelope can preferably be cylindrical both in the first section and in the second section.
  • the side wall is arranged perpendicularly in a first section and / or inclined in a second section to an adjacent and / or assigned groove base.
  • the side wall is designed obliquely with respect to the rotor axis, that is to say that an angle between the side wall and the rotor axis is smaller than 90 ° and larger than 0 °. It when the side wall in is arranged at an angle to the rotor axis which is at least 50 ° and / or at most 80 °. An angle of approximately 70 ° is particularly preferred.
  • the side wall can be formed by a web.
  • a web can in particular be formed between two adjacent Holweck grooves or between two circumferences of the same groove.
  • the web can in particular also form a second side wall of an adjacent or the Holweck groove, in particular wherein both side walls are formed parallel to one another and / or at an angle to the rotor axis.
  • the Holweck pump stage can have several gears, i.e. several parallel, thread-like Holweck grooves.
  • one, in particular thread-like, web is provided for each aisle.
  • Two threads or Holweck grooves can be separated from one another by a web, for example.
  • the web can have an inner end which, for example, is flat and / or is arranged parallel to the rotor axis.
  • the web can generally have, for example, two, in particular parallel, side walls which delimit a respective groove or a groove.
  • the side walls can preferably both be arranged at an angle.
  • the object of the invention is also achieved by a method for producing a vacuum pump according to the type described above, the Holweck groove being produced in at least a first section by milling.
  • a milling cutter is guided obliquely with respect to a thread axis of the Holwecknut.
  • the thread axis corresponds in particular to a rotor axis in the assembly of the vacuum pump.
  • the first section can preferably be an inlet section of the Holweck pumping stage.
  • the Holweck groove can generally preferably be produced by another machining process and in particular by slotting.
  • milling in the first section and butting in the second section can therefore advantageously be combined.
  • the first section can advantageously take advantage of the fact that relatively deep grooves can be made in a simple manner by means of milling and relatively filigree webs can be formed.
  • the groove can also be produced in a simple manner in a section, in particular downstream of the inlet section in the pumping direction, which is difficult to access for a milling cutter. The respective advantages of the machining processes can therefore be used in a targeted manner.
  • the side wall delimiting the Holwecknut is formed in a cross section in which a thread axis of the Holwecknut is inclined to the thread axis.
  • an end mill and / or a disk mill can be used for milling.
  • the vacuum pump can preferably be a turbo-molecular pump with a Holweck pump stage.
  • the turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se.
  • the gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.
  • the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.
  • a flood inlet 133 in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as a purge gas connection via which purge gas to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump.
  • Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.
  • the lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141.
  • the vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were.
  • the vacuum pump 111 can be designed so that it is also in operation can be taken if it is oriented in a different way than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.
  • a bearing cap 145 is attached to the underside 141.
  • Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.
  • the turbomolecular pump 111 comprises several turbomolecular pump stages connected in series with one another, with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form one turbomolecular pumping stage.
  • the stator disks 157 are held at a desired axial distance from one another by spacer rings 159.
  • the vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested one inside the other.
  • the active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbo molecular pumps.
  • the radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and with this forms a second Holweck pumping stage.
  • the radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.
  • a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173.
  • a radially running channel can be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.
  • a conical injection molded nut 185 with an outer diameter that increases towards the roller bearing 181 is provided on the rotor shaft 153.
  • the injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store.
  • the operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.
  • the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.
  • roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.
  • the permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, which each comprise a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction.
  • the ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially.
  • the rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119.
  • the ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203.
  • a plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.
  • An emergency or retainer bearing 215 is provided within the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented will.
  • the backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation.
  • the radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217.
  • a permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217.
  • the motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135.
  • the electric motor 125 can be protected from process gas, for example from corrosive components of the process gas, via the sealing gas.
  • the engine compartment 137 can also be evacuated via the pump outlet 117, ie the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.
  • a so-called labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular to achieve better sealing of the motor compartment 217 from the radially outside Holweck pump stages.
  • turbo molecular pump 111 which comprises a Holweck pump stage, serves to illustrate the technical background.
  • the pump 111 can in particular be developed according to the invention.
  • the vacuum pump according to the invention can, in particular, advantageously be developed further by means of individual or several features of the pump 111 described above.
  • a housing component 10 of a vacuum pump according to the invention is shown in cross section, the sectional plane running along a rotor axis 12 of a Holweck rotor, not shown here.
  • the vacuum pump comprises a Holweck pump stage 14, of which only the stator-side elements are visible, namely at least one thread-like Holweck groove 16 which is formed in the housing component 10.
  • a Holweck rotor sleeve When assembled, a Holweck rotor sleeve preferably rotates in the Holweck pump stage 14, for example as it is used in connection with the Figs. 1 to 5 is described.
  • the Holweck pump stage 14 comprises a plurality of Holweck grooves 16 running in parallel, that is to say it is designed with multiple threads.
  • side walls 18 are visible, which delimit the respective grooves 16 and separate them from one another.
  • the side walls 18 are arranged obliquely with respect to the rotor axis 12.
  • an angle 20 is indicated between a side wall 18 and the rotor axis 12 or a groove base 22. In the embodiment shown, this is approximately 70 ° and can be preferred be at least 50 ° and / or at most 80 °.
  • all side walls 18 are arranged parallel to one another and at an angle 20 obliquely to the rotor axis 12.
  • a respective Holweck groove 16 is delimited in the axial direction by the side walls 18 and in the radial direction by a groove base 22 which extends between the side walls 18.
  • the groove base 22 defines a base envelope along its axial extent and over several turns or turns. This is conical in a first section 24 and cylindrical in a second section 26.
  • the groove base 22 is generally flat, but there is an unevenness on the groove base 22 in a transition area between the first section 24 and the second section 26, which is particularly a result of the transition between the sections 24 and 26.
  • the side walls 18 are formed by webs 28 which separate the Holweck grooves 16 of the different aisles from one another.
  • the webs 28 and the side walls 18 have an inner end which defines an inner envelope.
  • the inner envelope is cylindrical here both in the first section 24 and in the second section 26. At the inner end, the webs 28 are flat and aligned parallel to the rotor axis 12.
  • the Holweck groove 16 is formed deeper in the first section 24 than in the second section 26, in particular the width of the Holweck groove 16 preferably being the same in both sections 24 and 26 or preferably constant over the entire axial length of the Holweck pumping stage.
  • the width is defined in particular by the axial distance between the inner ends of two side walls 18 or webs 28 via a groove 16.
  • the first section 24 preferably forms an inlet section of the Holweck pumping stage 14.
  • the great depth or the relatively large volume in this section 24 the groove 16 provides a particularly good pumping speed for the Holweck pump stage 14.
  • a milling cutter 30 is indicated, such as can be performed, for example, to produce the Holwecknut 16 in the first section 24.
  • the milling cutter 30 is designed here as an end mill by way of example.
  • the milling cutter 30 is aligned with its axis of rotation 32 obliquely with respect to the rotor axis 12 or a thread axis of the thread-like Holwecknut 16, which corresponds to the rotor axis 12 in the assembly of the vacuum pump.
  • the angle between the axis of rotation 32 and the rotor axis 12 corresponds to that angle 20 of the side walls 18.
  • the Holwecknut 16 in the first section 24 can be produced in a simple manner with the milling cutter 30 without the need for an angle head for the milling cutter.
  • the Holwecknut 16 can thus be produced in a simple manner.
  • the Holweck groove 16 can preferably be produced by pushing.
  • the one or more grooves 16 can generally be made with a milling cutter, for example with an end mill or disk milling cutter. Further internal machining, for example in the second section 26, may be impossible or difficult to do with an angle head on the milling machine due to the geometry (e.g. small diameter).
  • a conical first or inlet section 24, in particular with the base envelope can be milled from the outside. This manufacturing method means that the webs 28, which are in particular those of the stator here, are inclined between the slots 16 at the same angle as the milling cutter itself.
  • the grooves 16 can consequently continue to be produced by butting.
  • the butted grooves are preferably also inclined at the same angle as the milled grooves, in particular so that the cutting tool does not damage the webs 28 already present after the milling.
  • the two manufacturing processes should be synchronized with regard to the angular position of the grooves 16 and the side walls 18.

Description

Die vorliegende Erfindung betrifft eine Vakuumpumpe, beispielsweise eine Turbomolekularpumpe, umfassend eine Holweckpumpstufe mit einem Holweckstator und einem im Betrieb der Vakuumpumpe um eine Rotorachse rotierenden Holweckrotor, der mit dem Holweckstator zum Erzeugen einer Pumpwirkung zusammenwirkt, wobei die Holweckpumpstufe zumindest eine gewindeartige Holwecknut aufweist, die von zumindest einer Seitenwand begrenzt ist.The present invention relates to a vacuum pump, for example a turbomolecular pump, comprising a Holweck pump stage with a Holweck stator and a Holweck rotor which rotates around a rotor axis during operation of the vacuum pump and which interacts with the Holweck stator to generate a pumping effect, the Holweck pump stage having at least one thread-like Holweck groove, which from at least one side wall is limited.

