EP0603698A1 - Pompe à vide avec piston roulant - Google Patents

Pompe à vide avec piston roulant Download PDF

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Publication number
EP0603698A1
EP0603698A1 EP93120054A EP93120054A EP0603698A1 EP 0603698 A1 EP0603698 A1 EP 0603698A1 EP 93120054 A EP93120054 A EP 93120054A EP 93120054 A EP93120054 A EP 93120054A EP 0603698 A1 EP0603698 A1 EP 0603698A1
Authority
EP
European Patent Office
Prior art keywords
outlet opening
piston
gas outlet
control piston
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93120054A
Other languages
German (de)
English (en)
Other versions
EP0603698B1 (fr
Inventor
Hermann Lang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Balzers Pfeiffer GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Pfeiffer GmbH filed Critical Balzers Pfeiffer GmbH
Publication of EP0603698A1 publication Critical patent/EP0603698A1/fr
Application granted granted Critical
Publication of EP0603698B1 publication Critical patent/EP0603698B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/20—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with dissimilar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0021—Systems for the equilibration of forces acting on the pump
    • F04C29/0035—Equalization of pressure pulses

Definitions

  • the invention relates to a Roots vacuum pump according to the preamble of the first claim.
  • Roots pump is a pump system that has a technically dry pumping chamber. This means that there is no oil in the scoop for lubrication, sealing, reduction of dead volume or for other purposes.
  • Roots pumps of traditional design are particularly well suited as rotary displacement pumps for conveying or circulating gases. Since the volume does not change during the pure conveying, they work without internal compression. Compression only takes place when the gas is emitted. This results in extremely high energy consumption, which also causes the pump to become very hot.
  • Roots pumps have to compress when the back pressure is too high and uses them mainly at low pressures.
  • Roots pumps are operated in conjunction with other pump types or as a combination of several Roots pumps connected in series for vacuum generation.
  • Such systems can only be implemented with high expenditure on equipment, large space requirements and high energy consumption.
  • the temperatures can be kept within limits with gas-cooled Roots pumps. However, this does not reduce energy consumption.
  • a multi-stage Roots pump is presented in DE-OS 29 51 591. Here several pump stages are realized in one housing. This design represents a more compact solution than the simple combination of several pumps and is also more efficient in terms of efficiency. The above however, this does not solve fundamental problems.
  • Canadian Patent 10 40 540 describes a rotary machine with a control piston and 2 claw-type working pistons with internal compression. This machine is primarily intended for use as a motor or compressor. It is extremely unsuitable for conveying gas quantities, since the gases are compressed in the work rooms and then expanded again.
  • a two-shaft vacuum pump with internal compression is described in DE-OS 33 12 117. To avoid internal over-compression, this pump is equipped with a further outlet opening via a pressure relief valve.
  • the complicated shape of the two pistons makes it difficult to manufacture their surfaces precisely. However, this is a prerequisite for an optimal seal between the two pistons on the one hand and the pistons and the housing wall, on the other hand, to minimize the backflow.
  • the harmful space ie a dead volume, in which a part of the compressed gas is conveyed back to the vacuum side and expands there, is undesirably large. This reduces the efficiency of the internal compression.
  • the object of the invention is to develop a Roots pump with internal compression, which has a good internal seal, a high internal compression and a minimal harmful space with energy-saving operation.
  • the disadvantages mentioned above, which occur with conventional pumps of this type, are to be avoided.
  • connections between the recesses in the control piston and the gas outlet opening cause an outflow of the gases conveyed in the recesses in the phase of the end compression and thus prevent gas recirculation in the intake manifold.
  • connection between the section 8 of the pump chamber and a recess in the control piston extends the area of the pre-compression and prevents over-compression.
  • the pump there is a working piston 4 and a control piston 5 in the housing 1, which is provided with the intake port 2 and the gas outlet opening 3.
  • the piston heads 6 on the working piston 4 engage in the recesses 7 of the control piston 5.
  • the working piston 4 rotates in section 8 and control piston 5 rotates in section 9 of the pump chamber.
  • the edge 10 of the housing is located between the two sections. Another edge 11 important for the function of the pump is located between the partial area 9 and the gas discharge opening 3.
  • the outer boundary line of a piston head is designated by 12 and the rear boundary line of a recess of the control piston in the direction of rotation is designated by 13.
  • Bores 14 are provided in the control piston 5, each of which connects the recesses 7 to the gas outlet opening 3 at the time of the end compression.
  • Another bore 15 connects the compression side of section 8 to section 9 of the pump chamber.
  • the pumping process proceeds as follows: Gas, which enters the pump chamber from the intake port 2, is conveyed through the piston heads 6 into the partial area 8 and compressed there. As soon as a recess 7 of the control piston 5 connects the gas outlet opening 3 to the subarea 8 of the pump chamber, the compressed gas is expelled via the gas outlet opening 3.
  • the boundary line 12 of a piston head may only then the edge 10 between pass through sections 8 and 9 when rear boundary line 13 of a recess 7 has passed edge 11 between gas outlet opening 3 and section 9. After this point in time, the volume is closed in a recess 7 and is further compressed by a piston head 6.
  • the gas compressed in a recess 7 is expelled through a bore 14 via the gas outlet opening 3.
  • part of the gas compressed in the partial area 8 can get into a recess 7 before it is connected to the gas outlet opening 3 in order to then be conveyed from the recess 7 to the gas outlet opening 3.
  • the recess 7 is also used for precompression and over-compression in the partial region 8 is prevented.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP93120054A 1992-12-24 1993-12-13 Pompe à vide avec piston roulant Expired - Lifetime EP0603698B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4244063 1992-12-24
DE4244063A DE4244063A1 (de) 1992-12-24 1992-12-24 Wälzkolben-Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP0603698A1 true EP0603698A1 (fr) 1994-06-29
EP0603698B1 EP0603698B1 (fr) 1997-01-29

