EP0834017B1 - Pompe a vide - Google Patents

Pompe a vide Download PDF

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Publication number
EP0834017B1
EP0834017B1 EP96922830A EP96922830A EP0834017B1 EP 0834017 B1 EP0834017 B1 EP 0834017B1 EP 96922830 A EP96922830 A EP 96922830A EP 96922830 A EP96922830 A EP 96922830A EP 0834017 B1 EP0834017 B1 EP 0834017B1
Authority
EP
European Patent Office
Prior art keywords
rotor
housing
vacuum pump
bearing body
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96922830A
Other languages
German (de)
English (en)
Other versions
EP0834017A1 (fr
Inventor
Christian Dahmlos
Dietmar Rook
Ralf Steffens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sterling Industry Consult GmbH
Original Assignee
Sterling Industry Consult GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1995122560 external-priority patent/DE19522560A1/de
Priority claimed from DE1995122555 external-priority patent/DE19522555A1/de
Application filed by Sterling Industry Consult GmbH filed Critical Sterling Industry Consult GmbH
Publication of EP0834017A1 publication Critical patent/EP0834017A1/fr
Application granted granted Critical
Publication of EP0834017B1 publication Critical patent/EP0834017B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies

Definitions

  • the invention relates to a vacuum pump with a pair within an axially flow Scooping space, in particular helically interlocking Displacement rotors, each of which is supported by a shaft mounted on the pressure side, each with the rotor of an outside of the housing that forms the scoop arranged motor is connected.
  • the unit is the operationally sensitive Warehouse functions contracted. It can be used by the manufacturer for exchange purposes delivered pre-assembled, adjusted and balanced and as a whole sent to the manufacturer for maintenance while the rest of the maintenance including assembly and disassembly of the less specialized available to the user Personnel can be left.
  • each rotor assembly preassembled independently of the other a separate bearing body is assigned to each rotor.
  • a common bearing body is provided for both rotors can be.
  • the housing forming the scooping chamber is expediently on the pressure side of one Base plate limited, in or on which the bearing body can be centered and / or fixed.
  • This Base plate can be connected in one piece to the scoop chamber. Conveniently however, it is a separate part. It can also be part of the motor housing. this is usually on the base plate on the side remote from the chamber is arranged.
  • the flange plate is expediently sealed off from the scooping space realized in that the flange plate opposite the base plate or the motor housing is sealed, while the base plate or the motor housing opposite the chamber housing is sealed.
  • the pump chamber (or its Jacket and cover) can be removed for maintenance of the scooping area and the rotor surfaces become. without this the tight closure of the synchronization discs receiving rooms impaired.
  • the motor housing is expediently sealed in a dust-tight manner from the atmosphere. It is therefore not necessary to seal the receiving the synchronization discs Spaces opposite the drive.
  • the motor rotor expediently also belongs to the one that can be pulled off the housing as a whole Rotor unit. The same applies to the synchronization gear or to the rotor assembly non-rotatable encoder disk, which is part of a device for measuring the angle of rotation of the rotor.
  • the invention makes it possible to considerably increase the cost of warehousing reduce the need for pumps with different delivery data belonging to the same series essentially only by the length of the rotors, the scoop housing and if necessary, distinguish the tubular parts of the bearing bodies. Instead or in addition They can also differ from the design of the displacement projections on the circumference of the rotors differentiate.
  • the motor housing 2 rests on the foot part 1, with the flange-like base plate at the top 3 may be connected in one piece. on which the pump chamber 4 is built. This is closed at the top by a cover 5 which contains a suction opening 6.
  • each serve to support a rotor 8.
  • its scope preferably two-helically arranged displacer projections 9 carries in the type of tooth engagement in the conveying cavities 10 between the displacer projections 9 of the adjacent rotor.
  • the displacement projections also have an effect 9 together on the circumference with the inner surface of the scoop housing part 4.
  • the Rotors 8 are connected to the suction chamber 11 at the top and to the pressure chamber 12 at the bottom.
  • the pressure chamber 12 communicates with the pressure outlet 17 through the channel 16 Parts are provided at the lower end of the vertical scoop housing.
  • Each rotor 8 is non-rotatably connected to a shaft 20 which passes through the bottom of the bearing body 7 a permanently lubricated roller bearing 21 is mounted.
  • a second, also permanently lubricated Rolling bearing 22 is located at the upper end of a tubular part 23 of the Bearing body 7, in a downward, ie pressure side, open, concentric bore 24 of the rotor 8 protrudes.
  • This bearing 22 is preferably located above the Center of the rotor 8.
  • the tubular part 23 of the bearing body preferably extends by the greater part of the length of the rotor 8.
