EP0409287A1 - Pompe à vide avec espace de déplacement - Google Patents
Pompe à vide avec espace de déplacement Download PDFInfo
- Publication number
- EP0409287A1 EP0409287A1 EP90116358A EP90116358A EP0409287A1 EP 0409287 A1 EP0409287 A1 EP 0409287A1 EP 90116358 A EP90116358 A EP 90116358A EP 90116358 A EP90116358 A EP 90116358A EP 0409287 A1 EP0409287 A1 EP 0409287A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- shafts
- shaft
- pump according
- drive motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/02—Arrangements of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
- F04C2240/52—Bearings for assemblies with supports on both sides
Definitions
- the invention relates to a twin-shaft vacuum pump with at least one pumping chamber, with a pair of rotors located in the or each pumping chamber, with shields delimiting the pumping chamber or the pumping chambers, and with a synchronization gearbox consisting of two gearwheels in one side chamber, one end of which one of the shafts is connected to a drive motor.
- the invention preferably relates to a twin-shaft vacuum pump of the type mentioned, in which all rotor pairs are equipped with rotary lobes of the claw type (Northey profile).
- the invention can also be used in twin-shaft vacuum pumps with rotors of a different design (root profile, screw profile or any combination of all the profiles mentioned).
- the present invention has for its object to provide a twin-shaft vacuum pump of the type mentioned, which is relatively compact, requires a small footprint and is easy to install and service.
- this object is achieved in that the shafts of the vacuum pump are arranged vertically and in that the side space with the synchronization gear and the means which connect one of the rotors to the drive motor are arranged below the lower pair of rotors.
- a twin-shaft vacuum pump designed in this way requires a relatively small footprint.
- assembly and service work can be carried out easily. If the pump is water-cooled, a complete cooling water drain is particularly easy.
- the inlet of the pump is arranged above the uppermost pump stage and is designed as a vertical connecting piece with a horizontal connecting flange;
- the pump outlet is located below the lowest pump stage.
- the rotary pistons are of the claw type (see FIG. 2) and rotate in the scoops 11, 12, 13, which are formed by the shields 14 to 17 and the housing rings 18 to 20.
- the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
- the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gearwheel 26 which is in engagement with the gearwheels 24 and 25.
- the shafts 2, 3 are supported by roller bearings 27.
- the upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
- the inlet channel 31 opens on the front side (opening 32) into the scoop chamber 11 of the first stage.
- the end opening of the first stage is designated 33 and leads into the connecting channel 34.
- the connecting channel 34 located in the shield 15 is connected to the inlet opening 35 of the second stage.
- the end shield 16 is designed accordingly.
- Below the lowermost (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower bearing plate 17.
- An oil-containing space 40 formed by a common shaft trough 41, is provided below the system consisting of the pump housing and motor.
- An oil pump 42 connected to the shaft 2 projects into this shaft trough 41.
- Lubricant channels not shown in detail, extend from the oil pump to the points of the pump (bearings, engagements of the gear wheels 23 to 26, oil seals or the like) which require oil lubrication .
- cooling water channels 43 and 44 are provided in the side plates 14 and 17. Cooling water inlet and outlet are designated 45 and 46.
- the cooling water inlet 45 is arranged at the lowest point of the channel system 43, 44, so that a simple cooling water drain is possible and complete emptying is ensured.
- Fig. 3 shows a longitudinal section through a two-stage two-shaft vacuum pump according to the invention.
- the drive motor 22 is arranged below the pump. Its shaft 51 forms an axial extension of the shaft 2.
- the motor shaft 51 and pump shaft 2 are expediently formed in one piece.
- the drive motor 22 is water-cooled and for this purpose equipped with a double-walled housing 52.
- the cooling channel 53 thus formed is connected to the cooling system 43 to 46 of the pump housing.
- the connecting lines required for this are designated 54 and 55.
- the synchronization wheels 23, 24 and the oil chamber 40, into which the oil pump 42 projects, are located between the drive motor 22 and the lower end plate 17.
- the oil pump 42 is coupled to the drive shaft 3.
- the embodiment according to FIG. 3 has a small overall height despite the pump housing and drive motor lying axially one behind the other, since on the one hand the pump and motor have a common shaft and - because of the water cooling - the drive motor does not require a cooling fan. A separate engine mounting can also be omitted.
- the cooling water inlet is arranged as far down on the motor housing 52 so that it can be used as a cooling water outlet in a simple manner. Complete drainage of the entire cooling system is guaranteed.
- FIG. 4 is a single-stage two-shaft vacuum pump with a drive motor 22 arranged next to it.
- This arrangement has the advantage that a belt or chain drive (the latter is shown) can be used.
- the shaft 3 of the vacuum pump and the shaft 51 of the motor 22 are equipped with gear wheels 56 and 57 and connected to one another via a chain, not shown in detail.
- the advantage of this solution is that speed differences (e.g. drive motors with 50 or 60 Hz) can be compensated for in a simple manner.
- drives of this type have the advantage of better damping.
- FIG. 4 shows a special feature which relates to the design of the mounting of the shafts 2, 3 in the end shield 14.
- essentially cylindrical fitting pieces 61, 62 are connected, which have a pot-shaped design 63 on the end face.
- the shaft ends themselves or the end faces of the rotors can also be equipped with this cup-shaped design 63.
- a cylindrical stump 65 which is fastened to a housing cover 66, projects into the respective cup-shaped space from above.
- the bearing 27 is supported with its inner bearing ring on the fixed stump 65 and with its outer bearing ring on the inner wall of the cup-shaped design.
- the cylindrical adapters 61, 62 form with the surrounding walls of the bearing plate 14 a gap seal, the z. B. can be formed as a labyrinth seal 47 (with piston rings located in the grooves). This ensures an effective separation of the storage rooms from the usually oil-free delivery rooms.
- FIG. 5 shows an enlarged bearing arrangement of the type described in relation to FIG. 4.
- a rotating ring 68 is provided above the bearing ring 27, which almost completely closes the storage space from the outside. A centrifugal effect also occurs. Lubricant reaching the ring 68 is conveyed outwards and thus back into the storage space.
- a shaft sealing ring 69 is provided above the bearing 27, which also closes the storage space.
- the sealing lip of the shaft sealing ring 68 bears against the stump 65 when the shaft 2, 3 is stationary. If the shaft rotates, the sealing lip lifts off from the shaft end 65, so that the seal becomes contactless.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE90116358T DE3789556D1 (de) | 1987-05-15 | 1987-05-15 | Vakuumpumpe mit Schöpfraum. |
EP90116358A EP0409287B1 (fr) | 1987-05-15 | 1987-05-15 | Pompe à vide avec espace de déplacement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP87107089A EP0290662B1 (fr) | 1987-05-15 | 1987-05-15 | Pompe à vide à déplacement positif avec deux arbres |
EP90116358A EP0409287B1 (fr) | 1987-05-15 | 1987-05-15 | Pompe à vide avec espace de déplacement |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87107089.2 Division | 1987-05-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0409287A1 true EP0409287A1 (fr) | 1991-01-23 |
EP0409287B1 EP0409287B1 (fr) | 1994-04-06 |
Family
ID=8196996
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP90116358A Expired - Lifetime EP0409287B1 (fr) | 1987-05-15 | 1987-05-15 | Pompe à vide avec espace de déplacement |
EP87107089A Expired - Lifetime EP0290662B1 (fr) | 1987-05-15 | 1987-05-15 | Pompe à vide à déplacement positif avec deux arbres |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP87107089A Expired - Lifetime EP0290662B1 (fr) | 1987-05-15 | 1987-05-15 | Pompe à vide à déplacement positif avec deux arbres |
Country Status (4)
Country | Link |
---|---|
US (1) | US4940398A (fr) |
EP (2) | EP0409287B1 (fr) |
JP (2) | JPS63302194A (fr) |
