EP0569455B1 - Dry-running twin-shaft vacuum pump - Google Patents

Dry-running twin-shaft vacuum pump Download PDF

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Publication number
EP0569455B1
EP0569455B1 EP92904222A EP92904222A EP0569455B1 EP 0569455 B1 EP0569455 B1 EP 0569455B1 EP 92904222 A EP92904222 A EP 92904222A EP 92904222 A EP92904222 A EP 92904222A EP 0569455 B1 EP0569455 B1 EP 0569455B1
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EP
European Patent Office
Prior art keywords
shafts
pump according
gear housing
intermediate plate
suction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP92904222A
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German (de)
French (fr)
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EP0569455A1 (en
Inventor
Hartmut Kriehn
Lothar Brenner
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Balzers und Leybold Deutschland Holding AG
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Leybold AG
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Publication of EP0569455A1 publication Critical patent/EP0569455A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps

Definitions

  • the invention relates to a dry-running twin-shaft vacuum pump with at least one pumping chamber, with a pair of rotors located in the pumping chamber and supported by the shafts, with a gearbox housing which is assigned to one of the two end faces of the pumping chamber, and with bearings which face the wall section facing the pumping chamber of the gear housing and which support the two shafts that pass through this wall section.
  • “Dry-running” vacuum pumps are pumps whose pumping chambers do not contain any lubricants and / or sealants. Their advantage is that they can generate completely hydrocarbon-free vacuums. Lubrication of the bearings of the shafts that carry the pistons rotating in the pumping chambers cannot be dispensed with. With dry-running pumps, there is therefore a need to ensure an effective separation of the storage rooms from the pumping rooms.
  • the shafts On one side of the pump, the shafts extend into the gear housing, in which there is a gear synchronizing the rotor movement. It must also be ensured that the gear chamber containing oil is sealed off from the adjacent pump chamber.
  • the present invention has for its object to provide a twin-shaft vacuum pump of the type mentioned, in which a safe separation between the gear chamber and the adjacent scooping space is guaranteed and in addition, maintenance and assembly work can be carried out much easier.
  • this object is achieved in that an intermediate disk is provided between the gear housing and the adjacent scooping chamber, which is penetrated by the shafts and receives the exhaust pipe which is led out laterally and can be detached from the wall of the transmission housing.
  • additional means for separating the gear space from the adjacent scooping space can be provided between the shafts and the washer according to the invention.
  • the shafts in this area are expediently equipped with bushings, preferably piston ring bushings.
  • Pumps of the type according to the invention are usually constructed in disks.
  • the assembly begins with the gearbox, the gears, shafts and gearbox-side bearings. This work requires great care and is therefore lengthy. Then the components and rotors that form the scoops are pushed one after the other over the shafts and then only have to be clamped.
  • the use of the intermediate disk according to the invention ensures that the area of the pump which is difficult to assemble, namely the gear housing, does not belong to the contaminated area.
  • the contaminated area is limited to the parts that are easy to disassemble or assemble. After disassembling the contaminated parts, the wearing parts (bearings, shaft sealing ring) can be easily reached.
  • the gearbox as a complex component, is protected against contamination and wear. Overall, the invention greatly facilitates and simplifies service procedures.
  • the pump shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 or 6, 7 or 8, 9.
  • the axial length of the rotors decreases from the suction side to the pressure side .
  • the rotary pistons are of the claw type (Northey, cf., for example, Eu-A-290 662) and rotate in the scoops 11, 12, 13, which are formed by the shields 14 to 17 and the housing rings 18 to 20.
  • the shield 17 is formed by the wall section of the Gear housing 21, which is assigned to the outlet-side scooping space 13.
  • the shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve.
  • the drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gear 26, which is in engagement with the gears 24 and 25.
