EP0290664B1 - Pompe à deux arbres - Google Patents

Pompe à deux arbres Download PDF

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Publication number
EP0290664B1
EP0290664B1 EP87107091A EP87107091A EP0290664B1 EP 0290664 B1 EP0290664 B1 EP 0290664B1 EP 87107091 A EP87107091 A EP 87107091A EP 87107091 A EP87107091 A EP 87107091A EP 0290664 B1 EP0290664 B1 EP 0290664B1
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EP
European Patent Office
Prior art keywords
shaft
pot
rotor
pump according
shaft pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP87107091A
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German (de)
English (en)
Other versions
EP0290664A1 (fr
Inventor
Heinz Frings
Karl-Heinz Ronthaler
Ralf Steffens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE8787107091T priority Critical patent/DE3775553D1/de
Priority to EP87107091A priority patent/EP0290664B1/fr
Priority to JP63115015A priority patent/JPS63302195A/ja
Priority to US07/194,252 priority patent/US4917583A/en
Publication of EP0290664A1 publication Critical patent/EP0290664A1/fr
Application granted granted Critical
Publication of EP0290664B1 publication Critical patent/EP0290664B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a twin-shaft pump with a pumping chamber, with a pair of rotors located in the pumping chamber, with side flanges for frontal support of the rotors by means of roller bearings and with a drive which engages on one of the rotor end faces.
  • the shaft seals of the pumping chamber and the shaft bearings are also arranged one behind the other. This results in a relatively large bearing distance, which results in an increased overall length of the entire pump, an increased bending load on the piston shaft ends, an unfavorable dynamic behavior and a limited length-diameter ratio of the rotary lobes.
  • the space available for the shaft seal is very narrow in the axial direction, so that different sealing principles can only be accommodated with great effort.
  • the two-shaft pumps of the type mentioned also include single- or multi-stage pumps, the rotary lobes of which have different profiles, as are disclosed, for example, in DE-OSes 31 47 824 and 33 12 117.
  • the use of helical rotors is also known in two-shaft vacuum pumps.
  • the invention relates to multi-stage two-shaft vacuum pumps, the stages of which are equipped with differently designed pairs of pistons.
  • a screw compressor with different tooth space volumes is known from FR-A-12 90 239.
  • a kinematically reversed bearing is provided on the suction side, which is supported on a fixed pin which penetrates the hollow-bored rotor.
  • the prior art includes the content of FR-A-986 715, which discloses a rotary lobe pump.
  • the pair of rotary pistons is kinematically reversed on extensions in bearings, whereby the bearing inner ring is supported on a fixed pin.
  • the present invention has for its object to provide a twin-shaft pump of the type mentioned, which is significantly more compact, has a simpler structure and advantageously enables a modular design.
  • the Roots vacuum pump 1 shown in FIG. 1 essentially comprises the following components: housing 2, side plate 3 on the drive side, side plate 4 opposite the drive side, and rotors 5 and 6, which rotate in the pumping chamber 7. Sections through the rotors 5 and 6 are shown within the scooping chamber 7, specifically perpendicular to their position within the Roots pump 1.
  • cup-shaped designs 8 are provided which are formed by cup-shaped components 11 and 12 in the exemplary embodiment shown in FIG. 1.
  • the rotors 5 and 6 each have a central stub shaft 13 to 16 on each end face. With a likewise central, bottom-side opening 17 and 18, the components 11 and 12 encompass the associated shaft end 13 and 15, respectively.
  • the components 11, 12 are fastened by means of screws on the respective end face of the rotor 5 and 6, respectively. A fixed and central position of the components 11 and 12 is ensured by this type of fastening.
  • the rotor bearings 19 which in the embodiment shown in FIG. 1 consist of deep groove ball bearings. These bearings 19 are supported on the one hand on the inner wall of the pot-shaped components 11 and 12. To support the fixed inner bearing ring, a shaft end 21 protruding into the cup-shaped component 11 or 12 is provided in each case.
  • the side plate 4 has circular openings with the cup-shaped components 11 and 12 directly surrounding inner walls 22.
  • the covers 24 are provided, to which the stationary stumps 21 are attached. Lid 24 and stump 21 are preferably formed in one piece.
