EP0409287B1 - Pompe à vide avec espace de déplacement - Google Patents

Pompe à vide avec espace de déplacement Download PDF

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Publication number
EP0409287B1
EP0409287B1 EP90116358A EP90116358A EP0409287B1 EP 0409287 B1 EP0409287 B1 EP 0409287B1 EP 90116358 A EP90116358 A EP 90116358A EP 90116358 A EP90116358 A EP 90116358A EP 0409287 B1 EP0409287 B1 EP 0409287B1
Authority
EP
European Patent Office
Prior art keywords
pump
shaft
drive
cup
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90116358A
Other languages
German (de)
English (en)
Other versions
EP0409287A1 (fr
Inventor
Hanns-Peter Dr. Berges
Hartmut Kriehn
Wolfgang Leier
Ralf Steffens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to EP90116358A priority Critical patent/EP0409287B1/fr
Priority to DE90116358T priority patent/DE3789556D1/de
Publication of EP0409287A1 publication Critical patent/EP0409287A1/fr
Application granted granted Critical
Publication of EP0409287B1 publication Critical patent/EP0409287B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/52—Bearings for assemblies with supports on both sides

Definitions

  • the invention relates to a vacuum pump with the features of the preamble of claim 1.
  • a vacuum pump of the generic type is known from FR-A-12 90 239.
  • the rotors rotate about vertical axes and are each mounted on a housing-fixed mandrel that passes through the respective rotor from the outlet side.
  • the upper bearings of the rotors on the respective mandrel are pot-shaped.
  • the pots, which are open at the top, are covered with caps that rotate with the rotors.
  • the known pump has one stage. In order to be able to store the rotors exactly on the inlet side, their mandrels fixed to the housing must be very solid. In the case of a multi-stage vacuum pump, the bearing principle of a “housing-fixed mandrel that penetrates the entire rotor system” would lead to an extremely complex structure.
  • the present invention has for its object to provide a twin-shaft vacuum pump of the type mentioned, which is relatively compact and in which an effective separation of the rooms in which the inlet-side bearings are located from the pumping chambers is ensured.
  • the invention preferably relates to a twin-shaft vacuum pump in which all rotor pairs are equipped with rotary lobes of the claw type (Northey profile).
  • the invention can also be used in twin-shaft vacuum pumps with rotors of a different design (root profile, screw profile or any combination of all of the profiles mentioned).
  • the exemplary embodiment shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three rotor pairs 4, 5 or 6, 7 or 8, 9.
  • the axial length of the rotors decreases from the suction side to the pressure side .
  • the rotary pistons are of the claw type (see FIG. 2) and rotate in the scoops 11, 12, 13, which are formed by the shields 14 to 17 and the housing rings 18 to 20.
  • the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
  • the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gear 26, which is in engagement with the gears 24 and 25.
  • the shafts 2, 3 are supported by roller bearings 27.
  • the upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
  • the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage.
  • the end opening of the first stage is designated 33 and leads into the connecting duct 34.
  • the connecting duct 34 located in the shield 15 is connected to the inlet opening 35 of the second stage.
  • the end shield 16 is designed accordingly.
  • Below the lowest (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower end shield 17.
  • An oil-containing space 40 formed by a common shaft trough 41, is provided below the system consisting of the pump housing and motor.
  • An oil pump 42 connected to the shaft 2 projects into this shaft trough 41.
  • Lubricant channels not shown in detail, extend from the oil pump to the points of the pump (bearings, engagements of the gear wheels 23 to 26, oil seals or the like) which require oil lubrication .
  • cooling water channels 43 and 44 are provided in the side plates 14 and 17. Cooling water inlet and outlet are designated 45 and 46.
  • the cooling water inlet 45 is arranged at the lowest point of the channel system 43, 44, so that a simple cooling water drain is possible and complete emptying is ensured.
  • Fig. 3 shows a longitudinal section through a two-stage two-shaft vacuum pump according to the invention.
  • the drive motor 22 is arranged below the pump. Its shaft 51 forms an axial extension of the shaft 2.
  • the motor shaft 51 and pump shaft 2 are expediently formed in one piece.
  • the drive motor 22 is water-cooled and for this purpose equipped with a double-walled housing 52.
  • the cooling channel 53 thus formed is connected to the cooling system 43 to 46 of the pump housing.
  • the connecting lines required for this are designated 54 and 55.
  • the synchronization wheels 23, 24 and the oil chamber 40, into which the oil pump 42 projects, are located between the drive motor 22 and the lower end plate 17.
  • the oil pump 42 is coupled to the drive shaft 3.
  • the embodiment according to FIG. 3 has a small overall height despite the pump housing and the drive motor lying axially one behind the other, since on the one hand the pump and motor have a common shaft and - because of the water cooling - the drive motor does not require a cooling fan. A separate engine mounting can also be omitted.
  • the cooling water inlet is arranged as far down as possible on the motor housing 52, so that it can be used as a cooling water outlet in a simple manner. A complete drainage of the entire cooling system is guaranteed.
  • FIG. 4 is a single-stage two-shaft vacuum pump with a drive motor 22 arranged next to it.
  • This arrangement has the advantage that a belt or chain drive (the latter is shown) can be used.
  • the shaft 3 of the vacuum pump and the shaft 51 of the motor 22 are equipped with gear wheels 56 and 57 and connected to one another via a chain, not shown in detail.
  • the advantage of this solution is that speed differences (e.g. drive motors with 50 or 60 Hz) can be compensated for in a simple manner.
  • drives of this type have the advantage of better damping.
  • FIG. 4 shows a special feature which relates to the design of the mounting of the shafts 2, 3 in the end shield 14.
  • essentially cylindrical fitting pieces 61, 62 are connected, which have a pot-shaped design 63 on the end face.
  • the shaft ends themselves or the end faces of the rotors can also be equipped with this cup-shaped design 63.
  • a cylindrical stump 65 which is fastened to a housing cover 66, projects into the respective pot-shaped space from above.
  • the bearing 27 is supported with its inner bearing ring on the fixed stump 65 and with its outer bearing ring on the inner wall of the cup-shaped design.
  • the cylindrical adapters 61, 62 form with the surrounding walls of the bearing plate 14 a gap seal, the z. B. can be formed as a labyrinth seal 67 (with piston rings located in the grooves). This ensures an effective separation of the storage rooms from the usually oil-free delivery rooms.
  • FIG. 5 shows an enlarged bearing arrangement of the type described in relation to FIG. 4.
  • a rotating ring 68 is provided above the bearing ring 27, which almost completely closes the storage space from the outside. A centrifugal effect also occurs. Lubricant reaching the ring 68 is conveyed outwards and thus back into the storage space.
  • a shaft sealing ring 69 is provided above the bearing 27, which also closes the storage space.
  • the sealing lip of the shaft sealing ring 68 lies against the stump 65 when the shaft 2, 3 is stationary. If the shaft rotates, the sealing lip lifts off from the shaft end 65, so that the seal becomes contactless.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (8)