Die Erfindung betrifft auch ein Verfahren zur Herstellung einer derartigen Vakuumpumpe.The invention also relates to a method for producing such a vacuum pump.

Die Erfindung betrifft insbesondere eine Vakuumpumpe nach dem Oberbegriff des Anspruchs 1. Eine solche ist in der GB 242,084 A offenbart. Weiteren Stand der Technik bilden die US 4,746,265 A , die WO 2011/070856 A1 , die DE 20 2013 009 462 U1 , die DE 10 2014 105 582 A1 , die US 6,315517 B1 , die WO 2006/037730 A1 und die US 2003/0185667 A1 .The invention relates in particular to a vacuum pump according to the preamble of claim 1. Such is in US Pat GB 242,084 A disclosed. The further state of the art U.S. 4,746,265 A , the WO 2011/070856 A1 , the DE 20 2013 009 462 U1 , the DE 10 2014 105 582 A1 , the US 6,315517 B1 , the WO 2006/037730 A1 and the US 2003/0185667 A1 .

Holwecknuten, insbesondere solche, die ein Innengewinde bilden, werden üblicherweise durch Stoßen ausgebildet. Es kann wünschenswert sein, eine Holweckgeometrie mit schmalen aber im Verhältnis zur Breite sehr tiefen Nuten herzustellen. Speziell im Einlassbereich einer Holweckstufe kann es sinnvoll sein, vergleichsweise tiefe Nuten herzustellen. Derart tiefe Nuten im Einlassbereich erweisen sich zum Beispiel als vorteilhaft, wenn das von einer Turbomolekularpumpstufe mit hohem Saugvermögen geförderte Gas in die Holweckpumpstufe übergeben werden soll. Insbesondere im Hinblick auf die Herstellung von schmalen aber tiefen Nuten im Innendurchmesser eines Holweckbauteils, insbesondere einer Holweck-Statorhülse, hat das verbreitete Verfahren des Stoßens Nachteile. Zum einen müssen dafür sehr filigrane Werkzeuge benutzt werden, die anfällig für Verschleiß und Versagen sind. Zum anderen kann mit jedem Arbeitsgang des Werkzeugs nur eine geringe Zustellung erreicht werden, was lange Produktionszeiten und hohe Kosten verursacht.Holweck grooves, especially those that form an internal thread, are usually formed by pushing. It can be desirable to produce a Holweck geometry with narrow but very deep grooves in relation to the width. Especially in the inlet area of a Holweck step, it can make sense to produce comparatively deep grooves. Such deep grooves in the inlet area prove to be advantageous, for example, when the gas conveyed by a turbomolecular pumping stage with high pumping speed is to be transferred to the Holweck pumping stage. Especially with regard to the manufacture of narrow but deep grooves in the inner diameter of a Holweck component, in particular a Holweck stator sleeve, the widespread method of pushing has disadvantages. On the one hand, very filigree tools that are prone to wear and failure must be used for this. On the other hand, only a small infeed can be achieved with each work step of the tool, which causes long production times and high costs.

Es ist eine Aufgabe der Erfindung, die Herstellung einer Holwecknut zu vereinfachen.It is an object of the invention to simplify the production of a Holwecknut.

Diese Aufgabe wird durch eine Vakuumpumpe mit den in Anspruch 1 genannten Merkmalen gelöst, und insbesondere dadurch, dass die Seitenwand in einem Querschnitt, in dem die Rotorachse liegt, zumindest abschnittsweise schräg in Bezug auf die Rotorachse ausgebildet ist. Erfindungsgemäß weist die Holwecknut außerdem einen Nutgrund auf, der eine Grundeinhüllende definiert, wobei die Grundeinhüllende in zumindest einem, insbesondere zweiten, Abschnitt der Holwecknut zylindrisch ausgebildet ist.This object is achieved by a vacuum pump with the features mentioned in claim 1, and in particular in that the side wall in a cross section in which the rotor axis is located is at least partially oblique with respect to the rotor axis. According to the invention, the Holweck groove also has a groove base which defines a base envelope, the base envelope being designed to be cylindrical in at least one, in particular a second, section of the Holweck groove.

Durch diese Geometrie wird eine prozesssichere und kostengünstige Herstellung ermöglicht, insbesondere von Holwecknuten mit großer Tiefe und relativ geringer Breite.This geometry enables reliable and cost-effective production, in particular of Holweck grooves with great depth and relatively small width.

Der Erfindung liegt der Gedanke zugrunde, dass die Seitenwände der Nuten nicht, wie im Stand der Technik üblich, gerade bzw. senkrecht zur Rotorachse ausgerichtet sein müssen. Vielmehr ergeben sich durch die Abweichung von der senkrechten Ausrichtung erhebliche Vorteile im Herstellungsprozess. Die Holwecknut kann somit durch ein spanendes Verfahren hergestellt sein, insbesondere gefräst sein. Insbesondere kann ein spanendes Werkzeug, wie etwa ein Fräser, bei der Bearbeitung entsprechend schräg ausgerichtet sein. Die Holwecknut ist somit besonders leicht zugänglich.The invention is based on the idea that the side walls of the grooves do not have to be aligned straight or perpendicular to the rotor axis, as is customary in the prior art. Rather, the deviation from the vertical alignment results in considerable advantages in the manufacturing process. The Holweck groove can thus be produced by a cutting process, in particular milled. In particular, a cutting tool, such as a milling cutter, can be aligned correspondingly at an angle during machining. The Holwecknut is therefore particularly easily accessible.

Der Begriff "Abschnitt" bezieht sich insbesondere auf die Rotorachse, also auf einen Axialabschnitt, und/oder auf die Schraubenform der Holwecknut. Die Holwecknut kann grundsätzlich in unterschiedlichen Abschnitten unterschiedlich ausgebildet sein. Erfindungsgemäß ist die Seitenwand zumindest in einem Abschnitt schräg ausgebildet. Sie kann beispielsweise über ihre gesamte Länge schräg, insbesondere mit über die Länge gleichem Winkel, ausgebildet sein. Sie kann aber auch in unterschiedlichen Abschnitten unterschiedliche Winkel aufweisen und/oder z.B. auch in wenigstens einem Abschnitt senkrecht zur Rotorachse angeordnet sein.The term “section” relates in particular to the rotor axis, that is to say to an axial section, and / or to the helical shape of the Holweck groove. The Holwecknut can basically be designed differently in different sections. According to the invention, the side wall is designed to be inclined at least in one section. For example, it can be designed to be inclined over its entire length, in particular at an angle that is the same over its length. However, it can also have different angles in different sections and / or, for example, also be arranged perpendicular to the rotor axis in at least one section.

Der maßgebliche Querschnitt ist ein solcher, in dem die Rotorachse liegt. In Bezug auf den Rotor handelt es sich also letztlich um einen Längsschnitt, der jedoch quer zur Seitenwand verläuft.The relevant cross-section is one in which the rotor axis lies. With regard to the rotor, it is ultimately a longitudinal section, which, however, runs transversely to the side wall.

Erfindungsgemäß ist vorgesehen, dass die Holwecknut ein Innengewinde bildet.According to the invention it is provided that the Holwecknut forms an internal thread.

Insbesondere kann der Holweckstator die Holwecknut aufweisen. Alternativ kann etwa der Holweckrotor die Holwecknut aufweisen. Grundsätzlich können auch jeweilige Holwecknuten an Rotor und Stator erfindungsgemäß ausgebildet sein.In particular, the Holweck stator can have the Holweck groove. Alternatively, for example, the Holweck rotor can have the Holweck groove. In principle, respective Holweck grooves on the rotor and stator can also be formed according to the invention.

Die Holwecknut weist allgemein einen Nutgrund auf. Dieser kann insbesondere im Querschnitt eben ausgebildet sein. Der Nutgrund definiert insbesondere über mehrere Windungen der Nut hinweg ein Einhüllende, die auch als Grundeinhüllende bezeichnet werden kann. Bei einem vorteilhaften Beispiel ist die Grundeinhüllende zumindest in einem ersten Abschnitt der Holwecknut konisch ausgebildet. Alternativ oder zusätzlich kann der Nutgrund zumindest in einem ersten Abschnitt der Holwecknut in dem Querschnitt schräg in Bezug auf die Rotorachse ausgebildet sein. Im ersten Abschnitt kann insbesondere der Nutgrund zumindest im Wesentlichen senkrecht zum zugehörigen Bereich der Seitenwand angeordnet sein.The Holweck groove generally has a groove base. This can, in particular, be flat in cross section. The groove base defines an envelope in particular over several turns of the groove, which can also be referred to as the base envelope. In an advantageous example, the basic envelope is designed conically at least in a first section of the Holweck groove. As an alternative or in addition, the groove base can be designed at least in a first section of the Holweck groove in the cross section obliquely with respect to the rotor axis. In the first section, in particular, the groove base can at least be arranged essentially perpendicular to the associated area of the side wall.

