EP0370117B1 - Pompe à vide avec deux arbres et méthode de fonctionnement - Google Patents

Pompe à vide avec deux arbres et méthode de fonctionnement Download PDF

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Publication number
EP0370117B1
EP0370117B1 EP88117650A EP88117650A EP0370117B1 EP 0370117 B1 EP0370117 B1 EP 0370117B1 EP 88117650 A EP88117650 A EP 88117650A EP 88117650 A EP88117650 A EP 88117650A EP 0370117 B1 EP0370117 B1 EP 0370117B1
Authority
EP
European Patent Office
Prior art keywords
rotor
outlet
recess
scooping
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP88117650A
Other languages
German (de)
English (en)
Other versions
EP0370117A1 (fr
Inventor
Hanns-Peter Dr. Berges
Wolfgang Leier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE88117650T priority Critical patent/DE3887149D1/de
Priority to EP88117650A priority patent/EP0370117B1/fr
Priority to JP1275118A priority patent/JP2755733B2/ja
Priority to US07/482,151 priority patent/US5049050A/en
Publication of EP0370117A1 publication Critical patent/EP0370117A1/fr
Application granted granted Critical
Publication of EP0370117B1 publication Critical patent/EP0370117B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0007—Injection of a fluid in the working chamber for sealing, cooling and lubricating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the invention relates to a method for operating a two-shaft vacuum pump according to the preamble of claim 1.
  • the invention relates to a two-shaft vacuum pump suitable for carrying out this operating method (claim 2).
  • a twin-shaft vacuum pump of this type is known from the older, not prepublished EP-A-0.290.662.
  • the rotors are each equipped with a protrusion (claw, tooth) and a recess and perform their rotary motion in the scooping chamber in a meshing and contact-free manner.
  • the respective cutouts control the inlet and outlet openings located in the side plates of the scoop chamber.
  • the present invention has for its object to provide an operating method for a twin-shaft vacuum pump according to the Northey principle and to design a twin-shaft vacuum pump of this type so that it can be flushed with a gas during operation without the gas flushing the pump properties (Final pressure, pumping speed, etc.) significantly affected.
  • FR-A-21 09 789 belongs to the prior art.
  • the majority of the nozzles are always open. Only some of the nozzles on the side are swept by one of the two rotors (main rotor); however, this is not intended to shut off or control the supply of the liquid into the working space, but rather to provide an effective axial seal of the rotor against the side wall.
  • the exemplary embodiment shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three rotor pairs 4, 5 or 6, 7 or 8, 9.
  • the axial length of the rotors decreases from the suction side to the pressure side .
  • the rotary pistons are of the claw type (see FIG. 2) and rotate in the scoops 11, 12, 13, which are formed by the shields 14 to 17 and the housing rings 18 to 20.
  • the drive motor 22 is located next to the vertically arranged pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which are used to synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8, 9 serve.
  • the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gear 26, which is in engagement with the gears 24 and 25.
  • the shafts 2, 3 are supported by roller bearings 27.
  • the upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
  • the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 in the first stage.
  • the end opening of the first stage is designated 33 and leads into the connecting duct 34.
  • the connecting duct 34 located in the shield 15 is connected to the inlet opening 35 of the second stage.
  • the end shield 16 is designed accordingly.
  • Below the lowest (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower end shield 17.
  • the rotors are each provided with a projection 38 and a recess 39. Otherwise, they have the shape of a circular disc with the radius r1. They rotate in a meshing and contactless manner about the axes 40 and 41 in their respective scoops 11, 12, 13.
  • the recesses 39 are used to control the inlet and outlet.
  • the inlet opening 35 is assigned to the inlet-side rotor 6, and the outlet opening 42 is assigned to the outlet-side rotor 7.
  • the two rotors always form two spaces (scooping volumes) 43, 44, of which the enlarging space 43 is connected to the inlet opening 35.
  • the space 44 which is reduced as a result of the rotor rotation is connected to the outlet opening 42.
  • the mouth 45 of a purge gas line is located in the scoop chamber 12.
  • part of the purge gas line is formed by a longitudinal bore 46 and a transverse bore 47 in the side plate 16.
  • the transverse bore 47 leads to orifices 45, 48 located in the scoops 12, 13, so that both outlet-side stages of the multi-stage two-shaft vacuum pump 1 can be supplied with purge gas.
  • the bore 46 is via a line 49 outside the pump 1 with a purge gas supply 51, for. B. a nitrogen bottle in connection.
  • Figures 2 to 4 show the exact position of the mouth 45 in the scoop 12. It is assigned to the outlet-side rotor 7 and lies on a circle around the axis 41 with the radius r2, on which the outlet opening 42 is also located. This makes it possible to control the purge gas supply by means of the recess 39 in the rotor 7.
  • the position of the mouth 45 is selected so that the respective scooping volume at the moment of the supply of purge gas ( Figure 3) is completed both towards the inlet opening and towards the outlet opening. This condition is fulfilled when the mouth 45 of the purge gas line is upstream of the outlet opening 42 with respect to the rotary movement of the rotor 7.
  • the angle ⁇ which is determined by the position of the purge gas mouth 45 and the start of the outlet opening 42, must be greater than the angle ⁇ , which is due to the width the recess 39 in the rotor 7 is determined.
  • the maximum size of the angle ⁇ is given by the necessary condition that at no time a short circuit between the inlet 35 and the purge gas mouth 45 may exist.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (4)

