DE69217283T2 - Schraubenkolben-Vakuumpumpe - Google Patents

Schraubenkolben-Vakuumpumpe

Info

Publication number
DE69217283T2
DE69217283T2 DE69217283T DE69217283T DE69217283T2 DE 69217283 T2 DE69217283 T2 DE 69217283T2 DE 69217283 T DE69217283 T DE 69217283T DE 69217283 T DE69217283 T DE 69217283T DE 69217283 T2 DE69217283 T2 DE 69217283T2
Authority
DE
Germany
Prior art keywords
vacuum pump
screw piston
piston vacuum
screw
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69217283T
Other languages
English (en)
Other versions
DE69217283D1 (de
Inventor
Noburu Shimizu
Kiyoshi Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69217283D1 publication Critical patent/DE69217283D1/de
Publication of DE69217283T2 publication Critical patent/DE69217283T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE69217283T 1991-07-10 1992-07-09 Schraubenkolben-Vakuumpumpe Expired - Fee Related DE69217283T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3195945A JPH0518382A (ja) 1991-07-10 1991-07-10 スクリユー形真空ポンプ

Publications (2)

Publication Number Publication Date
DE69217283D1 DE69217283D1 (de) 1997-03-20
DE69217283T2 true DE69217283T2 (de) 1997-07-31

Family

ID=16349589

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69217283T Expired - Fee Related DE69217283T2 (de) 1991-07-10 1992-07-09 Schraubenkolben-Vakuumpumpe

Country Status (5)

Country Link
US (1) US5374170A (de)
EP (1) EP0523551B1 (de)
JP (1) JPH0518382A (de)
KR (1) KR100221673B1 (de)
DE (1) DE69217283T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2869369B1 (fr) * 2004-04-21 2006-07-21 Alcatel Sa Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe
JP4853168B2 (ja) * 2006-08-10 2012-01-11 株式会社豊田自動織機 スクリューポンプ

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB747058A (en) * 1953-04-21 1956-03-28 Worthington Corp Multi-stage rotary compressor of the outwardly sliding vane type
US3088659A (en) * 1960-06-17 1963-05-07 Svenska Rotor Maskiner Ab Means for regulating helical rotary piston engines
US4068984A (en) * 1974-12-03 1978-01-17 H & H Licensing Corporation Multi-stage screw-compressor with different tooth profiles
JPS52112809A (en) * 1976-03-19 1977-09-21 Tokico Ltd Volume type rotary compressor
US4220197A (en) * 1979-01-02 1980-09-02 Dunham-Bush, Inc. High speed variable delivery helical screw compressor/expander automotive air conditioning and waste heat energy _recovery system
US4351160A (en) * 1980-06-16 1982-09-28 Borg-Warner Corporation Capacity control systems for screw compressor based water chillers
SU1146482A1 (ru) * 1984-02-21 1985-03-23 Предприятие П/Я А-3884 Горизонтальный винтовой компрессор
JPH079239B2 (ja) * 1984-04-11 1995-02-01 株式会社日立製作所 スクリュー真空ポンプ
JPS61152990A (ja) * 1984-12-26 1986-07-11 Hitachi Ltd スクリユ−真空ポンプ
JPS61205388A (ja) * 1985-03-08 1986-09-11 Hitachi Ltd 無給油式スクリュー流体装置
JPS61223295A (ja) * 1985-03-27 1986-10-03 Hitachi Ltd オイルフリ−スクリユ−真空ポンプ
JPS61234290A (ja) * 1985-04-10 1986-10-18 Hitachi Ltd 多段スクリユ−真空ポンプ装置
US4667646A (en) * 1986-01-02 1987-05-26 Shaw David N Expansion compression system for efficient power output regulation of internal combustion engines
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
JPS62284994A (ja) * 1986-06-04 1987-12-10 Hitachi Ltd 多段スクリユ−真空ポンプ起動法
GB8617612D0 (en) * 1986-07-18 1986-08-28 Peabody Holmes Ltd Gas moving device
JPH022948A (ja) * 1988-06-14 1990-01-08 Mitsubishi Electric Corp コネクタ装着検出回路
JPH027268A (ja) * 1988-06-27 1990-01-11 Hitachi Ltd Ｐｃｍ記録再生装置
JPH07111184B2 (ja) * 1988-12-05 1995-11-29 株式会社荏原製作所 スクリュ−圧縮機

Also Published As

Publication number Publication date
KR100221673B1 (ko) 1999-09-15
DE69217283D1 (de) 1997-03-20
EP0523551B1 (de) 1997-02-05
JPH0518382A (ja) 1993-01-26
US5374170A (en) 1994-12-20
EP0523551A1 (de) 1993-01-20
KR930002682A (ko) 1993-02-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee