EP1797331A1 - Drag vacuum pump - Google Patents

Drag vacuum pump

Info

Publication number
EP1797331A1
EP1797331A1 EP05791919A EP05791919A EP1797331A1 EP 1797331 A1 EP1797331 A1 EP 1797331A1 EP 05791919 A EP05791919 A EP 05791919A EP 05791919 A EP05791919 A EP 05791919A EP 1797331 A1 EP1797331 A1 EP 1797331A1
Authority
EP
European Patent Office
Prior art keywords
housing
rotor
pump
vacuum pump
cartridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05791919A
Other languages
German (de)
French (fr)
Other versions
EP1797331B1 (en
Inventor
Ralf Adamietz
Roland Blumenthal
Dirk Kalisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1797331A1 publication Critical patent/EP1797331A1/en
Application granted granted Critical
Publication of EP1797331B1 publication Critical patent/EP1797331B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a Reübungvakuumpumpe with a housing having a flugclenfine pump stator, a rotor drive and a rotor bearing.
  • the three housing parts are a stator housing part, an outlet housing part part, of which a cartridge having the motor and / or the bearing is held, and a bearing housing part. Between each two adjacent housing parts corresponding seals are arranged to produce the required tightness, which are difficult or impossible, for example, with a corrosion-inhibiting coating, can be coated under certain circumstances. Despite careful installation, leaks in the area of seals can never be completely ruled out. Furthermore, the temperature behavior of the entire housing is inhomogeneous because of the multi-part of the housing.
  • the object of the invention is to improve the physical properties of a friction vacuum pump.
  • the housing is integrally formed over its entire axial length, so that the one-piece housing surrounds the entire axial length of the pump rotor, the rotor drive and the rotor bearing.
  • the integral nature of the housing ensures a homogeneous temperature behavior of the housing. By eliminating seals, the tightness of the housing is also ensured in the long term.
  • the housing itself does not have to consist of several parts assembled together, so that assembly work and resulting error sources omitted by the elimination of seals in the area of the housing, the inside of the housing is easy and complete coatable.
  • the friction vacuum pump housing merely has an end cap which has no supporting function and therefore does not require any particular precision in assembly.
  • the one-piece design of the housing improves a large number of physical properties of the friction vacuum pump, in particular the temperature behavior, the tightness and the quality of a housing-side coating
  • the rotor bearing and the rotor drive are arranged in a cartridge, which is held by the housing and is surrounded over its entire axial length of the housing.
  • a cartridge is understood to mean an arrangement which consists of a cartridge housing which is cup-shaped or completely closed, and in which a shaft is rotatably mounted in a rotor bearing which can be driven by a rotor drive located in the cartridge.
  • the storage and the drive are arranged completely pre-assembled in the closed or almost closed cartridge.
  • the shaft protruding from the cartridge may be connected to the pump rotor, and this assembly may then be inserted into the housing with the cartridge being mounted in the housing interior.
  • the cartridge has a pot-shaped housing which is formed e ⁇ nstuckig with the friction vacuum pump housing. After the rotor bearing and the rotor drive are inserted into the cup-shaped housing, the pot opening is closed by a cartridge lid. Due to the one-piece design of the friction vacuum pump housing with the cup-shaped cartridge housing, the assembly is simplified as a whole, leaks are reduced and in particular a more precise positioning of the cartridge or the rotor drive and the rotor bearing is ensured.