  1. Pompe à vide (1) comprenant au moins une chambre de déplacement (11), comprenant deux rotors (4, 5, 6, 7, 8, 9) situés dans la chambre de déplacement, ou dans chaque chambre de déplacement, et tournant autour d'axes verticaux, comprenant des plaques (14, 17) qui délimitent la chambre de déplacement, ou respectivement les chambres de déplacement, et dans lesquelles sont situées l'entrée (32) de la pompe agencée du côté aspiration et la sortie (37) de la pompe agencée du côté pression, comprenant une transmission de synchronisation située dans une chambre latérale et constituée par deux roues dentées, ladite transmission étant en liaison avec un moteur d'entraînement, la chambre latérale avec la transmission de synchronisation (23, 24) étant agencée au-dessous de la paire de rotors, et comprenant dans la région du côté d'aspiration de la pompe à vide (1) des paliers (27) réalisés sous forme de godets, caractérisée en ce que les rotors (4, 5) sont agencés chacun sur un arbre (2, 3); en ce que les arbres (2, 3) s'appuient dans les plaques de montage (14, 17) par l'intermédiaire de paliers (27), et en ce que les paliers supérieurs sont réalisés en forme de godets de telle manière que les paliers d'arbre (27) s'appuient sur les parois intérieures des formes de godets (63) et sur un moignon (65) solidaire du boîtier qui pénètre depuis le haut dans celles-ci.
  2. Pompe selon la revendication 1, caractérisée en ce que les formes de godets (63) sont constituées par l'arbre lui-même ou par des pièces ajustées (61, 62) fixées sur les extrémités des arbres (2, 3); et en ce que la face extérieure de ces pièces ajustées constitue avec la plaque de montage supérieure (14) qui l'entoure des étanchéités à fente, à labyrinthe, ou similaire.
  3. Pompe selon la revendication 1, 2, caractérisée en ce qu'une bague d'étanchéité (69) pour l'arbre forme la fermeture de la chambre de palier en forme de godet.
  4. Pompe selon l'une des revendications 1, 2 ou 3, caractérisée en ce que le moteur d'entraînement (22) est agencé à côté de la pompe (1) de telle manière que son arbre d'entraînement (51) est également orienté verticalement.
  5. Pompe selon la revendication 4, caractérisée en ce que les roues dentées (23, 24) de la transmission de synchronisation sont agencées dans un plan avec une roue dentée (25) sur l'arbre d'entraînement (51) du moteur (22), et en ce qu'il est prévu une autre roue dentée (26) pour réaliser la liaison d'entraînement.
  6. Pompe selon la revendication 4, caractérisée en ce que l'arbre (51) du moteur d'entraînement (22) est relié à l'un des arbres (2, 3) de la pompe (1) au moyen d'un entraînement à courroie, à courroie dentée, ou à chaîne.
  7. Pompe selon l'une des revendications 1 à 6, caractérisée en ce que l'entrée (29) de la pompe (1) est agencée au-dessus de l'étage de pompe situé le plus en haut; et en ce que la sortie (36) de la pompe est située au-dessous de l'étage de la pompe situé le plus en bas.
  8. Pompe selon la revendication 7, caractérisée en ce que l'entrée (29) de la pompe (1) est réalisée sous la forme d'un manchon de raccordement vertical avec une bride de raccordement horizontale (28).
EP90116358A 1987-05-15 1987-05-15 Pompe à vide avec espace de déplacement Expired - Lifetime EP0409287B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP90116358A EP0409287B1 (fr) 1987-05-15 1987-05-15 Pompe à vide avec espace de déplacement
DE90116358T DE3789556D1 (de) 1987-05-15 1987-05-15 Vakuumpumpe mit Schöpfraum.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP90116358A EP0409287B1 (fr) 1987-05-15 1987-05-15 Pompe à vide avec espace de déplacement
EP87107089A EP0290662B1 (fr) 1987-05-15 1987-05-15 Pompe à vide à déplacement positif avec deux arbres