  • the end of the tubular part 23 is in a vertical arrangement of the pump much higher than the pressure outlet 17. This is helpful for protecting the bearing and drive region from the ingress of liquid or other heavy impurities from the scooping area.
  • Cooling channels 25 are provided in the tubular part 23 of the bearing body, which channels 26 with a cooling water source and via corresponding channels shown in the drawing non-appearance. connected to a cooling water drain.
  • the cooling channels 25 are preferably formed by helical recesses through a sleeve are tightly covered.
  • the cooling of the rotor bearings extends the service life or the Maintenance intervals for these bearings.
  • the circumferential surface is also due to the cooling of the tubular part 23 of the bearing body is kept at a low temperature. This Circumferential surface is the inner peripheral surface of the cavity 24 of the rotor with little Distance opposite.
  • These surfaces are designed to ensure good heat exchange are capable and thus heat from the rotor indirectly via the tubular Part 23 of the bearing body and its cooling devices 25 can be removed.
  • these can be designed in a suitable manner. For example, they can be treated or be browned that the radiation exchange is favored by high absorption coefficients becomes.
  • the convective heat exchange mediates the gas layer in between can by small surface distance and suitable surface structure, the leads to an increase in the heat transfer coefficient.
  • One area or both can be rough for this purpose or with heat exchange fins or threads or the like be trained.
  • Suitable sealing and / or locking devices are provided.
  • the equipment of the opposing surfaces of the bearing body is advantageous 23 and the inner surfaces of the rotor cavity 24 on one side or on both Sides with a feed thread, not shown, that have a feed effect from the rotor cavity 24 exercises towards the pressure chamber 12.
  • This promotional effect works because of it higher density primarily on solid or liquid particles and thereby prevents their penetration into the bearing and drive area.
  • the conveyor thread is expedient designed so that this effect even at significantly reduced speed is effective.
  • the conveying effect can also be brought about by the gap between the rotor and bearing body widens conically towards the pressure chamber.
  • the gap width (distance of the Surface of the bearing body from the surface of the rotor) remains essentially constant.
  • the surfaces facing each other can also be used in this case be provided with a conveyor thread on one or both sides; required but it is not.
  • the cleaning operation is not carried out continuously, but periodically when cleaning is required (e.g. due to an increase in drive torque) is detected. Thanks to the pump's insensitivity to liquids relatively large amounts of liquid can then also be used. If the operating speed due to the amount or type of cleaning fluid used cannot be maintained, the speed can be reduced accordingly.
  • suitable control devices are provided. For example, the speed can be dependent are controlled by the drive torque. what with increased power requirements automatically to a corresponding reduction in speed compared to the operating speed leads.
  • the continuous rotation of the rotors even during the cleaning phase not only serves to seal the rotor bearing, but also promotes the action the cleaning liquid on the soiled surfaces.
  • the promotional effect in the gap between the rotor and bearing body can also be used to promote Seal gas can be used independently of an external compressed gas source. In general but is the effect of such a pressurized gas source to promote the sealing gas prefer to be independent of the rotor speed in the sealing gas supply.
  • the scoop chamber 4 can contain a chamber 30 (Fig. 2), the whole or over Much of the circumference revolves and circulates through the cooling water to the housing to keep at a predetermined temperature. Cooling of the housing jacket is not required in all cases. However, it is in the context of the invention advantageously possible because the rotors 8 are cooled and their thermal expansion is therefore limited. There is no need to fear that the rotors are only there tarnish on the case because they stretch while the case on less Temperature is maintained.
  • the pump according to the invention can be equipped with pre-inlet. It means that Channels 31 in the areas of high, possibly even medium compression in the housing are provided, through which gas of higher pressure than it reaches the compression stage corresponds to this area of the scooping space, is let in to effect cooling and / or noise reduction according to known principles.
  • the pre-inlet gas can be directly the Pressure side of the pump can be removed by placing it in the cooler pockets 30 of the scoop jacket 4 is cooled. For this purpose, it can be passed through heat exchanger tubes become.
  • roller bearings 21, 22 in the example shown are angular contact ball bearings, which are set against each other by a spring 29.
  • Each shaft 20 carries below the Bearing 21 preferably immediately, i.e. without an intermediate clutch, the rotor 35 of the drive motor, the stator 36 is arranged in the motor housing 2.
  • the Motor housing can be equipped with cooling channels 38.
