EP0603698A1 - Rolling piston vacuum pump - Google Patents
Rolling piston vacuum pump Download PDFInfo
- Publication number
- EP0603698A1 EP0603698A1 EP93120054A EP93120054A EP0603698A1 EP 0603698 A1 EP0603698 A1 EP 0603698A1 EP 93120054 A EP93120054 A EP 93120054A EP 93120054 A EP93120054 A EP 93120054A EP 0603698 A1 EP0603698 A1 EP 0603698A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- outlet opening
- piston
- gas outlet
- control piston
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005096 rolling process Methods 0.000 title abstract 2
- 238000007906 compression Methods 0.000 claims abstract description 26
- 230000006835 compression Effects 0.000 claims abstract description 22
- 238000005086 pumping Methods 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 description 28
- 238000005265 energy consumption Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/20—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with dissimilar tooth forms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0021—Systems for the equilibration of forces acting on the pump
- F04C29/0035—Equalization of pressure pulses
Definitions
- the invention relates to a Roots vacuum pump according to the preamble of the first claim.
- Roots pump is a pump system that has a technically dry pumping chamber. This means that there is no oil in the scoop for lubrication, sealing, reduction of dead volume or for other purposes.
- Roots pumps of traditional design are particularly well suited as rotary displacement pumps for conveying or circulating gases. Since the volume does not change during the pure conveying, they work without internal compression. Compression only takes place when the gas is emitted. This results in extremely high energy consumption, which also causes the pump to become very hot.
- Roots pumps have to compress when the back pressure is too high and uses them mainly at low pressures.
- Roots pumps are operated in conjunction with other pump types or as a combination of several Roots pumps connected in series for vacuum generation.
- Such systems can only be implemented with high expenditure on equipment, large space requirements and high energy consumption.
- the temperatures can be kept within limits with gas-cooled Roots pumps. However, this does not reduce energy consumption.
- a multi-stage Roots pump is presented in DE-OS 29 51 591. Here several pump stages are realized in one housing. This design represents a more compact solution than the simple combination of several pumps and is also more efficient in terms of efficiency. The above however, this does not solve fundamental problems.
- Canadian Patent 10 40 540 describes a rotary machine with a control piston and 2 claw-type working pistons with internal compression. This machine is primarily intended for use as a motor or compressor. It is extremely unsuitable for conveying gas quantities, since the gases are compressed in the work rooms and then expanded again.
- a two-shaft vacuum pump with internal compression is described in DE-OS 33 12 117. To avoid internal over-compression, this pump is equipped with a further outlet opening via a pressure relief valve.
- the complicated shape of the two pistons makes it difficult to manufacture their surfaces precisely. However, this is a prerequisite for an optimal seal between the two pistons on the one hand and the pistons and the housing wall, on the other hand, to minimize the backflow.
- the harmful space ie a dead volume, in which a part of the compressed gas is conveyed back to the vacuum side and expands there, is undesirably large. This reduces the efficiency of the internal compression.
- the object of the invention is to develop a Roots pump with internal compression, which has a good internal seal, a high internal compression and a minimal harmful space with energy-saving operation.
- the disadvantages mentioned above, which occur with conventional pumps of this type, are to be avoided.
- connections between the recesses in the control piston and the gas outlet opening cause an outflow of the gases conveyed in the recesses in the phase of the end compression and thus prevent gas recirculation in the intake manifold.
- connection between the section 8 of the pump chamber and a recess in the control piston extends the area of the pre-compression and prevents over-compression.
- the pump there is a working piston 4 and a control piston 5 in the housing 1, which is provided with the intake port 2 and the gas outlet opening 3.
- the piston heads 6 on the working piston 4 engage in the recesses 7 of the control piston 5.
- the working piston 4 rotates in section 8 and control piston 5 rotates in section 9 of the pump chamber.
- the edge 10 of the housing is located between the two sections. Another edge 11 important for the function of the pump is located between the partial area 9 and the gas discharge opening 3.
- the outer boundary line of a piston head is designated by 12 and the rear boundary line of a recess of the control piston in the direction of rotation is designated by 13.
