EP0566573A1 - Silencieux. - Google Patents

Silencieux.

Info

Publication number
EP0566573A1
EP0566573A1 EP91918199A EP91918199A EP0566573A1 EP 0566573 A1 EP0566573 A1 EP 0566573A1 EP 91918199 A EP91918199 A EP 91918199A EP 91918199 A EP91918199 A EP 91918199A EP 0566573 A1 EP0566573 A1 EP 0566573A1
Authority
EP
European Patent Office
Prior art keywords
silencer
muffler
outlet
component
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91918199A
Other languages
German (de)
English (en)
Other versions
EP0566573B1 (fr
Inventor
Hanns-Peter Berges
Lothar Brenner
Hartmut Kriehn
Sascha Bauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Mann and Hummel GmbH
Original Assignee
Leybold AG
Filterwerk Mann and Hummel GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19904034253 external-priority patent/DE4034253A1/de
Priority claimed from DE9014883U external-priority patent/DE9014883U1/de
Priority claimed from DE9014888U external-priority patent/DE9014888U1/de
Application filed by Leybold AG, Filterwerk Mann and Hummel GmbH filed Critical Leybold AG
Publication of EP0566573A1 publication Critical patent/EP0566573A1/fr
Application granted granted Critical
Publication of EP0566573B1 publication Critical patent/EP0566573B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing

Definitions

  • Silencers are usually located in the end area of exhaust pipes, which discharge the gases leaving the outlet of a machine (motor, pump or the like) to the outside.
  • the rotary vacuum pumps include single-shaft (rotary slide pumps, blocking slide pumps or the like) and two-shaft (pumps with rotor pairs of the screw, root, claw type or the like) pumps, which can also be designed in one or more stages.
  • single-shaft rotary slide pumps, blocking slide pumps or the like
  • two-shaft umps with rotor pairs of the screw, root, claw type or the like
  • this increases the noise significantly.
  • dry (oil-free pumping chambers) running twin-shaft vacuum pumps produce very high sound pressure levels in the exhaust area.
  • Vacuum pumps of the type mentioned at the outset are frequently used in chemical or other processes (etching, vapor deposition processes or the like).
  • the gases drawn in by the vacuum pump in these cases are generally harmful to the environment.
  • At the outlet of the vacuum pump there is therefore a permanently installed flue gas pipe which discharges the extracted gases to the outside via gas scrubbers or other cleaning systems.
  • the gases extracted in particular in the case of etching and vapor deposition processes are often dust-laden. This is because dry-running vacuum pumps are usually used in such processes Problem of dust deposits, especially in the outlet area of the pump and in the subsequent exhaust pipes.
  • the present invention is therefore based on the object of designing a muffler in such a way that it can also be accommodated in the presence of permanently installed exhaust gas lines in the vicinity of the machine, the noise of which is to be reduced, and that it can be installed on the exhaust gas without complex assembly work lines can be exchanged so that it can be replaced, for example, in the case of dust loads without significant interruptions in operation.
  • the muffler is designed as a cartridge component.
  • the cartridge design is known for oil filters.
  • the housing of the cartridge is essentially cylindrical and has a closed end face.
  • the inflow and outflow are on the second face.
  • the oil inlet is arranged centrally and the oil outlet is arranged decentrally.
  • the central oil inlet opening is formed by a pipe socket that carries a thread. With this thread, the oil filter cartridge can be screwed to the unit in which the oil to be filtered is located.
  • the design of the muffler as a cartridge component has the advantage that this component can be replaced quickly without complex assembly work on the exhaust pipes.
  • the silencer according to the invention is particularly advantageous to use on the vacuum pumps mentioned, which are used in chemical or other processes (etching, vapor deposition processes or the like).
  • the dust deposits accumulating in the outlet area of the pump can be removed without interrupting operation - for example by replacing the silencer.
  • the disturbing dusts preferably collect in the silencer according to the invention. so that the cleaning of the line guides located in front of and behind the silencer is largely eliminated.
  • FIG. 1 shows a schematic sketch, which represents a vacuum pump with a silencer
  • FIG. 2 shows a vacuum pump with rotor pairs of the claw type, in which the use of the silencer according to the invention has particular advantages, and
  • FIG 3 shows a partial section through a silencer of the type concerned here.
  • the vacuum pump 1 shown schematically in FIG. 1 has the rotor 4, which is located in the pump chamber 11 formed by the housing 10.
  • the inlet and outlet of the vacuum pump are designated 29 and 36, respectively.
  • An exhaust pipe 51 connects to the outlet 36 and opens into a flange component 52.
  • the outgoing exhaust pipe 53 is also connected to the flange component 52.
  • a muffler 54 designed in the manner of a cartridge, as is shown, for example, in FIG. 3, is detachably fastened to the flange component 52. This arrangement enables an easy and quick change of the muffler without the need for expensive disassembly and assembly work on the exhaust pipes 51, 53 themselves.
  • the pump shown in FIG. 2 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 or 6 7 or 8, 9.
  • the axial length of the rotors decreases from the suction side to the pressure side "
  • the rotary pistons are of the claw type (Northey, cf., for example, EU-A-290 662) and rotate in the scoops 11, 12, 13, which are formed by the shields 14 to 17 and the housing rings 18 to 20.
  • the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing.
  • the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
  • the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gearwheel 26 which is in engagement with the gearwheels 24 and 25.
  • the upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
  • the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage.
  • the end opening of the first stage is designated 33 and leads into the connecting duct 34.
  • the connecting duct 34 located in the shield 15 is connected to the inlet opening 35 of the second stage.
  • the end shield 16 is designed accordingly.
  • Below the lowest (third) pump stage is the outlet 36, which is connected to the front outlet opening 37 in the lower end shield 17.
  • An oil-containing space 40 formed by a common shaft trough 41, is provided below the system consisting of pump housing and motor.
  • An oil pump 42 connected to the shaft 2 projects into this shaft trough 41.
  • Lubricant channels extend from the oil pump to the points of the pump (bearings, engagements of the gearwheels 23 to 26, Simmerrings or the like), which one need oil lubrication.
  • the illustrated embodiment of the three-stage two-shaft vacuum pump is water-cooled.
  • cooling water channels 43 and 44 are provided in the side plates 14 and 17. Cooling water inlet and outlet are designated 45 and 46.
  • the cooling water inlet 45 is arranged at the lowest point of the channel system 43, 44, so that a simple cooling water drain is possible and complete emptying is ensured.
  • the outlet opening 36 of the pump 1 is formed by a connecting piece 55 which carries a coupling component 56, on which in turn the silencer 54 is detachably fastened.
  • the muffler 54, the coupling component 56 and also an intermediate component 57 which can optionally be inserted between the coupling component 56 and the connecting piece 55 are shown enlarged in FIG.
  • the coupling component 56 and the connecting piece 55 are connected to one another, either directly or via the intermediate component 57.
  • the intermediate component 57 serves to hold sensors 58, for example pressure sensors, the function of which below is still described. Gas type sensors can also be arranged at this point.
  • the coupling component 56 has a central passage opening 61 which is partly equipped with an internal thread 62 on the muffler side.
  • a pipe socket 63 equipped with a corresponding external thread can be screwed into this thread 62 and at the same time forms the inlet 64 of the silencer 54.
  • a central interior 65 which is surrounded by concentric baffle plates 66, adjoins the inlet opening 64. These are concentrically arranged, alternately interlocking, one-sidedly closed tubular cylinders, which cause multiple deflection of the gases passing through (cf. the arrows shown).
  • the outer cylinder is equipped with side openings 67 so that the gases enter an outer annular space 68. This outer annular space 68 is connected to one or more decentralized outlet openings 69.
  • a muffler-side open channel in the coupling component 56 is assigned to the outlet openings 69. This is provided with a radial extension 72, to which the exhaust pipe 53 is connected.
  • a peripheral sealing ring 73 is provided for the external sealing of the muffler 54 with respect to the coupling component 56 and is arranged concentrically to the pipe socket 63.
  • the flange component 52 and the muffler 54 according to FIG. 1 are also expediently designed like the coupling component 56 and the muffler 54 according to FIG. 3.
  • the exhaust gas reaches the interior (65) of the muffler (54) from the pump outlet (36).
  • the subsequent multiple redirection brings about the desired sound absorption.
  • the exhaust gases then exit from the outlet openings (69) and reach the exhaust line (53) via the ring channel (71) in the coupling component (56).
  • an intermediate component which can optionally be installed between the coupling component (56) and the outlet connector (55) serves to hold sensors (58).
  • a sensor (58) is connected to the muffler inlet area.
  • the flow resistance increases, which results in an increase in pressure in the inlet area of the silencer.
  • the pressure sensor With the help of the pressure sensor, the load on the muffler (54) with deposits can be monitored.
  • a further pressure sensor (58) is also shown, which is connected via the bore (74) to the outlet area of the silencer (54).
  • two pressure sensors (58) are used in this way, it is possible to observe the dust load on the silencer (54) by observing the difference "in the pressures recorded by the sensors.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Exhaust Silencers (AREA)