  • the shafts 2, 3 are supported by roller bearings 27.
  • the upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump.
  • the inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage.
  • the end opening of the first stage is designated 33 and leads into the connecting duct 34.
  • the connecting duct 34 located in the shield 15 is connected to the inlet opening 35 of the second stage.
  • the end shield 16 is designed accordingly.
  • Below the lowermost (third) pump stage is the outlet 36, which is connected to the front outlet opening 37.
  • the gear housing 21 which includes the oil-containing space 40 and the oil pan 41.
  • An oil pump 42 connected to the shaft 2 projects into the gear housing 21.
  • Lubricant channels extend from the oil pump to the points of the pump (bearings, engagements of the gearwheels 23 to 26, oil seals or the like) which require oil lubrication .
  • the bearings 27 in the region of the upper shaft ends are preferably lubricated with grease.
  • the illustrated embodiment of the three-stage two-shaft vacuum pump is water-cooled.
  • 17 cooling water channels 43 and 44 are provided in the side plates 14 and in the gear housing 21. Cooling water inlet and outlet are designated 45 and 46.
  • the cooling water inlet 45 is arranged at the lowest point of the channel system 43, 44, so that a simple cooling water drain is possible and complete emptying is ensured.
  • the pump shown is equipped in the manner according to the invention with an intermediate disk 51 which separates the gear housing 21 from the other components which form the scooping spaces 11 to 13.
  • the intermediate disk 51 is detachably fastened to the gear housing 1 and itself forms a wall section delimiting the scooping space 13. It receives the exhaust line 52, which is led laterally outwards from the front outlet opening 37.
  • the bearings 27 and also a usually existing, associated with each of the shafts radial shaft seal 53 are - as in the prior art - in the wall section 17 of the gear housing 21. After the disassembly of the intermediate plate 51, these components are freely accessible for maintenance work.
  • FIG. 2 shows an enlarged partial section through a pump 1 according to the invention in the area of the passage of the shafts 2, 3 (only one is visible) through the bearing plate 16, the outlet-side scooping space 13, the intermediate plate 51 and the wall section 17 of the gear housing 21.
  • the shafts 54 which rotate with the shafts and which have annular depressions 55 on their outside.
  • the recesses 55 there are resting piston rings 56 which, together with the recesses 55, form labyrinth seals.
  • the shafts 2, 3 are supported on the bearings 27 with an enlarged diameter 57.
  • a bushing 58 for the radial shaft sealing ring 53 adjoins this diameter widening 57 at the top. This is supported on the outside in an annular profile component 59, which is embedded in the wall section 17 of the gear housing 21 and is fastened thereon.
  • a centrifugal disc 61 is also arranged, which protects the radial shaft sealing ring 53 against dust particles that may fall down.
  • a sealing gas line 62 opens, which is passed through the intermediate disc 51, that is to say through a component that is simple in terms of casting technology.
  • the labyrinth seal located above it has gas flowing continuously in the direction of the scooping chamber 13, so that toxic fluids cannot flow in the opposite direction.
  • the walls of the delivery space are as hot as possible during operation.
  • this goal is limited by the fact that the transmission housing is cooled.
  • the intermediate disk 51 according to the invention it is also possible to largely decouple the gear housing thermally from the scooping areas.
  • the washer is made of poorly heat-conducting material (e.g. gray cast iron, stainless steel or the like) and / or that measures (gaps or the like) are taken to cover the contact surfaces between the washer 51 and the adjacent components (ring 20 , Wall 17) reduce.
  • a plurality of grooves 63 are provided, one of which is used to hold a sealing ring 64.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A dry-running twin-shaft vacuum pump (1) with at least one expansion chamber (11, 12, 13), a pair of rotors (4, 5; 6, 7; 8, 9) in the expansion chamber and driven by the shafts (2, 3) and a gear casing (21). In order to limit the regions contaminated during the conveyance of toxic substances to components which are easy to fit, it is proposed that between the gear casing (21) and the adjacent expansion chamber (13) be fitted an intermediate plate (51) pierced by the shafts (2, 3), holding the lateral exhaust pipe (52) and releasable from the wall (17) of the gear casing (21).