- Bores 14 are provided in the control piston 5, each of which connects the recesses 7 to the gas outlet opening 3 at the time of the end compression.
- Another bore 15 connects the compression side of section 8 to section 9 of the pump chamber.
- the pumping process proceeds as follows: Gas, which enters the pump chamber from the intake port 2, is conveyed through the piston heads 6 into the partial area 8 and compressed there. As soon as a recess 7 of the control piston 5 connects the gas outlet opening 3 to the subarea 8 of the pump chamber, the compressed gas is expelled via the gas outlet opening 3.
- the boundary line 12 of a piston head may only then the edge 10 between pass through sections 8 and 9 when rear boundary line 13 of a recess 7 has passed edge 11 between gas outlet opening 3 and section 9. After this point in time, the volume is closed in a recess 7 and is further compressed by a piston head 6.
- the gas compressed in a recess 7 is expelled through a bore 14 via the gas outlet opening 3.
- part of the gas compressed in the partial area 8 can get into a recess 7 before it is connected to the gas outlet opening 3 in order to then be conveyed from the recess 7 to the gas outlet opening 3.
- the recess 7 is also used for precompression and over-compression in the partial region 8 is prevented.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Die Erfindung betrifft eine Wälzkolben-Vakuumpumpe nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a Roots vacuum pump according to the preamble of the first claim.
Die Forderung nach trockenen Pumpsystemen wird besonders in der Vakuumtechnik immer dringlicher. Mit der Wälzkolbenpumpe steht ein Pumpsystem zur Verfügung, welches einen technisch trockenen Schöpfraum aufweist. Darunter ist zu verstehen, daß im Schöpfraum kein Öl zur Schmierung, Abdichtung, Reduzierung von Totvolumen oder zu sonstigen Zwecken vorhanden ist.The demand for dry pump systems is becoming increasingly urgent, especially in vacuum technology. The Roots pump is a pump system that has a technically dry pumping chamber. This means that there is no oil in the scoop for lubrication, sealing, reduction of dead volume or for other purposes.
Wälzkolbenpumpen traditioneller Bauart sind als Rotationsverdränger-Pumpen besonders gut zum Fördern oder Umwälzen von Gasen geeignet. Da sich das Volumen beim reinen Fördern nicht ändert, arbeiten sie ohne innere Verdichtung. Kompression findet erst beim Ausstoß des Gases statt. Dadurch ist ein extrem hoher Energieverbrauch bedingt, welcher zudem noch eine starke Erwärmung der Pumpe verursacht.Roots pumps of traditional design are particularly well suited as rotary displacement pumps for conveying or circulating gases. Since the volume does not change during the pure conveying, they work without internal compression. Compression only takes place when the gas is emitted. This results in extremely high energy consumption, which also causes the pump to become very hot.
Da die Dichtspalte zwischen den Kolben und dem Gehäuse ständig von der vollen Druckdifferenz zwischen Ansaugdruck und Ausstoßdruck beauflagt werden, treten sehr hohe Rückströmverluste auf. Sie führen zu einer weiteren Verschlechterung des Wirkungsgrades und beeinträchtigen den Kompressionsfaktor besonders bei höheren Drücken.Since the sealing gaps between the pistons and the housing are constantly exposed to the full pressure difference between the suction pressure and the discharge pressure, very high backflow losses occur on. They lead to a further deterioration in efficiency and impair the compression factor, especially at higher pressures.
Um diese Nachteile zu vermeiden und die Erwärmung in Grenzen zu halten, sieht man davon ab, daß Wälzkolbenpumpen bei zu hohen Gegendrücken verdichten müssen und setzt sie vorwiegend bei niedrigen Drücken ein.In order to avoid these disadvantages and to keep the heating within limits, one ignores the fact that Roots pumps have to compress when the back pressure is too high and uses them mainly at low pressures.