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP87107089.2 Division 1987-05-15

Publications (2)

Publication Number Publication Date
EP0409287A1 EP0409287A1 (fr) 1991-01-23
EP0409287B1 true EP0409287B1 (fr) 1994-04-06

Family

ID=8196996

Family Applications (2)

Application Number Title Priority Date Filing Date
EP87107089A Expired - Lifetime EP0290662B1 (fr) 1987-05-15 1987-05-15 Pompe à vide à déplacement positif avec deux arbres
EP90116358A Expired - Lifetime EP0409287B1 (fr) 1987-05-15 1987-05-15 Pompe à vide avec espace de déplacement

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP87107089A Expired - Lifetime EP0290662B1 (fr) 1987-05-15 1987-05-15 Pompe à vide à déplacement positif avec deux arbres

Country Status (4)

Country Link
US (1) US4940398A (fr)
EP (2) EP0290662B1 (fr)
JP (2) JPS63302194A (fr)
DE (1) DE3785192D1 (fr)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2645574B2 (ja) * 1988-10-07 1997-08-25 株式会社宇野澤組鐵工所 多段真空ポンプ
EP0370117B1 (fr) * 1988-10-24 1994-01-12 Leybold Aktiengesellschaft Pompe à vide avec deux arbres et méthode de fonctionnement
DE3876243D1 (de) * 1988-10-24 1993-01-07 Leybold Ag Zweiwellenvakuumpumpe mit schoepfraum.
DE4017192A1 (de) * 1990-05-29 1991-12-05 Leybold Ag Verfahren zur herstellung eines pumpenringes fuer eine zweistufige vakuumpumpe sowie mit einem derartigen pumpenring ausgeruestete vakuumpumpe
US5071369A (en) * 1990-12-05 1991-12-10 Amp Incorporated Electrical connector having a terminal position assurance member
DE4038704C2 (de) * 1990-12-05 1996-10-10 K Busch Gmbh Druck & Vakuum Dr Drehkolbenpumpe
EP0497995A1 (fr) * 1991-02-01 1992-08-12 Leybold Aktiengesellschaft Pompe sèche à vide
DE59200347D1 (de) * 1991-02-01 1994-09-08 Leybold Ag Trockenlaufende zweiwellenvakuumpumpe.
DE4233142A1 (de) * 1992-10-02 1994-04-07 Leybold Ag Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
EP0678966B1 (fr) * 1994-04-21 1998-07-08 Ebara Corporation Moteur électrique multi-arbres et pompe à déplacement positif combinée avec un tel moteur
DE4439724A1 (de) * 1994-11-09 1996-05-15 Leybold Ag Trockenverdichtende Zweiwellen-Verdrängermaschine
DE59603870D1 (de) * 1995-06-21 2000-01-13 Sterling Ind Consult Gmbh Mehrstufiger schraubenspindelverdichter
GB9604486D0 (en) * 1996-03-01 1996-05-01 Boc Group Plc Improvements in vacuum pumps
DE19819538C2 (de) 1998-04-30 2000-02-17 Rietschle Werner Gmbh & Co Kg Druck-Saug-Pumpe
FR2785361B1 (fr) * 1998-11-02 2000-12-01 Cit Alcatel Transport de gaz pompes dans une pompe a vide ou des canalisations
US7533685B2 (en) 2005-01-28 2009-05-19 Agilent Technologies, Inc. Lubricant collection apparatus
GB2426036A (en) * 2005-05-10 2006-11-15 Bernard Whicher Vertical Northey compressor
JP4673136B2 (ja) * 2005-06-09 2011-04-20 株式会社日立産機システム スクリュー圧縮機
JP2008138549A (ja) * 2006-11-30 2008-06-19 Anest Iwata Corp ２軸以上の回転軸を配した無給油流体機械本体を有する無給油流体機械
JP2008157446A (ja) * 2006-11-30 2008-07-10 Anest Iwata Corp ２軸以上の回転軸間の駆動力伝達機構と該駆動力伝達機構を用いた無給油流体機械
DE202009012158U1 (de) 2009-09-08 2011-02-03 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe
WO2011101064A2 (fr) * 2010-02-18 2011-08-25 Ralf Steffens Entraînement pour un compresseur à broches
DE202010011626U1 (de) * 2010-08-20 2010-10-21 Hugo Vogelsang Maschinenbau Gmbh Drehkolbenpumpe
DE202017003046U1 (de) * 2017-06-09 2018-09-14 Leybold Gmbh Trockenverdichtende Vakuumpumpe
DE102018203992A1 (de) * 2018-03-15 2019-09-19 Gardner Denver Schopfheim Gmbh Drehkolbenmaschine
CN109113998A (zh) * 2018-09-18 2019-01-01 世通海泰泵业（天津）股份有限公司 抽真空用驱动装置