Description

Die Erfindung bezieht sich auf eine trockenlaufende Zweiwellenvakuumpumpe mit mindestens einem Schöpfraum, mit einem im Schöpfraum befindlichen, von den Wellen getragenen Rotorpaar, mit einem Getriebegehäuse, das einer der beiden Stirnseiten des Schöpfraumes zugeordnet ist, sowie mit Lagerungen, die sich im dem Schöpfraum zugewandten Wandungsabschnitt des Getriebegehäuses befinden und die die beiden Wellen, die diesen Wandungsabschnitt durchsetzen, abstützen.The invention relates to a dry-running twin-shaft vacuum pump with at least one pumping chamber, with a pair of rotors located in the pumping chamber and supported by the shafts, with a gearbox housing which is assigned to one of the two end faces of the pumping chamber, and with bearings which face the wall section facing the pumping chamber of the gear housing and which support the two shafts that pass through this wall section.

"Trockenlaufende" Vakuumpumpen sind Pumpen, deren Schöpfräume keine Schmier- und/oder Dichtmittel enthalten. Ihr Vorteil liegt darin, daß sie vollständig kohlenwasserstoffreie Vakua erzeugen können. Auf die Schmierung der Lagerungen der Wellen, die die in den Schöpfräumen rotierenden Kolben tragen, kann jedoch nicht verzichtet werden. Bei trockenlaufenden Pumpen besteht deshalb die Notwendigkeit, eine wirksame Trennung der Lagerräume von den Schöpfräumen zu gewährleisten. Auf der einen Seite der Pumpe erstrecken sich die Wellen bis in das Getriebegehäuse, in welchem sich ein die Rotorbewegung synchronisierendes Getriebe befindet. Auch die Abdichtung des Öl enthaltenden Getrieberaums vom benachbarten Schöpfraum muß sichergestellt sein."Dry-running" vacuum pumps are pumps whose pumping chambers do not contain any lubricants and / or sealants. Their advantage is that they can generate completely hydrocarbon-free vacuums. Lubrication of the bearings of the shafts that carry the pistons rotating in the pumping chambers cannot be dispensed with. With dry-running pumps, there is therefore a need to ensure an effective separation of the storage rooms from the pumping rooms. On one side of the pump, the shafts extend into the gear housing, in which there is a gear synchronizing the rotor movement. It must also be ensured that the gear chamber containing oil is sealed off from the adjacent pump chamber.

Wegen ihrer besonderen Eigenschaft, kohlenwasserstoffreie Vakua erzeugen zu können, werden trockenlaufende Zweiwellenvakuumpumpen häufig in der Halbleiterindustrie eingesetzt, und zwar bei Anlagen, in denen unter Vakuum Ätz- oder Beschichtungsprozesse ablaufen. Die bei diesen Prozessen eingesetzten oder entstehenden Gase sind vielfach giftig. Wartungs- oder Service-Arbeiten werden deshalb durch eine Dekontamination der kontaminierten Teile der Pumpe maßgeblich erschwert.Because of their special property of being able to generate hydrocarbon-free vacuums, dry-running twin-shaft vacuum pumps are used frequently used in the semiconductor industry, in fact in systems in which etching or coating processes take place under vacuum. The gases used or generated in these processes are often toxic. Maintenance or service work is therefore made considerably more difficult by decontamination of the contaminated parts of the pump.

Aus der EP-A-290 662 ist eine Zweiwellenvakuumpumpe der eingangs erwähnten Art bekannt. Das an den auslaßseitigen Schöpfraum angrenzende Getriebegehäuse hat gleichzeitig die Funktion eines Lagerschildes. Dadurch sind Kontaminationen von Teilen des Getriebegehäuses unvermeidbar. Vor der Durchführung von Montagearbeiten an der Pumpe müssen deshalb auch diese Teile des Getriebegehäuses dekontaminiert werden, was den Wartungsaufwand zusätzlich erhöht.From EP-A-290 662 a twin-shaft vacuum pump of the type mentioned at the outset is known. The gear housing adjacent to the outlet-side scooping chamber also has the function of a bearing plate. As a result, contamination of parts of the gearbox is unavoidable. Before carrying out installation work on the pump, these parts of the gearbox must also be decontaminated, which increases the maintenance effort.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Zweiwellenvakuumpumpe der eingangs genannten Art zu schaffen, bei der eine sichere Trennung zwischen dem Getrieberaum und dem angrenzenden Schöpfraum gewährleistet ist und bei der außerdem Wartungs- und Montagearbeiten wesentlich einfacher durchgeführt werden können.The present invention has for its object to provide a twin-shaft vacuum pump of the type mentioned, in which a safe separation between the gear chamber and the adjacent scooping space is guaranteed and in addition, maintenance and assembly work can be carried out much easier.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß zwischen dem Getriebegehäuse und dem benachbarten Schöpfraum eine von den Wellen durchsetzte, die seitlich herausgeführte Auspuffleitung aufnehmende, von der Wandung des Getriebegehäuses lösbare Zwischenscheibe vorgesehen ist. Bei dieser Lösung können zwischen den Wellen und der erfindungsgemäßen Zwischenscheibe zusätzliche Mittel zur Trennung des Getrieberaumes vom angrenzenden Schöpfraum vorgesehen sein. Zweckmäßig sind die Wellen in diesem Bereich mit Buchsen, vorzugsweise Kolbenringbuchsen, ausgerüstet. Ein weiterer wesentlicher Vorteil bezieht sich auf den Einsatz der erfindungsgemäßen Pumpe bei giftigen Medien. Bedingt durch die Zwischenplatte ist der kontaminierte Teil der Pumpe eindeutig definierbar und trennbar von einem nicht kontaminierten Bereich.According to the invention, this object is achieved in that an intermediate disk is provided between the gear housing and the adjacent scooping chamber, which is penetrated by the shafts and receives the exhaust pipe which is led out laterally and can be detached from the wall of the transmission housing. In this solution, additional means for separating the gear space from the adjacent scooping space can be provided between the shafts and the washer according to the invention. The shafts in this area are expediently equipped with bushings, preferably piston ring bushings. Another significant advantage relates to the use of the pump according to the invention with toxic media. Due to the intermediate plate, the contaminated part of the pump can be clearly defined and separated from an uncontaminated area.