  • the axial length of the cartridge is at least 50% surrounded by the pump rotor, i. the cartridge projects axially into the pot-shaped pump rotor with at least half of its axial length. In this way, a compact construction of the friction vacuum pump is realized with respect to the overall axial length.
  • a part of the cartridge housing is formed by the friction vacuum pump housing.
  • the cartridge housing has two sections, one facing the rotor side and one facing away from the rotor, from the mounting location of the cartridge on the housing.
  • the portion of the cartridge facing away from the rotor may be formed by the friction vacuum pump housing, i. the cup-shaped cartridge case does not have a cartridge-type lid, but is closed by the aspiration vacuum pump housing. As a result, the number of components is reduced overall.
  • the housing has on the inside a circular shoulder, on which the cartridge preferably bears on the suction side and to which it is attached
  • the cartridge is preferably inserted into the housing together with the rotor from the suction nozzle.
  • the cartridge is placed on the circular shoulder and preferably fastened from the pressure side of the heel with suitable fastening means, for example with threaded screws.
  • the circular shoulder is easy to produce and allows a gas-tight attachment of the cartridge to the housing.
  • the pump rotor is a Holweck pump rotor.
  • the radial plane surface between a housing-side stator wall and a rotor-side hub can shrink towards the pressure side.
  • the figure shows a Reibungsvakuumpumpe invention in longitudinal section
  • a friction vacuum pump IO is shown, which is a screw pump, also called Holwcck pump.
  • the friction vacuum pump 10 consists essentially of a suction-side towards the funnel-shaped narrowing housing 12, arranged in the housing 12 and mounted cartridge 14, which includes a rotor bearing, not shown, and a rotor drive, not shown, and a pump rotor 16, the plurality of helically arranged wings 18 has.
  • the housing 12 is integrally formed and surrounds the entire axial length of the pump rotor 16 and the cartridge containing the rotor drive and the rotor bearing 14.
  • the pressure-side end of the housing 12 is through a front-side housing cover! 20 closed.
  • a circular shoulder 22 is provided on its inner circumference, on which a corresponding circular shoulder 24 of the cartridge 14 is supported gas-tight. The paragraphs 22, 24 of the housing 12 and the cartridge 14 are bolted together.
  • a rotor shaft 26 From the cartridge protrudes at its suction end a rotor shaft 26 out, which holds the rotor 16.
  • the rotor 16 is connected to the rotor shaft, for example screwed.
  • the rotor hub 28 of the rotor 16 tapers towards the suction side.
  • the inside of the housing 12 forms a stator 30, which widens towards the suction side. Due to the extension of the inner diameter of the stator and the reduction of the outer diameter of the rotor hub 28 to Saugseitc out the radial plane surface between the stator 30 and the rotor hub 28 is increased towards the Saugseitc out and reduced to the pressure side.
  • the housing 12 has a gas inlet 32 at its one suction-side axial end. On the pressure side of the pump rotor 16, a radial gas outlet 34 is provided *
  • the housing 12 in the part in which it encloses the vacuum not a single seal on with a subsequent GescouseteÜ.
  • a homogeneous temperature behavior is realized. Coatings of the stator wall 30 are free of discontinuities. Lack of a seal between two housing parts and no leaks can occur.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

