DE59200391D1 - Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe. - Google Patents

Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.

Info

Publication number
DE59200391D1
DE59200391D1 DE59200391T DE59200391T DE59200391D1 DE 59200391 D1 DE59200391 D1 DE 59200391D1 DE 59200391 T DE59200391 T DE 59200391T DE 59200391 T DE59200391 T DE 59200391T DE 59200391 D1 DE59200391 D1 DE 59200391D1
Authority
DE
Germany
Prior art keywords
gas supply
inert gas
vacuum pump
stage dry
running vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59200391T
Other languages
English (en)
Inventor
Lothar Brenner
Rudolf Bahnen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59200391D1 publication Critical patent/DE59200391D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE59200391T 1991-03-04 1992-02-21 Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe. Expired - Fee Related DE59200391D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP91103238 1991-03-04
PCT/EP1992/000367 WO1992015786A1 (de) 1991-03-04 1992-02-21 Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe

Publications (1)

Publication Number Publication Date
DE59200391D1 true DE59200391D1 (de) 1994-09-22

Family

ID=8206478

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59200391T Expired - Fee Related DE59200391D1 (de) 1991-03-04 1992-02-21 Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.

Country Status (6)

Country Link
US (1) US5356275A (de)
EP (1) EP0574442B1 (de)
JP (2) JPH06505079A (de)
KR (1) KR100203019B1 (de)
DE (1) DE59200391D1 (de)
WO (1) WO1992015786A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992014060A1 (de) * 1991-02-01 1992-08-20 Leybold Aktiengesellschaft Trockenlaufende zweiwellenvakuumpumpe
DE4234169A1 (de) * 1992-10-12 1994-04-14 Leybold Ag Verfahren zum Betrieb einer trockenverdichteten Vakuumpumpe sowie für dieses Betriebsverfahren geeignete Vakuumpumpe
DE69630981T2 (de) 1995-02-28 2004-12-30 Anest Iwata Corp. Kontrollsystem für zweistufige Vakuumpumpe
DE19709206A1 (de) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
DE19945241A1 (de) * 1999-09-21 2001-04-05 Messer Griesheim Gmbh Verfahren zur schonenden Verdichtung von hochreinen Gasen
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP3941452B2 (ja) * 2001-10-17 2007-07-04 株式会社豊田自動織機 真空ポンプにおける運転停止制御方法及び運転停止制御装置
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
JP3941484B2 (ja) * 2001-12-03 2007-07-04 アイシン精機株式会社 多段式真空ポンプ
US8047817B2 (en) * 2003-09-23 2011-11-01 Edwards Limited Cleaning method of a rotary piston vacuum pump
GB0519742D0 (en) * 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas
GB2440341B (en) * 2006-07-24 2011-09-21 Boc Group Plc Vacuum pump
KR100773358B1 (ko) * 2006-11-17 2007-11-05 삼성전자주식회사 유체 노즐을 갖는 진공펌프 및 배기 시스템
KR100873104B1 (ko) * 2007-03-16 2008-12-09 삼성전자주식회사 회전체 크리닝 유니트 및 이를 갖는 진공펌프
JP5073754B2 (ja) * 2007-11-14 2012-11-14 株式会社アルバック 多段式ドライポンプ
KR20100091063A (ko) * 2009-02-09 2010-08-18 삼성전자주식회사 회전체 크리닝 장치 및 이를 갖는 진공 펌프
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
TR201901251T4 (tr) * 2015-06-17 2019-02-21 Jurop S P A Bir atık madde giriş ekipmanı ya da sistemi için emme/sıkıştırma düzeneği.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2839240A (en) * 1955-03-03 1958-06-17 Bechtold Karl Compression and expansion machines for gaseous bodies
FR93701E (fr) * 1967-04-03 1969-05-09 Legris Fils Programmateur a fluide et a circuit intégré.
JP2515831B2 (ja) * 1987-12-18 1996-07-10 株式会社日立製作所 スクリユ―真空ポンプ
GB8809621D0 (en) * 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
DE3887149D1 (de) * 1988-10-24 1994-02-24 Leybold Ag Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb.
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
KR940000217B1 (ko) * 1989-06-05 1994-01-12 가부시기가이샤 히다찌 세이사꾸쇼 스크류 압축장치 및 그 제어장치
US5277224A (en) * 1993-03-02 1994-01-11 Century Industries Inc. Five valve manifold for use with a pressure sensing apparatus

Also Published As

Publication number Publication date
US5356275A (en) 1994-10-18
EP0574442B1 (de) 1994-08-17
JPH06505079A (ja) 1994-06-09
WO1992015786A1 (de) 1992-09-17
EP0574442A1 (de) 1993-12-22
JP2001000025U (ja) 2001-07-19
KR100203019B1 (ko) 1999-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8327 Change in the person/name/address of the patent owner

Owner name: UNAXIS DEUTSCHLAND HOLDING GMBH, 63450 HANAU, DE

8339 Ceased/non-payment of the annual fee