Für Anwendungsfälle, welche einen höheren Druckbereich umfassen, werden Wälzkolbenpumpen in Verbindung mit anderen Pumpentypen oder als Kombination von mehreren, hintereinander geschalteten Wälzkolbenpumpen zur Vakuumerzeugung betrieben. Solche Systeme sind nur mit hohem apparativem Aufwand, großem Raumbedarf und hohem Energieverbrauch zu verwirklichen. Mit gasumlaufgekühlten Wälzkolbenpumpen kann man die Temperaturen in Grenzen halten. Der Energieverbrauch jedoch wird dadurch nicht gemindert.For applications that encompass a higher pressure range, Roots pumps are operated in conjunction with other pump types or as a combination of several Roots pumps connected in series for vacuum generation. Such systems can only be implemented with high expenditure on equipment, large space requirements and high energy consumption. The temperatures can be kept within limits with gas-cooled Roots pumps. However, this does not reduce energy consumption.
In der DE-OS 29 51 591 wird eine mehrstufige Wälzkolbenpumpe vorgestellt. Hier sind mehrere Pumpstufen in einem Gehäuse verwirklicht. Diese Konstruktion stellt eine kompaktere Lösung dar als die einfache Kombination mehrere Pumpen und ist auch in ihrem Wirkungsgrad effizienter. Die o.g. grundsätzlichen Probleme werden damit jedoch nicht gelöst.A multi-stage Roots pump is presented in DE-OS 29 51 591. Here several pump stages are realized in one housing. This design represents a more compact solution than the simple combination of several pumps and is also more efficient in terms of efficiency. The above however, this does not solve fundamental problems.
Wenn das Gas vor dem Ausstoß gegen Atmosphärendruck schon im Inneren der Pumpe verdichtet wird, liegt nicht mehr die volle Druckdifferenz auf der Ausstoßseite an. Dadurch wird die Erwärmung und die Gasrückströmung selbst beim Pumpen gegen höhere Drücke in Grenzen gehalten. Solche Pumpsysteme mit innerer Verdichtung sind bekannt. Sie weisen jedoch erhebliche Nachteile auf.If the gas is already compressed inside the pump before it is ejected against atmospheric pressure, it is no longer full Pressure difference on the discharge side. This keeps the heating and gas backflow within limits even when pumping against higher pressures. Such pump systems with internal compression are known. However, they have significant disadvantages.
Bei der in der DE-OS 33 32 361 vorgestellten Wälzkolbenpumpe findet eine Verdichtung des Gases innerhalb der Pumpe statt. Der dort beschriebene Steuermechanismus für die Vorverdichtung ist jedoch sehr kompliziert und aufwendig und vor allem bei hohen Drehzahlen sehr anfällig gegenüber mechanischen Defekten.In the Roots pump presented in DE-OS 33 32 361, the gas is compressed within the pump. However, the control mechanism for the pre-compression described there is very complicated and complex and, especially at high speeds, very susceptible to mechanical defects.
In der Kanadischen Patentschrift 10 40 540 ist eine Rotationsmaschine mit einem Steuerkolben und 2 Arbeitskolben der Klauen-Bauart mit innerer Verdichtung beschrieben. Diese Maschine ist in erster Linie zum Einsatz als Motor oder Kompressor vorgesehen. Zum Fördern von Gasmengen ist sie äußerst schlecht geeignet, da die Gase in den Arbeitsräumen komprimiert und anschließend wieder expandiert werden.