  1. Procédé d'exploitation d'une pompe à vide à deux arbres (1) selon le principe Northey, comprenant deux rotors (4, 5 ; 6, 7 ; 8, 9) qui tournent en synchronisme et sans contact dans une chambre d'épuisement (11, 12, 13) et qui sont munis chacun d'une saillie (38) et d'un évidement (39), dont l'un commande une ouverture d'entrée (32, 35) et l'autre une ouverture de sortie (33, 37, 42), les deux rotors formant, pendant leur rotation, deux chambres (compartiments d'épuisement 43, 44) dont celle qui s'agrandit (43) est reliée à l'ouverture d'entrée (35) et celle qui diminue (44) est reliée à l'ouverture de sortie (42), caractérisé en ce que du gaz de balayage est introduit dans le compartiment d'épuisement (44) qui diminue, et qui est transporté vers la sortie, et ceci uniquement lorsque ce compartiment d'épuisement (44) est fermé aussi bien vis-à-vis de l'ouverture d'entrée (35) que vis-à-vis de l'ouverture de sortie (42), et en ce que l'amenée du gaz de balayage est commandée à l'aide du rotor du côté de sortie (5, 7, 9).
  2. Pompe pour la mise en oeuvre du procédé selon la revendication 1, comprenant deux rotors (4, 5 ; 6, 7 ; 8, 9) qui tournent en synchronisme et sans contact dans une chambre d'épuisement (11, 12, 13), dans laquelle
    - les rotors sont tourillonnés pour tourner chacun autour d'un axe (40, 41),
    - les rotors sont équipés chacun d'une saillie (38) et d'un évidement (39),
    - à l'un (6) des rotors (6, 7) est associée, dans un des flasques latéraux (14, 15, 16) qui délimitent la chambre d'épuisement, une ouverture d'aspiration (32, 35) dont la distance à l'axe de rotation (40) correspond à la distance de l'évidement (39) du rotor (6) à l'axe de rotation (40) de telle manière que l'évidement (39) du rotor (6) commande l'ouverture d'aspiration (32, 35),
    - à l'autre rotor (7), est associée, dans l'autre flasque latéral (15, 16, 17), une ouverture de sortie (33, 42, 37) dont la distance à l'axe de rotation (41) correspond à la distance de l'évidement (39) du rotor (7) à l'axe de rotation (41) de telle manière que l'évidement (39) du rotor (7) commande l'ouverture de sortie (33, 42, 37), caractérisée
    - en ce qu'une conduite de gaz de balayage (46, 47) débouche dans la chambre d'épuisement,
    - en ce que le débouché (45, 48) de la conduite de gaz de balayage est associé au rotor du côté de sortie (5, 7, 9),
    - en ce que la distance du débouché (45, 48) à l'axe de rotation (41) correspond à la distance de l'évidement (39) du rotor (7) à l'axe de rotation (41) de telle manière que l'évidement (39) du rotor (7) commande aussi l'amenée du gaz de balayage, et
    - en ce que la position du débouché (45, 48) de la conduite de gaz de balayage (46, 47) est choisie de manière que le compartiment d'épuisement qui diminue et qui est transporté vers la sortie, soit fermé vis-à-vis de l'ouverture d'entrée (35) et de l'ouverture de sortie (42) au moment de l'amenée du gaz de balayage.
  3. Pompe selon la revendication 2, caractérisée en ce que l'ouverture de sortie (42) et le débouché (45, 48) de la conduite de gaz de balayage se trouvent sur un cercle centré sur l'axe de rotation (41) du rotor du côté de sortie (5, 7, 9), en ce que le débouché (45, 48) se trouve en amont de l'ouverture de sortie (42) - rapporté au mouvement de rotation du rotor - et en ce que l'angle (α) qui est défini par la position du débouché (45, 48) et par le début de l'ouverture de sortie (42) est plus grand que l'angle (β) qui est défini par la largeur de l'évidement du rotor.
  4. Pompe selon la revendication 2 ou 3, caractérisée en ce qu'elle est à trois étages et en ce qu'un débouché (45, 48) d'une conduite de gaz de balayage (46, 47) est prévue dans chacune des chambres d'épuisement (12, 13) des étages de pompe du côté de sortie.
EP88117650A 1988-10-24 1988-10-24 Pompe à vide avec deux arbres et méthode de fonctionnement Expired - Lifetime EP0370117B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE88117650T DE3887149D1 (de) 1988-10-24 1988-10-24 Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb.
EP88117650A EP0370117B1 (fr) 1988-10-24 1988-10-24 Pompe à vide avec deux arbres et méthode de fonctionnement
JP1275118A JP2755733B2 (ja) 1988-10-24 1989-10-24 ２軸式真空ポンプを運転する方法並びに２軸式真空ポンプ
US07/482,151 US5049050A (en) 1988-10-24 1990-02-20 Method for operating a twin shaft vacuum pump according to the Northey principle and a twin shaft vacuum pump suitable for the implementation of the method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88117650A EP0370117B1 (fr) 1988-10-24 1988-10-24 Pompe à vide avec deux arbres et méthode de fonctionnement