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE25567E (en) * 1964-05-05 Lorenz
US25567A (en) * 1859-09-27 Belt-hook pliers and punch
US1446366A (en) * 1922-02-18 1923-02-20 Hale Fire Pump Co Inc Pump or motor
US1623650A (en) * 1923-09-19 1927-04-05 Anderson Robert Dunbar Exhaust fan or blower
US2549652A (en) * 1947-06-20 1951-04-17 Waterous Co Universal gear case for rotary pumps
US2880676A (en) * 1956-03-26 1959-04-07 Succop Anna Louise Motor and pump combination
FR1290239A (fr) * 1961-02-28 1962-04-13 Alsacienne Constr Meca Pompe à vide
US3133506A (en) * 1961-08-15 1964-05-19 Luciani Louis Gear pump having internal bearings and seals
FR1411544A (fr) * 1964-10-15 1965-09-17 Moteur à piston rotatif
GB1248032A (en) * 1967-09-21 1971-09-29 Edwards High Vacuum Int Ltd Rotary mechanical vacuum pumps of the intermeshing screw type
GB1248031A (en) * 1967-09-21 1971-09-29 Edwards High Vacuum Int Ltd Two-stage rotary vacuum pumps
US3558248A (en) * 1968-01-10 1971-01-26 Lennox Ind Inc Screw type refrigerant compressor
US3472445A (en) * 1968-04-08 1969-10-14 Arthur E Brown Rotary positive displacement machines
GB1301475A (fr) * 1969-07-14 1972-12-29
US3628898A (en) * 1970-04-20 1971-12-21 Edwin C Bragdon Twin ellipse pump
US3796526A (en) * 1972-02-22 1974-03-12 Lennox Ind Inc Screw compressor
US3811805A (en) * 1972-05-16 1974-05-21 Dunham Bush Inc Hydrodynamic thrust bearing arrangement for rotary screw compressor
JPS5440316A (en) * 1977-09-07 1979-03-29 Hitachi Ltd Enclosed screw compressor
GB2088957B (en) * 1980-12-05 1984-12-12 Boc Ltd Rotary positive-displacement fluidmachines
US4504201A (en) * 1982-11-22 1985-03-12 The Boc Group Plc Mechanical pumps
DE3312117A1 (de) * 1983-04-02 1984-10-04 Leybold-Heraeus GmbH, 5000 Köln Zweiwellen-vakuumpumpe mit innerer verdichtung
JPS60259791A (ja) * 1984-06-04 1985-12-21 Hitachi Ltd オイルフリ−スクリユ−真空ポンプ
JP2511870B2 (ja) * 1986-03-20 1996-07-03 株式会社日立製作所 スクリユ−真空ポンプ装置
US4728271A (en) * 1986-09-02 1988-03-01 Suntec Industries Incorporated Gear pump with improved pinion mounting

Also Published As

Publication number Publication date
EP0290662A1 (fr) 1988-11-17
DE3785192D1 (de) 1993-05-06
EP0409287A1 (fr) 1991-01-23
JPH10192U (ja) 1998-08-25
EP0290662B1 (fr) 1993-03-31
US4940398A (en) 1990-07-10
JPS63302194A (ja) 1988-12-09

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