Eine Zweiwellen-Vakuumpumpe mit innerer Verdichtung wird in der DE-OS 33 12 117 beschrieben. Zur Vermeidung einer inneren Überverdichtung ist diese Pumpe über ein Überdruckventil mit einer weiteren Austrittsöffnung ausgestattet. Die komplizierte Form der beiden Kolben erschwert eine präzise Fertigung ihrer Flächen. Dies ist aber eine Voraussetzung für eine optimale Abdichtung zwischen den beiden Kolben einerseits und den Kolben und der Gehäusewand andererseits, um die Rückströmung auf ein Minimum zu begrenzen. Außerdem ist bei dieser Konstruktion der schädliche Raum, d.h. ein Totvolumen, in welchem ein Teil des komprimierten Gases auf die Vakuumseite zurückgefördert wird und dort expandiert, unerwünscht groß. Dadurch wird der Wirkungsgrad der inneren Verdichtung verringert.A two-shaft vacuum pump with internal compression is described in DE-OS 33 12 117. To avoid internal over-compression, this pump is equipped with a further outlet opening via a pressure relief valve. The complicated shape of the two pistons makes it difficult to manufacture their surfaces precisely. However, this is a prerequisite for an optimal seal between the two pistons on the one hand and the pistons and the housing wall, on the other hand, to minimize the backflow. In addition, in this construction the harmful space, ie a dead volume, in which a part of the compressed gas is conveyed back to the vacuum side and expands there, is undesirably large. This reduces the efficiency of the internal compression.
Die Aufgabe der Erfindung ist es, eine Wälzkolben-Pumpe mit innerer Verdichtung zu entwickeln, welche bei energiesparendem Betrieb eine gute innere Abdichtung, eine hohe innere Verdichtung und einen minimalen schädlichen Raum aufweist. Die oben erwähnten Nachteile, welche bei herkömmlichen Pumpen dieser Bauart auftreten, sollen vermieden werden.The object of the invention is to develop a Roots pump with internal compression, which has a good internal seal, a high internal compression and a minimal harmful space with energy-saving operation. The disadvantages mentioned above, which occur with conventional pumps of this type, are to be avoided.
Die Aufgabe wird durch die kennzeichnenden Teile des 1. und 2. Patentanspruches gelöst. Die Ansprüche 3 und 4 stellen weitere vorteilhafte Ausgestaltungen der Erfindung dar.The object is achieved by the characterizing parts of the first and second claims.
Durch den kreisförmigen Querschnitt wird eine einfache und präzise Fertigung der Kolben erreicht. Dies bewirkt eine optimale Abdichtung zwischen den Kolben. Die Anordnung von Arbeitskolben mit Kolbenköpfen, Steuerkolben mit Ausnehmungen, den beiden Teilbereichen des Pumpenraumes und der Gasaustrittsöffnung macht einen effektiven Betrieb einer Wälzkolbenpumpe mit innerer Verdichtung möglich. Durch die kennzeichnenden Merkmale der Ansprüche 1 und 2 werden Rückstrpmungen von Bereichen höherer Drücke in Bereiche niedrigerer Drücke auf ein Minimum begrenzt.The circular cross-section enables simple and precise manufacture of the pistons. This creates an optimal seal between the pistons. The arrangement of working pistons with piston heads, control pistons with recesses, the two partial areas of the pump chamber and the gas outlet opening makes effective operation of a Roots pump with internal compression possible. The characterizing features of
Die Verbindungen zwischen den Ausnehmungen im Steuerkolben und der Gasaustrittsöffnung bewirken einen Abfluß des in den Ausnehmungen geförderten Gase in der Phase der Endkompression und vermeiden damit eine Gasrückförderung in den Ansaugstutzen.The connections between the recesses in the control piston and the gas outlet opening cause an outflow of the gases conveyed in the recesses in the phase of the end compression and thus prevent gas recirculation in the intake manifold.
Die Verbindung zwischen dem Teilbereich 8 des Pumpenraumes und einer Ausnehmung im Steuerkolben erweitert den Bereich der Vorverdichtung und verhindert eine Überkompression.The connection between the section 8 of the pump chamber and a recess in the control piston extends the area of the pre-compression and prevents over-compression.
An einem Beispiel, welches in der Abbildung dargestellt ist, wird die Erfindung näher erläutert.The invention is explained in more detail using an example which is shown in the figure.