Pumpen der erfindungsgemäßen Art, vorzugsweise mit vertikal angeordneten Wellen, sind üblicherweise scheibenweise aufgebaut. Bei der Montage wird mit dem Getriebegehäuse, den Zahnrädern, Wellen und getriebeseitigen Lagerungen begonnen. Diese Arbeiten erfordern eine hohe Sorgfalt und sind deshalb langwierig. Danach werden die die Schöpfräume bildenden Bauteile und Rotoren nacheinander über die Wellen geschoben und müssen dann nur noch verspannt werden. Durch den Einsatz der erfindungsgemäßen Zwischenscheibe ist sichergestellt, daß der montageaufwendige Bereich der Pumpe, nämlich das Getriebegehäuse, nicht zum kontaminierten Bereich gehört. Der kontaminierte Bereich ist auf die einfach zu demontierenden bzw. montierenden Teile begrenzt. Nach der Demontage der kontaminierten Teile sind die Verschleißteile (Lager, Wellendichtring) in einfacher Weise erreichbar. Das Getriebegehäuse als aufwendig montierbares Bauteil ist sowohl vor Verunreinigungen als auch vor Verechleiß geschützt. Insgesamt ergibt sich durch die Erfindung eine große Erleichterung und Vereinfachung von Serviceprozeduren.Pumps of the type according to the invention, preferably with vertically arranged shafts, are usually constructed in disks. The assembly begins with the gearbox, the gears, shafts and gearbox-side bearings. This work requires great care and is therefore lengthy. Then the components and rotors that form the scoops are pushed one after the other over the shafts and then only have to be clamped. The use of the intermediate disk according to the invention ensures that the area of the pump which is difficult to assemble, namely the gear housing, does not belong to the contaminated area. The contaminated area is limited to the parts that are easy to disassemble or assemble. After disassembling the contaminated parts, the wearing parts (bearings, shaft sealing ring) can be easily reached. The gearbox, as a complex component, is protected against contamination and wear. Overall, the invention greatly facilitates and simplifies service procedures.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 und 2 dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

Figur 1
eine Zweiwellenvakuumpumpe mit einer Zwischenscheibe nach der Erfindung und
Figur 2
einen vergrößerten Ausschnitt eines Abschnittes der Welle im Bereich des Getrieberaumes und des angrenzenden Schöpfraumes.
Further advantages and details of the invention will be explained on the basis of the exemplary embodiments shown in FIGS. 1 and 2. Show it
Figure 1
a twin-shaft vacuum pump with an washer according to the invention and
Figure 2
an enlarged section of a portion of the shaft in the area of the transmission space and the adjacent scooping space.

Bei der in Figur 1 dargestellten Pumpe handelt es sich um eine dreistufige Vakuumpumpe 1 mit zwei Wellen 2 und 3 sowie drei Rotorpaaren 4, 5 bzw. 6, 7 bzw. 8, 9. Die axiale Länge der Rotoren nimmt von der Saugseite zur Druckseite ab. Die Drehkolben sind vom Klauentyp (Northey, vgl. beispielsweise die Eu-A- 290 662) und rotieren in den Schöpfräumen 11, 12, 13, welche von den Schilden 14 bis 17 und den Gehäuseringen 18 bis 20 gebildet werden. Der Schild 17 wird gebildet von dem Wandungsabschnitt des Getriebegehäuses 21, welcher dem auslaßseitigen Schöpfraum 13 zugeordnet ist.The pump shown in FIG. 1 is a three-stage vacuum pump 1 with two shafts 2 and 3 and three pairs of rotors 4, 5 or 6, 7 or 8, 9. The axial length of the rotors decreases from the suction side to the pressure side . The rotary pistons are of the claw type (Northey, cf., for example, Eu-A-290 662) and rotate in the scoops 11, 12, 13, which are formed by the shields 14 to 17 and the housing rings 18 to 20. The shield 17 is formed by the wall section of the Gear housing 21, which is assigned to the outlet-side scooping space 13.

Die Wellen 2, 3 sind vertikal angeordnet. Dieses gilt ebenfalls für den neben dem Pumpengehäuse angeordneten Antriebsmotor 22. Unterhalb des unteren Lagerschildes 17 sind die Wellen 2, 3 mit Zahnrädern 23, 24 gleichen Durchmessers ausgerüstet, welche der Synchronisation der Bewegung der Rotorpaare 4, 5 bzw. 6, 7 bzw. 8, 9 dienen. Auch der Antriebsmotor 22 weist an seiner Unterseite ein Zahnrad 25 auf. Die Antriebsverbindung wird hergestellt durch ein weiteres Zahnrad 26, das mit den Zahnrädern 24 und 25 in Eingriff steht.The shafts 2, 3 are arranged vertically. This also applies to the drive motor 22 arranged next to the pump housing. Below the lower bearing plate 17, the shafts 2, 3 are equipped with gear wheels 23, 24 of the same diameter, which synchronize the movement of the rotor pairs 4, 5 or 6, 7 or 8 , 9 serve. The drive motor 22 also has a gearwheel 25 on its underside. The drive connection is established by a further gear 26, which is in engagement with the gears 24 and 25.

Im oberen Lagerschild 14 und in der Wandung 17 des Getriebege- häuses 21 stützen sich die Wellen 2, 3 über Wälzlager 27 ab. Der obere Lagerschild 14 ist mit einem horizontal angeordneten Anschlußflansch 28 ausgerüstet, welcher den Einlaß 29 der Pumpe bildet. Der Einlaßkanal 31 mündet stirnseitig (Öffnung 32) in den Schöpfraum 11 der ersten Stufe. Die stirnseitig angeordnete Auslaßöffnung der ersten Stufe ist mit 33 bezeichnet und führt in den Verbindungskanal 34. Der im Schild 15 befindliche Verbindungskanal 34 steht mit der Einlaßöffnung 35 der zweiten Stufe in Verbindung. Der Lagerschild 16 ist entsprechend gestaltet. Unterhalb der untersten (dritten) Pumpstufe befindet sich der Auslaß 36, der mit der stirnseitigen Auslaßöffnung 37 in Verbindung steht.In the upper end shield 14 and in the wall 17 of the gear housing 21, the shafts 2, 3 are supported by roller bearings 27. The upper end plate 14 is equipped with a horizontally arranged connecting flange 28, which forms the inlet 29 of the pump. The inlet channel 31 opens at the end (opening 32) into the scoop chamber 11 of the first stage. The end opening of the first stage is designated 33 and leads into the connecting duct 34. The connecting duct 34 located in the shield 15 is connected to the inlet opening 35 of the second stage. The end shield 16 is designed accordingly. Below the lowermost (third) pump stage is the outlet 36, which is connected to the front outlet opening 37.

Unterhalb des aus Pumpengehäuse und Motor bestehenden Systems befindet sich das Getriebegehäuse 21, das den Öl enthaltenden Raum 40 und die Oelwanne 41 umfaßt. In das Getriebegehäuse 21 hinein ragt eine mit der Welle 2 verbundene Ölpumpe 42. Von der Ölpumpe aus erstrecken sich im einzelnen nicht dargestellt Schmiermittelkanäle zu den Stellen der Pumpe (Lager, Eingriffe der Zahnräder 23 bis 26, Simmerringe oder dergleichen), welche einer Ölschmierung bedürfen. Die Lagerungen 27 im Bereich der oberen Wellenenden sind vorzugsweise fettgeschmiert.Below the system consisting of the pump housing and the motor is the gear housing 21, which includes the oil-containing space 40 and the oil pan 41. An oil pump 42 connected to the shaft 2 projects into the gear housing 21. Lubricant channels (not shown in detail) extend from the oil pump to the points of the pump (bearings, engagements of the gearwheels 23 to 26, oil seals or the like) which require oil lubrication . The bearings 27 in the region of the upper shaft ends are preferably lubricated with grease.

Das dargestellte Ausführungsbeispiel der dreistufigen Zweiwellenvakuumpumpe ist wassergekühlt. Dazu sind in den Seitenschilden 14 und im Getriebegehäuse 21 17 Kühlwasserkanäle 43 und 44 vorgesehen. Kühlwassereinlaß und -auslaß sind mit 45 und 46 bezeichnet. Der Kühlwassereinlaß 45 ist an der untersten Stelle des Kanalsystems 43, 44 angeordnet, so daß ein einfacher Kühlwasserablaß möglich und eine vollständige Entleerung sichergestellt sind.The illustrated embodiment of the three-stage two-shaft vacuum pump is water-cooled. For this purpose, 17 cooling water channels 43 and 44 are provided in the side plates 14 and in the gear housing 21. Cooling water inlet and outlet are designated 45 and 46. The cooling water inlet 45 is arranged at the lowest point of the channel system 43, 44, so that a simple cooling water drain is possible and complete emptying is ensured.