A friction vacuum pump ( 10 ) comprises a housing ( 12 ) defining a vaneless pump stator ( 30 ), a rotor drive and a rotor support which rotatably supports a pump rotor ( 16 ) provided with a vane ( 18 ). The housing ( 12 ) surrounds the overall axial length of the pump rotor ( 16 ), the rotor drive and the rotor support. Prior art housings are of multipart configuration and thus comprise seals between the housing portions. The seals are difficult to coat and may be or become locations where leaks occur. In contrast, the housing ( 12 ) is of one-piece configuration such that, in any case, the region of the housing ( 12 ) which is in contact with the vacuum gas is free of seals.

Description

051744WO Sg-Eb/q" 051744WO Sg-Eb / q "
ReibunqsvakuunnpumpcReibunqsvakuunnpumpc
Die Erfindung bezieht sich auf eine Reϊbungsvakuumpumpe mit einem Gehäuse, das einen flugclfreien Pumpenstator, einen Rotorantrieb und eine Rotorlagerung aufweist.The invention relates to a Reübungvakuumpumpe with a housing having a flugclfreien pump stator, a rotor drive and a rotor bearing.
Das Gehäuse derartiger Reibungsvakuumpumpen, beispielsweise Turbomolckularpumpen oder Holweckpumpen, umgibt die gesamte axiale Länge des Pumpenrotors, des Rotorantriebes und der Rotorlagerung. Aus WO 2004/015 272 A] ist eine Schraubenpumpe bekannt, deren Gehäuse im Wesentlichen aus - J -The housing of such friction vacuum pumps, for example turbomolocular pumps or Holweck pumps, surrounds the entire axial length of the pump rotor, the rotor drive and the rotor bearing. From WO 2004/015 272 A] a screw pump is known, whose housing consists essentially of - J -
drei axial aneinander anschließenden Teilen besteht, die zu dem Gehäuse zusammengefügt, beispielsweise miteinander verschraubt sind. Die drei Gehäuseteile sind ein Statorgehäuseteil, ein Auslass-Gehäuscteil, von dem eine den Motor und/oder die Lagerung aufweisende Kartusche gehalten wird, sowie ein Lagergehäuseteil. Zwischen jeweils zwei aneinander angrenzenden Gehäuseteilen sind zur Herstellung der erforderlichen Dichtigkeit entsprechende Dichtungen angeordnet, die unter Umständen nur schwer oder gar nicht, beispielsweise mit einer korrosionshemmenden Beschichtung, beschichtbar sind. Trotz alier Sorgfalt bei der Montage können Undichtigkeiten im Bereich der Dichtungen nie völlig ausgeschlossen werden. Ferner ist das Temperaturverhalten des gesamten Gehäuses wegen der Mehrteiligkeit des Gehäuses inhomogen.three axially adjoining parts, which are joined to the housing, for example, bolted together. The three housing parts are a stator housing part, an outlet housing part part, of which a cartridge having the motor and / or the bearing is held, and a bearing housing part. Between each two adjacent housing parts corresponding seals are arranged to produce the required tightness, which are difficult or impossible, for example, with a corrosion-inhibiting coating, can be coated under certain circumstances. Despite careful installation, leaks in the area of seals can never be completely ruled out. Furthermore, the temperature behavior of the entire housing is inhomogeneous because of the multi-part of the housing.
Aus US 2002/00448666 Al ist eine Schraubenpumpe bekannt, deren Gehäuse aus zwei Teilen besteht, wobei das druckseϊtige Gehäuseteil einstuckig mit einem Lager- und Motorgehäuse verbunden ist. Durch die Zweiteiligkeit des Gehäuses ergeben sich auch hier die oben beschriebenen Nachteile.From US 2002/00448666 Al a screw pump is known, the housing consists of two parts, wherein the druckseϊtige housing part is einstuckig connected to a bearing and motor housing. Due to the bipartite nature of the housing, the disadvantages described above also arise here.