  • sealing gas seal is shown in connection with component 11.
  • sealing gas eg inert gas
  • annular channel 26 arranged in the inner wall 22 of the side plate 4 via the channel 27.
  • a slight gas flow flows continuously to the exhaust chamber 7, so that possibly aggressive gases located therein cannot get into the storage room.
  • a piston ring labyrinth seal is shown.
  • the outside of the component 12 is equipped with grooves 28, in which piston rings 29 are arranged, which are supported on the inner wall 22 of the side plate 4 and thus form the labyrinth.
  • the two gear wheels 31 and 32 which are responsible for the synchronous movement of the rotors 5 and 6, are arranged on the drive side in the region of the side plate 3.
  • the gear 31 forms the cup-shaped design 8, which receives the bearing 19.
  • the stump 21 fixed to the housing is fastened to the cover 33.
  • the drive shaft 34 is connected to the right end face of the lower piston 6.
  • the drive motor itself is not shown.
  • the rotor-side end of the drive shaft 34 is fastened to the rotor in the same way as the cup-shaped components 11 and 12 and the gear 31. This gives the advantage of using identical rotors.
  • the gearwheel 32 is fastened on the drive shaft 34 by means of a clamping element 35 known per se, which allows the necessary play adjustment of the rotors 5 and 6.
  • the motor flange 36 is fastened to the bearing flange 3 with a flange 37 in which there is a bearing 38 for the drive shaft 34.
  • This arrangement makes it easy to mount different drive variants (canned motors, built-in motors, motors with different speeds). It is only necessary that the end of the respective drive shaft to be connected to the rotor 6 has similar fastening means.
  • the motor flange 36 is a turned part that can be produced inexpensively.
  • FIG. 2 again shows an exemplary embodiment for the drive side of a two-shaft pump according to the invention with an upstream gear stage 41.
  • the drive shaft 42 is coupled to the first gear wheel 43.
  • the deep groove ball bearings 44 and 45 are provided for mounting the gear wheel 43 and the drive shaft 34.
  • the driven gear 46 is coupled to the stub shaft 34, which is connected to the rotor 6 in the manner described for FIG. 1.
  • FIG. 2 also shows further variants for sealing concepts which, as shown, are not restricted to use with the synchronization gears 31 and 32.
  • the gear wheel 31 In the area of the associated rotor end face, the gear wheel 31 has a radially inwardly directed step 48, into which a component 49 fixed to the housing projects.
  • a recess 51 is provided in the gear wheel end face facing this part 49, in which a sealing ring 52 rotating with the gear wheel is accommodated.
  • the sealing ring is under the action of the compression spring 53 and is thereby pressed onto the parts 49 fixed to the housing, so that a contacting seal is present.
  • a non-contact labyrinth seal is shown in connection with the gear 32.
  • the housing-fixed part 49 is equipped with annular projections and recesses 54, to which corresponding projections and recesses 55 in the gear 32 are assigned.
  • FIG. 3 shows rotor bearings in which components 11 and 12 with cup-shaped designs 8 are respectively arranged in front of the rotors 5 and 6.
  • the components 11 and 12 are further designed as gear wheels with an identical diameter and form the synchronization gear for the pistons 5 and 6.
  • a preferably grease-lubricated version is shown again.
  • the storage room is completed by the profile ring 62, which forms a gap seal with the step 63 on the stump 21.
  • a cooling ring 81 is provided in the storage space, namely between the profile ring 62 and the bearing 19, which is supplied by the stump 21 in a manner not shown. This cooling ring 81 forms additional protection against lubricant vapors emerging from the storage space.
  • the upper part of FIG. 5 shows an advantageous possibility of connecting the component 11 upstream of the piston 5 to the rotor 5, regardless of whether it simultaneously functions as a gear or not.
  • a depression 77 equipped with a gradation, the lower section of which is equipped with a thread 78.
  • a stump 79 with a design corresponding to the depression 77 is fastened to the component 11.
  • the stump 79 takes over the centering between the component 11 and the rotor 5, the thread 78 serves to fasten the two parts 5 and 11 together.
  • FIG. 3 shows a preferably oil-lubricated version.
  • a radial shaft sealing ring 65 is provided instead of a gap seal.
