DE69221415T2 - Schraubenkolben-Vakuumpumpe - Google Patents

Schraubenkolben-Vakuumpumpe

Info

Publication number
DE69221415T2
DE69221415T2 DE69221415T DE69221415T DE69221415T2 DE 69221415 T2 DE69221415 T2 DE 69221415T2 DE 69221415 T DE69221415 T DE 69221415T DE 69221415 T DE69221415 T DE 69221415T DE 69221415 T2 DE69221415 T2 DE 69221415T2
Authority
DE
Germany
Prior art keywords
vacuum pump
screw piston
piston vacuum
screw
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69221415T
Other languages
English (en)
Other versions
DE69221415D1 (de
Inventor
Kiyoshi Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69221415D1 publication Critical patent/DE69221415D1/de
Application granted granted Critical
Publication of DE69221415T2 publication Critical patent/DE69221415T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE69221415T 1991-09-27 1992-09-24 Schraubenkolben-Vakuumpumpe Expired - Fee Related DE69221415T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3276886A JPH0587076A (ja) 1991-09-27 1991-09-27 スクリユー式真空ポンプ

Publications (2)

Publication Number Publication Date
DE69221415D1 DE69221415D1 (de) 1997-09-11
DE69221415T2 true DE69221415T2 (de) 1998-02-05

Family

ID=17575770

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69221415T Expired - Fee Related DE69221415T2 (de) 1991-09-27 1992-09-24 Schraubenkolben-Vakuumpumpe

Country Status (5)

Country Link
US (1) US5261802A (de)
EP (1) EP0535533B1 (de)
JP (1) JPH0587076A (de)
KR (1) KR100213983B1 (de)
DE (1) DE69221415T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3010529B1 (ja) * 1998-08-28 2000-02-21 セイコー精機株式会社 真空ポンプ、及び真空装置
FR2812040B1 (fr) * 2000-07-18 2003-02-07 Cit Alcatel Carter monobloc pour pompe a vide
JP3856661B2 (ja) * 2001-06-06 2006-12-13 株式会社荏原製作所 真空ポンプ
JP4521344B2 (ja) * 2005-09-30 2010-08-11 株式会社日立産機システム 油冷式スクリュー圧縮機
JP5197141B2 (ja) * 2008-05-12 2013-05-15 株式会社神戸製鋼所 ２段スクリュ圧縮機および冷凍装置
JP6683481B2 (ja) 2016-01-15 2020-04-22 株式会社Ｌｉｘｉｌ 水洗式便器
CN105971882A (zh) * 2016-07-12 2016-09-28 合肥新沪屏蔽泵有限公司 一种新型双螺旋真空泵
CN108194355A (zh) * 2018-03-05 2018-06-22 珠海格力电器股份有限公司 压缩机和空调设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977818A (en) * 1975-01-17 1976-08-31 Hydrothermal Power Co., Ltd. Throttling means for geothermal streams
JPS5714501A (en) * 1980-07-01 1982-01-25 Sumitomo Chem Co Ltd Destroying method of egg of yellow-spotted longicorn beetle
JPS57126591A (en) * 1981-01-29 1982-08-06 Matsushita Electric Ind Co Ltd Compressor
JPH0631627B2 (ja) * 1984-07-25 1994-04-27 株式会社日立製作所 回転容積形真空ポンプ装置
DE3618301A1 (de) * 1985-06-05 1986-12-18 Barmag Barmer Maschinenfabrik Ag, 5630 Remscheid Vakuumpumpe
JPS62284994A (ja) * 1986-06-04 1987-12-10 Hitachi Ltd 多段スクリユ−真空ポンプ起動法
DE3721138C2 (de) * 1986-07-02 1995-09-21 Barmag Barmer Maschf Flügelzellenvakuumpumpe an Kraftfahrzeugmotoren als Servo-Pumpe
JPH07111184B2 (ja) * 1988-12-05 1995-11-29 株式会社荏原製作所 スクリュ−圧縮機
JPH02199287A (ja) * 1989-01-26 1990-08-07 Kobe Steel Ltd スクリュ式ポンプ装置
US4968221A (en) * 1989-04-03 1990-11-06 Dresser Industries, Inc. Intake valve for vacuum compressor

Also Published As

Publication number Publication date
KR100213983B1 (ko) 1999-08-02
KR930006331A (ko) 1993-04-21
DE69221415D1 (de) 1997-09-11
JPH0587076A (ja) 1993-04-06
US5261802A (en) 1993-11-16
EP0535533A1 (de) 1993-04-07
EP0535533B1 (de) 1997-08-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee