CN101031724A - Drag vacuum pump - Google Patents
Drag vacuum pump Download PDFInfo
- Publication number
- CN101031724A CN101031724A CNA2005800329501A CN200580032950A CN101031724A CN 101031724 A CN101031724 A CN 101031724A CN A2005800329501 A CNA2005800329501 A CN A2005800329501A CN 200580032950 A CN200580032950 A CN 200580032950A CN 101031724 A CN101031724 A CN 101031724A
- Authority
- CN
- China
- Prior art keywords
- rotor
- housing
- pump
- vacuum pump
- drag vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Rotary Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
A drag vacuum pump (10) comprises: a housing (12) that forms a vaneless pump stator (30); a rotor drive, and; a rotor bearing that holds a pump rotor (16) having vanes (18) in a manner that enables the rotor to rotate. The housing (12) surrounds the entire axial length of the pump rotor (16), of the rotor drive and of the rotor bearing. Prior art devices consist of multiple part designs thus having seals between housing parts. The seals are difficult to coat and can be or become sites at which leakage occurs. The inventive housing (12), on the contrary, has a one-piece design so that, in any case, the area of the housing (12) that is in contact with the vacuum gas is free from seals.
Description
Technical field
The present invention relates to a kind of drag vacuum pump, it comprises housing, rotor driven device and the rotor field spider that constitutes the bladelesspump stator.
Background technique
The housing of the drag vacuum pump of this for example turbomolecular pump or Holweck pump is around the whole axial length of pump rotor, rotor driven device and rotor field spider.A kind of as can be known screw pump from WO 2004/015272A1, its housing are made up of three axial interconnected parts basically, and described part for example is screwed onto and forms housing together and connect.Three housing parts are the stator case parts, be used to support the outlet housing parts and the bearing housing part of the tube that comprises motor and/or support.Be respectively arranged with Sealing to guarantee required sealing between the housing parts of two adjacency, Sealing wherein may be difficult to or may be not coated, for example applies the underseal material.Even the careful again leakage that can not fully prevent in assembling work at sealing area.In addition, because the multicomponent structure of housing, the temperature variation characteristic of whole housing is uneven.
From a kind of as can be known screw pump of US 2002/00448666 A1, its housing is made up of two-part, and wherein, waste side housing parts and bearing and electric machine casing form.The two-part structure of this housing has caused foregoing shortcoming equally.
Summary of the invention
The objective of the invention is to improve the physical property of drag vacuum pump.
According to the present invention, this purpose realizes by the feature of claim 1.
In Wesco pump according to the present invention, housing is configured to a single-piece on its whole axial length, so the housing of this single-piece is around the whole axial length of pump rotor, rotor driven device and rotor field spider.This individual construction of housing has been guaranteed housing even temperature variation characteristic.In addition owing to Sealing is not set, so can guarantee the sealing of housing for a long time yet.Housing self needn't be made of a plurality of parts, therefore the root of eliminating assembling work and producing shortcoming thus.Owing to Sealing is not set in shell area, can be easily in the housing and carry out coating continuously.For example, this Wesco pump housing only has the lid of an end, and this drowning has bearing function, does not therefore also need accurate especially during installment work.
This individual construction of housing has improved the quality of coating of a plurality of physical propertys, particularly temperature variation characteristic, sealing and the enclosure interior of drag vacuum pump.
According to a preferred aspect, rotor field spider and rotor driven device are arranged in the tube, the tube by housings support and on its whole axial length by housing around.Here, tube is meant the device of being made up of cylinder shell, and this cylinder shell has the structure of jar shape or complete closed, and the axle in rotor field spider rotatably is supported in this cylinder shell, and this drives by the rotor driven device that is positioned at tube.Support and driver are arranged under the situation of prepackage fully in tube sealing or approximate sealing.When the assembling drag vacuum pump, at first will be connected with pump rotor from the axle that tube extends, described then device can be inserted in the housing, and wherein tube is fixed on enclosure interior.By this way, drag vacuum pump can assemble simple and reliablely.The individual construction of drag vacuum pump housing and unique driving is set and supporting drum has caused the modular construction of drag vacuum pump.These two features have been simplified assembling and dismantlement work together, from and improved the assembling accuracy, reduced assembly fee usefulness, simplify and quickened maintenance and repair work.
Preferably, tube has the tank-like shell that constitutes with the drag vacuum pump one.After rotor field spider and rotor driven device were inserted into tank-like shell, the opening of tank-like body was sealed by cover.The drag vacuum pump housing has made things convenient for assembling work with the integrative-structure of jar shape cylinder shell, has reduced leakage, has guaranteed that particularly tube and/or rotor driven device and rotor field spider locate more accurately.
