EP2949938B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2949938B1
EP2949938B1 EP15151656.4A EP15151656A EP2949938B1 EP 2949938 B1 EP2949938 B1 EP 2949938B1 EP 15151656 A EP15151656 A EP 15151656A EP 2949938 B1 EP2949938 B1 EP 2949938B1
Authority
EP
European Patent Office
Prior art keywords
shaft
vacuum pump
lip seal
seal
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15151656.4A
Other languages
German (de)
English (en)
Other versions
EP2949938A1 (fr
Inventor
Christopher Kobus
Kevin Schneider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2949938A1 publication Critical patent/EP2949938A1/fr
Application granted granted Critical
Publication of EP2949938B1 publication Critical patent/EP2949938B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/52—Bearings for assemblies with supports on both sides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0064—Magnetic couplings

Definitions

  • the invention relates to a vacuum pump with a single or multi-piece shaft according to the preamble of claim 1.
  • Vacuum pumps in particular Roots vacuum pumps, have become indispensable in many industrial applications. Examples of such applications include metallurgy, vacuum drying and chemical engineering.
  • Roots vacuum pumps provide to operate two waves in opposite directions at the same speed. This is ensured for example by a mechanical synchromesh. On these waves are pistons which cooperate, include gas volumes and transfer from the pump inlet to the pump outlet.
  • the prior art ( DE 10 2008 060 540 A1 ) includes a Roots vacuum pump having a suction chamber with two mutually rotating pistons and two storage spaces in which bearings are provided for rotatably supporting at least one shaft.
  • the Roots vacuum pumps belonging to the prior art usually have two rotors whose shafts are mounted on both sides.
  • the pump-effective pistons which are part of the rotor, thereby rotate in the pump chamber and are spatially separated from the storage.
  • the execution of the shaft passage and its seal between the pump chamber and storage space is of great importance for these pumps. Among other things, it determines the applied frictional heat and the resulting operating and oil temperature. Depending on the version, the achievable final pressure and the duration differ until the pump reaches it. Correct sealing protects the equipment from process gas, impurities conveyed and prevents the accumulation of condensate. Thus, these factors significantly determine the life of the pump and customer satisfaction.
  • piston ring seals are known, which are arranged in the shaft passage.
  • piston ring seals have the disadvantage that impurities in the gas to be conveyed, for example dust particles, damage the piston ring seals.
  • impurities in the gas to be conveyed for example dust particles
  • the medium to be pumped which is located in the pump chamber, often contain gases that change lubricants and possibly carry dust particles with it.
  • condensate is often contained in the media to be conveyed. Through these substances, the lubricants change chemically, so they must be replaced after a relatively short time, which in turn comes to a breakdown of the pump.
  • the prior art ( DE 195 44 994 A1 ) includes a multi-shaft vacuum pump, with which an effective seal between the gearbox, or storage rooms and storage spaces is to be achieved.
  • This pump provides two lip seals so that the lips face one seal towards the suction chamber and the lips of the other seal towards the gearbox or storage space. This results in a number of advantages, for example, that contamination in the corners, undercuts and depressions in the immediate sealing region of the seals by accumulating substances from the pump chamber and from the transmission, or storage space can be avoided.
  • This prior art seal assembly can be further improved.
  • a screw compressor with a shaft seal Furthermore belongs to the state of the art ( EP 0 859 154 A1 ) a screw compressor with a shaft seal.
  • the screw compressor also provides two lip seals. Between the lip seals a gas inlet is provided. On both sides next to the lip seals a spiral seal is arranged in each case.
  • the two lip seals with the sealing gas inlet in between have the task of oil, which is used to lubricate a ball bearing on the one hand, and a fluid, such as water, which serves to lubricate the rotor on the other side, to separate so that the oil does not mixed with the water.
  • This seal assembly has four sealing elements and is very expensive for this reason.
  • the technical problem underlying the invention is to provide a vacuum pump in which a seal of the shaft passage is provided, which is insensitive to gases that change lubricant, dust particles and / or condensate.
  • the vacuum pump according to the invention with at least one single- or multi-piece shaft which is rotatably mounted with at least one bearing assembly, a pump chamber and a bearing or gear room for arranging the at least one bearing assembly with a seal assembly for performing the single or multi-piece shaft between pump chamber and bearing - Or gear chamber, wherein the seal assembly for carrying out the at least one single- or multi-piece shaft having a first seal, which is formed as a lip seal, wherein a second sealing arrangement is provided, characterized in that in the space between the first lip seal and the second sealing arrangement, a sealing gas inlet is provided and that the second sealing arrangement has at least one piston ring seal.
  • the vacuum pump according to the invention has the advantage that the lip seal has minimal gaps with high throttling effect for the sealing gas, that is, allows a small sealing gas flow despite a high pressure.
  • the arrangement according to the invention has the advantage that the lip seal ensures a good seal against dust particles, condensate and gases.
  • Piston ring seals for example in a rectangular shape, operate relatively independently of the rotational speed and permit a pressure equalization which is faster compared to the lip seal (lower throttle effect).
  • these ring seals have emergency running properties and work wear-resistant and they have less heat input and a lower power consumption.
  • the vacuum pump according to the invention has the advantage that over the prior art, a better seal is achieved by higher sealing gas pressures due to an increased throttle effect.
  • a barrier gas inlet between the first lip seal and the second seal assembly this relatively small space can be filled with barrier gas.
  • the sealing gas requirement is reduced compared with the prior art since, according to the prior art, the entire storage space has generally been filled with sealing gas.
  • the first lip seal is arranged on the pumping chamber side.
  • piston ring seals for example rectangular rings, work relatively independently of the rotational speed and have runflat properties.
  • the second sealing arrangement consists of two piston ring seals.
  • Two piston ring seals have the advantage over a piston ring seal that the sealing effect is improved.
  • a further advantageous embodiment of the invention provides that the piston ring seals are arranged adjacent to each other at a distance from each other. By this embodiment, a sufficient sealing effect can be achieved.