Bei der Pumpe befinden sich im Gehäuse 1, welches mit dem Ansaugstutzen 2 und der Gasaustrittsöffnung 3 versehen ist, ein Arbeitskolben 4 und ein Steuerkolben 5. Bei Rotation greifen die Kolbenköpfe 6 auf dem Arbeitskolben 4 in die Ausnehmungen 7 des Steuerkolbens 5. Der Arbeitskolben 4 dreht sich im Teilbereich 8 und der Steuerkolben 5 dreht sich im Teilbereich 9 des Pumpenraumes. Die Kante 10 des Gehäuses befindet sich zwischen den beiden Teilbereichen. Eine weitere für die Funktion der Pumpe wichtige Kante 11 befindet sich zwischen dem Teilbereich 9 und der Gasaustriffsöffnung 3. Die äußere Begrenzungslinie eines Kolbenkopfes ist mit 12 und die in Drehrichtung hintere Begrenzungslinie einer Ausnehmung des Steuerkolbens ist mit 13 bezeichnet.In the pump, there is a working
Im Steuerkolben 5 sind Bohrungen 14 angebracht, welche jeweils zum Zeitpunkt der Endkompression in den Ausnehmungen 7 diese mit der Gasaustrittsöffnung 3 verbinden. Eine weitere Bohrung 15 verbindet die Kompressionsseite des Teilbereichs 8 mit dem Teilbereich 9 des Pumpenraumes.
Bei der in der Abbildung angegebenen Drehrichtung der Kolben läuft der Pumpvorgang wie folgt ab:
Gas, welches vom Ansaugstutzen 2 her in den Pumpenraum gelangt, wird durch die Kolbenköpfe 6 in den Teilbereich 8 gefördert und dort verdichtet. Sobald eine Ausnehmung 7 des Steuerkolbens 5 die Gasaustrittsöffnung 3 mit dem Teilbereich 8 des Pumpenraumes verbindet, wird des komprimierte Gas über die Gasaustrittsöffnung 3 ausgestoßen. Um eine Rückströmung von der Gasaustrittsöffnung 3 in den Teilbereich 8 zu Beginn der nächsten Kompressionsphase (wenn das Gas noch nicht komprimiert ist und somit einen geringeren Druck als an der Gasaustrittsöffnung aufweist) zu vermeiden, darf die Begrenzungslinie 12 eines Kolbenkopfes erst dann die Kante 10 zwischen den Teilbereichen 8 und 9 passieren, wenn die hintere Begrenzungslinie 13 einer Ausnehmung 7 die Kante 11 zwischen Gasaustrittsöffnung 3 und Teilbereich 9 passiert hat. Nach diesem Zeitpunkt ist das Volumen in einer Ausnehmung 7 abgeschlossen und wird durch einen Kolbenkopf 6 weiter verdichtet.With the direction of rotation of the pistons shown in the illustration, the pumping process proceeds as follows:
Gas, which enters the pump chamber from the
Das in einer Ausnehmung 7 komprimierte Gas wird durch eine Bohrung 14 über die Gasaustrittsöffnung 3 ausgestoßen.The gas compressed in a recess 7 is expelled through a
Durch eine Bohrung 15 kann ein Teil des im Teilbereich 8 komprimierten Gases in eine Ausnehmung 7 gelangen, bevor diese mit der Gasaustrittsöffnung 3 in Verbindung steht, um anschliessend von der Ausnehmung 7 zur Gasaustrittsöffnung 3 befördert zu werden. Dadurch wird die Ausnehmung 7 zur Vorverdichtung mit herangezogen und eine Überkompression im Teilbereich 8 verhindert.Through a
Claims (4)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4244063 | 1992-12-24 | ||
| DE4244063A DE4244063A1 (en) | 1992-12-24 | 1992-12-24 | Roots vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0603698A1 true EP0603698A1 (en) | 1994-06-29 |
| EP0603698B1 EP0603698B1 (en) | 1997-01-29 |
Family
ID=6476527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP93120054A Expired - Lifetime EP0603698B1 (en) | 1992-12-24 | 1993-12-13 | Rolling piston vacuum pump |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0603698B1 (en) |
| JP (1) | JPH06213181A (en) |