Bei einer weiteren Ausführungsform ist vorgesehen, dass der erste Abschnitt in Bezug auf eine Pumprichtung ein Einlassabschnitt der Holweckpumpstufe ist. Im Einlassabschnitt können erfindungsgemäß auf einfache Weise besonders tiefe Nuten, insbesondere bei relativ geringer Breite, hergestellt werden. Somit kann auf einfache Weise die Pumpleistung, insbesondere das Saugvermögen, verbessert werden.In a further embodiment it is provided that the first section is an inlet section of the Holweck pumping stage with respect to a pumping direction. According to the invention, particularly deep grooves, in particular with a relatively small width, can be produced in a simple manner in the inlet section. The pump performance, in particular the pumping speed, can thus be improved in a simple manner.

Der erste Abschnitt kann beispielsweise an einem Ende des Bauteils angeordnet sein, welches die Holwecknut aufweist, wobei ein Ende in Bezug auf die Rotorachse gemeint ist.The first section can, for example, be arranged at one end of the component which has the Holweck groove, one end being meant in relation to the rotor axis.

Die Grundeinhüllende kann, grundsätzlich unabhängig von einem ersten Abschnitt mit konischer Grundeinhüllender bzw. schrägem Nutgrund, bevorzugt in einem zweiten Abschnitt der Holwecknut zylindrisch ausgebildet sein. Alternativ oder zusätzlich kann der Nutgrund z.B. in einem, insbesondere zweiten, Abschnitt der Holwecknut parallel zur Rotorachse ausgebildet sein. Der, insbesondere zweite, Abschnitt kann beispielsweise im Anschluss an einen Einlassabschnitt und/oder einen Auslassabschnitt der Holweckpumpstufe angeordnet sein.The base envelope can, in principle, independently of a first section with a conical base envelope or an inclined groove base, preferably be cylindrical in a second section of the Holweck groove. Alternatively or additionally, the groove base can be formed, for example, in a, in particular a second, section of the Holweck groove parallel to the rotor axis. The, in particular the second, section can be arranged, for example, following an inlet section and / or an outlet section of the Holweck pumping stage.

Die Seitenwand weist insbesondere ein radial inneres Ende auf, welches insbesondere über mehrere Windungen der Holwecknut hinweg eine Inneneinhüllende definiert. Die Inneneinhüllende kann bevorzugt in zumindest einem Abschnitt, insbesondere in mehreren Abschnitten, zylindrisch sein. Bevorzugt kann die Inneneinhüllende sowohl im ersten Abschnitt als auch im zweiten Abschnitt zylindrisch sein.The side wall has, in particular, a radially inner end which, in particular, defines an inner envelope over several turns of the Holweck groove. The inner envelope can preferably be cylindrical in at least one section, in particular in several sections. The inner envelope can preferably be cylindrical both in the first section and in the second section.

Bei einem weiteren Beispiel ist vorgesehen, dass die Seitenwand in einem ersten Abschnitt senkrecht und/oder in einem zweiten Abschnitt schräg zu einem benachbarten und/oder zugeordneten Nutgrund angeordnet ist.In a further example it is provided that the side wall is arranged perpendicularly in a first section and / or inclined in a second section to an adjacent and / or assigned groove base.

Erfindungsgemäß ist die Seitenwand schräg in Bezug auf die Rotorachse ausgebildet, d.h. dass ein Winkel zwischen der Seitenwand und der Rotorachse kleiner als 90° und größer als 0° ist. Besonders vorteilhaft ist es, wenn die Seitenwand in einem Winkel zur Rotorachse angeordnet ist, der wenigstens 50° und/oder höchstens 80° beträgt. Besonders bevorzugt ist ein Winkel von etwa 70°.According to the invention, the side wall is designed obliquely with respect to the rotor axis, that is to say that an angle between the side wall and the rotor axis is smaller than 90 ° and larger than 0 °. It when the side wall in is arranged at an angle to the rotor axis which is at least 50 ° and / or at most 80 °. An angle of approximately 70 ° is particularly preferred.

Zum Beispiel kann die Seitenwand von einem Steg gebildet sein. Ein Steg kann insbesondere zwischen zwei benachbarten Holwecknuten oder zwischen zwei Umläufen derselben Nut gebildet sein. Der Steg kann insbesondere auch eine zweite Seitenwand einer benachbarten bzw. der Holwecknut bilden, insbesondere wobei beide Seitenwände parallel zueinander und/oder schräg zur Rotorachse ausgebildet sind.For example, the side wall can be formed by a web. A web can in particular be formed between two adjacent Holweck grooves or between two circumferences of the same groove. The web can in particular also form a second side wall of an adjacent or the Holweck groove, in particular wherein both side walls are formed parallel to one another and / or at an angle to the rotor axis.

Allgemein kann die Holweckpumpstufe mehrere Gänge, d.h. mehrere parallel angeordnete, gewindeartige Holwecknuten aufweisen. Insbesondere ist ein, insbesondere gewindeartiger, Steg je Gang vorgesehen. Zwei Gänge bzw. Holwecknuten können z.B. durch einen Steg voneinander getrennt sein.In general, the Holweck pump stage can have several gears, i.e. several parallel, thread-like Holweck grooves. In particular, one, in particular thread-like, web is provided for each aisle. Two threads or Holweck grooves can be separated from one another by a web, for example.

Der Steg kann ein inneres Ende aufweisen, welches z.B. eben ausgebildet ist und/oder parallel zur Rotorachse angeordnet ist. Der Steg kann allgemein z.B. zwei, insbesondere parallele, Seitenwände aufweisen, die jeweilige oder eine Nut begrenzen. Die Seitenwände können bevorzugt beide schräg angeordnet sein.The web can have an inner end which, for example, is flat and / or is arranged parallel to the rotor axis. The web can generally have, for example, two, in particular parallel, side walls which delimit a respective groove or a groove. The side walls can preferably both be arranged at an angle.

Die Aufgabe der Erfindung wird auch durch ein Verfahren zur Herstellung einer Vakuumpumpe nach vorstehend beschriebener Art gelöst, wobei die Holwecknut in zumindest einem ersten Abschnitt durch Fräsen hergestellt wird.The object of the invention is also achieved by a method for producing a vacuum pump according to the type described above, the Holweck groove being produced in at least a first section by milling.

Gemäß einer Ausführungsform ist vorgesehen, dass dabei ein Fräser schräg in Bezug auf eine Gewindeachse der Holwecknut geführt wird. Die Gewindeachse entspricht insbesondere einer Rotorachse im Zusammenbau der Vakuumpumpe.According to one embodiment it is provided that a milling cutter is guided obliquely with respect to a thread axis of the Holwecknut. The thread axis corresponds in particular to a rotor axis in the assembly of the vacuum pump.

Der erste Abschnitt kann bevorzugt ein Einlassabschnitt der Holweckpumpstufe sein.The first section can preferably be an inlet section of the Holweck pumping stage.

In einem zweiten Abschnitt kann die Holwecknut allgemein bevorzugt durch ein anderes spanendes Verfahren und insbesondere durch Stoßen hergestellt werden. Insbesondere lassen sich also Fräsen im ersten Abschnitt und Stoßen im zweiten Abschnitt vorteilhaft kombinieren. So kann einerseits im ersten Abschnitt vorteilhaft ausgenutzt werden, dass mittels Fräsen auf einfache Weise relativ tiefe Nuten eingebracht und relativ filigrane Stege ausgebildet werden können. Im zweiten Abschnitt kann vorteilhaft ausgenutzt werden, dass die Nut auch in einem, insbesondere in Pumprichtung dem Einlassabschnitt nachgeordneten, Abschnitt auf einfache Weise hergestellt werden kann, der für einen Fräser nur schwer zugänglich ist. Es können also die jeweiligen Vorteile der Bearbeitungsverfahren jeweils gezielt ausgenutzt werden.In a second section, the Holweck groove can generally preferably be produced by another machining process and in particular by slotting. In particular, milling in the first section and butting in the second section can therefore advantageously be combined. Thus, on the one hand, the first section can advantageously take advantage of the fact that relatively deep grooves can be made in a simple manner by means of milling and relatively filigree webs can be formed. In the second section, it can advantageously be used that the groove can also be produced in a simple manner in a section, in particular downstream of the inlet section in the pumping direction, which is difficult to access for a milling cutter. The respective advantages of the machining processes can therefore be used in a targeted manner.

Beispielsweise kann es vorgesehen sein, dass sowohl im ersten als auch in einem zweiten Abschnitt, insbesondere dem vorstehend beschriebenen zweiten Abschnitt, die die Holwecknut begrenzende Seitenwand in einem Querschnitt, in dem eine Gewindeachse der Holwecknut liegt, schräg zu der Gewindeachse ausgebildet wird.For example, it can be provided that both in the first and in a second section, in particular the second section described above, the side wall delimiting the Holwecknut is formed in a cross section in which a thread axis of the Holwecknut is inclined to the thread axis.

Allgemein kann zum Fräsen insbesondere ein Schaftfräser und/oder ein Scheibenfräser verwendet werden.In general, an end mill and / or a disk mill can be used for milling.

Bei der Vakuumpumpe kann es sich bevorzugt um eine Turbomolekularpumpe mit einer Holweckpumpstufe handeln.The vacuum pump can preferably be a turbo-molecular pump with a Holweck pump stage.

Es versteht sich, dass das beschriebene Verfahren auch durch die Merkmale und Ausführungsformen, welche im Zusammenhang mit einer Vakuumpumpe beschrieben werden, vorteilhaft weitergebildet werden kann, und umgekehrt.It goes without saying that the described method can also be advantageously developed by the features and embodiments which are described in connection with a vacuum pump, and vice versa.

Nachfolgend wird die Erfindung beispielhaft anhand vorteilhafter Ausführungsformen unter Bezugnahme auf die beigefügten Figuren beschrieben. Es zeigen, jeweils schematisch:

Fig. 1
eine perspektivische Ansicht einer Turbomolekularpumpe,
Fig. 2
eine Ansicht der Unterseite der Turbomolekularpumpe von Fig. 1,
Fig. 3
einen Querschnitt der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie A-A,
Fig. 4
eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie B-B,
Fig. 5
eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie C-C,
Fig. 6
zeigt ein Gehäusebauteil einer erfindungsgemäßen Vakuumpumpe im Querschnitt.
Fig. 7
zeigt ebenfalls das Gehäusebauteil der Fig. 6 im Querschnitt, wobei zur Illustration des zugrundeliegenden Herstellungsverfahrens ein Fräser angedeutet ist.
The invention is described below by way of example using advantageous embodiments with reference to the accompanying figures. They show, each schematically:
Fig. 1
a perspective view of a turbo molecular pump,
Fig. 2
a view of the underside of the turbo molecular pump of FIG Fig. 1 ,
Fig. 3
a cross section of the turbo molecular pump along the in Fig. 2 shown section line AA,
Fig. 4
a cross-sectional view of the turbo molecular pump along the line in FIG Fig. 2 shown section line BB,
Fig. 5
a cross-sectional view of the turbo molecular pump along the line in FIG Fig. 2 shown section line CC,
Fig. 6
shows a housing component of a vacuum pump according to the invention in cross section.
Fig. 7
also shows the housing component of Fig. 6 in cross section, a milling cutter being indicated to illustrate the underlying manufacturing process.

Die in Fig. 1 gezeigte Turbomolekularpumpe 111 umfasst einen von einem Einlassflansch 113 umgebenen Pumpeneinlass 115, an welchen in an sich bekannter Weise ein nicht dargestellter Rezipient angeschlossen werden kann. Das Gas aus dem Rezipienten kann über den Pumpeneinlass 115 aus dem Rezipienten gesaugt und durch die Pumpe hindurch zu einem Pumpenauslass 117 gefördert werden, an den eine Vorvakuumpumpe, wie etwa eine Drehschieberpumpe, angeschlossen sein kann.In the Fig. 1 The turbo-molecular pump 111 shown comprises a pump inlet 115 which is surrounded by an inlet flange 113 and to which a recipient (not shown) can be connected in a manner known per se. The gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, can be connected.

Der Einlassflansch 113 bildet bei der Ausrichtung der Vakuumpumpe gemäß Fig. 1 das obere Ende des Gehäuses 119 der Vakuumpumpe 111. Das Gehäuse 119 umfasst ein Unterteil 121, an welchem seitlich ein Elektronikgehäuse 123 angeordnet ist. In dem Elektronikgehäuse 123 sind elektrische und/oder elektronische Komponenten der Vakuumpumpe 111 untergebracht, z.B. zum Betreiben eines in der Vakuumpumpe angeordneten Elektromotors 125. Am Elektronikgehäuse 123 sind mehrere Anschlüsse 127 für Zubehör vorgesehen. Außerdem sind eine Datenschnittstelle 129, z.B. gemäß dem RS485-Standard, und ein Stromversorgungsanschluss 131 am Elektronikgehäuse 123 angeordnet.In the orientation of the vacuum pump, the inlet flange 113 forms according to FIG Fig. 1 the upper end of the housing 119 of the vacuum pump 111. The housing 119 comprises a lower part 121 on which an electronics housing 123 is arranged laterally. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123. In addition, a data interface 129, for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.

Am Gehäuse 119 der Turbomolekularpumpe 111 ist ein Fluteinlass 133, insbesondere in Form eines Flutventils, vorgesehen, über den die Vakuumpumpe 111 geflutet werden kann. Im Bereich des Unterteils 121 ist ferner noch ein Sperrgasanschluss 135, der auch als Spülgasanschluss bezeichnet wird, angeordnet, über welchen Spülgas zum Schutz des Elektromotors 125 (siehe z.B. Fig. 3) vor dem von der Pumpe geförderten Gas in den Motorraum 137, in welchem der Elektromotor 125 in der Vakuumpumpe 111 untergebracht ist, gebracht werden kann. Im Unterteil 121 sind ferner noch zwei Kühlmittelanschlüsse 139 angeordnet, wobei einer der Kühlmittelanschlüsse als Einlass und der andere Kühlmittelanschluss als Auslass für Kühlmittel vorgesehen ist, das zu Kühlzwecken in die Vakuumpumpe geleitet werden kann.A flood inlet 133, in particular in the form of a flood valve, is provided on the housing 119 of the turbo molecular pump 111, via which the vacuum pump 111 can be flooded. In the area of the lower part 121 there is also a sealing gas connection 135, which is also referred to as a purge gas connection, via which purge gas to protect the electric motor 125 (see e.g. Fig. 3 ) can be brought into the engine compartment 137, in which the electric motor 125 in the vacuum pump 111 is accommodated, before the gas conveyed by the pump. Two coolant connections 139 are also arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be passed into the vacuum pump for cooling purposes.

Die untere Seite 141 der Vakuumpumpe kann als Standfläche dienen, sodass die Vakuumpumpe 111 auf der Unterseite 141 stehend betrieben werden kann. Die Vakuumpumpe 111 kann aber auch über den Einlassflansch 113 an einem Rezipienten befestigt werden und somit gewissermaßen hängend betrieben werden. Außerdem kann die Vakuumpumpe 111 so gestaltet sein, dass sie auch in Betrieb genommen werden kann, wenn sie auf andere Weise ausgerichtet ist als in Fig. 1 gezeigt ist. Es lassen sich auch Ausführungsformen der Vakuumpumpe realisieren, bei der die Unterseite 141 nicht nach unten, sondern zur Seite gewandt oder nach oben gerichtet angeordnet werden kann.The lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the lower side 141. The vacuum pump 111 can, however, also be attached to a recipient via the inlet flange 113 and can thus be operated in a suspended manner, as it were. In addition, the vacuum pump 111 can be designed so that it is also in operation can be taken if it is oriented in a different way than in Fig. 1 is shown. Embodiments of the vacuum pump can also be implemented in which the underside 141 cannot be arranged facing downwards, but facing to the side or facing upwards.

An der Unterseite 141, die in Fig. 2 dargestellt ist, sind noch diverse Schrauben 143 angeordnet, mittels denen hier nicht weiter spezifizierte Bauteile der Vakuumpumpe aneinander befestigt sind. Beispielsweise ist ein Lagerdeckel 145 an der Unterseite 141 befestigt.At the bottom 141, which in Fig. 2 is shown, various screws 143 are also arranged, by means of which components of the vacuum pump not specified here are attached to one another. For example, a bearing cap 145 is attached to the underside 141.

An der Unterseite 141 sind außerdem Befestigungsbohrungen 147 angeordnet, über welche die Pumpe 111 beispielsweise an einer Auflagefläche befestigt werden kann.Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened to a support surface, for example.

In den Figuren 2 bis 5 ist eine Kühlmittelleitung 148 dargestellt, in welcher das über die Kühlmittelanschlüsse 139 ein- und ausgeleitete Kühlmittel zirkulieren kann.In the Figures 2 to 5 a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.

Wie die Schnittdarstellungen der Figuren 3 bis 5 zeigen, umfasst die Vakuumpumpe mehrere Prozessgaspumpstufen zur Förderung des an dem Pumpeneinlass 115 anstehenden Prozessgases zu dem Pumpenauslass 117.Like the sectional views of the Figures 3 to 5 show, the vacuum pump comprises several process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.

In dem Gehäuse 119 ist ein Rotor 149 angeordnet, der eine um eine Rotationsachse 151 drehbare Rotorwelle 153 aufweist.A rotor 149 is arranged in the housing 119 and has a rotor shaft 153 which is rotatable about an axis of rotation 151.

Die Turbomolekularpumpe 111 umfasst mehrere pumpwirksam miteinander in Serie geschaltete turbomolekulare Pumpstufen mit mehreren an der Rotorwelle 153 befestigten radialen Rotorscheiben 155 und zwischen den Rotorscheiben 155 angeordneten und in dem Gehäuse 119 festgelegten Statorscheiben 157. Dabei bilden eine Rotorscheibe 155 und eine benachbarte Statorscheibe 157 jeweils eine turbomolekulare Pumpstufe. Die Statorscheiben 157 sind durch Abstandsringe 159 in einem gewünschten axialen Abstand zueinander gehalten.The turbomolecular pump 111 comprises several turbomolecular pump stages connected in series with one another, with several radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119. A rotor disk 155 and an adjacent stator disk 157 each form one turbomolecular pumping stage. The stator disks 157 are held at a desired axial distance from one another by spacer rings 159.

Die Vakuumpumpe umfasst außerdem in radialer Richtung ineinander angeordnete und pumpwirksam miteinander in Serie geschaltete Holweck-Pumpstufen. Der Rotor der Holweck-Pumpstufen umfasst eine an der Rotorwelle 153 angeordnete Rotornabe 161 und zwei an der Rotornabe 161 befestigte und von dieser getragene zylindermantelförmige Holweck-Rotorhülsen 163, 165, die koaxial zur Rotationsachse 151 orientiert und in radialer Richtung ineinander geschachtelt sind. Ferner sind zwei zylindermantelförmige Holweck-Statorhülsen 167, 169 vorgesehen, die ebenfalls koaxial zu der Rotationsachse 151 orientiert und in radialer Richtung gesehen ineinander geschachtelt sind.The vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for effective pumping. The rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder-jacket-shaped Holweck rotor sleeves 163, 165 which are attached to the rotor hub 161 and carried by the latter, which are oriented coaxially to the axis of rotation 151 and nested in one another in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and, viewed in the radial direction, are nested one inside the other.

Die pumpaktiven Oberflächen der Holweck-Pumpstufen sind durch die Mantelflächen, also durch die radialen Innen- und/oder Außenflächen, der Holweck-Rotorhülsen 163, 165 und der Holweck-Statorhülsen 167, 169 gebildet. Die radiale Innenfläche der äußeren Holweck-Statorhülse 167 liegt der radialen Außenfläche der äußeren Holweck-Rotorhülse 163 unter Ausbildung eines radialen Holweck-Spalts 171 gegenüber und bildet mit dieser die der Turbomolekularpumpen nachfolgende erste Holweck-Pumpstufe. Die radiale Innenfläche der äußeren Holweck-Rotorhülse 163 steht der radialen Außenfläche der inneren Holweck-Statorhülse 169 unter Ausbildung eines radialen Holweck-Spalts 173 gegenüber und bildet mit dieser eine zweite Holweck-Pumpstufe. Die radiale Innenfläche der inneren Holweck-Statorhülse 169 liegt der radialen Außenfläche der inneren Holweck-Rotorhülse 165 unter Ausbildung eines radialen Holweck-Spalts 175 gegenüber und bildet mit dieser die dritte Holweck-Pumpstufe.The active pumping surfaces of the Holweck pump stages are formed by the jacket surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169. The radial inner surface of the outer Holweck stator sleeve 167 lies opposite the radial outer surface of the outer Holweck rotor sleeve 163 forming a radial Holweck gap 171 and with this forms the first Holweck pump stage following the turbo molecular pumps. The radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and with this forms a second Holweck pumping stage. The radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165 with the formation of a radial Holweck gap 175 and with this forms the third Holweck pumping stage.

Am unteren Ende der Holweck-Rotorhülse 163 kann ein radial verlaufender Kanal vorgesehen sein, über den der radial außenliegende Holweck-Spalt 171 mit dem mittleren Holweck-Spalt 173 verbunden ist. Außerdem kann am oberen Ende der inneren Holweck-Statorhülse 169 ein radial verlaufender Kanal vorgesehen sein, über den der mittlere Holweck-Spalt 173 mit dem radial innenliegenden Holweck-Spalt 175 verbunden ist. Dadurch werden die ineinander geschachtelten Holweck-Pumpstufen in Serie miteinander geschaltet. Am unteren Ende der radial innenliegenden Holweck-Rotorhülse 165 kann ferner ein Verbindungskanal 179 zum Auslass 117 vorgesehen sein.At the lower end of the Holweck rotor sleeve 163, a radially running channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173. Also, at the top of the In the inner Holweck stator sleeve 169, a radially running channel can be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. As a result, the nested Holweck pump stages are connected in series with one another. A connecting channel 179 to the outlet 117 can also be provided at the lower end of the radially inner Holweck rotor sleeve 165.

Die vorstehend genannten pumpaktiven Oberflächen der Holweck-Statorhülsen 163, 165 weisen jeweils mehrere spiralförmig um die Rotationsachse 151 herum in axialer Richtung verlaufende Holweck-Nuten auf, während die gegenüberliegenden Mantelflächen der Holweck-Rotorhülsen 163, 165 glatt ausgebildet sind und das Gas zum Betrieb der Vakuumpumpe 111 in den Holweck-Nuten vorantreiben.The aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running helically around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.

Zur drehbaren Lagerung der Rotorwelle 153 sind ein Wälzlager 181 im Bereich des Pumpenauslasses 117 und ein Permanentmagnetlager 183 im Bereich des Pumpeneinlasses 115 vorgesehen.For the rotatable mounting of the rotor shaft 153, a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnetic bearing 183 in the area of the pump inlet 115.

Im Bereich des Wälzlagers 181 ist an der Rotorwelle 153 eine konische Spritzmutter 185 mit einem zu dem Wälzlager 181 hin zunehmenden Außendurchmesser vorgesehen. Die Spritzmutter 185 steht mit mindestens einem Abstreifer eines Betriebsmittelspeichers in gleitendem Kontakt. Der Betriebsmittelspeicher umfasst mehrere aufeinander gestapelte saugfähige Scheiben 187, die mit einem Betriebsmittel für das Wälzlager 181, z.B. mit einem Schmiermittel, getränkt sind.In the area of the roller bearing 181, a conical injection molded nut 185 with an outer diameter that increases towards the roller bearing 181 is provided on the rotor shaft 153. The injection-molded nut 185 is in sliding contact with at least one stripper of an operating medium store. The operating medium reservoir comprises several absorbent disks 187 stacked on top of one another, which are impregnated with an operating medium for the roller bearing 181, e.g. with a lubricant.

Im Betrieb der Vakuumpumpe 111 wird das Betriebsmittel durch kapillare Wirkung von dem Betriebsmittelspeicher über den Abstreifer auf die rotierende Spritzmutter 185 übertragen und in Folge der Zentrifugalkraft entlang der Spritzmutter 185 in Richtung des größer werdenden Außendurchmessers der Spritzmutter 185 zu dem Wälzlager 181 hin gefördert, wo es z.B. eine schmierende Funktion erfüllt.During operation of the vacuum pump 111, the operating medium is transferred by capillary action from the operating medium reservoir via the scraper to the rotating injection nut 185 and, as a result of the centrifugal force, is conveyed along the injection nut 185 in the direction of the increasing outer diameter of the injection nut 185 to the roller bearing 181, where it eg fulfills a lubricating function.

Das Wälzlager 181 und der Betriebsmittelspeicher sind durch einen wannenförmigen Einsatz 189 und den Lagerdeckel 145 in der Vakuumpumpe eingefasst.The roller bearing 181 and the operating medium store are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.

Das Permanentmagnetlager 183 umfasst eine rotorseitige Lagerhälfte 191 und eine statorseitige Lagerhälfte 193, welche jeweils einen Ringstapel aus mehreren in axialer Richtung aufeinander gestapelten permanentmagnetischen Ringen 195, 197 umfassen. Die Ringmagnete 195, 197 liegen einander unter Ausbildung eines radialen Lagerspalts 199 gegenüber, wobei die rotorseitigen Ringmagnete 195 radial außen und die statorseitigen Ringmagnete 197 radial innen angeordnet sind. Das in dem Lagerspalt 199 vorhandene magnetische Feld ruft magnetische Abstoßungskräfte zwischen den Ringmagneten 195, 197 hervor, welche eine radiale Lagerung der Rotorwelle 153 bewirken. Die rotorseitigen Ringmagnete 195 sind von einem Trägerabschnitt 201 der Rotorwelle 153 getragen, welcher die Ringmagnete 195 radial außenseitig umgibt. Die statorseitigen Ringmagnete 197 sind von einem statorseitigen Trägerabschnitt 203 getragen, welcher sich durch die Ringmagnete 197 hindurch erstreckt und an radialen Streben 205 des Gehäuses 119 aufgehängt ist. Parallel zu der Rotationsachse 151 sind die rotorseitigen Ringmagnete 195 durch ein mit dem Trägerabschnitt 203 gekoppeltes Deckelelement 207 festgelegt. Die statorseitigen Ringmagnete 197 sind parallel zu der Rotationsachse 151 in der einen Richtung durch einen mit dem Trägerabschnitt 203 verbundenen Befestigungsring 209 sowie einen mit dem Trägerabschnitt 203 verbundenen Befestigungsring 211 festgelegt. Zwischen dem Befestigungsring 211 und den Ringmagneten 197 kann außerdem eine Tellerfeder 213 vorgesehen sein.The permanent magnetic bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, which each comprise a ring stack of several permanent magnetic rings 195, 197 stacked on top of one another in the axial direction. The ring magnets 195, 197 are opposite one another with the formation of a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside. The magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially. The rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153 which surrounds the ring magnets 195 radially on the outside. The stator-side ring magnets 197 are carried by a stator-side support section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119. The ring magnets 195 on the rotor side are fixed parallel to the axis of rotation 151 by a cover element 207 coupled to the carrier section 203. The stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. A plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.

Innerhalb des Magnetlagers ist ein Not- bzw. Fanglager 215 vorgesehen, welches im normalen Betrieb der Vakuumpumpe 111 ohne Berührung leer läuft und erst bei einer übermäßigen radialen Auslenkung des Rotors 149 relativ zu dem Stator in Eingriff gelangt, um einen radialen Anschlag für den Rotor 149 zu bilden, da eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen verhindert wird. Das Fanglager 215 ist als ungeschmiertes Wälzlager ausgebildet und bildet mit dem Rotor 149 und/oder dem Stator einen radialen Spalt, welcher bewirkt, dass das Fanglager 215 im normalen Pumpbetrieb außer Eingriff ist. Die radiale Auslenkung, bei der das Fanglager 215 in Eingriff gelangt, ist groß genug bemessen, sodass das Fanglager 215 im normalen Betrieb der Vakuumpumpe nicht in Eingriff gelangt, und gleichzeitig klein genug, sodass eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen unter allen Umständen verhindert wird.An emergency or retainer bearing 215 is provided within the magnetic bearing, which runs empty during normal operation of the vacuum pump 111 without contact and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator to create a radial stop for the rotor 149 to form, since a collision of the rotor-side structures with the stator-side structures is prevented will. The backup bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which has the effect that the backup bearing 215 is disengaged during normal pumping operation. The radial deflection at which the backup bearing 215 engages is dimensioned large enough that the backup bearing 215 does not come into engagement during normal operation of the vacuum pump, and at the same time small enough that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.

Die Vakuumpumpe 111 umfasst den Elektromotor 125 zum drehenden Antreiben des Rotors 149. Der Anker des Elektromotors 125 ist durch den Rotor 149 gebildet, dessen Rotorwelle 153 sich durch den Motorstator 217 hindurch erstreckt. Auf den sich durch den Motorstator 217 hindurch erstreckenden Abschnitt der Rotorwelle 153 kann radial außenseitig oder eingebettet eine Permanentmagnetanordnung angeordnet sein. Zwischen dem Motorstator 217 und dem sich durch den Motorstator 217 hindurch erstreckenden Abschnitt des Rotors 149 ist ein Zwischenraum 219 angeordnet, welcher einen radialen Motorspalt umfasst, über den sich der Motorstator 217 und die Permanentmagnetanordnung zur Übertragung des Antriebsmoments magnetisch beeinflussen können.The vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149. The armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217. A permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 extending through the motor stator 217. Between the motor stator 217 and the section of the rotor 149 extending through the motor stator 217 there is an intermediate space 219 which comprises a radial motor gap via which the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can magnetically influence each other.

Der Motorstator 217 ist in dem Gehäuse innerhalb des für den Elektromotor 125 vorgesehenen Motorraums 137 festgelegt. Über den Sperrgasanschluss 135 kann ein Sperrgas, das auch als Spülgas bezeichnet wird, und bei dem es sich beispielsweise um Luft oder um Stickstoff handeln kann, in den Motorraum 137 gelangen. Über das Sperrgas kann der Elektromotor 125 vor Prozessgas, z.B. vor korrosiv wirkenden Anteilen des Prozessgases, geschützt werden. Der Motorraum 137 kann auch über den Pumpenauslass 117 evakuiert werden, d.h. im Motorraum 137 herrscht zumindest annäherungsweise der von der am Pumpenauslass 117 angeschlossenen Vorvakuumpumpe bewirkte Vakuumdruck.The motor stator 217 is fixed in the housing within the motor compartment 137 provided for the electric motor 125. A sealing gas, which is also referred to as a flushing gas and which can be air or nitrogen, for example, can enter the engine compartment 137 via the sealing gas connection 135. The electric motor 125 can be protected from process gas, for example from corrosive components of the process gas, via the sealing gas. The engine compartment 137 can also be evacuated via the pump outlet 117, ie the vacuum pressure produced by the backing pump connected to the pump outlet 117 is at least approximately in the engine compartment 137.

Zwischen der Rotornabe 161 und einer den Motorraum 137 begrenzenden Wandung 221 kann außerdem eine sog. und an sich bekannte Labyrinthdichtung 223 vorgesehen sein, insbesondere um eine bessere Abdichtung des Motorraums 217 gegenüber den radial außerhalb liegenden Holweck-Pumpstufen zu erreichen.A so-called labyrinth seal 223, known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the engine compartment 137, in particular to achieve better sealing of the motor compartment 217 from the radially outside Holweck pump stages.

Die vorstehende Beschreibung der Turbomolekularpumpe 111, welche eine Holweckpumpstufe umfasst, dient der Illustration des technischen Hintergrunds. Die Pump 111 kann insbesondere erfindungsgemäß weitergebildet werden. Umgekehrt kann die erfindungsgemäße Vakuumpumpe insbesondere vorteilhaft durch einzelne oder mehrere Merkmale der vorstehend beschriebenen Pumpe 111 weitergebildet werden.The above description of the turbo molecular pump 111, which comprises a Holweck pump stage, serves to illustrate the technical background. The pump 111 can in particular be developed according to the invention. Conversely, the vacuum pump according to the invention can, in particular, advantageously be developed further by means of individual or several features of the pump 111 described above.

In den Fig. 6 und 7 ist ein Gehäusebauteil 10 einer erfindungsgemäßen Vakuumpumpe jeweils im Querschnitt gezeigt, wobei die Schnittebene entlang einer Rotorachse 12 eines hier nicht dargestellten Holweckrotors verläuft.In the Figures 6 and 7 a housing component 10 of a vacuum pump according to the invention is shown in cross section, the sectional plane running along a rotor axis 12 of a Holweck rotor, not shown here.

Die Vakuumpumpe umfasst eine Holweckpumpstufe 14, von der lediglich die statorseitigen Elemente sichtbar sind, nämlich zumindest eine gewindeartige Holwecknut 16, die in dem Gehäusebauteil 10 ausgebildet ist. Im Zusammenbau rotiert in der Holweckpumpstufe 14 bevorzugt eine Holweck-Rotorhülse, zum Beispiel wie sie im Zusammenhang mit den Fig. 1 bis 5 beschrieben ist. In dieser Ausführungsform umfasst die Holweckpumpstufe 14 mehrere parallel verlaufende Holwecknuten 16, ist also mehrgängig ausgebildet.The vacuum pump comprises a Holweck pump stage 14, of which only the stator-side elements are visible, namely at least one thread-like Holweck groove 16 which is formed in the housing component 10. When assembled, a Holweck rotor sleeve preferably rotates in the Holweck pump stage 14, for example as it is used in connection with the Figs. 1 to 5 is described. In this embodiment, the Holweck pump stage 14 comprises a plurality of Holweck grooves 16 running in parallel, that is to say it is designed with multiple threads.