  • the lip direction is arranged on the pump chamber side. This ensures that impurities in the medium to be pumped, which is located in the pump chamber, do not enter the seal chamber or in the direction of the bearing or gear compartment. As a result, lubricant in the bearing or gear chamber is not or not so quickly contaminated, so that the lubricant has a longer life.
  • the second sealing arrangement is advantageously arranged on the storage space side.
  • This sealing arrangement serves primarily to form a relatively small gap with the sealing gas inlet, so that not the entire bearing or gear chamber must be filled with sealing gas. If the entire bearing or gear chamber to fill with sealing gas, as provided in the prior art, the consumption of sealing gas is very high.
  • the sealing gas arranged behind the lip seal builds up a pressure in the direction of the pumping chamber, so that less gas moves from the pumping chamber in the direction of the storage space.
  • the lip seal is advantageously arranged such that the lip seal is pressed against the shaft or a bushing on the shaft by a higher pressure in the pump chamber.
  • a lip of the lip seal is arranged pointing in the direction of the suction chamber. This ensures that at a higher pressure in the pump chamber with respect to the space with the sealing gas, the lip seal is pressed against shaft or socket and thereby the throttle effect is increased.
  • a possible embodiment of the invention provides that the shaft or the bush is coated at least in the region of the system of the lip seal. This makes it possible to reduce the friction between the shaft or bushing and the lip seal, so that less heat is generated.
  • the lip seal has the advantage that it is process gas tight by the sealing gas.
  • the barrier gas stream also cools the lip seal, which heats up during operation due to friction.
  • a further advantageous embodiment of the invention provides that a mating surface of the lip seal has a twist. This will be a corresponding Gas flow achieved, so that the throttling effect of the lip seal is reinforced.
  • the vacuum pump according to the invention is advantageously designed as Roots piston pump.
  • the invention can also be used with other pumps, for example turbomolecular pumps or the like.
  • Fields of application are shaft feedthroughs through the pump chamber and storage room.
  • Fig. 1 shows a Roots vacuum pump with a housing 1.
  • the pump chamber 2 is penetrated by a first shaft 10 and a second shaft 14.
  • Shaft axes of the pump chamber is limited by a first bearing plate 4 and a second bearing plate 5.
  • a first piston 12 with the first shaft 10 and a second piston 16 with the second shaft 14 are connected.
  • Both shafts 10, 14 are supported by bearing arrangements rotatably in the end shields 4, 5 from.
  • first bearing plate 4 In the first bearing plate 4 are a floating bearing 22 of the first shaft 10 and a floating bearing 26 of the second shaft 14.
  • second bearing plate 5 In the second bearing plate 5 are a fixed bearing 24 of the first shaft 10 and a bearing 28 of the second shaft 14th
  • a gear chamber 3 On a side facing away from the pump chamber 2 of the first bearing plate 4, a gear chamber 3 is provided, in which the ends of the first and second shafts 10, 14 protrude. On the shaft ends sit a first and a second synchronous wheel 18, 20, which transmits the rotation of the first shaft 10 to the second shaft 14 so that it rotates at the same speed, but in opposite directions.
  • a first centrifugal disc 30 dips into a lubricant reservoir and distributes the lubricant in the gear chamber 3.
  • a gap 8 On the side facing away from the pump chamber 2 of the second bearing plate 5 is a gap 8. This is penetrated by the first shaft 10, while the second shaft 14 terminates in it.
  • a second centrifugal disc 32 On the end of the second shaft 14, a second centrifugal disc 32 is arranged, which also dips into a lubricant reservoir and causes a distribution of the lubricant in the intermediate space.
  • the intermediate space passing through the end of the first shaft 10 terminates in a motor housing 6.
  • the shaft end with the inner magnet 44 is surrounded by a split pot 40 which is mounted airtight by means of a split-top flange on the housing 6.
  • a magnet carrier 48 carries outer magnets 46, which cooperate with the inner magnet 44 to transmit force and rotation.
  • the magnet carrier 48 is arranged on a motor shaft 50, which is mounted in an engine mount 52.
  • the motor magnets 54 which are likewise arranged on the motor shaft 50, interact with coils 56 in order to convert electrical energy into mechanical rotation. Coils and motor magnets form the drive of the Roots pump 100.
  • the shaft passages 34, 36, 38, 42 are of identical construction.
  • the shaft passage 34 is in Fig. 2 shown.
  • a bush 58 is arranged on the shaft 14.
  • the pump chamber is shown on the left and the gear compartment 3 on the right. It could be in the Fig. 2 also act around the shaft leadthrough 38 or 42. Then the pump chamber 2 would be on the left and the intermediate space 8 on the right.
  • the shaft leadthrough 34 has on the one side a lip seal 60 on the pump chamber side and two piston ring seals 62, 64 on the piston chamber or piston chamber side.
  • the piston ring seals 62, 64 are designed as rectangular seals and are correspondingly arranged in rectangular grooves 66 of the shaft passage 34.
  • a barrier gas inlet 68 is provided to fill a space 70 between lip seal 60 and piston ring seal 62 with barrier gas.
  • the lip seal 60 which is arranged on the pump chamber side, is insensitive to dust particles and has a good throttling action with respect to condensate and gases, which form part of the medium to be pumped in the pump chamber 2.
  • the sealing gas has the advantage that it also prevents gas from the pumping chamber 2 from wandering in the direction of bearing or gear chamber 3.
  • the space 70 is relatively small compared to the transmission and storage space 3, so that the space 70, which is filled with sealing gas, has a smaller volume than the transmission or storage space 3. As a result, the consumption of sealing gas is significantly reduced.
  • the lip seal 60 has a very good throttle effect. Behind the lip seal 60 in the direction of bearing or gear chamber 3, the sealing gas is arranged, which builds up a pressure in the direction of the pump chamber, so that little gas migrates from the pump chamber in the direction of bearing or gear chamber 3.
  • the lip seal 60 is arranged such that the lip seal 60 is pressed against the bush 58 due to the higher pressure in the pump chamber 2.
  • the piston rings 62, 64 delimit on the other side, that is, the storage and drive chamber side, the space which is filled with sealing gas.
  • the piston ring seals 62, 64 produce the required throttle effect.
  • the piston rings 62, 64 also have emergency running properties. They also have the advantage that they are easy to assemble.
  • the barrier gas stream cools the lip seal 60, since by rotation of the shaft 14 frictional heat is generated.
  • a lip 72 of the lip seal is arranged pointing in the direction of the suction chamber 2. This ensures that gas from the pump chamber 2, which would like to reach in the direction of the space 70 and thus in the direction of the transmission or storage space 3, the lip 72 of the lip seal 60 presses against the shaft 14 or bushing 58, whereby the throttling effect of the lip seal 60 is increased.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (11)

