KR930002682A - 스크루 진공펌프 - Google Patents

스크루 진공펌프 Download PDF

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Publication number
KR930002682A
KR930002682A KR1019920012130A KR920012130A KR930002682A KR 930002682 A KR930002682 A KR 930002682A KR 1019920012130 A KR1019920012130 A KR 1019920012130A KR 920012130 A KR920012130 A KR 920012130A KR 930002682 A KR930002682 A KR 930002682A
Authority
KR
South Korea
Prior art keywords
screw vacuum
vacuum pump
gas
screw
port
Prior art date
Application number
KR1019920012130A
Other languages
English (en)
Other versions
KR100221673B1 (ko
Inventor
노부루 시미즈
기요시 야나기사와
Original Assignee
원본미기재
가부시기가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 원본미기재, 가부시기가이샤 에바라 세이사꾸쇼 filed Critical 원본미기재
Publication of KR930002682A publication Critical patent/KR930002682A/ko
Application granted granted Critical
Publication of KR100221673B1 publication Critical patent/KR100221673B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

내용 없음.

Description

스크루 진공펌프
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 회전자의 원주방향에서 나타낸 관점에서 쌍의 암·수 회전자가 서로 맞물리는 방법을 보이는 도,
제2도는 본 발명에 따른 스크루 진공펌프의 구조를 보이는 도식적 측면도.

Claims (3)

  1. 각각 두개의 평행축 주위로 서로 맞물린 상태로 회전하는 쌍의 암·수 회전자와, 상기 두개의 회전자를 조정하기 위한 케이싱을 구비한 스크루 전공펌프에 있어서, 상기 케이싱은 흡입구와 방출구를 구비하고, 상기 흡입구에서 상기 회전자 사이에 한정된 공간으로 가스를 흡입하는 공정, 상기 가스를 운송하는 공정, 상기 가스를 상기 회전자 내부에 압축하는 공정, 그리고 상기 가스를 상기 방출구로 부터 방출하는 공정을 더 포함하는 상기 스크루 진공펌프에 있어서, 상기 방출구는 미리 닫혀져 그것으로 상기 흡입과 운송 공정 사이에 흡입된 가스를 확장하는 공정을 삽입하는 것을 특징으로 하는 스크루 진공펌프.
  2. 제1항에서 정의된 스크루 진공펌프의 복수개가 다단으로 연속하여 연결된 것을 포함하는 펌프장치.
  3. 제2항에서 각 스크루 진공펌프의 펌프속도는 앞선 스크루 진공펌프 보다 대략 같거나 높은 것을 특징으로 하는 스크루 진공펌프.
    ※참고사항:최초출원 내용에 의하여 공개하는 것임.
KR1019920012130A 1991-07-10 1992-07-08 스크루 진공펌프 KR100221673B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP91-195945 1991-07-10
JP3195945A JPH0518382A (ja) 1991-07-10 1991-07-10 スクリユー形真空ポンプ

Publications (2)

Publication Number Publication Date
KR930002682A true KR930002682A (ko) 1993-02-23
KR100221673B1 KR100221673B1 (ko) 1999-09-15

Family

ID=16349589

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920012130A KR100221673B1 (ko) 1991-07-10 1992-07-08 스크루 진공펌프

Country Status (5)

Country Link
US (1) US5374170A (ko)
EP (1) EP0523551B1 (ko)
JP (1) JPH0518382A (ko)
KR (1) KR100221673B1 (ko)
DE (1) DE69217283T2 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2869369B1 (fr) * 2004-04-21 2006-07-21 Alcatel Sa Pompe a vide multi-etagee, et installation de pompage comprenant une telle pompe
JP4853168B2 (ja) * 2006-08-10 2012-01-11 株式会社豊田自動織機 スクリューポンプ

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB747058A (en) * 1953-04-21 1956-03-28 Worthington Corp Multi-stage rotary compressor of the outwardly sliding vane type
US3088659A (en) * 1960-06-17 1963-05-07 Svenska Rotor Maskiner Ab Means for regulating helical rotary piston engines
US4068984A (en) * 1974-12-03 1978-01-17 H & H Licensing Corporation Multi-stage screw-compressor with different tooth profiles
JPS52112809A (en) * 1976-03-19 1977-09-21 Tokico Ltd Volume type rotary compressor
US4220197A (en) * 1979-01-02 1980-09-02 Dunham-Bush, Inc. High speed variable delivery helical screw compressor/expander automotive air conditioning and waste heat energy _recovery system
US4351160A (en) * 1980-06-16 1982-09-28 Borg-Warner Corporation Capacity control systems for screw compressor based water chillers
SU1146482A1 (ru) * 1984-02-21 1985-03-23 Предприятие П/Я А-3884 Горизонтальный винтовой компрессор
JPH079239B2 (ja) * 1984-04-11 1995-02-01 株式会社日立製作所 スクリュー真空ポンプ
JPS61152990A (ja) * 1984-12-26 1986-07-11 Hitachi Ltd スクリユ−真空ポンプ
JPS61205388A (ja) * 1985-03-08 1986-09-11 Hitachi Ltd 無給油式スクリュー流体装置
JPS61223295A (ja) * 1985-03-27 1986-10-03 Hitachi Ltd オイルフリ−スクリユ−真空ポンプ
JPS61234290A (ja) * 1985-04-10 1986-10-18 Hitachi Ltd 多段スクリユ−真空ポンプ装置
US4667646A (en) * 1986-01-02 1987-05-26 Shaw David N Expansion compression system for efficient power output regulation of internal combustion engines
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
JPS62284994A (ja) * 1986-06-04 1987-12-10 Hitachi Ltd 多段スクリユ−真空ポンプ起動法
GB8617612D0 (en) * 1986-07-18 1986-08-28 Peabody Holmes Ltd Gas moving device
JPH022948A (ja) * 1988-06-14 1990-01-08 Mitsubishi Electric Corp コネクタ装着検出回路
JPH027268A (ja) * 1988-06-27 1990-01-11 Hitachi Ltd Ｐｃｍ記録再生装置
JPH07111184B2 (ja) * 1988-12-05 1995-11-29 株式会社荏原製作所 スクリュ−圧縮機

Also Published As

Publication number Publication date
KR100221673B1 (ko) 1999-09-15
EP0523551A1 (en) 1993-01-20
DE69217283D1 (de) 1997-03-20
US5374170A (en) 1994-12-20
JPH0518382A (ja) 1993-01-26
EP0523551B1 (en) 1997-02-05
DE69217283T2 (de) 1997-07-31

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