Abstract

La présente invention se réfère à un silencieux (54) conçu comme une cartouche, ainsi qu'à une machine (1) comportant un tel silencieux; un changement rapide du silencieux (54) est obtenu en particulier s'il est conçu comme étant démontable, présentant dans son intérieur des chicanes (66) pour une déflexion multiple des gaz quittant l'échappement de pompe (36), l'entrée (64) et la sortie (69) du silencieux se trouvant sur sa face frontale.
EP91918199A 1990-10-27 1991-10-19 Silencieux Expired - Lifetime EP0566573B1 (fr)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
DE9014888U 1990-10-27
DE9014883U 1990-10-27
DE19904034253 DE4034253A1 (de) 1990-10-27 1990-10-27 Rotations-vakuumpumpe
DE9014883U DE9014883U1 (de) 1990-10-27 1990-10-27 Rotations-Vakuumpumpe
DE4034253 1990-10-27
DE9014888U DE9014888U1 (de) 1990-10-27 1990-10-27 Schalldämpfer
PCT/EP1991/001991 WO1992008053A1 (fr) 1990-10-27 1991-10-19 Silencieux

Publications (2)

Publication Number Publication Date
EP0566573A1 true EP0566573A1 (fr) 1993-10-27
EP0566573B1 EP0566573B1 (fr) 1995-01-04

Family

ID=27201827

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91918199A Expired - Lifetime EP0566573B1 (fr) 1990-10-27 1991-10-19 Silencieux

Country Status (7)

Country Link
US (1) US5399817A (fr)
EP (1) EP0566573B1 (fr)
JP (1) JPH07504474A (fr)
KR (1) KR930703539A (fr)
DE (1) DE59104173D1 (fr)
ES (1) ES2067953T3 (fr)
WO (1) WO1992008053A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006110180A1 (fr) * 2005-04-11 2006-10-19 Carrier Corporation Silencieux de compresseur
US7463812B2 (en) 2007-01-19 2008-12-09 Adc Telecommunications, Inc. Overhead cable termination arrangement
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR332837A (fr) * 1903-06-06 1903-11-09 Benjamin Crawford Dispositif perfectionné pour rendre silencieux l'échappement des machines à gaz et autres machines à explosions
US806714A (en) * 1905-03-30 1905-12-05 John F Laird Exhaust-muffler.
US1598578A (en) * 1921-11-21 1926-08-31 Maxim Silencer Co Silencer
US3032139A (en) * 1959-03-11 1962-05-01 Buckeye Ind Inc Muffler for air cylinders and the like
US3612216A (en) * 1969-12-01 1971-10-12 Gen Impact Extrusions Mfg Ltd Muffler can

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9208053A1 *

Also Published As

Publication number Publication date
DE59104173D1 (de) 1995-02-16
ES2067953T3 (es) 1995-04-01
EP0566573B1 (fr) 1995-01-04
JPH07504474A (ja) 1995-05-18
KR930703539A (ko) 1993-11-30
US5399817A (en) 1995-03-21
WO1992008053A1 (fr) 1992-05-14

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