| DE (2) | DE4244063A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007057813A1 (en) | 2007-11-30 | 2009-06-04 | Heinig, Jürgen, Dr.-Ing. | Rolling piston compressor arrangement for use as e.g. hydraulic motor, has pair of axially supported cylinders that are tangentially arranged to each other, where lateral surfaces of cylinders are mutually passed on |
| DE102008044856A1 (en) | 2008-08-28 | 2010-03-04 | Heinig, Jürgen, Dr.-Ing. | Turbo fan for fixed wing aircraft, giving thrust by accelerating air at ambient temperatures, uses rotating cylinders fitted with vanes rolling at a tangent against each other |
| CN114704465A (en) * | 2022-04-11 | 2022-07-05 | 浙江创为真空设备股份有限公司 | Pre-pumping structure of Roots vacuum pump |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19809957A1 (en) * | 1998-03-07 | 1999-09-09 | Pfeiffer Vacuum Gmbh | Multi-shaft vacuum pump |
| JP5725660B2 (en) * | 2011-09-30 | 2015-05-27 | アネスト岩田株式会社 | Claw pump |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1324941A (en) * | 1962-02-09 | 1963-04-26 | Studia Technica Ets | Volumetric machine such as compressor or pump |
| GB1128051A (en) * | 1965-05-24 | 1968-09-25 | Lucas Industries Ltd | Gear pumps |
| DE3018638A1 (en) * | 1980-05-16 | 1981-12-03 | Walter 4791 Schlangen Plöger | Rotary engine piston rotor wings - have recessed flanks sealingly meshing with correspondingly contoured recesses in cylinder rotor |
| US5071328A (en) * | 1990-05-29 | 1991-12-10 | Schlictig Ralph C | Double rotor compressor with two stage inlets |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH405585A (en) * | 1961-10-13 | 1966-01-15 | Studia Technica Ets | Rotary machine, in particular compressor or pump |
| CH621854A5 (en) * | 1977-06-06 | 1981-02-27 | Balzers Hochvakuum | Roots pump |
| DE3332361C2 (en) * | 1983-09-08 | 1994-05-26 | Balzers Pfeiffer Gmbh | Roots pump |
-
1992
- 1992-12-24 DE DE4244063A patent/DE4244063A1/en not_active Withdrawn
-
1993
- 1993-12-13 EP EP93120054A patent/EP0603698B1/en not_active Expired - Lifetime
- 1993-12-13 DE DE59305337T patent/DE59305337D1/en not_active Expired - Lifetime
- 1993-12-22 JP JP5324066A patent/JPH06213181A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1324941A (en) * | 1962-02-09 | 1963-04-26 | Studia Technica Ets | Volumetric machine such as compressor or pump |
| GB1128051A (en) * | 1965-05-24 | 1968-09-25 | Lucas Industries Ltd | Gear pumps |
| DE3018638A1 (en) * | 1980-05-16 | 1981-12-03 | Walter 4791 Schlangen Plöger | Rotary engine piston rotor wings - have recessed flanks sealingly meshing with correspondingly contoured recesses in cylinder rotor |
| US5071328A (en) * | 1990-05-29 | 1991-12-10 | Schlictig Ralph C | Double rotor compressor with two stage inlets |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007057813A1 (en) | 2007-11-30 | 2009-06-04 | Heinig, Jürgen, Dr.-Ing. | Rolling piston compressor arrangement for use as e.g. hydraulic motor, has pair of axially supported cylinders that are tangentially arranged to each other, where lateral surfaces of cylinders are mutually passed on |
| DE102008044856A1 (en) | 2008-08-28 | 2010-03-04 | Heinig, Jürgen, Dr.-Ing. | Turbo fan for fixed wing aircraft, giving thrust by accelerating air at ambient temperatures, uses rotating cylinders fitted with vanes rolling at a tangent against each other |
| CN114704465A (en) * | 2022-04-11 | 2022-07-05 | 浙江创为真空设备股份有限公司 | Pre-pumping structure of Roots vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| DE59305337D1 (en) | 1997-03-13 |
| EP0603698B1 (en) | 1997-01-29 |
| DE4244063A1 (en) | 1994-06-30 |
| JPH06213181A (en) | 1994-08-02 |
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