  • the flange plates 50 which in the example shown with the bearing bodies 7 from one Pieces are, with their outer edges 51, which is essentially the scope follow the scoop chamber 4, and their abutting inner edges 52 the top of the base plate 3 placed.
  • the flange plates 50 are opposite Base plate 3 sealed. Also the end faces following a secant in radial section 53, on which they lie against each other, are equipped with a sealing insert.
  • a recess is provided under the flange plates 50, between the edges 51, 52, which includes a space 39 with the top of the base plate 3, which is for receiving of synchronization gears 40, which rotates with known means on the Shafts 20 are arranged between the bearings 21 and the motor rotors. So that they Area of the inner edges 52 of the flange plates 50 can comb with each other the inner edges at a corresponding point on a cutout through which the gears reach through. Below this section there is a bridge on each side 1 the reference line of the reference number 52, which generally designates the inner edge points. This web is not only advantageous for reasons of stability, but also because it is a circumferential seal on the one hand against the base plate 3 and on the other hand allows between the flattened secant surfaces of the flange plates 50.
  • the recesses 39 in the flange plates 50 have a diameter that is larger than the diameter of the synchronization gears 40. They are in relation to the Inner edges 52 arranged a little eccentrically so that the synchronization gears 40 when assembling the rotor assemblies despite the presence of the sealing web can be used at 52.
  • the synchronization gears 40 can also serve as pulse generator disks or be supplemented by additional pulse generator disks, which are sensed by sensors 42 1, of which one is shown. These sensors 42 are with a control device in connection, which the respective rotational position of the rotors relative to one Setpoint is monitored and corrected via the drive. It is a synchronization of the rotors electronically, which is known as such and therefore no further explanation is required here.
  • the game between the teeth of the synchronization gears 40 is slightly less than the backlash between the projections 9 of the rotors 8. However, it is larger than the synchronization tolerance of the electronic ones Synchronization device.
  • the performance data of the pump are determined by the drive power and speed by the displacement or delivery volume formed on the rotors and thus by the Length of the rotors determined.
  • the funding data can therefore be changed in that the length of the pump part containing the rotors is changed.
  • a range of Pumps with different performance data are therefore characterized by this from that the individual pumps of this series differ by grading the length distinguish between these parts, the scoop chamber, the rotors and possibly the include tubular parts of the bearing body protruding into the rotors.
  • each rotor with the associated bearing and drive devices forms an independently mountable unit which, in addition to the rotor, consists of the bearings 21, 22, the bearing body 7, the cooling devices provided therein, the shaft 20, the synchronization gear 40, the associated sensor 42 and the motor rotor 35.
  • These units are completely pre-assembled in the pump. You can go after the removal of the pumping chamber housing is easily removed from the base plate 3 or be used. Your replacement can therefore be left to the user. while the manufacturer takes care of the maintenance of the sensitive units as such.
  • Fig. 2 and Fig. 4 illustrate that the suction chamber 11 through the scoop a cover plate 14 is separated, which allows an immediate passage of the sucked medium prevented from the suction opening 6 in the scoop. Instead, it arrives first through one or the other of two openings 61 into the head space 62 one of two settling rooms 63, which act as special containers 68 on the broad sides of the pumping chamber housing 4 are scheduled.
  • the head space 62 is down towards the settling space 63 open and laterally delimited by partitions 64 from two side spaces 65 which are also open to the settling space 63 and through an opening 66 on both sides the opening 61 are arranged, are connected to the pumping chamber of the pump.
  • the medium drawn in passes from the suction opening 6 through the suction chamber 11 into a middle head space 62, is deflected downward into the settling space 63, is therein deflected upwards to one of the side head spaces 65 and passes through from here the opening 66 into the scoop.
  • the openings 61, 62 through which the medium in the Settling space 63 flows in are thus spatially offset from the openings 65, 66, through which it flows back into the scoop.
  • the one thereby forced on the gas flow Redirection has the result that liquid or solid particles carried by him are thrown down into the settling chamber 63 due to the inertia effect. In particular, this also applies to any liquid surge. If often with Liquid slug must be expected, the settling rooms with discharge devices be provided for the liquid contained therein. Regardless of or a fill level meter 67 may also be functionally connected therewith.
  • the pump is preferably of an isochoric design to handle larger quantities of liquid to be able to support without harm.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Rotary Pumps (AREA)