  • the cooling ring 81 which is located as far radially as possible, is connected to the stump 21 via a closed ring web 82, so that it forms a dynamic seal with an outer oil ring. Effective cooling of the oil is also achieved.
  • a bore 77 is again provided in the rotor 6, in which a stump 79 fastened to the component 12 is fastened centering via the screw connection 80.
  • the stump 79 can be both cylindrical and conical for centering.
  • the embodiment shown in FIG. 3 not only has the advantage of using identical rotors;
  • the roters can be made from extruded sections that can be cut to length, since stub shafts are no longer required.
  • FIG. 4 again shows a section through the drive-side plate 3, which is equipped with a drive gear stage, formed by the gear wheels 83 and 84.
  • a drive side designed in this way can be combined with a synchronization gear which is arranged on the side opposite the drive (compare, for example, FIG. 5).
  • the bearing 38 in the motor flange 37 serves to support the shaft 34.
  • the foot of the shaft 34 is connected to the gear 83 via the clamping element 35.
  • the bearing 19 of the rotor 6 lies in the cup-shaped design 8, which is embedded in the end face of the rotor 6.
  • the fixed ring of the bearing 19 is supported on the stump 21 which protrudes into the cup-shaped design 8.
  • a plate 87, which is located between the piston 6 and the gear 83 and is screwed to the side window 3, serves to hold and fasten the stump 21.
  • an output gear 91 of a gear 91, 92 serving for the drive and the associated synchronization gear 31 are fastened on the rotor 5 coaxially.
  • the cup-shaped design 8 is provided, within which the bearing 19 is accommodated in the manner already described.
  • the drive gear 92 is expediently (not shown) mounted on the drive shaft of the electric motor, while a cup-shaped design 8 can be provided in the second synchronization gear 32 for mounting the rotor 6 (see Fig. 1, gear 31). In this way, all four rotor bearings are designed in the manner according to the invention.
  • FIG. 6 shows a drive-side mounting of the rotor 6 with the aid of a cup-shaped design 8 in the synchronization or gear wheel 32, 91, in which the drive shaft 34 is coupled to the rotor 6 at the same time.
  • cover 24 and stump 21 are equipped with a central bore 93 and the gearwheel with a central bore 94 through which the drive shaft 34 extends. This is inserted with its free end into the gear 32 and firmly connected to the rotor 6.
  • Fig. 7 shows an embodiment of a drive-side bearing, in which the rotor bearing of the driven piston and the pump-side drive shaft bearing are identical.
  • the drive shaft 34 is inserted into the synchronization gear 32 which is firmly connected to the rotor 6 and is supported in the motor flange 37 via the bearing 38.
  • This bearing 38 also forms the rotor bearing.
  • the interface for connecting different motors can be placed behind the drive gear that has already been synchronized. The synchronization is not disturbed. Overdeterminations (2 motor bearings, 1 drive-side rotor bearing) are no longer necessary.
  • a two-shaft vacuum pump according to the invention has a much simpler structure than previously known pumps of this type. Castings previously required can be replaced by turned parts. The number of sealing grooves that must be present in castings is significantly reduced, so that considerable Manufacturing advantages result. The side plate 4 and the housing 2 can be formed in one piece, so that the number of parts to be manufactured and the areas to be sealed is further reduced. Finally, the compactness achieved and the reduced weight are associated with a not inconsiderable price reduction.
  • the thermal operational reliability is increased.
  • the temperature of the rotors rotating in a non-contact vacuum does not increase as much as that of conventional double-shaft vacuum pumps, so that contact between the rotors and the surrounding housing, which can give off its heat much better than the rotary pistons, is reduced.
  • a uniform expansion of the rotors and the housing is thereby achieved, that is, an excessive temperature difference and the resulting thermal expansion differences between the rotary piston and the housing, caused by different heat emissions, are avoided.
  • the cooling devices located in the storage area it is prevented that temperature differences across the bearings and the absolute storage temperatures become too great.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (19)