According to a preferred aspect, the tube axial length at least 50% by pump rotor around, that is, and the tube axial length at least one jar shape pump rotor that partly axially puts in.Realized the compact structure aspect whole axial length of drag vacuum pump by this way.
According to a preferred aspect, the part of cylinder shell is made of the housing of drag vacuum pump.Cylinder shell comprises two sections, that is, observe from the restraint location of tube on housing, and one is arranged on rotor-side, and another is arranged on away from the rotor place.The section away from the rotor setting of tube is made of the drag vacuum pump housing, that is, jar shape cylinder shell does not comprise the cover of tube self, but by the drag vacuum pump housings close.Thereby, reduced the sum of parts.
According to a preferred aspect, enclosure interior comprises the circumferential convex shoulder, preferably recline in the suction side this convex shoulder and being fastened on it of tube.Tube and rotor preferably are inserted into the housing from the suction side together.Tube is set on the circumferential convex shoulder, and is preferably fastening with suitable fastening from the waste side of convex shoulder, for example bolt.The convex shoulder of circumferential is easy to produce and allows tube to be fastened on the housing airtightly.
Preferably, pump rotor is a kind of Holweck pump rotor.Surface in the radial plane, between case side stator wall and the rotor-side wheel hub reduces towards waste side.
Therefore, the entrance section of drag vacuum pump is relatively large, so caused big relatively gas throughput.
Describe one embodiment of the present invention in detail referring now to accompanying drawing.
Description of drawings
Accompanying drawing illustrates the longitudinal cross-section according to drag vacuum pump of the present invention.
Embodiment
Accompanying drawing illustrates drag vacuum pump 10, and it is a kind of screw pump, is also referred to as the Holweck pump.Drag vacuum pump 10 consists essentially of housing 12, tube 14 and pump rotor 16, wherein, housing 12 narrows down towards the suction side with funnel shaped, the rotor driven device that tube 14 is provided with and is fastened in the housing 12 and comprises the rotor field spider that does not show and do not show, pump rotor 16 comprises a plurality of spiral blades 18 of being arranged to.
In housing 12, interior week is provided with circumferential convex shoulder 22, and tube 14 corresponding circumferential convex shoulders 24 are supported on the convex shoulder 22 airtightly.The convex shoulder 22 of housing 12 is connected with the convex shoulder 24 mutual spirals of tube 14.
The rotor hub 28 of rotor 16 is tapered towards the suction side.The inboard of housing 12 forms stator wall 30, and this stator wall enlarges towards the suction side.Owing to enlarge and the external diameter of rotor hub 28 reduces, so surface in the radial plane, between stator wall 30 and the rotor hub 28 increases towards the suction side and reduces towards waste side along internal diameter towards the direction stator wall of suction side.
Claims (8)
1. a drag vacuum pump (10) comprises
Form vaneless pump stator housing (12) and
Rotor driven device and support have the rotor field spider of the pump rotor (16) of blade (18),
Wherein said housing (12) is characterized in that around the whole axial length of described pump rotor (16), described rotor driven device and described rotor field spider,
Described housing (12) is an individual construction.
2. drag vacuum pump according to claim 1 (10) is characterized in that, rotor field spider and rotor driven device are arranged in the tube (14), described tube (14) supported by described housing (12) and on whole axial length by described housing (12) around.
3. drag vacuum pump according to claim 2 (10) is characterized in that, described tube has the tank-like shell integrally formed with the drag vacuum pump housing.
4. according to claim 2 or 3 described drag vacuum pumps (10), it is characterized in that, the axial length of described tube (14) at least 50% by described pump rotor (16) around.
5. drag vacuum pump according to claim 2 (10) is characterized in that, the part of the housing of described tube is made of the housing of described drag vacuum pump.
6. according to each described drag vacuum pump (10) among the claim 2-5, it is characterized in that described housing (12) has the convex shoulder (22) of circumferential, described tube (14) is fastened on the described convex shoulder.
7. according to each described drag vacuum pump (10) among the claim 1-6, it is characterized in that described pump rotor (16) is a kind of screw pump rotor.
