GB0519742D0 - Method of pumping gas - Google Patents

Method of pumping gas

Info

Publication number
GB0519742D0
GB0519742D0 GBGB0519742.1A GB0519742A GB0519742D0 GB 0519742 D0 GB0519742 D0 GB 0519742D0 GB 0519742 A GB0519742 A GB 0519742A GB 0519742 D0 GB0519742 D0 GB 0519742D0
Authority
GB
United Kingdom
Prior art keywords
pumping gas
pumping
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB0519742.1A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GBGB0519742.1A priority Critical patent/GB0519742D0/en
Publication of GB0519742D0 publication Critical patent/GB0519742D0/en
Priority to US11/992,454 priority patent/US20090269231A1/en
Priority to KR1020087007439A priority patent/KR20080049788A/en
Priority to PCT/GB2006/003286 priority patent/WO2007036689A1/en
Priority to JP2008532854A priority patent/JP2009510321A/en
Priority to EP06779305A priority patent/EP1931880A1/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Chemical Vapour Deposition (AREA)
GBGB0519742.1A 2005-09-28 2005-09-28 Method of pumping gas Pending GB0519742D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GBGB0519742.1A GB0519742D0 (en) 2005-09-28 2005-09-28 Method of pumping gas
US11/992,454 US20090269231A1 (en) 2005-09-28 2006-09-06 Method of Pumping Gas
KR1020087007439A KR20080049788A (en) 2005-09-28 2006-09-06 Method of pumping gas
PCT/GB2006/003286 WO2007036689A1 (en) 2005-09-28 2006-09-06 Method of pumping gas
JP2008532854A JP2009510321A (en) 2005-09-28 2006-09-06 How to pump gas
EP06779305A EP1931880A1 (en) 2005-09-28 2006-09-06 Method of pumping gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0519742.1A GB0519742D0 (en) 2005-09-28 2005-09-28 Method of pumping gas

Publications (1)

Publication Number Publication Date
GB0519742D0 true GB0519742D0 (en) 2005-11-09

Family

ID=35394887

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0519742.1A Pending GB0519742D0 (en) 2005-09-28 2005-09-28 Method of pumping gas

Country Status (6)

Country Link
US (1) US20090269231A1 (en)
EP (1) EP1931880A1 (en)
JP (1) JP2009510321A (en)
KR (1) KR20080049788A (en)
GB (1) GB0519742D0 (en)
WO (1) WO2007036689A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5481019B2 (en) * 2007-06-05 2014-04-23 エドワーズ株式会社 Vacuum pump piping structure and cleaning method for the vacuum pump piping
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
JP5102068B2 (en) * 2008-02-29 2012-12-19 株式会社荏原製作所 Multistage vacuum pump
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
AU2011341031B2 (en) * 2010-12-10 2016-10-27 Ateliers Busch Sa Vacuum pump for applications in vacuum packaging machines
GB2500610A (en) * 2012-03-26 2013-10-02 Edwards Ltd Apparatus to supply purge gas to a multistage vacuum pump
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202017003212U1 (en) * 2017-06-17 2018-09-18 Leybold Gmbh Multi-stage Roots pump
FR3092879B1 (en) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Dry type primary vacuum pump
GB2590663B (en) * 2019-12-23 2022-06-29 Edwards S R O Vacuum pump
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
GB2621854A (en) * 2022-08-24 2024-02-28 Edwards Korea Ltd Apparatus and method for delivering purge gas to a vacuum pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01177486A (en) * 1987-12-28 1989-07-13 Ebara Corp Vacuum pump
GB8809621D0 (en) * 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (en) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Positive displacement twin-shaft vacuum pump
JP2733489B2 (en) * 1989-05-10 1998-03-30 株式会社宇野澤組鐵工所 Backflow cooled multi-stage rotary vacuum pump with gas dilution
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
FR2691382B1 (en) * 1992-05-22 1994-09-09 Cit Alcatel Pumping installation for pumping an enclosure containing gases mixed with solid particles or liable to generate solid particles or condensates.
JP3494457B2 (en) * 1993-07-07 2004-02-09 株式会社大阪真空機器製作所 Vacuum pump device
JP3079077B2 (en) * 1997-12-17 2000-08-21 古河電気工業株式会社 Metal organic chemical vapor deposition equipment
JP2001304115A (en) * 2000-04-26 2001-10-31 Toyota Industries Corp Gas feeding device for vacuum pump
JP3758550B2 (en) * 2001-10-24 2006-03-22 アイシン精機株式会社 Multistage vacuum pump
JP2006520873A (en) * 2003-03-19 2006-09-14 株式会社荏原製作所 Positive displacement vacuum pump
JP4232505B2 (en) * 2003-03-27 2009-03-04 アイシン精機株式会社 Vacuum pump

Also Published As

Publication number Publication date
KR20080049788A (en) 2008-06-04
US20090269231A1 (en) 2009-10-29
EP1931880A1 (en) 2008-06-18
WO2007036689A1 (en) 2007-04-05
JP2009510321A (en) 2009-03-12

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