Im dargestellten Querschnitt sind Seitenwände 18 sichtbar, die die jeweiligen Nuten 16 begrenzen und voneinander trennen. Die Seitenwände 18 sind schräg in Bezug auf die Rotorachse 12 angeordnet. In Fig. 6 ist ein Winkel 20 zwischen einer Seitenwand 18 und der Rotorachse 12 bzw. einem Nutgrund 22 angedeutet. Dieser beträgt in der gezeigten Ausführungsform etwa 70° und kann bevorzugt wenigstens 50° und/oder höchstens 80° betragen. In der gezeigten Ausführungsform sind alle Seitenwände 18 parallel zueinander und im Winkel 20 schräg zur Rotorachse 12 angeordnet.In the cross section shown, side walls 18 are visible, which delimit the respective grooves 16 and separate them from one another. The side walls 18 are arranged obliquely with respect to the rotor axis 12. In Fig. 6 an angle 20 is indicated between a side wall 18 and the rotor axis 12 or a groove base 22. In the embodiment shown, this is approximately 70 ° and can be preferred be at least 50 ° and / or at most 80 °. In the embodiment shown, all side walls 18 are arranged parallel to one another and at an angle 20 obliquely to the rotor axis 12.

Eine jeweilige Holwecknut 16 ist in axialer Richtung durch die Seitenwände 18 und in radialer Richtung durch einen Nutgrund 22 begrenzt, der sich zwischen den Seitenwänden 18 erstreckt. Der Nutgrund 22 definiert entlang seiner axialen Erstreckung und über mehrere Gänge bzw. Windungen hinweg eine Grundeinhüllende. Diese ist in einem ersten Abschnitt 24 konisch und in einem zweiten Abschnitt 26 zylindrisch ausgebildet. Der Nutgrund 22 ist allgemein eben ausgebildet, wobei jedoch in einem Übergangsbereich zwischen dem ersten Abschnitt 24 und dem zweiten Abschnitt 26 eine Unebenheit am Nutgrund 22 vorhanden ist, welche sich insbesondere aus dem Übergang zwischen den Abschnitten 24 und 26 ergibt.A respective Holweck groove 16 is delimited in the axial direction by the side walls 18 and in the radial direction by a groove base 22 which extends between the side walls 18. The groove base 22 defines a base envelope along its axial extent and over several turns or turns. This is conical in a first section 24 and cylindrical in a second section 26. The groove base 22 is generally flat, but there is an unevenness on the groove base 22 in a transition area between the first section 24 and the second section 26, which is particularly a result of the transition between the sections 24 and 26.

Die Seitenwände 18 sind durch Stege 28 gebildet, die die Holwecknuten 16 der unterschiedlichen Gänge voneinander trennen. Die Stege 28 bzw. die Seitenwände 18 weisen ein inneres Ende auf, welches eine Inneneinhüllende definiert. Die Inneneinhüllende ist hier sowohl im ersten Abschnitt 24 als auch im zweiten Abschnitt 26 zylindrisch ausgebildet. Am inneren Ende sind die Stege 28 eben ausgebildet und parallel zur Rotorachse 12 ausgerichtet.The side walls 18 are formed by webs 28 which separate the Holweck grooves 16 of the different aisles from one another. The webs 28 and the side walls 18 have an inner end which defines an inner envelope. The inner envelope is cylindrical here both in the first section 24 and in the second section 26. At the inner end, the webs 28 are flat and aligned parallel to the rotor axis 12.

Die Holwecknut 16 ist im ersten Abschnitt 24 tiefer als im zweiten Abschnitt 26 ausgebildet, insbesondere wobei die Breite der Holwecknut 16 bevorzugt in beiden Abschnitten 24 und 26 gleich bzw. über die gesamte axiale Länge der Holweckpumpstufe bevorzugt konstant ist. Die Breite ist insbesondere durch den axialen Abstand der inneren Enden zweier Seitenwände 18 bzw. Stege 28 über eine Nut 16 definiert.The Holweck groove 16 is formed deeper in the first section 24 than in the second section 26, in particular the width of the Holweck groove 16 preferably being the same in both sections 24 and 26 or preferably constant over the entire axial length of the Holweck pumping stage. The width is defined in particular by the axial distance between the inner ends of two side walls 18 or webs 28 via a groove 16.

Der erste Abschnitt 24 bildet bevorzugt einen Einlassabschnitt der Holweckpumpstufe 14. Die in diesem Abschnitt 24 große Tiefe bzw. das relativ große Volumen der Nut 16 stellt ein besonders gutes Saugvermögen für die Holweckpumpstufe 14 bereit.The first section 24 preferably forms an inlet section of the Holweck pumping stage 14. The great depth or the relatively large volume in this section 24 the groove 16 provides a particularly good pumping speed for the Holweck pump stage 14.

In Fig. 7 ist ein Fräser 30 angedeutet, wie er beispielsweise zur Fertigung der Holwecknut 16 im ersten Abschnitt 24 geführt werden kann. Der Fräser 30 ist hier beispielhaft als Schaftfräser ausgebildet.In Fig. 7 a milling cutter 30 is indicated, such as can be performed, for example, to produce the Holwecknut 16 in the first section 24. The milling cutter 30 is designed here as an end mill by way of example.

Der Fräser 30 ist mit seiner Rotationsachse 32 schräg in Bezug auf die Rotorachse 12 bzw. eine Gewindeachse der gewindeartigen Holwecknut 16 ausgerichtet, welche der Rotorachse 12 im Zusammenbau der Vakuumpumpe entspricht. Dabei entspricht der Winkel zwischen der Rotationsachse 32 und der Rotorachse 12 demjenigen Winkel 20 der Seitenwände 18.The milling cutter 30 is aligned with its axis of rotation 32 obliquely with respect to the rotor axis 12 or a thread axis of the thread-like Holwecknut 16, which corresponds to the rotor axis 12 in the assembly of the vacuum pump. The angle between the axis of rotation 32 and the rotor axis 12 corresponds to that angle 20 of the side walls 18.

Aus Fig. 7 ist insbesondere ersichtlich, dass die Holwecknut 16 im ersten Abschnitt 24 auf einfache Weise mit dem Fräser 30 hergestellt werden kann, ohne dass ein Winkelkopf für den Fräser notwendig wäre. Insbesondere im ersten Abschnitt 24 kann somit die Holwecknut 16 auf einfache Weise hergestellt werden. Im zweiten Abschnitt 26 kann die Holwecknut 16 bevorzugt mittels Stoßen hergestellt werden.the end Fig. 7 it can be seen in particular that the Holwecknut 16 in the first section 24 can be produced in a simple manner with the milling cutter 30 without the need for an angle head for the milling cutter. In particular in the first section 24, the Holwecknut 16 can thus be produced in a simple manner. In the second section 26, the Holweck groove 16 can preferably be produced by pushing.

Im ersten bzw. Einlassabschnitt 24 der Holweckpumpstufe 14 können die ein oder mehreren Nuten 16 allgemein mit einem Fräser, z.B. mit einem Schaft- oder Scheibenfräser hergestellt werden. Die weitere Innenbearbeitung, z.B. im zweiten Abschnitt 26, kann aufgrund der Geometrie (z.B. kleiner Durchmesser) nicht oder schwierig mit einem Winkelkopf auf der Fräsmaschine möglich sein. Erfindungsgemäß kann insbesondere mit einem schräg angestellten Fräser, z.B. wie in Fig. 7 dargestellt, von außen ein, insbesondere mit der Grundeinhüllenden, konischer erster bzw. Einlassabschnitt 24 gefräst werden. Diese Fertigungsmethode führt dazu, dass die Stege 28, welche hier insbesondere solche des Stators sind, zwischen den Nuten 16 im gleichen Winkel geneigt sind, wie der Fräser selbst. Abschnitte des Stators, insbesondere der zweite Abschnitt, die auf diese Art nicht erreicht werden können, weil sie weiter im Inneren des Bauteils 10 liegen, benötigen im Allgemeinen nicht mehr die große Nuttiefe. Die Vorteile der großen Nuttiefe entfalten sich vielmehr besonders im Einlassbereich. Im zweiten Abschnitt 26 können die Nuten 16 folglich weiterhin per Stoßen hergestellt werden. Dabei sind bevorzugt auch die gestoßenen Nuten im gleichen Winkel geneigt, wie die gefrästen Nuten, insbesondere damit das Stoßwerkzeug nicht die bereits nach dem Fräsen vorhandenen Stege 28 beschädigt. Außerdem sollten die zwei Fertigungsverfahren bezüglich der Winkellage der Nuten 16 bzw. der Seitenwände 18 synchronisiert werden.In the first or inlet section 24 of the Holweck pumping stage 14, the one or more grooves 16 can generally be made with a milling cutter, for example with an end mill or disk milling cutter. Further internal machining, for example in the second section 26, may be impossible or difficult to do with an angle head on the milling machine due to the geometry (e.g. small diameter). According to the invention, in particular with an inclined milling cutter, for example as in Fig. 7 shown, a conical first or inlet section 24, in particular with the base envelope, can be milled from the outside. This manufacturing method means that the webs 28, which are in particular those of the stator here, are inclined between the slots 16 at the same angle as the milling cutter itself. Sections of the stator, in particular the second section, which cannot be reached in this way because they are further inside the component 10, generally no longer require the large slot depth. Rather, the advantages of the large groove depth are particularly evident in the inlet area. In the second section 26, the grooves 16 can consequently continue to be produced by butting. The butted grooves are preferably also inclined at the same angle as the milled grooves, in particular so that the cutting tool does not damage the webs 28 already present after the milling. In addition, the two manufacturing processes should be synchronized with regard to the angular position of the grooves 16 and the side walls 18.