Publications (2)

Publication Number Publication Date
EP0370117A1 EP0370117A1 (fr) 1990-05-30
EP0370117B1 true EP0370117B1 (fr) 1994-01-12

Family

ID=8199480

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88117650A Expired - Lifetime EP0370117B1 (fr) 1988-10-24 1988-10-24 Pompe à vide avec deux arbres et méthode de fonctionnement

Country Status (4)

Country Link
US (1) US5049050A (fr)
EP (1) EP0370117B1 (fr)
JP (1) JP2755733B2 (fr)
DE (1) DE3887149D1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4038704C2 (de) * 1990-12-05 1996-10-10 K Busch Gmbh Druck & Vakuum Dr Drehkolbenpumpe
DE59200391D1 (de) * 1991-03-04 1994-09-22 Leybold Ag Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.
DE19819538C2 (de) 1998-04-30 2000-02-17 Rietschle Werner Gmbh & Co Kg Druck-Saug-Pumpe
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
WO2004036047A1 (fr) * 2002-10-14 2004-04-29 The Boc Group Plc Pompe a vide a piston rotatif pourvue d'un equipement de lavage
JP3991918B2 (ja) * 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
KR20100091063A (ko) * 2009-02-09 2010-08-18 삼성전자주식회사 회전체 크리닝 장치 및 이를 갖는 진공 펌프
DE202014007117U1 (de) 2014-09-05 2015-12-09 Oerlikon Leybold Vacuum Gmbh Klauenpumpe
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1915269A1 (de) * 1969-03-26 1970-10-08 Siemens Ag Roots-Geblaese
SE351012B (fr) * 1970-10-01 1972-11-13 Atlas Copco Ab
GB2111126A (en) * 1981-12-09 1983-06-29 British Oxygen Co Ltd Rotary positive-displacement fluid-machines
JPS60256584A (ja) * 1984-05-30 1985-12-18 Honjiyou Chem Kk 高真空装置
JPS62157289A (ja) * 1985-12-29 1987-07-13 Anretsuto:Kk 高真空用ル−ツブロワ−
GB8625337D0 (en) * 1986-10-22 1986-11-26 Utile Eng Co Ltd Pumps
DE3785192D1 (de) * 1987-05-15 1993-05-06 Leybold Ag Zweiwellenvakuumpumpe mit schoepfraum.

Also Published As

Publication number Publication date
JP2755733B2 (ja) 1998-05-25
JPH02153291A (ja) 1990-06-12
US5049050A (en) 1991-09-17
DE3887149D1 (de) 1994-02-24
EP0370117A1 (fr) 1990-05-30

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