Claims (9)

  1. Pompe à vide comportant une paire de rotors déplaceurs (8) tournant à l'intérieur d'une chambre d'aspiration traversée par un courant axial et s'engageant l'un dans l'autre notamment en forme de vis, lesquels rotors sont portés de manière volante chacun par un arbre (20) monté côté compression, chaque arbre étant relié au rotor (35) d'un moteur disposé à l'extérieur du carter (4) formant la chambre d'aspiration, caractérisée en ce que chaque rotor (8) forme avec l'arbre (20) correspondant et avec un corps de palier (7) stationnaire particulier, qui peut être fixé sur le carter et qui reçoit tous les paliers de l'arbre, un ensemble pouvant être extrait du boítier.
  2. Pompe à vide selon la revendication 1, caractérisée en ce qu'à chaque rotor (8) est affecté un corps de palier (7) séparé.
  3. Pompe à vide selon la revendication 1 ou 2, caractérisée en ce que le carter (4) formant la chambre d'aspiration est limitrophe, côté compression, d'une plaque de base (3) à laquelle peut être fixé le corps de palier (7).
  4. Pompe à vide selon l'une des revendications 1 à 3, caractérisée en ce qu'une plaque-bride (50), qui peut être enlevée avec l'ensemble-rotor, délimite une chambre séparée de manière étanche de la chambre d'aspiration, dans laquelle est prévue une roue dentée de synchronisation (40) et/ou un disque générateur d'impulsions.
  5. Pompe à vide selon la revendication 3 ou 4, caractérisée en ce que sur la plaque de base (3), sur le côté opposé au carter (4) formant la chambre d'aspiration, est disposé un carter-moteur (37) logeant les moteurs.
  6. Pompe à vide selon l'une des revendications 1 à 5, caractérisée en ce qu'au moins un palier de rotor (22) est disposé à l'intérieur du rotor (8) dans une chambre (24) du rotor, ouverte vers le côté compression (12), sur un élément tubulaire (23), qui s'engage dans le rotor (8), du corps de palier (7).
  7. Pompe à vide selon l'une des revendications 1 à 6, caractérisée en ce que le rotor (35) du moteur fait partie aussi des ensembles-rotors pouvant être extraits en bloc.
  8. Pompe à vide selon l'une des revendications 1 à 7, caractérisée en ce que la roue dentée de synchronisation ou le disque générateur d'impulsions fait aussi partie de l'ensemble-rotor pouvant être extrait en bloc.
  9. Série de pompes à vide selon l'une des revendications 1 à 8, caractérisée en ce que des pompes aux caractéristiques de refoulement différentes diffèrent, indépendamment de l'entraínement, essentiellement seulement par la longueur des rotors, des carters formant les chambres d'aspiration et éventuellement des éléments tubulaires des corps de paliers ainsi qu'éventuellement par la réalisation des saillies de déplacement sur le pourtour des rotors (8).
EP96922830A 1995-06-21 1996-06-18 Pompe a vide Expired - Lifetime EP0834017B1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE1995122560 DE19522560A1 (de) 1995-06-21 1995-06-21 Vakuumpumpe mit einem Paar innerhalb eines axial durchströmten Schöpfraums umlaufender Verdrängerrotoren
DE19522555 1995-06-21
DE1995122555 DE19522555A1 (de) 1995-06-21 1995-06-21 Rotationskolbenverdichter mit zwei Rotoren
DE19522560 1995-06-21
PCT/EP1996/002630 WO1997001037A1 (fr) 1995-06-21 1996-06-18 Pompe a vide