8. according to each described drag vacuum pump (10) among the claim 1-7, it is characterized in that the surface between the wheel hub (28) in the radial plane, pump stator (30) and described pump rotor (16) reduces towards waste side.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004047930.5 | 2004-10-01 | ||
| DE102004047930A DE102004047930A1 (en) | 2004-10-01 | 2004-10-01 | Friction vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101031724A true CN101031724A (en) | 2007-09-05 |
| CN100458171C CN100458171C (en) | 2009-02-04 |
Family
ID=35427899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005800329501A Expired - Fee Related CN100458171C (en) | 2004-10-01 | 2005-09-21 | Drag vacuum pump |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20080206041A1 (en) |
| EP (1) | EP1797331B1 (en) |
| JP (1) | JP2008514862A (en) |
| CN (1) | CN100458171C (en) |
| AT (1) | ATE454555T1 (en) |
| DE (2) | DE102004047930A1 (en) |
| WO (1) | WO2006037730A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104613008A (en) * | 2015-02-28 | 2015-05-13 | 北京北仪创新真空技术有限责任公司 | Rotor of molecular pump |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1395718B1 (en) | 2009-09-30 | 2012-10-19 | Nuovo Pignone Spa | ASSRAL FLOW COMPRESSOR WITH WALL, REACTOR AND METHOD |
| US9279417B2 (en) | 2013-04-26 | 2016-03-08 | Sol-Electrica, Llc | Solar power system |
| WO2015039443A1 (en) * | 2013-09-18 | 2015-03-26 | 北京北仪创新真空技术有限责任公司 | Atmospheric impact resistant molecular pump |
| CN103452872A (en) * | 2013-09-18 | 2013-12-18 | 北京北仪创新真空技术有限责任公司 | Atmosphere-impact-resisting molecular pump |
| EP3670924B1 (en) * | 2019-11-19 | 2021-11-17 | Pfeiffer Vacuum Gmbh | Vacuum pump and method for producing same |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE625444C (en) * | 1934-02-24 | 1936-02-08 | Leybold S Nachfolger A G E | Molecular air pump |
| JPS60139098U (en) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | Combined axial flow molecular pump |
| DE3705912A1 (en) * | 1987-02-24 | 1988-09-01 | Alcatel Hochvakuumtechnik Gmbh | HIGH VACUUM PUMP WITH A BELL-SHAPED ROTOR |
| FR2611818B1 (en) * | 1987-02-26 | 1991-04-19 | Cit Alcatel | ROTARY MOLECULAR VACUUM PUMP OF THE GAEDE CHANNEL TYPE |
| FR2641582B1 (en) * | 1989-01-09 | 1991-03-22 | Cit Alcatel | GAEDE CHANNEL TYPE VACUUM PUMP |
| JPH03222895A (en) * | 1990-01-26 | 1991-10-01 | Hitachi Koki Co Ltd | Thread-grooved vacuum pump |
| JP3486000B2 (en) * | 1995-03-31 | 2004-01-13 | 日本原子力研究所 | Screw groove vacuum pump |
| DE19756837C2 (en) * | 1997-12-19 | 1999-09-30 | K Busch Gmbh Druck & Vakuum Dr | Molecular and viscosity pump |
| FR2776029B1 (en) * | 1998-03-16 | 2000-06-23 | Alsthom Cge Alcatel | TURBOMOLECULAR PUMP |
| DE19846188A1 (en) * | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Friction vacuum pump with stator and rotor |
| US6302641B1 (en) * | 2000-01-07 | 2001-10-16 | Kashiyama Kougyou Industry Co., Ltd. | Multiple type vacuum pump |
| US6514035B2 (en) * | 2000-01-07 | 2003-02-04 | Kashiyama Kougyou Industry Co., Ltd. | Multiple-type pump |
| DE10224604B4 (en) * | 2002-06-04 | 2014-01-30 | Oerlikon Leybold Vacuum Gmbh | evacuation device |
-
2004
- 2004-10-01 DE DE102004047930A patent/DE102004047930A1/en not_active Withdrawn
-
2005
- 2005-09-21 WO PCT/EP2005/054735 patent/WO2006037730A1/en active Application Filing
- 2005-09-21 AT AT05791919T patent/ATE454555T1/en not_active IP Right Cessation
- 2005-09-21 EP EP05791919A patent/EP1797331B1/en not_active Not-in-force
- 2005-09-21 CN CNB2005800329501A patent/CN100458171C/en not_active Expired - Fee Related
- 2005-09-21 US US11/664,142 patent/US20080206041A1/en not_active Abandoned
- 2005-09-21 JP JP2007534008A patent/JP2008514862A/en not_active Withdrawn
- 2005-09-21 DE DE502005008839T patent/DE502005008839D1/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104613008A (en) * | 2015-02-28 | 2015-05-13 | 北京北仪创新真空技术有限责任公司 | Rotor of molecular pump |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1797331B1 (en) | 2010-01-06 |
| JP2008514862A (en) | 2008-05-08 |
| ATE454555T1 (en) | 2010-01-15 |
| DE102004047930A1 (en) | 2006-04-06 |
| DE502005008839D1 (en) | 2010-02-25 |
| WO2006037730A1 (en) | 2006-04-13 |
| EP1797331A1 (en) | 2007-06-20 |
| US20080206041A1 (en) | 2008-08-28 |
| CN100458171C (en) | 2009-02-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090204 Termination date: 20100921 |