Aufgabe der Erfindung ist es, die physikalischen Eigenschaften einer Reibungsvakuumpumpe zu verbessern.The object of the invention is to improve the physical properties of a friction vacuum pump.
Diese Aufgabe wird erfindungsgemäß gelöst mit den Merkmalen des Patentanspruches 1.This object is achieved by the features of claim 1.
Bei der erfindungsgemäßen Reibungsvakuumpumpe ist das Gehäuse über seine gesamte axiale Länge einstuckig ausgebildet, so dass das einstückige Gehäuse die gesamte axiale Länge des Pumpenrotors, des Rotorantriebes und der Rotorlagerung umgibt. Durch die Einstückigkeϊt des Gehäuses wird ein homogenes Temperaturverhalten des Gehäuses sichergestellt. Durch den Wegfall von Dichtungen ist ferner auch langfristig die Dichtigkeit des Gehäuses sichergestellt. Das Gehäuse selbst muss nicht aus mehreren Teilen zusaminenmontiert werden, so dass Montagearbeiten und hieraus resultierende Fehlerquellen entfallen Durch den Wegfall von Dichtungen im Bereich des Gehäuses ist die Gehäuse-Innenseite einfach und lückenlos beschichtbar. Das Reibungsvakuumpumpen-Gehäuse weist beispielsweise lediglich noch einen endscϊtigcn Deckel auf, der keine tragende Funktion hat, und daher keine besondere Präzision bei der Montage erfordert.In the friction vacuum pump according to the invention, the housing is integrally formed over its entire axial length, so that the one-piece housing surrounds the entire axial length of the pump rotor, the rotor drive and the rotor bearing. The integral nature of the housing ensures a homogeneous temperature behavior of the housing. By eliminating seals, the tightness of the housing is also ensured in the long term. The housing itself does not have to consist of several parts assembled together, so that assembly work and resulting error sources omitted by the elimination of seals in the area of the housing, the inside of the housing is easy and complete coatable. For example, the friction vacuum pump housing merely has an end cap which has no supporting function and therefore does not require any particular precision in assembly.
Durch die einstuckige Ausbildung des Gehäuses werden eine Vielzahl physikalischer Eigenschaften der Reibungsvakuumpumpe verbessert, insbesondere das Temperaturverhalten, die Dichtigkeit und die Qualität einer gehäuscinnenseitigen BeschichtungThe one-piece design of the housing improves a large number of physical properties of the friction vacuum pump, in particular the temperature behavior, the tightness and the quality of a housing-side coating
Gemäß einer bevorzugten Ausgestaltung sind die Rotorlagerung und der Rotorantrieb in einer Kartusche angeordnet, die von dem Gehäuse gehalten wird und über ihre gesamte axiale Länge von dem Gehäuse umgeben ist. Unter einer Kartusche wird vorliegend eine Anordnung verstanden, die aus einem Kartuschen-Gehäuse besteht, das topfförmig oder vollständig geschlossen ausgebildet ist, und in dem drehbar eine Welle in einer Rotorlagerung drehbar gelagert ist, die durch einen in der Kartusche befindlichen Rotorantrieb antreibbar ist. Die Lagerung und der Antrieb sind komplett vormontiert in der geschlossenen oder annähernd geschlossenen Kartusche angeordnet. Beim Zusammenbau der Reibungsvakuumpumpe kann zunächst die aus der Kartusche herausragende Welle mit dem Pumpenrotor verbunden werden, und diese Anordnung anschließend in das Gehäuse eingesetzt werden, wobei die Kartusche in dem Gehäuse-Innenraum befestigt wird. Auf diese Weise ist die Montage der Reibungsvakuumpumpe einfach und zuverlässig vornehmbar. Die Einstuckigkeit des Rcϊbungsvakuumpumpen-Gehäuscs und das Vorsehen einer