EP0569455B1 - Pompe a vide du type a marche a sec avec deux arbres - Google Patents
Pompe a vide du type a marche a sec avec deux arbres Download PDFInfo
- Publication number
- EP0569455B1 EP0569455B1 EP92904222A EP92904222A EP0569455B1 EP 0569455 B1 EP0569455 B1 EP 0569455B1 EP 92904222 A EP92904222 A EP 92904222A EP 92904222 A EP92904222 A EP 92904222A EP 0569455 B1 EP0569455 B1 EP 0569455B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- shafts
- pump according
- gear housing
- intermediate plate
- suction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 5
- 229910001060 Gray iron Inorganic materials 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000009987 spinning Methods 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 231100000614 poison Toxicity 0.000 abstract 1
- 239000003440 toxic substance Substances 0.000 abstract 1
- 238000005086 pumping Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 231100000331 toxic Toxicity 0.000 description 4
- 230000002588 toxic effect Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000005202 decontamination Methods 0.000 description 2
- 230000003588 decontaminative effect Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004323 axial length Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
Definitions
- the invention relates to a dry-running twin-shaft vacuum pump with at least one pumping chamber, with a pair of rotors located in the pumping chamber and supported by the shafts, with a gearbox housing which is assigned to one of the two end faces of the pumping chamber, and with bearings which face the wall section facing the pumping chamber of the gear housing and which support the two shafts that pass through this wall section.
- “Dry-running” vacuum pumps are pumps whose pumping chambers do not contain any lubricants and / or sealants. Their advantage is that they can generate completely hydrocarbon-free vacuums. Lubrication of the bearings of the shafts that carry the pistons rotating in the pumping chambers cannot be dispensed with. With dry-running pumps, there is therefore a need to ensure an effective separation of the storage rooms from the pumping rooms.
- the shafts On one side of the pump, the shafts extend into the gear housing, in which there is a gear synchronizing the rotor movement. It must also be ensured that the gear chamber containing oil is sealed off from the adjacent pump chamber.
- the present invention has for its object to provide a twin-shaft vacuum pump of the type mentioned, in which a safe separation between the gear chamber and the adjacent scooping space is guaranteed and in addition, maintenance and assembly work can be carried out much easier.
- this object is achieved in that an intermediate disk is provided between the gear housing and the adjacent scooping chamber, which is penetrated by the shafts and receives the exhaust pipe which is led out laterally and can be detached from the wall of the transmission housing.
- additional means for separating the gear space from the adjacent scooping space can be provided between the shafts and the washer according to the invention.
- the shafts in this area are expediently equipped with bushings, preferably piston ring bushings.
- Pumps of the type according to the invention are usually constructed in disks.
- the assembly begins with the gearbox, the gears, shafts and gearbox-side bearings. This work requires great care and is therefore lengthy. Then the components and rotors that form the scoops are pushed one after the other over the shafts and then only have to be clamped.
- the use of the intermediate disk according to the invention ensures that the area of the pump which is difficult to assemble, namely the gear housing, does not belong to the contaminated area.
- the contaminated area is limited to the parts that are easy to disassemble or assemble. After disassembling the contaminated parts, the wearing parts (bearings, shaft sealing ring) can be easily reached.
- the gearbox as a complex component, is protected against contamination and wear. Overall, the invention greatly facilitates and simplifies service procedures.
- the pump shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 or 6, 7 or 8, 9.
- the axial length of the rotors decreases from the suction side to the pressure side .
- the rotary pistons are of the claw type (Northey, cf., for example, Eu-A-290 662) and rotate in the scoops 11, 12, 13, which are formed by the shields 14 to 17 and the housing rings 18 to 20.
- the shield 17 is formed by the wall section of the Gear housing 21, which is assigned to the outlet-side scooping space 13.
- the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
- the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gear 26, which is in engagement with the gears 24 and 25.
- the shafts 2, 3 are supported by roller bearings 27.
- the upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
- the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage.