Die dargestellte Pumpe ist in der erfindungsgemäßen Weise mit einer Zwischenscheibe 51 ausgerüstet, welche das Getriebegehäuse 21 von den übrigen, die Schöpfräume 11 bis 13 bildenden Bauteilen trennt. Die Zwischenscheibe 51 ist lösbar am Getriebegehäuse 1 befestigt und bildet selbst einen den Schöpfraum 13 begrenzenden Wandungsabschnitt. Sie nimmt die von der stirnseitigen Auslaßöffnung 37 seitlich nach außen geführte Auspuffleitung 52 auf. Nach der - einfach durchzuführenden - Demontage der die Schöpfräume 11 bis 13 bildenden Bauteile (einschließlich Zwischenscheibe 51), welche im Falle des Einsatzes der Pumpe bei giftigen Fördermedien kontaminiert sind, sind alle zu dekontaminierenden Teile demontiert. Eine Dekontaminierung des montageaufwendigen Getriebegehäuses 21 kann deshalb bei Servicearbeiten entfallen. Die Lagerungen 27 und auch ein üblicherweise vorhandener, jeder der Wellen zugeordneter Radialwellendichtring 53 befinden sich - wie beim Stand der Technik - im Wandungsabschnitt 17 des Getriebegehäuses 21. Nach der Demontage der Zwischenscheibe 51 sind diese Bauteile für Wartungsarbeiten frei zugänglich.The pump shown is equipped in the manner according to the invention with an intermediate disk 51 which separates the gear housing 21 from the other components which form the scooping spaces 11 to 13. The intermediate disk 51 is detachably fastened to the gear housing 1 and itself forms a wall section delimiting the scooping space 13. It receives the exhaust line 52, which is led laterally outwards from the front outlet opening 37. After the - easy to carry out - disassembly of the components forming the scoops 11 to 13 (including the intermediate disk 51), which are contaminated when the pump is used with toxic fluids, all parts to be decontaminated are disassembled. Decontamination of the gear housing 21, which is difficult to assemble, can therefore be dispensed with during service work. The bearings 27 and also a usually existing, associated with each of the shafts radial shaft seal 53 are - as in the prior art - in the wall section 17 of the gear housing 21. After the disassembly of the intermediate plate 51, these components are freely accessible for maintenance work.

Figur 2 zeigt vergrößert einen Teilschnitt durch eine erfindungsgemäße Pumpe 1 im Bereich des Durchtritts der Wellen 2, 3 (nur eine ist sichtbar) durch den Lagerschild 16, den auslaßseitigen Schöpfraum 13, die Zwischenscheibe 51 und den Wandungsabschnitt 17 des Getriebegehäuses 21. Zur dichten gegenseitigen Trennung der jeweils benachbarten Räume (Schöpfräume bzw. Getrieberaum) sind den Wellen mitrotierenden Buchsen 54 zugeordnet, die auf ihrer Außenseite ringförmige Vertiefungen 55 aufweisen. In den Vertiefungen 55 befinden sich ruhende Kolbenringe 56, die gemeinsam mit den Vertiefungen 55 Labyrinthdichtungen bilden.Figure 2 shows an enlarged partial section through a pump 1 according to the invention in the area of the passage of the shafts 2, 3 (only one is visible) through the bearing plate 16, the outlet-side scooping space 13, the intermediate plate 51 and the wall section 17 of the gear housing 21. For a tight mutual Separation of the respectively adjacent spaces (scooping spaces or gear space) are assigned to the shafts 54 which rotate with the shafts and which have annular depressions 55 on their outside. In the recesses 55 there are resting piston rings 56 which, together with the recesses 55, form labyrinth seals.

Die Wellen 2, 3 stützen sich mit einer Durchmessererweiterung 57 auf den Lagern 27 ab. An diese Durchmessererweiterung 57 schließt sich nach oben eine Laufbuchse 58 für den Radialwellendichtring 53 an. Dieser stützt sich außen in einem Ringprofilbauteil 59 ab, das in den Wandungsabschnitt 17 des Getriebegehäuses 21 eingelassen und daran befestigt ist. Zwischen der Laufbuchse 58 und der Kolbenringbuchse 54, also oberhalb des Raldialwellendichtringes 53, ist noch eine Schleuderscheibe 61 angeordnet, die den Radialwellendichtring 53 vor eventuell herabfallenden Staubpartikeln schützt.The shafts 2, 3 are supported on the bearings 27 with an enlarged diameter 57. A bushing 58 for the radial shaft sealing ring 53 adjoins this diameter widening 57 at the top. This is supported on the outside in an annular profile component 59, which is embedded in the wall section 17 of the gear housing 21 and is fastened thereon. Between the bushing 58 and the piston ring bushing 54, that is to say above the radial shaft sealing ring 53, a centrifugal disc 61 is also arranged, which protects the radial shaft sealing ring 53 against dust particles that may fall down.