  1. Pompe à vide comprenant au moins un arbre (10) en une ou plusieurs parties, lequel est monté à rotation avec au moins un arrangement de palier (22, 24, 26, 28), une chambre de compression (2) et une chambre à palier et/ou engrenage (3) destinée au montage de l'au moins un arrangement de palier (22, 24, 26, 28), comprenant un arrangement d'étanchéité (60, 62, 64) servant à faire passer l'arbre (10) en une ou plusieurs parties entre la chambre de compression (2) et la chambre à palier ou engrenage (3), l'arrangement d'étanchéité (60, 62, 64) servant à faire passer l'au moins un arbre (10, 14) en une ou plusieurs parties possédant une première garniture d'étanchéité qui est réalisée sous la forme d'une garniture d'étanchéité à lèvre (60), un deuxième arrangement d'étanchéité (62, 64) étant présent,
    caractérisée en ce
    qu'une entrée de gaz d'arrêt se trouve dans un espace (70) entre la première garniture d'étanchéité à lèvre (60) et le deuxième arrangement d'étanchéité (62, 64) et en ce que le deuxième arrangement d'étanchéité (62, 64) possède au moins une garniture d'étanchéité à segment de piston (62, 64).
  2. Pompe à vide selon la revendication 1, caractérisée en ce que le deuxième arrangement d'étanchéité est constitué de deux garnitures d'étanchéité à segment de piston (62, 64).
  3. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que les garnitures d'étanchéité à segment de piston (62, 64) sont disposées l'une à côté de l'autre et avec un écart l'une par rapport à l'autre.
  4. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que la garniture d'étanchéité à lèvre (60) est disposée du côté de la chambre de compression.
  5. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que le deuxième arrangement d'étanchéité (62, 64) est disposé du côté de la chambre à palier ou engrenage.
  6. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que la garniture d'étanchéité à lèvre (60) est réalisée appliquée contre l'arbre (10, 14) ou contre une douille (58) montée sur l'arbre (10, 14).
  7. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce qu'une lèvre (72) de la garniture d'étanchéité à lèvre (60) est disposée orientée en direction de la chambre de compression (2).
  8. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que l'arbre (10, 14) est muni d'un revêtement au moins dans la zone dans laquelle est appliquée la garniture d'étanchéité à lèvre (60).
  9. Pompe à vide selon la revendication 6, caractérisée en ce que la douille (58) est munie d'un revêtement au moins dans la zone dans laquelle est appliquée la garniture d'étanchéité à lèvre (60).
  10. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce qu'une surface de rotation antagoniste de la garniture d'étanchéité à lèvre (60) possède une torsion.
  11. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que la pompe à vide (100) est réalisée sous la forme d'une pompe de Roots.
EP15151656.4A 2014-05-28 2015-01-19 Pompe à vide Active EP2949938B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014107536.6A DE102014107536A1 (de) 2014-05-28 2014-05-28 Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP2949938A1 EP2949938A1 (fr) 2015-12-02
EP2949938B1 true EP2949938B1 (fr) 2018-10-03