- the end opening of the first stage is designated 33 and leads into the connecting duct 34.
- the connecting duct 34 located in the shield 15 is connected to the inlet opening 35 of the second stage.
- the end shield 16 is designed accordingly.
- Below the lowermost (third) pump stage is the outlet 36, which is connected to the front outlet opening 37.
- the gear housing 21 which includes the oil-containing space 40 and the oil pan 41.
- An oil pump 42 connected to the shaft 2 projects into the gear housing 21.
- Lubricant channels extend from the oil pump to the points of the pump (bearings, engagements of the gearwheels 23 to 26, oil seals or the like) which require oil lubrication .
- the bearings 27 in the region of the upper shaft ends are preferably lubricated with grease.
- the illustrated embodiment of the three-stage two-shaft vacuum pump is water-cooled.
- 17 cooling water channels 43 and 44 are provided in the side plates 14 and in the gear housing 21. Cooling water inlet and outlet are designated 45 and 46.
- the cooling water inlet 45 is arranged at the lowest point of the channel system 43, 44, so that a simple cooling water drain is possible and complete emptying is ensured.
- the pump shown is equipped in the manner according to the invention with an intermediate disk 51 which separates the gear housing 21 from the other components which form the scooping spaces 11 to 13.
- the intermediate disk 51 is detachably fastened to the gear housing 1 and itself forms a wall section delimiting the scooping space 13. It receives the exhaust line 52, which is led laterally outwards from the front outlet opening 37.
- the bearings 27 and also a usually existing, associated with each of the shafts radial shaft seal 53 are - as in the prior art - in the wall section 17 of the gear housing 21. After the disassembly of the intermediate plate 51, these components are freely accessible for maintenance work.
- FIG. 2 shows an enlarged partial section through a pump 1 according to the invention in the area of the passage of the shafts 2, 3 (only one is visible) through the bearing plate 16, the outlet-side scooping space 13, the intermediate plate 51 and the wall section 17 of the gear housing 21.
- the shafts 54 which rotate with the shafts and which have annular depressions 55 on their outside.
- the recesses 55 there are resting piston rings 56 which, together with the recesses 55, form labyrinth seals.
- the shafts 2, 3 are supported on the bearings 27 with an enlarged diameter 57.
- a bushing 58 for the radial shaft sealing ring 53 adjoins this diameter widening 57 at the top. This is supported on the outside in an annular profile component 59, which is embedded in the wall section 17 of the gear housing 21 and is fastened thereon.
- a centrifugal disc 61 is also arranged, which protects the radial shaft sealing ring 53 against dust particles that may fall down.
- a sealing gas line 62 opens, which is passed through the intermediate disc 51, that is to say through a component that is simple in terms of casting technology.
- the labyrinth seal located above it has gas flowing continuously in the direction of the scooping chamber 13, so that toxic fluids cannot flow in the opposite direction.
- the walls of the delivery space are as hot as possible during operation.
- this goal is limited by the fact that the transmission housing is cooled.
- the intermediate disk 51 according to the invention it is also possible to largely decouple the gear housing thermally from the scooping areas.
- the washer is made of poorly heat-conducting material (e.g. gray cast iron, stainless steel or the like) and / or that measures (gaps or the like) are taken to cover the contact surfaces between the washer 51 and the adjacent components (ring 20 , Wall 17) reduce.
- a plurality of grooves 63 are provided, one of which is used to hold a sealing ring 64.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Claims (10)
- Pompe à vide (1) à deux arbres et fonctionnant à sec, comprenant au moins une chambre de pompage (11, 12, 13), une paire de rotors (4, 5 ; 6, 7 8, 9) situés dans la chambre de pompage et portés par les arbres (2, 3), un boîtier de transmission (21) qui est associé à l'un des deux côtés d'extrémité de la chambre de pompage, ainsi que des paliers (27) qui sont situés dans la section de paroi (17) du boîtier de transmission (21) orientée vers la chambre de pompage, et qui supportent les deux arbres (2, 3) qui traversent cette section de paroi (17), caractérisée en ce qu'il est prévu entre le boîtier de transmission (21) et la chambre de pompage voisine (13) une plaque intermédiaire (51) démontable par rapport à la paroi (17) du boîtier de transmission (21), ladite plaque intermédiaire étant traversée par les arbres (2, 3) et recevant la conduite d'échappement (52) menée latéralement vers l'extérieur.