BezugszeichenlisteList of reference symbols

111111
TurbomolekularpumpeTurbo molecular pump
113113
EinlassflanschInlet flange
115115
PumpeneinlassPump inlet
117117
PumpenauslassPump outlet
119119
Gehäusecasing
121121
UnterteilLower part
123123
ElektronikgehäuseElectronics housing
125125
ElektromotorElectric motor
127127
ZubehöranschlussAccessory connection
129129
DatenschnittstelleData interface
131131
StromversorgungsanschlussPower supply connection
133133
FluteinlassFlood inlet
135135
SperrgasanschlussSealing gas connection
137137
MotorraumEngine compartment
139139
KühlmittelanschlussCoolant connection
141141
Unterseitebottom
143143
Schraubescrew
145145
LagerdeckelBearing cap
147147
BefestigungsbohrungMounting hole
148148
KühlmittelleitungCoolant line
149149
Rotorrotor
151151
RotationsachseAxis of rotation
153153
RotorwelleRotor shaft
155155
RotorscheibeRotor disk
157157
StatorscheibeStator disk
159159
AbstandsringSpacer ring
161161
RotornabeRotor hub
163163
Holweck-RotorhülseHolweck rotor sleeve
165165
Holweck-RotorhülseHolweck rotor sleeve
167167
Holweck-StatorhülseHolweck stator sleeve
169169
Holweck-StatorhülseHolweck stator sleeve
171171
Holweck-SpaltHolweck gap
173173
Holweck-SpaltHolweck gap
175175
Holweck-SpaltHolweck gap
179179
VerbindungskanalConnection channel
181181
Wälzlagerroller bearing
183183
PermanentmagnetlagerPermanent magnet bearings
185185
SpritzmutterInjection nut
187187
Scheibedisc
189189
Einsatzmission
191191
rotorseitige Lagerhälftebearing half on the rotor side
193193
statorseitige Lagerhälftestator-side bearing half
195195
RingmagnetRing magnet
197197
RingmagnetRing magnet
199199
LagerspaltBearing gap
201201
TrägerabschnittBeam section
203203
TrägerabschnittBeam section
205205
radiale Streberadial strut
207207
DeckelelementCover element
209209
StützringSupport ring
211211
BefestigungsringFastening ring
213213
TellerfederDisc spring
215215
Not- bzw. FanglagerEmergency or fishing camp
217217
MotorstatorMotor stator
219219
ZwischenraumSpace
221221
WandungWall
223223
LabyrinthdichtungLabyrinth seal
1010
GehäusebauteilHousing component
1212th
Rotorachse/GewindeachseRotor axis / thread axis
1414th
HolweckpumpstufeHolweck pumping stage
1616
HolwecknutHolwecknut
1818th
SeitenwandSide wall
2020th
Winkelangle
2222nd
NutgrundGroove base
2424
erster Abschnittfirst section
2626th
zweiter Abschnittsecond part
2828
Stegweb
3030th
FräserMilling cutter
3232
RotationsachseAxis of rotation

Claims (14)

  1. A vacuum pump comprising a Holweck pump stage (14) having a Holweck stator and a Holweck rotor which rotates about a rotor axis (12) in the operation of the vacuum pump and which cooperates with the Holweck stator to generate a pumping effect,
    wherein the Holweck pump stage (14) has at least one thread-like Holweck groove (16) which is bounded by at least one side wall (18) and which forms an internal thread,
    wherein the side wall (18) is at least sectionally formed obliquely with respect to the rotor axis (12) in a cross-section in which the rotor axis (12) lies,
    characterized in that
    the Holweck groove (16) has a groove base (22) which defines a base envelope, with the base envelope being formed cylindrically in at least one section (26) of the Holweck groove (16).
  2. A vacuum pump in accordance with claim 1,
    wherein the Holweck stator has the Holweck groove (16).
  3. A vacuum pump in accordance with at least one of the preceding claims,
    wherein the base envelope is formed conically in a first section (24) of the Holweck groove (16), and/or wherein in a first section (24) of the Holweck groove (16) the groove base (22) is formed obliquely with respect to the rotor axis (12) in the cross-section.
  4. A vacuum pump in accordance with claim 3,
    wherein the first section (24) is an inlet section of the Holweck pump stage (14) with respect to a pump direction.
  5. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the section mentioned in claim 1 is a second section (26) of the Holweck groove (16), in particular wherein the groove base (22) is formed in parallel with the rotor axis (12) in the second section (26) of the Holweck groove (16).
  6. A vacuum pump in accordance with claim 5,
    wherein a radially inner end of the side wall (18) defines an inner envelope which is cylindrical in both a first section (24) and the second section (26).
  7. A vacuum pump in accordance with claim 5 or claim 6,
    wherein the side wall (18) is arranged perpendicular to an adjacent groove base (22) in a first section (24) and obliquely to an adjacent groove base (22) in a second section (26).
  8. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the side wall (18) is arranged at an angle (20) to the rotor axis (12) which amounts to at least 50° and/or at most 80°.
  9. A vacuum pump (10) in accordance with at least one of the preceding claims,
    wherein the side wall (18) is formed by a web (28).
  10. A method of manufacturing a vacuum pump in accordance with any one of the preceding claims,
    wherein the Holweck groove (16) is produced by milling in at least a first section (24).
  11. A method in accordance with claim 10,
    wherein a milling cutter (30) is guided obliquely with respect to a thread axis (12) of the Holweck groove (16).
  12. A method in accordance with claim 10 or claim 11,
    wherein the first section (24) is an inlet section of the Holweck pump stage (14).
  13. A method in accordance with at least one of the claims 10 to 12,
    wherein the section mentioned in claim 1 is a second section (26) of the Holweck groove (16), in particular wherein the Holweck groove (16) is produced by shaping in the second section (26).
  14. A method in accordance with claim 13,
    wherein, in both the first section (24) and the second section (26), the side wall (18) bounding the Holweck groove (16) is formed obliquely to the thread axis (12) in a cross-section in which a thread axis (12) of the Holweck groove (18) lies.
EP19210020.4A 2019-11-19 2019-11-19 Vacuum pump and method for producing same Active EP3670924B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19210020.4A EP3670924B1 (en) 2019-11-19 2019-11-19 Vacuum pump and method for producing same
JP2020159322A JP7032500B2 (en) 2019-11-19 2020-09-24 Vacuum pumps and how to make such vacuum pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19210020.4A EP3670924B1 (en) 2019-11-19 2019-11-19 Vacuum pump and method for producing same

Publications (2)

Publication Number Publication Date
EP3670924A1 EP3670924A1 (en) 2020-06-24
EP3670924B1 true EP3670924B1 (en) 2021-11-17

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EP (1) EP3670924B1 (en)
JP (1) JP7032500B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2601313A (en) * 2020-11-25 2022-06-01 Edwards Ltd Drag pumping mechanism for a turbomolecular pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7090460B2 (en) * 2000-09-30 2006-08-15 Leybold Vakuum Gmbh Pump embodied as a side channel pump
EP1797331A1 (en) * 2004-10-01 2007-06-20 Oerlikon Leybold Vacuum GmbH Drag vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
JPH02114796U (en) * 1989-02-28 1990-09-13
JPH03275997A (en) * 1990-03-26 1991-12-06 Nippon Soken Inc Variable displacement vacuum pump
JP3026217B1 (en) * 1998-10-28 2000-03-27 セイコー精機株式会社 Vacuum pump
DE10210404A1 (en) * 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Method for manufacturing the rotor of a friction vacuum pump and rotor manufactured using this method
KR101773632B1 (en) * 2009-12-11 2017-08-31 에드워즈 가부시키가이샤 Cylindrical fixed member of thread-groove exhaust unit and vacuum pump using same
DE202013009462U1 (en) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Carrier element for tubular elements of a Holweck stage
DE102014105582A1 (en) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7090460B2 (en) * 2000-09-30 2006-08-15 Leybold Vakuum Gmbh Pump embodied as a side channel pump
EP1797331A1 (en) * 2004-10-01 2007-06-20 Oerlikon Leybold Vacuum GmbH Drag vacuum pump

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JP2021080917A (en) 2021-05-27
EP3670924A1 (en) 2020-06-24

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