Family

ID=52347241

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15151656.4A Active EP2949938B1 (fr) 2014-05-28 2015-01-19 Pompe à vide

Country Status (2)

Country Link
EP (1) EP2949938B1 (fr)
DE (1) DE102014107536A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210372404A1 (en) * 2019-01-10 2021-12-02 Raymond Zhou Shaw Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11619231B1 (en) * 2021-12-28 2023-04-04 Elvac Co., Ltd Complete bearing-sealed root vacuum pump system capable of promoting vacuum ability of condenser of power plant

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016218239A1 (de) 2016-09-22 2018-03-22 MTU Aero Engines AG Dichtungsanordnung für ein Turbinenzwischengehäuse einer Gasturbine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19544994A1 (de) * 1995-12-02 1997-06-05 Balzers Pfeiffer Gmbh Mehrwellenvakuumpumpe
BE1010915A3 (nl) * 1997-02-12 1999-03-02 Atlas Copco Airpower Nv Inrichting voor het afdichten van een rotoras en schroefcompressor voorzien van dergelijke inrichting.
GB9708397D0 (en) * 1997-04-25 1997-06-18 Boc Group Plc Improvements in vacuum pumps
DE102008060540A1 (de) 2008-12-04 2010-06-10 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
DE102010045881A1 (de) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210372404A1 (en) * 2019-01-10 2021-12-02 Raymond Zhou Shaw Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11619231B1 (en) * 2021-12-28 2023-04-04 Elvac Co., Ltd Complete bearing-sealed root vacuum pump system capable of promoting vacuum ability of condenser of power plant

Also Published As

Publication number Publication date
EP2949938A1 (fr) 2015-12-02
DE102014107536A1 (de) 2015-12-03

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