- Pompe selon la revendication 1, caractérisé en ce que les arbres (2, 3) sont agencés verticalement.
- Pompe selon l'une ou l'autre des revendications 1 et 2, caractérisée en ce qu'elle comprend des paires de rotors (4, 5 ; 6, 7 ; 8, 9) du type à engrènement.
- Pompe selon l'une quelconque des revendications 1 à 3, caractérisée en ce qu'elle est réalisée à plusieurs étages.
- Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que les arbres (2, 3) sont équipés de douilles (54) dans la région de la plaque intermédiaire (51), de préférence des douilles (54, 55, 56) avec segments de piston.
- Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce qu'une bague d'étanchéité radiale (53) est associée à chacun des arbres (2, 3), ladite bague d'étanchéité étant située entre les paliers (27) et la plaque intermédiaire (51).
- Pompe selon la revendication 6, caractérisée en ce qu'un disque centrifuge est agencé au-dessus de chaque bague d'étanchéité radiale (53).
- Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que la plaque intermédiaire (51) abrite une conduite (62) de gaz d'arrêt (gaz inerte) qui débouche dans la zone limite entre la plaque intermédiaire (51) et le boîtier de transmission (21).
- Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que la plaque intermédiaire (51) est réalisée en un matériau mauvais conducteur de la chaleur, par exemple de la fonte grise ou de l'acier inoxydable.
- Pompe selon l'une quelconque des revendications précédentes, caractérisée en ce que les surfaces de contact de la plaque intermédiaire (51) avec le boîtier de transmission (21) et/ou avec la bague de boîtier (20) adjacente sont réduites.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP91101331 | 1991-02-01 | ||
EP91101331 | 1991-02-01 | ||
PCT/EP1992/000211 WO1992014060A1 (fr) | 1991-02-01 | 1992-01-31 | Pompe a vide du type a marche a sec avec deux arbres |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0569455A1 EP0569455A1 (fr) | 1993-11-18 |
EP0569455B1 true EP0569455B1 (fr) | 1994-08-03 |
Family
ID=8206357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92904222A Expired - Lifetime EP0569455B1 (fr) | 1991-02-01 | 1992-01-31 | Pompe a vide du type a marche a sec avec deux arbres |
Country Status (5)
Country | Link |
---|---|
US (1) | US5364245A (fr) |
EP (1) | EP0569455B1 (fr) |
JP (1) | JPH06505076A (fr) |
DE (1) | DE59200347D1 (fr) |
WO (1) | WO1992014060A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005015212A1 (de) * | 2005-04-02 | 2006-10-05 | Leybold Vacuum Gmbh | Wellendichtung |
EP1273801B2 (fr) † | 2001-07-05 | 2012-09-12 | Kabushiki Kaisha Toyota Jidoshokki | Joint d'étancheité pour pompe à vide rotatif |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4233142A1 (de) * | 1992-10-02 | 1994-04-07 | Leybold Ag | Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe |
JP3432679B2 (ja) * | 1996-06-03 | 2003-08-04 | 株式会社荏原製作所 | 容積式真空ポンプ |