  1. Pompe à vide à deux arbres, comportant une chambre d'aspiration (7), une paire de rotors (5, 6) se trouvant dans la chambre d'aspiration, des flasques latéraux (3, 4) pour le support frontal des rotors au moyen de paliers à roulement (19), et un dispositif d'entraînement qui agit sur un des côtés frontaux des rotors, caractérisée par les particularités suivantes:
    - les faces frontales de rotor qui sont situées sur le côté de la pompe opposé à celui où se trouve l'entraînement, ainsi que la face frontale de rotor qui est voisine de la face frontale de rotor qui est entraînée, comportent chacune une pièce essentiellement en forme de coupelle (11, 12, 31, 84, 91) et montée à l'avant de la face frontale de rotor respective;
    - les pièces en forme de coupelle (11, 12, 31, 84, 91) sont réalisées sous la forme de pièces séparées et sont fixées sur les faces frontales respectives des rotors (5, 6);
    - la pièce en forme de coupelle, qui se trouve sur la face frontale de rotor voisine de la face frontale de rotor entraînée, est formée par une roue dentée de synchronisation ou de transmission (31, 84, 91);
    - les paliers à roulement (19) associés aux faces frontales de rotor s'appuient chacun sur la paroi intérieure de la pièce en forme coupelle (11, 12, 31, 84, 91) et sur un tourillon fixe (21) s'engageant dans la coupelle;
    - aux pièces en forme de coupelle (11, 12, 31, 84, 91) sont associés des moyens d'étanchéité (26 à 29; 48 à 55) destinés à rendre étanche la chambre d'aspiration (7) de la pompe à vide par rapport à l'atmosphère environnante.
  2. Pompe à deux arbres selon la revendication 1, caractérisée en ce qu'un tronçon d'arbre (34) formant une pièce séparée, est prévu pour l'accouplement avec un moteur d'entraînement, et en ce que ce tronçon d'arbre est relié au rotor de la même manière que les pièces en forme de coupelle.
  3. Pompe à deux arbres selon la revendication 2, caractérisée en ce que le palier 38 sur la face frontale de rotor reliée à l'arbre d'entraînement (34) forme simultanément le palier de l'arbre d'entraînement, côté rotor.
  4. Pompe à deux arbres selon la revendication 1, caracterisee en ce qu'une roue dentée de transmission ou de synchronisation (32, 91) est montée à l'avant de la face frontale du rotor reliée à l'arbre d'entraînement (34), en ce que l'ensemble en forme de coupelle (8) se trouve dans la roue dentée, et en ce que dans la roue dentée, dans le couvercle (24) ainsi que dans le tourillon (21), est prévu respectivement un alésage central (93, 94) pour le passage de l'arbre (34).
  5. Pompe à deux arbres selon la revendication 1, 2, 3 ou 4, caractérisée en ce qu'une roue de synchronisation (32) et une roue dentée de transmission (91) sont fixées sur le rotor (6) avec leurs axes confondus, et en ce que l'ensemble en forme de coupelle (8) se trouve dans la roue dentée de transmission extérieure.
  6. Pompe à deux arbres selon l'une des revendications précédentes, caractérisée en ce que les moyens d'étanchéité associés aux pièces en forme de coupelle, sont réalisés sous la forme de joint d'étanchéité à labyrinthe (28, 29).
  7. Pompe à deux arbres selon l'une des revendications 1 à 5, caractérisée en ce que les moyens d'étanchéité sont réalisés sous la forme de joints d'étanchéité à contact (49, 52).
  8. Pompe à deux arbres selon l'une des revendications 1 à 5, caractérisée en ce que la coupelle (8) présente sur son côté extérieur, un épaulement (48), et en ce que les moyens d'étanchéité sont constitués par un joint d'étanchéité axial (49, 52).
  9. Pompe à deux arbres selon l'une des revendications précédentes, caractérisée en ce que les pièces en forme de coupelle (11, 12) s'engagent, avec un tourillon d'arbre (79), dans un alésage de guidage (77) dans le rotor, et sont liées par vissage au rotor.
  10. Pompe à deux arbres selon l'une des revendications 1 à 8, caractérisée en ce que les pièces en forme de coupelle (11, 12) comportent un tourillon fileté (77) qui est vissé dans un alésage taraudé (78) dans le rotor.
  11. Pompe à deux arbres selon l'une des revendications précédentes, caractérisée en ce que les paliers (19) sont lubrifiés à la graisse.
  12. Pompe à deux arbres selon l'une des revendications 1 à 10, caractérisée en ce que les paliers (19) sont lubrifiés à l'huile et en ce qu'une bague d'étanchéité à lèvre élastique (65) est prévue pour rendre étanche la chambre intérieure de la coupelle.
  13. Pompe à deux arbres selon la revendication 12, caractérisée en ce que la lèvre d'étanchéité de la bague d'étanchéité (65) est associée au tourillon (21) s'engageant dans la coupelle.
  14. Pompe à deux arbres selon la revendication 13, caractérisée en ce que la force d'application de la lèvre d'étanchéité est choisie de telle sorte que la lèvre se soulève lors de la rotation du rotor.
  15. Pompe à deux arbres selon l'une des revendications précédentes, caractérisée en ce que des moyens de refroidissement (81) des paliers (19) et/ou des rotors (5, 6) sont prévus dans la zone des ensembles en forme de coupelle (8).
  16. Pompe à deux arbres selon la revendication 15, caractérisée en ce qu'il est prévu un anneau de refroidissement (81) alimenté par le tourillon (21) fixe avec le carter.
  17. Pompe à deux arbres selon la revendication 16, caractérisée en ce que l'anneau de refroidissement (81) est disposé dans la zone de l'ouverture de coupelle.
  18. Pompe à deux arbres selon la revendication 17, caractérisée en ce que l'anneau de refroidissement (81) est disposé entre le palier (19) et un anneau d'étanchéité (62), et s'appuie par l'intermédiaire d'une nervure annulaire (82), sur le tourillon (21) fixe avec le carter, et en ce que la nervure et l'anneau de refroidissement obturent pratiquement l'ensemble en forme de coupelle (8).
  19. Pompe à deux arbres selon l'une des revendications précédentes, caractérisée en ce que le carter de pompe (2) et le flasque de palier (4) opposé à celui situé côté entraînement, sont réalisés d'un seul tenant.
EP87107091A 1987-05-15 1987-05-15 Pompe à deux arbres Expired - Lifetime EP0290664B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE8787107091T DE3775553D1 (de) 1987-05-15 1987-05-15 Zweiwellenpumpe.
EP87107091A EP0290664B1 (fr) 1987-05-15 1987-05-15 Pompe à deux arbres
JP63115015A JPS63302195A (ja) 1987-05-15 1988-05-13 ２軸ポンプ
US07/194,252 US4917583A (en) 1987-05-15 1988-05-16 Bearing support for a twin-shaft pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP87107091A EP0290664B1 (fr) 1987-05-15 1987-05-15 Pompe à deux arbres