DE (1) | DE3785192D1 (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1696132A3 (fr) * | 2005-01-28 | 2008-11-12 | Agilent Technologies, Inc. | Appareil de récupération de lubrifiant |
WO2011101064A3 (fr) * | 2010-02-18 | 2012-06-07 | Ralf Steffens | Entraînement pour un compresseur à broches |
WO2018224409A1 (fr) * | 2017-06-09 | 2018-12-13 | Leybold Gmbh | Pompe à vide à compression sèche |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2645574B2 (ja) * | 1988-10-07 | 1997-08-25 | 株式会社宇野澤組鐵工所 | 多段真空ポンプ |
DE3887149D1 (de) * | 1988-10-24 | 1994-02-24 | Leybold Ag | Zweiwellenvakuumpumpe und Verfahren zu ihrem Betrieb. |
EP0365695B1 (fr) * | 1988-10-24 | 1992-11-25 | Leybold Aktiengesellschaft | Pompe à vide à déplacement positif avec deux arbres |
DE4017192A1 (de) * | 1990-05-29 | 1991-12-05 | Leybold Ag | Verfahren zur herstellung eines pumpenringes fuer eine zweistufige vakuumpumpe sowie mit einem derartigen pumpenring ausgeruestete vakuumpumpe |
DE4038704C2 (de) * | 1990-12-05 | 1996-10-10 | K Busch Gmbh Druck & Vakuum Dr | Drehkolbenpumpe |
US5071369A (en) * | 1990-12-05 | 1991-12-10 | Amp Incorporated | Electrical connector having a terminal position assurance member |
EP0569455B1 (fr) * | 1991-02-01 | 1994-08-03 | Leybold Aktiengesellschaft | Pompe a vide du type a marche a sec avec deux arbres |
EP0497995A1 (fr) * | 1991-02-01 | 1992-08-12 | Leybold Aktiengesellschaft | Pompe sèche à vide |
DE4233142A1 (de) * | 1992-10-02 | 1994-04-07 | Leybold Ag | Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe |
KR100346820B1 (ko) * | 1994-04-21 | 2002-11-30 | 가부시키 가이샤 에바라 세이사꾸쇼 | 다축전기모터 및 그에 결합된 용적형 진공펌프 |
DE4439724A1 (de) * | 1994-11-09 | 1996-05-15 | Leybold Ag | Trockenverdichtende Zweiwellen-Verdrängermaschine |
KR100424386B1 (ko) * | 1995-06-21 | 2004-07-15 | 스털링 인더스트리 컨설트 게엠베하 | 다단나사-스핀들압축기 |
GB9604486D0 (en) * | 1996-03-01 | 1996-05-01 | Boc Group Plc | Improvements in vacuum pumps |
DE19819538C2 (de) | 1998-04-30 | 2000-02-17 | Rietschle Werner Gmbh & Co Kg | Druck-Saug-Pumpe |
FR2785361B1 (fr) * | 1998-11-02 | 2000-12-01 | Cit Alcatel | Transport de gaz pompes dans une pompe a vide ou des canalisations |
GB2426036A (en) * | 2005-05-10 | 2006-11-15 | Bernard Whicher | Vertical Northey compressor |
JP4673136B2 (ja) * | 2005-06-09 | 2011-04-20 | 株式会社日立産機システム | スクリュー圧縮機 |
JP2008157446A (ja) * | 2006-11-30 | 2008-07-10 | Anest Iwata Corp | 2軸以上の回転軸間の駆動力伝達機構と該駆動力伝達機構を用いた無給油流体機械 |
JP2008138549A (ja) * | 2006-11-30 | 2008-06-19 | Anest Iwata Corp | 2軸以上の回転軸を配した無給油流体機械本体を有する無給油流体機械 |
DE202009012158U1 (de) | 2009-09-08 | 2011-02-03 | Hugo Vogelsang Maschinenbau Gmbh | Drehkolbenpumpe |
DE202010011626U1 (de) * | 2010-08-20 | 2010-10-21 | Hugo Vogelsang Maschinenbau Gmbh | Drehkolbenpumpe |
DE102018203992A1 (de) * | 2018-03-15 | 2019-09-19 | Gardner Denver Schopfheim Gmbh | Drehkolbenmaschine |
CN109113998A (zh) * | 2018-09-18 | 2019-01-01 | 世通海泰泵业(天津)股份有限公司 | 抽真空用驱动装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1290239A (fr) * | 1961-02-28 | 1962-04-13 | Alsacienne Constr Meca | Pompe à vide |
US3133506A (en) * | 1961-08-15 | 1964-05-19 | Luciani Louis | Gear pump having internal bearings and seals |
FR1411544A (fr) * | 1964-10-15 | 1965-09-17 | Moteur à piston rotatif | |
GB1248032A (en) * | 1967-09-21 | 1971-09-29 | Edwards High Vacuum Int Ltd | Rotary mechanical vacuum pumps of the intermeshing screw type |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US25567A (en) * | 1859-09-27 | Belt-hook pliers and punch | ||