DE19800825A1 (de) * | 1998-01-02 | 1999-07-08 | Schacht Friedrich | Trockenverdichtende Schraubenspindelpumpe |
DE29807796U1 (de) * | 1998-04-30 | 1999-09-09 | GHH-RAND Schraubenkompressoren GmbH & Co. KG, 46145 Oberhausen | Dichtungsanordnung für einen Wellenzapfen eines trockenlaufenden Rotationsschraubenverdichters |
US6318959B1 (en) * | 1998-12-22 | 2001-11-20 | Unozawa-Gumi Iron Works, Ltd. | Multi-stage rotary vacuum pump used for high temperature gas |
JP2002257070A (ja) * | 2001-02-28 | 2002-09-11 | Toyota Industries Corp | 真空ポンプにおける軸封構造 |
JP4061850B2 (ja) * | 2001-02-28 | 2008-03-19 | 株式会社豊田自動織機 | 真空ポンプにおける軸封構造 |
JP2002257244A (ja) * | 2001-02-28 | 2002-09-11 | Toyota Industries Corp | 真空ポンプにおける軸封構造 |
CN100400881C (zh) * | 2002-08-23 | 2008-07-09 | 株式会社丰田自动织机 | 具有轴密封结构的真空泵 |
US7533685B2 (en) | 2005-01-28 | 2009-05-19 | Agilent Technologies, Inc. | Lubricant collection apparatus |
JP4673136B2 (ja) * | 2005-06-09 | 2011-04-20 | 株式会社日立産機システム | スクリュー圧縮機 |
DE102008010427B4 (de) * | 2008-02-21 | 2010-05-12 | Sartorius Stedim Biotech Gmbh | Bioreaktor |
EP3053653B1 (fr) | 2015-02-06 | 2017-11-22 | Alfa Laval Corporate AB | Séparateur centrifuge d'empilement de disques |
CN110159549B (zh) * | 2019-06-19 | 2024-01-02 | 格力博(江苏)股份有限公司 | 泵组件及高压清洗设备 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3575477A (en) * | 1969-10-23 | 1971-04-20 | Edward M Newsome | Seal |
DE3312117A1 (de) * | 1983-04-02 | 1984-10-04 | Leybold-Heraeus GmbH, 5000 Köln | Zweiwellen-vakuumpumpe mit innerer verdichtung |
JPS62243982A (ja) * | 1986-04-14 | 1987-10-24 | Hitachi Ltd | 2段型真空ポンプ装置およびその運転方法 |
EP0290662B1 (fr) * | 1987-05-15 | 1993-03-31 | Leybold Aktiengesellschaft | Pompe à vide à déplacement positif avec deux arbres |
DE3786917D1 (de) * | 1987-05-15 | 1993-09-09 | Leybold Ag | Ein- oder mehrstufige zweiwellenvakuumpumpe. |
FR2638788B1 (fr) * | 1988-11-07 | 1994-01-28 | Alcatel Cit | Pompe a vide du type roots multietage |
US5356275A (en) * | 1991-03-04 | 1994-10-18 | Leybold Aktiengesellschaft | Device for supplying a multi-stage dry-running vacuum pump with inert gas |
-
1992
- 1992-01-31 WO PCT/EP1992/000211 patent/WO1992014060A1/fr active IP Right Grant
- 1992-01-31 JP JP4503932A patent/JPH06505076A/ja active Pending
- 1992-01-31 EP EP92904222A patent/EP0569455B1/fr not_active Expired - Lifetime
- 1992-01-31 DE DE59200347T patent/DE59200347D1/de not_active Expired - Fee Related
- 1992-01-31 US US08/074,858 patent/US5364245A/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1273801B2 (fr) † | 2001-07-05 | 2012-09-12 | Kabushiki Kaisha Toyota Jidoshokki | Joint d'étancheité pour pompe à vide rotatif |
DE102005015212A1 (de) * | 2005-04-02 | 2006-10-05 | Leybold Vacuum Gmbh | Wellendichtung |
Also Published As
Publication number | Publication date |
---|---|
US5364245A (en) | 1994-11-15 |
JPH06505076A (ja) | 1994-06-09 |
DE59200347D1 (de) | 1994-09-08 |
WO1992014060A1 (fr) | 1992-08-20 |
EP0569455A1 (fr) | 1993-11-18 |
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