einzigen Antriebs- und Lagerungs-Kartusche fuhren zu einem [nodularen Aufbau der Reibungsvakuumpumpc. Beide Maßnahmen zusammen vereinfachen die Montage bzw Demontage, wodurch wiederum die Montagegenauigkeit verbessert wird, - A -According to a preferred embodiment, the rotor bearing and the rotor drive are arranged in a cartridge, which is held by the housing and is surrounded over its entire axial length of the housing. In the present case, a cartridge is understood to mean an arrangement which consists of a cartridge housing which is cup-shaped or completely closed, and in which a shaft is rotatably mounted in a rotor bearing which can be driven by a rotor drive located in the cartridge. The storage and the drive are arranged completely pre-assembled in the closed or almost closed cartridge. In assembling the friction vacuum pump, first, the shaft protruding from the cartridge may be connected to the pump rotor, and this assembly may then be inserted into the housing with the cartridge being mounted in the housing interior. In this way, the assembly of the friction vacuum pump is simple and reliable vornehmbar. The tapering of the vacuum pump housing and the provision of a single drive and storage cartridge result in a [nodular structure of the friction vacuum pump. Both measures together simplify the assembly or disassembly, which in turn improves the assembly accuracy, - A -
der Montageaufwand verringert wird sowie die Wartung bzw. Reparatur vereinfacht und beschleunigt wird.the assembly work is reduced and the maintenance or repair is simplified and accelerated.
Vorzugsweise weist die Kartusche ein topfförmiges Gehäuse auf, das eϊnstuckig mit dem Reibungsvakuumpumpen-Gehäuse ausgebildet ist. Nachdem die Rotorlagerung und der Rotorantrieb in das topfförmige Gehäuse eingesetzt sind, wird die Topföffnung durch einen Kartuschen-Deckel verschlossen. Durch die einstückige Ausbildung des Reibungsvakuumpumpen-Gehäuses mit dem topfförmigen Kartuschen-Gehäuse wird die Montage insgesamt vereinfacht, werden Undichtigkeiten verringert und wird insbesondere eine präzisere Positionierung der Kartusche bzw. des Rotorantriebes und der Rotorlagerung sichergestellt.Preferably, the cartridge has a pot-shaped housing which is formed eϊnstuckig with the friction vacuum pump housing. After the rotor bearing and the rotor drive are inserted into the cup-shaped housing, the pot opening is closed by a cartridge lid. Due to the one-piece design of the friction vacuum pump housing with the cup-shaped cartridge housing, the assembly is simplified as a whole, leaks are reduced and in particular a more precise positioning of the cartridge or the rotor drive and the rotor bearing is ensured.
Gemäß einer bevorzugten Ausgestaltung ist die axiale Länge der Kartusche zu mindestens 50% von dem Pumpenrotor umgeben, d.h. ragt die Kartusche mit mindestens der Hälfte ihrer Axiallängc in den topfförmigen Pumpenrotor axial hinein. Auf diese Weise wird eine bezüglich der Axϊal-Gesamtlänge kompakte Konstruktion der Reibungsvakuumpumpe realisiert.According to a preferred embodiment, the axial length of the cartridge is at least 50% surrounded by the pump rotor, i. the cartridge projects axially into the pot-shaped pump rotor with at least half of its axial length. In this way, a compact construction of the friction vacuum pump is realized with respect to the overall axial length.
Gemäß einer bevorzugten Ausgestaltung wird ein Teil des Kartuschen-Gehäuses von dem Reibungsvakuumpumpen-Gehäuse gebildet. Das Kartuschen-Gehäuse weist zwei Abschnitte auf, nämlich einen, der vom Befestigungsort der Kartusche an dem Gehäuse aus betrachtet rotorseitig und einen, der rotorabgewandt orientiert ist Der rotorabgewandte Abschnitt der Kartusche kann von dem Reibungsvakuumpumpen-Gehäuse gebildet sein, d.h. das topfförmige Kartuschen-Gehäuse weist keinen kartuscheneigenen Deckel auf, sondern wird durch das Reϊbungsvakuumpumpen-Gehäuse abgeschlossen. Hierdurch wird die Anzahl der Bauteile insgesamt verringert.According to a preferred embodiment, a part of the cartridge housing is formed by the friction vacuum pump housing. The cartridge housing has two sections, one facing the rotor side and one facing away from the rotor, from the mounting location of the cartridge on the housing. The portion of the cartridge facing away from the rotor may be formed by the friction vacuum pump housing, i. the cup-shaped cartridge case does not have a cartridge-type lid, but is closed by the aspiration vacuum pump housing. As a result, the number of components is reduced overall.
Gemäß einer bevorzugten Ausgestaltung weist das Gehäuse innenseitig einen zirkulären Absatz auf, an den die Kartusche vorzugsweise saugseitig anliegt und an dem sie befestigt ist Die Kartusche wird zusammen mit dem Rotor vorzugsweise von der Saugseϊtc aus in das Gehäuse eingesetzt. Die Kartusche wird auf den zirkulären Absatz aufgesetzt und vorzugsweise von der Druckseite des Absatzes aus mit geeigneten Befestigungsmitteln, beispielsweise mit Gewindeschrauben, befestigt. Der zirkuläre Absatz ist einfach herstellbar und erlaubt eine gasdichte Befestigung der Kartusche an dem Gehäuse.According to a preferred embodiment, the housing has on the inside a circular shoulder, on which the cartridge preferably bears on the suction side and to which it is attached The cartridge is preferably inserted into the housing together with the rotor from the suction nozzle. The cartridge is placed on the circular shoulder and preferably fastened from the pressure side of the heel with suitable fastening means, for example with threaded screws. The circular shoulder is easy to produce and allows a gas-tight attachment of the cartridge to the housing.
Vorzugsweise ist der Pumpenrotor ein Holweck- Pumpenrotor. Die Radialebenen- Fläche zwischen einer gehäuseseitigen Statorwand und einer rotorseitigen Nabe kann sich zur Druckseite hin verkleinern.Preferably, the pump rotor is a Holweck pump rotor. The radial plane surface between a housing-side stator wall and a rotor-side hub can shrink towards the pressure side.
Hierdurch ist der Eintrittsquerschnitt der Reibungsvakuumpumpe relativ groß, so dass der Gasdurchsatz ebenfalls relativ groß ist.As a result, the inlet cross-section of the friction vacuum pump is relatively large, so that the gas flow rate is also relatively large.
Tm Folgenden wird unter Bezugnahme auf die Zeichnung ein Ausführungsbeispiel der Erfindung näher erläutert.Tm following, an embodiment of the invention will be explained in more detail with reference to the drawing.
Die Figur zeigt eine erfindungsgemäße Reibungsvakuumpumpe im LängsschnittThe figure shows a Reibungsvakuumpumpe invention in longitudinal section
In der Figur ist eine Reibungsvakuumpumpe IO dargestellt, die eine Schraubenpumpe ist, auch Holwcck-Pumpe genannt. Die Reibungsvakuumpumpe 10 besteht im Wesentlichen aus einem sich zur Saugseite hin trichterförmig verengenden Gehäuse 12, einer in dem Gehäuse 12 angeordneten und befestigten Kartusche 14, die eine nicht dargestellte Rotorlagerung und einen nicht dargestellten Rotorantrieb enthält, und einem Pumpenrotor 16, der mehrere schraubenförmig angeordnete Flügel 18 aufweist.In the figure, a friction vacuum pump IO is shown, which is a screw pump, also called Holwcck pump. The friction vacuum pump 10 consists essentially of a suction-side towards the funnel-shaped narrowing housing 12, arranged in the housing 12 and mounted cartridge 14, which includes a rotor bearing, not shown, and a rotor drive, not shown, and a pump rotor 16, the plurality of helically arranged wings 18 has.
Das Gehäuse 12 ist einstückig ausgebildet und umgibt die gesamte axiale Länge des Pumpenrotors 16 und der den Rotorantrieb und die Rotorlagerung enthaltenden Kartusche 14. Das druckseitige Ende des Gehäuses 12 ist durch einen stirnseitigen Gehäusedecke! 20 verschlossen. In dem Gehäuse 14 ist an seinem Innenumfang ein zirkulärer Absatz 22 vorgesehen, an dem sich ein entsprechender zirkulärer Absatz 24 der Kartusche 14 gasdicht abstützt. Die Absätze 22, 24 des Gehäuses 12 und der Kartusche 14 sind miteinander verschraubt.The housing 12 is integrally formed and surrounds the entire axial length of the pump rotor 16 and the cartridge containing the rotor drive and the rotor bearing 14. The pressure-side end of the housing 12 is through a front-side housing cover! 20 closed. In the housing 14, a circular shoulder 22 is provided on its inner circumference, on which a corresponding circular shoulder 24 of the cartridge 14 is supported gas-tight. The paragraphs 22, 24 of the housing 12 and the cartridge 14 are bolted together.
Aus der Kartusche ragt an ihrem saugscitigen Ende eine Rotorwelle 26 heraus, die den Rotor 16 hält. Der Rotor 16 ist mit der Rotorweile verbunden, beispielsweise verschraubt.From the cartridge protrudes at its suction end a rotor shaft 26 out, which holds the rotor 16. The rotor 16 is connected to the rotor shaft, for example screwed.
Die Rotornabe 28 des Rotors 16 verjungt sich zur Saugseite hin. Die Innenseite des Gehäuses 12 bildet eine Statorwand 30, die sich zur Saugseite hin erweitert. Durch die Erweiterung des Innendurchmessers der Statorwand und durch die Verringerung des Außendurchmessers der Rotornabe 28 zur Saugseitc hin ist die Radialebenen-Fläche zwischen der Statorwand 30 und der Rotornabe 28 zur Saugseitc hin vergrößert und zur Druckseite hin verkleinert.The rotor hub 28 of the rotor 16 tapers towards the suction side. The inside of the housing 12 forms a stator 30, which widens towards the suction side. Due to the extension of the inner diameter of the stator and the reduction of the outer diameter of the rotor hub 28 to Saugseitc out the radial plane surface between the stator 30 and the rotor hub 28 is increased towards the Saugseitc out and reduced to the pressure side.
Das Gehäuse 12 weist an seinem einen saugseitigen axialen Ende einen Gaseinlass 32 auf. An der Druckseite des Pumpenrotors 16 ist ein radialer Gasauslass 34 vorgesehen*The housing 12 has a gas inlet 32 at its one suction-side axial end. On the pressure side of the pump rotor 16, a radial gas outlet 34 is provided *
Durch seine einstückige Ausbildung weist das Gehäuse 12 in dem Teil, in dem es das Vakuum umschließt, keine einzige Dichtung auf mit einem anschließenden GehäuseteÜ. Hierdurch wird insbesondere in dem dem Vakuum ausgesetzten Bereich des Gehäuses 12 ein homogenes Temperaturverhalten realisiert. Beschichtungen der Statorwand 30 sind frei von Unstetigkeiten. Mangels einer Dichtung zwischen zwei Gehäuseteilen können auch keine Undichtigkeiten auftreten. Due to its one-piece design, the housing 12 in the part in which it encloses the vacuum, not a single seal on with a subsequent GehäuseteÜ. As a result, in particular in the region of the housing 12 exposed to the vacuum, a homogeneous temperature behavior is realized. Coatings of the stator wall 30 are free of discontinuities. Lack of a seal between two housing parts and no leaks can occur.

Claims

- / -Patentansprüche / Patent claims
1. Reibungsvakuumpumpe (10) mit1. friction vacuum pump (10) with
einem Gehäuse (12), das einen flugclfrcicn Pumpenstator bildet, unda housing (12) forming a flighted pump stator, and
einem Rotorantrieb und einer Rotorlagerung, von der ein einen Flügel ( 18) aufweisender Pumpenrotor (16) gehalten wird,a rotor drive and a rotor bearing, of which a pump rotor (16) having a vane (18) is held,
wobei das Gehäuse (12) die gesamte axiale Länge des Pumpenrotors (16), des Rotorantriebes und der Rotorlagerung umgibt,the housing (12) surrounding the entire axial length of the pump rotor (16), the rotor drive and the rotor bearing,
d a d u r c h g e k e n n z e i c h n e t ,characterized ,
dass das Gehäuse (12) einstuckig ausgebildet ist.that the housing (12) is formed einstuckig.
2 Reibungsvakuumpumpe (10) nach Anspruch 1, dadurch gekennzeichnet, dass die Rotorlagerung und der Rotorantrϊeb in einer Kartusche (14) angeordnet sind, die von dem Gehäuse (12) gehalten wird und über ihre gesamte axiale Länge von dem Gehäuse (12) umgeben ist.2 friction vacuum pump (10) according to claim 1, characterized in that the rotor bearing and the Rotorantrϊeb are arranged in a cartridge (14) which is held by the housing (12) and is surrounded over its entire axial length of the housing (12) ,
3. Reibungsvakuumpumpe (10) nach Anspruch 2, dadurch gekennzeichnet, dass die Kartusche ein topfförmiges Gehäuse aufweist, das einstückig mit dem Reibungsvakuumpumpen-Gehäuse ausgebildet ist.3. Friction vacuum pump (10) according to claim 2, characterized in that the cartridge has a cup-shaped housing which is integrally formed with the friction vacuum pump housing.
4. Reibungsvakuumpumpe (10) nach Anspruch 2 oder 3, dadurch gekennzeichnet, dass die axiale Länge der Kartusche (14) zu mindestens 50% von dem Pumpenrotor (16) umgeben ist. 4. friction vacuum pump (10) according to claim 2 or 3, characterized in that the axial length of the cartridge (14) to at least 50% of the pump rotor (16) is surrounded.
5. Reibungsvakuumpumpe (10) nach Anspruch 2, dadurch gekennzeichnet, dass ein Teil des Kartuschen-Gehäuses von dem Reibungsvakuumpumpen- Gehäuse gebildet ist,5. Friction vacuum pump (10) according to claim 2, characterized in that a part of the cartridge housing is formed by the Reibungsvakuumpumpen-,
6. Reibungsvakuumpumpe (10) nach einem der Ansprüche 2 bis 5, dadurch gekennzeichnet, dass das Gehäuse (12) einen zirkulären Absatz (22) aufweist, an den die Kartusche (14) befestigt ist.6. Friction vacuum pump (10) according to any one of claims 2 to 5, characterized in that the housing (12) has a circular shoulder (22) to which the cartridge (14) is attached.
7. Reibungsvakuumpumpe (10) nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass der Pumpenrotor (16) ein Schrauben-Pumpenrotor ist.7. Friction vacuum pump (10) according to any one of claims 1 to 6, characterized in that the pump rotor (16) is a screw pump rotor.
8 Reibungsvakuumpumpe (10) nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass sich die Radialebenen-Fläche zwischen dem Pumpenstator (30) und einer Nabe (28) des Pumpenrotors ( 16) zur Druckseite hin verkleinert. 8 friction vacuum pump (10) according to one of claims 1 to 7, characterized in that the radial plane surface between the pump stator (30) and a hub (28) of the pump rotor (16) decreases towards the pressure side.
EP05791919A 2004-10-01 2005-09-21 Drag vacuum pump Not-in-force EP1797331B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004047930A DE102004047930A1 (en) 2004-10-01 2004-10-01 Friction vacuum pump
PCT/EP2005/054735 WO2006037730A1 (en) 2004-10-01 2005-09-21 Drag vacuum pump

Publications (2)

Publication Number Publication Date
EP1797331A1 true EP1797331A1 (en) 2007-06-20
EP1797331B1 EP1797331B1 (en) 2010-01-06

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ID=35427899

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EP05791919A Not-in-force EP1797331B1 (en) 2004-10-01 2005-09-21 Drag vacuum pump

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US (1) US20080206041A1 (en)
EP (1) EP1797331B1 (en)
JP (1) JP2008514862A (en)
CN (1) CN100458171C (en)
AT (1) ATE454555T1 (en)
DE (2) DE102004047930A1 (en)
WO (1) WO2006037730A1 (en)

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Also Published As

Publication number Publication date
EP1797331B1 (en) 2010-01-06
JP2008514862A (en) 2008-05-08
ATE454555T1 (en) 2010-01-15
DE102004047930A1 (en) 2006-04-06
DE502005008839D1 (en) 2010-02-25
WO2006037730A1 (en) 2006-04-13
CN101031724A (en) 2007-09-05
US20080206041A1 (en) 2008-08-28
CN100458171C (en) 2009-02-04

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