Publications (2)

Publication Number Publication Date
EP0290664A1 EP0290664A1 (fr) 1988-11-17
EP0290664B1 true EP0290664B1 (fr) 1991-12-27

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP87107091A Expired - Lifetime EP0290664B1 (fr) 1987-05-15 1987-05-15 Pompe à deux arbres

Country Status (4)

Country Link
US (1) US4917583A (fr)
EP (1) EP0290664B1 (fr)
JP (1) JPS63302195A (fr)
DE (1) DE3775553D1 (fr)

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PT834018E (pt) * 1995-06-21 2000-05-31 Sterling Ind Consult Gmbh Compressor de fuso helicoidal de estagios multiplos
DE19724643A1 (de) * 1997-06-11 1998-12-17 Sihi Gmbh & Co Kg Schraubenverdichter und Verfahren zum Betrieb desselben
US6095781A (en) * 1997-09-11 2000-08-01 Viking Pump, Inc. Timed element, high pressure, industrial rotary lobe pump
US5916139A (en) * 1997-09-16 1999-06-29 My-D Han-D Mfg. Co. Inc. Hydraulic system and pump
DE19839501A1 (de) * 1998-08-29 2000-03-02 Leybold Vakuum Gmbh Trockenverdichtende Schraubenspindelpumpe
DE19963172A1 (de) 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Schraubenpumpe mit einem Kühlmittelkreislauf
JP4670729B2 (ja) 2006-05-08 2011-04-13 株式会社デンソー 気体圧縮機
JP4784484B2 (ja) * 2006-11-02 2011-10-05 株式会社豊田自動織機 電動ポンプ
JP5389833B2 (ja) * 2011-01-11 2014-01-15 アネスト岩田株式会社 ２軸式ロータポンプ
DE202014007117U1 (de) * 2014-09-05 2015-12-09 Oerlikon Leybold Vacuum Gmbh Klauenpumpe
CN108916047A (zh) * 2018-09-14 2018-11-30 安徽达来电机有限公司 一种防错位的二叶轮轴及配套齿轮
FR3136261B1 (fr) * 2022-06-03 2024-05-17 Pfeiffer Vacuum Pompe à vide verticale

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US3133506A (en) * 1961-08-15 1964-05-19 Luciani Louis Gear pump having internal bearings and seals

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FR875021A (fr) * 1940-08-15 1942-09-03 Bolinder Munktell Pompe rotative à engrènement
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Also Published As

Publication number Publication date
JPS63302195A (ja) 1988-12-09
US4917583A (en) 1990-04-17
DE3775553D1 (de) 1992-02-06
EP0290664A1 (fr) 1988-11-17

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