Publications (2)

Publication Number Publication Date
EP0834017A1 EP0834017A1 (fr) 1998-04-08
EP0834017B1 true EP0834017B1 (fr) 1999-10-27

Family

ID=26016150

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96922830A Expired - Lifetime EP0834017B1 (fr) 1995-06-21 1996-06-18 Pompe a vide

Country Status (12)

Country Link
US (1) US5904473A (fr)
EP (1) EP0834017B1 (fr)
JP (1) JP3957083B2 (fr)
KR (1) KR100390254B1 (fr)
AT (1) ATE186102T1 (fr)
DE (1) DE59603493D1 (fr)
DK (1) DK0834017T3 (fr)
ES (1) ES2140108T3 (fr)
GR (1) GR3032483T3 (fr)
PT (1) PT834017E (fr)
TW (1) TW454066B (fr)
WO (1) WO1997001037A1 (fr)

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JP4844489B2 (ja) * 2007-07-19 2011-12-28 株式会社豊田自動織機 流体機械
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IT1393277B1 (it) * 2009-03-17 2012-04-12 Vhit Spa Pompa per vuoto rotativa con un dispositivo di disaccoppiamento dal motore di azionamento
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
WO2012076204A2 (fr) * 2010-12-10 2012-06-14 Ateliers Busch Sa Pompe à vide pour applications dans des machines d'emballage sous vide
BR112014028701A2 (pt) * 2012-05-25 2017-06-27 Ateliers Busch S A máquina volumétrica de tipo "a parafuso" aperfeiçoada
TWI491803B (zh) * 2013-02-07 2015-07-11 Hanbell Precise Machinery Co Ltd 一種雙段螺旋導程真空泵
WO2016157325A1 (fr) * 2015-03-27 2016-10-06 株式会社日立産機システム Compresseur de gaz
WO2016157450A1 (fr) * 2015-03-31 2016-10-06 株式会社日立産機システム Compresseur de gaz
CN106050664A (zh) * 2016-08-05 2016-10-26 北京朗禾科技有限公司 一种复合转子真空泵
CN106762646A (zh) * 2016-12-27 2017-05-31 北京朗禾科技有限公司 一种双电机复合转子双轴传动设备
CN106151031A (zh) * 2016-09-30 2016-11-23 北京艾岗科技有限公司 一种无油螺杆空压机
JP6930290B2 (ja) * 2017-08-28 2021-09-01 株式会社ジェイテクト 外接ギヤポンプ
US11365735B2 (en) * 2017-10-25 2022-06-21 Carrier Corporation Internal discharge gas passage for compressor

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JP3074829B2 (ja) * 1991-09-05 2000-08-07 松下電器産業株式会社 流体回転装置
EP0558921B2 (fr) * 1992-01-31 2003-09-10 Matsushita Electric Industrial Co., Ltd. Dispositif technique à plusieurs arbres rotatifs synchronisés
KR960009861B1 (ko) * 1992-01-31 1996-07-24 다니이 아끼오 유체회전장치
JPH05209594A (ja) * 1992-01-31 1993-08-20 Hitachi Ltd スクリュー真空ポンプ
JP3569924B2 (ja) * 1992-03-19 2004-09-29 松下電器産業株式会社 流体回転装置
DE69625401T2 (de) * 1995-03-20 2003-10-30 Ebara Corp Vakuumpumpe

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DE59603493D1 (de) 1999-12-02
ATE186102T1 (de) 1999-11-15
KR19990083660A (ko) 1999-12-06
JPH11508343A (ja) 1999-07-21
DK0834017T3 (da) 2000-04-25
GR3032483T3 (en) 2000-05-31
US5904473A (en) 1999-05-18
JP3957083B2 (ja) 2007-08-08
EP0834017A1 (fr) 1998-04-08
WO1997001037A1 (fr) 1997-01-09
TW454066B (en) 2001-09-11
PT834017E (pt) 2000-04-28
ES2140108T3 (es) 2000-02-16
KR100390254B1 (ko) 2003-08-19

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