Family

ID=6476527

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93120054A Expired - Lifetime EP0603698B1 (fr) 1992-12-24 1993-12-13 Pompe à vide avec piston roulant

Country Status (3)

Country Link
EP (1) EP0603698B1 (fr)
JP (1) JPH06213181A (fr)
DE (2) DE4244063A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007057813A1 (de) 2007-11-30 2009-06-04 Heinig, Jürgen, Dr.-Ing. Anordnung eines Einflügel-Wälzkolbenverdichters und Verfahren zur Verdichtung von förderbaren und kompressiblen Medien
DE102008044856A1 (de) 2008-08-28 2010-03-04 Heinig, Jürgen, Dr.-Ing. Anordnung eines Turbo-Schubgebläses und Verfahren zum Antrieb von Luftfahrzeugen
CN114704465A (zh) * 2022-04-11 2022-07-05 浙江创为真空设备股份有限公司 一种罗茨真空泵预抽结构

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19809957A1 (de) * 1998-03-07 1999-09-09 Pfeiffer Vacuum Gmbh Mehrwellenvakuumpumpe
JP5725660B2 (ja) 2011-09-30 2015-05-27 アネスト岩田株式会社 クローポンプ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1324941A (fr) * 1962-02-09 1963-04-26 Studia Technica Ets Machine volumétrique telle que compresseur ou pompe
GB1128051A (en) * 1965-05-24 1968-09-25 Lucas Industries Ltd Gear pumps
DE3018638A1 (de) * 1980-05-16 1981-12-03 Walter 4791 Schlangen Plöger Drehkolbenverbrennungsmaschine
US5071328A (en) * 1990-05-29 1991-12-10 Schlictig Ralph C Double rotor compressor with two stage inlets

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH405585A (fr) * 1961-10-13 1966-01-15 Studia Technica Ets Machine rotative, notamment compresseur ou pompe
CH621854A5 (en) * 1977-06-06 1981-02-27 Balzers Hochvakuum Roots pump
DE3332361C2 (de) * 1983-09-08 1994-05-26 Balzers Pfeiffer Gmbh Wälzkolbenpumpe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1324941A (fr) * 1962-02-09 1963-04-26 Studia Technica Ets Machine volumétrique telle que compresseur ou pompe
GB1128051A (en) * 1965-05-24 1968-09-25 Lucas Industries Ltd Gear pumps
DE3018638A1 (de) * 1980-05-16 1981-12-03 Walter 4791 Schlangen Plöger Drehkolbenverbrennungsmaschine
US5071328A (en) * 1990-05-29 1991-12-10 Schlictig Ralph C Double rotor compressor with two stage inlets

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007057813A1 (de) 2007-11-30 2009-06-04 Heinig, Jürgen, Dr.-Ing. Anordnung eines Einflügel-Wälzkolbenverdichters und Verfahren zur Verdichtung von förderbaren und kompressiblen Medien
DE102008044856A1 (de) 2008-08-28 2010-03-04 Heinig, Jürgen, Dr.-Ing. Anordnung eines Turbo-Schubgebläses und Verfahren zum Antrieb von Luftfahrzeugen
CN114704465A (zh) * 2022-04-11 2022-07-05 浙江创为真空设备股份有限公司 一种罗茨真空泵预抽结构

Also Published As

Publication number Publication date
EP0603698B1 (fr) 1997-01-29
DE4244063A1 (de) 1994-06-30
DE59305337D1 (de) 1997-03-13
JPH06213181A (ja) 1994-08-02

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