USRE25567E (en) * | 1964-05-05 | Lorenz | ||
US1446366A (en) * | 1922-02-18 | 1923-02-20 | Hale Fire Pump Co Inc | Pump or motor |
US1623650A (en) * | 1923-09-19 | 1927-04-05 | Anderson Robert Dunbar | Exhaust fan or blower |
US2549652A (en) * | 1947-06-20 | 1951-04-17 | Waterous Co | Universal gear case for rotary pumps |
US2880676A (en) * | 1956-03-26 | 1959-04-07 | Succop Anna Louise | Motor and pump combination |
GB1248031A (en) * | 1967-09-21 | 1971-09-29 | Edwards High Vacuum Int Ltd | Two-stage rotary vacuum pumps |
US3558248A (en) * | 1968-01-10 | 1971-01-26 | Lennox Ind Inc | Screw type refrigerant compressor |
US3472445A (en) * | 1968-04-08 | 1969-10-14 | Arthur E Brown | Rotary positive displacement machines |
GB1301475A (fr) * | 1969-07-14 | 1972-12-29 | ||
US3628898A (en) * | 1970-04-20 | 1971-12-21 | Edwin C Bragdon | Twin ellipse pump |
US3796526A (en) * | 1972-02-22 | 1974-03-12 | Lennox Ind Inc | Screw compressor |
US3811805A (en) * | 1972-05-16 | 1974-05-21 | Dunham Bush Inc | Hydrodynamic thrust bearing arrangement for rotary screw compressor |
JPS5440316A (en) * | 1977-09-07 | 1979-03-29 | Hitachi Ltd | Enclosed screw compressor |
GB2088957B (en) * | 1980-12-05 | 1984-12-12 | Boc Ltd | Rotary positive-displacement fluidmachines |
US4504201A (en) * | 1982-11-22 | 1985-03-12 | The Boc Group Plc | Mechanical pumps |
DE3312117A1 (de) * | 1983-04-02 | 1984-10-04 | Leybold-Heraeus GmbH, 5000 Köln | Zweiwellen-vakuumpumpe mit innerer verdichtung |
JPS60259791A (ja) * | 1984-06-04 | 1985-12-21 | Hitachi Ltd | オイルフリ−スクリユ−真空ポンプ |
JP2511870B2 (ja) * | 1986-03-20 | 1996-07-03 | 株式会社日立製作所 | スクリユ−真空ポンプ装置 |
US4728271A (en) * | 1986-09-02 | 1988-03-01 | Suntec Industries Incorporated | Gear pump with improved pinion mounting |
-
1987
- 1987-05-15 EP EP90116358A patent/EP0409287B1/fr not_active Expired - Lifetime
- 1987-05-15 DE DE8787107089T patent/DE3785192D1/de not_active Expired - Fee Related
- 1987-05-15 EP EP87107089A patent/EP0290662B1/fr not_active Expired - Lifetime
-
1988
- 1988-05-13 JP JP63115014A patent/JPS63302194A/ja active Pending
- 1988-05-13 US US07/193,659 patent/US4940398A/en not_active Expired - Lifetime
-
1997
- 1997-08-05 JP JP007947U patent/JPH10192U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1290239A (fr) * | 1961-02-28 | 1962-04-13 | Alsacienne Constr Meca | Pompe à vide |
US3133506A (en) * | 1961-08-15 | 1964-05-19 | Luciani Louis | Gear pump having internal bearings and seals |
FR1411544A (fr) * | 1964-10-15 | 1965-09-17 | Moteur à piston rotatif | |
GB1248032A (en) * | 1967-09-21 | 1971-09-29 | Edwards High Vacuum Int Ltd | Rotary mechanical vacuum pumps of the intermeshing screw type |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1696132A3 (fr) * | 2005-01-28 | 2008-11-12 | Agilent Technologies, Inc. | Appareil de récupération de lubrifiant |
US7533685B2 (en) | 2005-01-28 | 2009-05-19 | Agilent Technologies, Inc. | Lubricant collection apparatus |
WO2011101064A3 (fr) * | 2010-02-18 | 2012-06-07 | Ralf Steffens | Entraînement pour un compresseur à broches |
WO2018224409A1 (fr) * | 2017-06-09 | 2018-12-13 | Leybold Gmbh | Pompe à vide à compression sèche |
Also Published As
Publication number | Publication date |
---|---|
EP0290662A1 (fr) | 1988-11-17 |
DE3785192D1 (de) | 1993-05-06 |
JPH10192U (ja) | 1998-08-25 |
US4940398A (en) | 1990-07-10 |
EP0290662B1 (fr) | 1993-03-31 |
EP0409287B1 (fr) | 1994-04-06 |
JPS63302194A (ja) | 1988-12-09 |
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