In Höhe der Schleuderscheibe 61, die sich im Grenzbereich zwischen Zwischenscheibe 51 und Wandungsabschnitt 17 befindet, mündet eine Sperrgasleitung 62, welche durch die Zwischenscheibe 51 hindurchgeführt ist, also durch ein gußtechnisch einfaches Bauteil. Infolge der Sperrgaszufuhr an dieser Stelle ist die darüber befindliche Labyrinthdichtung ständig in Richtung Schöpfraum 13 gasdurchströmt, so daß giftige Fördermedien nicht in umgekehrter Richtung strömen können. Beim Stand der Technik war es erforderlich, gegebenenfalls notwendige Inertgasleitungen in fertigungstechnisch aufwendiger Weise durch die Kühlkanäle im Getriebegehäuse zu führen.At the level of the centrifugal disc 61, which is located in the border area between the intermediate disc 51 and the wall section 17, a sealing gas line 62 opens, which is passed through the intermediate disc 51, that is to say through a component that is simple in terms of casting technology. As a result of the supply of sealing gas at this point, the labyrinth seal located above it has gas flowing continuously in the direction of the scooping chamber 13, so that toxic fluids cannot flow in the opposite direction. In the prior art, it was necessary to run any necessary inert gas lines through the cooling channels in the transmission housing in a production-technically complex manner.

Bei vielen Applikationen von Pumpen der hier betroffenen Art ist es günstig, wenn die Schöpfraumbegrenzungswandungen während des Betriebs möglichst heiß sind. Diesem Ziel sind beim Stand der Technik dadurch, daß das Getriebegehäuse gekühlt ist, Grenzen gesetzt. Infolge der erfindungsgemäßen Zwischenscheibe 51 ist es jedoch möglich, das Getriebegehäuse von den Schöpfräumen auch thermisch weitestgehend zu entkoppeln. Dieses kann dadurch geschehen, daß die Zwischenscheibe aus schlecht wärmeleitendem Material (z.B. Grauguß, Edelstahl o.dgl.) besteht und/oder daß Maßnahmen (Spalte oder ähnliches) getroffen sind, die die Kontaktflächen zwischen der Zwischenscheibe 51 und den angrenzenden Bauteilen (Ring 20, Wandung 17) reduzieren. Beim Ausführungsbei- spiel nach Fig. 2 sind mehrere Nuten 63 vorgesehen, von denen eine der Aufnahme eines Dichtringes 64 dient.In many applications of pumps of the type concerned here, it is advantageous if the walls of the delivery space are as hot as possible during operation. In the prior art, this goal is limited by the fact that the transmission housing is cooled. As a result of the intermediate disk 51 according to the invention, however, it is also possible to largely decouple the gear housing thermally from the scooping areas. This can be done in that the washer is made of poorly heat-conducting material (e.g. gray cast iron, stainless steel or the like) and / or that measures (gaps or the like) are taken to cover the contact surfaces between the washer 51 and the adjacent components (ring 20 , Wall 17) reduce. In the exemplary embodiment according to FIG. 2, a plurality of grooves 63 are provided, one of which is used to hold a sealing ring 64.

Claims (10)

  1. Dry-running twin-shaft vacuum pump (1), having at least one suction chamber (11, 12, 13), having a pair of rotors (4, 5; 6, 7; 8, 9) situated in the suction chamber and carried by the shafts (2, 3), having a gear housing (21) associated with one of the two end faces of the suction chamber, and having bearings (27) which are situated in the wall portion (17) of the gear housing (21) facing the suction chamber and support the two shafts (2, 3) which penetrate said wall portion (17), characterized in that there is provided, between the gear housing (21) and the adjacent suction chamber (13), an intermediate plate (51) which is penetrated by the shafts (2, 3), accommodates the laterally brought-out exhaust line (52) and is detachable from the wall (17) of the gear housing (21).
  2. Pump according to claim 1, characterized in that the shafts (2, 3) are vertically disposed.
  3. Pump according to claim 1 or 2, characterized in that it has claw-type rotor pairs (4, 5; 6, 7; 8, 9).
  4. Pump according to claim 1, 2 or 3, characterized in that it is of a multi-stage construction.
  5. Pump according to one of the preceding claims, characterized in that the shafts (2, 3) in the region of the intermediate plate (51) are equipped with bushes (54), preferably piston ring bushes (54, 55, 56).
  6. Pump according to one of the preceding claims, characterized in that associated with each of the shafts (2, 3) is a rotary shaft seal (53) which is situated between the bearings (27) and the intermediate plate (51).
  7. Pump according to claim 6, caracterized in that a spinning plate is disposed above each of the rotary shaft seals (53).
  8. Pump according to one of the preceding claims, characterized in that the intermediate plate (51) accommodates a sealing gas (inert gas) line (62) which opens into the border area between the intermediate plate (51) and the gear housing (21).
  9. Pump according to one of the preceding claims, characterized in that the intermediate plate (51) is made of a material of poor thermal conductivity, e.g. grey cast iron or special steel.
  10. Pump according to one of the preceding claims, characterized in that the contact surfaces of the intermediate plate (51) with the gear housing (21) and/or with the adjacent housing ring (20) are reduced.
EP92904222A 1991-02-01 1992-01-31 Dry-running twin-shaft vacuum pump Expired - Lifetime EP0569455B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP91101331 1991-02-01
EP91101331 1991-02-01
PCT/EP1992/000211 WO1992014060A1 (en) 1991-02-01 1992-01-31 Dry-running twin-shaft vacuum pump

Publications (2)

Publication Number Publication Date
EP0569455A1 EP0569455A1 (en) 1993-11-18
EP0569455B1 true EP0569455B1 (en) 1994-08-03

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ID=8206357

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Application Number Title Priority Date Filing Date
EP92904222A Expired - Lifetime EP0569455B1 (en) 1991-02-01 1992-01-31 Dry-running twin-shaft vacuum pump

Country Status (5)

Country Link
US (1) US5364245A (en)
EP (1) EP0569455B1 (en)
JP (1) JPH06505076A (en)
DE (1) DE59200347D1 (en)
WO (1) WO1992014060A1 (en)

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DE102005015212A1 (en) * 2005-04-02 2006-10-05 Leybold Vacuum Gmbh Shaft sealing for e.g. rotary screw pump, has seal gap connected with locking gas chamber, and discharge opening connected with gas chamber and suction chamber, where seal gap is arranged between inner and outer sealing rings
EP1273801B2 (en) † 2001-07-05 2012-09-12 Kabushiki Kaisha Toyota Jidoshokki Sealing for vacuum pump

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JP3432679B2 (en) * 1996-06-03 2003-08-04 株式会社荏原製作所 Positive displacement vacuum pump
DE19800825A1 (en) * 1998-01-02 1999-07-08 Schacht Friedrich Dry compacting screw pump
DE29807796U1 (en) * 1998-04-30 1999-09-09 GHH-RAND Schraubenkompressoren GmbH & Co. KG, 46145 Oberhausen Sealing arrangement for a shaft journal of a dry-running rotary screw compressor
US6318959B1 (en) * 1998-12-22 2001-11-20 Unozawa-Gumi Iron Works, Ltd. Multi-stage rotary vacuum pump used for high temperature gas
JP2002257244A (en) * 2001-02-28 2002-09-11 Toyota Industries Corp Shaft seal structure in vacuum pump
JP2002257070A (en) * 2001-02-28 2002-09-11 Toyota Industries Corp Shaft sealing structure of vacuum pump
JP4061850B2 (en) * 2001-02-28 2008-03-19 株式会社豊田自動織機 Shaft seal structure in vacuum pump
CN100400881C (en) * 2002-08-23 2008-07-09 株式会社丰田自动织机 Axle sealing structure for vacuum pump
US7533685B2 (en) * 2005-01-28 2009-05-19 Agilent Technologies, Inc. Lubricant collection apparatus
JP4673136B2 (en) * 2005-06-09 2011-04-20 株式会社日立産機システム Screw compressor
DE102008010427B4 (en) * 2008-02-21 2010-05-12 Sartorius Stedim Biotech Gmbh bioreactor
EP3053653B1 (en) 2015-02-06 2017-11-22 Alfa Laval Corporate AB Disc stack centrifugal separator
CN110159549B (en) * 2019-06-19 2024-01-02 格力博(江苏)股份有限公司 Pump assembly and high-pressure cleaning equipment

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DE3312117A1 (en) * 1983-04-02 1984-10-04 Leybold-Heraeus GmbH, 5000 Köln TWO-SHAFT VACUUM PUMP WITH INTERNAL COMPRESSION
JPS62243982A (en) * 1986-04-14 1987-10-24 Hitachi Ltd 2-stage vacuum pump and operating method thereof
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1273801B2 (en) † 2001-07-05 2012-09-12 Kabushiki Kaisha Toyota Jidoshokki Sealing for vacuum pump
DE102005015212A1 (en) * 2005-04-02 2006-10-05 Leybold Vacuum Gmbh Shaft sealing for e.g. rotary screw pump, has seal gap connected with locking gas chamber, and discharge opening connected with gas chamber and suction chamber, where seal gap is arranged between inner and outer sealing rings

Also Published As

Publication number Publication date
EP0569455A1 (en) 1993-11-18
US5364245A (en) 1994-11-15
WO1992014060A1 (en) 1992-08-20
JPH06505076A (en) 1994-06-09
DE59200347D1 (en) 1994-09-08

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