EP2949938B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2949938B1
EP2949938B1 EP15151656.4A EP15151656A EP2949938B1 EP 2949938 B1 EP2949938 B1 EP 2949938B1 EP 15151656 A EP15151656 A EP 15151656A EP 2949938 B1 EP2949938 B1 EP 2949938B1
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EP
European Patent Office
Prior art keywords
shaft
vacuum pump
lip seal
seal
bearing
Prior art date
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Active
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EP15151656.4A
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German (de)
French (fr)
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EP2949938A1 (en
Inventor
Christopher Kobus
Kevin Schneider
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2949938A1 publication Critical patent/EP2949938A1/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009Shaft sealings specially adapted for pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/50Bearings
    • F04C2240/52Bearings for assemblies with supports on both sides
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0064Magnetic couplings

Definitions

  • the invention relates to a vacuum pump with a single or multi-piece shaft according to the preamble of claim 1.
  • Vacuum pumps in particular Roots vacuum pumps, have become indispensable in many industrial applications. Examples of such applications include metallurgy, vacuum drying and chemical engineering.
  • Roots vacuum pumps provide to operate two waves in opposite directions at the same speed. This is ensured for example by a mechanical synchromesh. On these waves are pistons which cooperate, include gas volumes and transfer from the pump inlet to the pump outlet.
  • the prior art ( DE 10 2008 060 540 A1 ) includes a Roots vacuum pump having a suction chamber with two mutually rotating pistons and two storage spaces in which bearings are provided for rotatably supporting at least one shaft.
  • the Roots vacuum pumps belonging to the prior art usually have two rotors whose shafts are mounted on both sides.
  • the pump-effective pistons which are part of the rotor, thereby rotate in the pump chamber and are spatially separated from the storage.
  • the execution of the shaft passage and its seal between the pump chamber and storage space is of great importance for these pumps. Among other things, it determines the applied frictional heat and the resulting operating and oil temperature. Depending on the version, the achievable final pressure and the duration differ until the pump reaches it. Correct sealing protects the equipment from process gas, impurities conveyed and prevents the accumulation of condensate. Thus, these factors significantly determine the life of the pump and customer satisfaction.
  • piston ring seals are known, which are arranged in the shaft passage.
  • piston ring seals have the disadvantage that impurities in the gas to be conveyed, for example dust particles, damage the piston ring seals.
  • impurities in the gas to be conveyed for example dust particles
  • the medium to be pumped which is located in the pump chamber, often contain gases that change lubricants and possibly carry dust particles with it.
  • condensate is often contained in the media to be conveyed. Through these substances, the lubricants change chemically, so they must be replaced after a relatively short time, which in turn comes to a breakdown of the pump.
  • the prior art ( DE 195 44 994 A1 ) includes a multi-shaft vacuum pump, with which an effective seal between the gearbox, or storage rooms and storage spaces is to be achieved.
  • This pump provides two lip seals so that the lips face one seal towards the suction chamber and the lips of the other seal towards the gearbox or storage space. This results in a number of advantages, for example, that contamination in the corners, undercuts and depressions in the immediate sealing region of the seals by accumulating substances from the pump chamber and from the transmission, or storage space can be avoided.
  • This prior art seal assembly can be further improved.
  • a screw compressor with a shaft seal Furthermore belongs to the state of the art ( EP 0 859 154 A1 ) a screw compressor with a shaft seal.
  • the screw compressor also provides two lip seals. Between the lip seals a gas inlet is provided. On both sides next to the lip seals a spiral seal is arranged in each case.
  • the two lip seals with the sealing gas inlet in between have the task of oil, which is used to lubricate a ball bearing on the one hand, and a fluid, such as water, which serves to lubricate the rotor on the other side, to separate so that the oil does not mixed with the water.
  • This seal assembly has four sealing elements and is very expensive for this reason.
  • the technical problem underlying the invention is to provide a vacuum pump in which a seal of the shaft passage is provided, which is insensitive to gases that change lubricant, dust particles and / or condensate.
  • the vacuum pump according to the invention with at least one single- or multi-piece shaft which is rotatably mounted with at least one bearing assembly, a pump chamber and a bearing or gear room for arranging the at least one bearing assembly with a seal assembly for performing the single or multi-piece shaft between pump chamber and bearing - Or gear chamber, wherein the seal assembly for carrying out the at least one single- or multi-piece shaft having a first seal, which is formed as a lip seal, wherein a second sealing arrangement is provided, characterized in that in the space between the first lip seal and the second sealing arrangement, a sealing gas inlet is provided and that the second sealing arrangement has at least one piston ring seal.
  • the vacuum pump according to the invention has the advantage that the lip seal has minimal gaps with high throttling effect for the sealing gas, that is, allows a small sealing gas flow despite a high pressure.
  • the arrangement according to the invention has the advantage that the lip seal ensures a good seal against dust particles, condensate and gases.
  • Piston ring seals for example in a rectangular shape, operate relatively independently of the rotational speed and permit a pressure equalization which is faster compared to the lip seal (lower throttle effect).
  • these ring seals have emergency running properties and work wear-resistant and they have less heat input and a lower power consumption.
  • the vacuum pump according to the invention has the advantage that over the prior art, a better seal is achieved by higher sealing gas pressures due to an increased throttle effect.
  • a barrier gas inlet between the first lip seal and the second seal assembly this relatively small space can be filled with barrier gas.
  • the sealing gas requirement is reduced compared with the prior art since, according to the prior art, the entire storage space has generally been filled with sealing gas.
  • the first lip seal is arranged on the pumping chamber side.
  • piston ring seals for example rectangular rings, work relatively independently of the rotational speed and have runflat properties.
  • the second sealing arrangement consists of two piston ring seals.
  • Two piston ring seals have the advantage over a piston ring seal that the sealing effect is improved.
  • a further advantageous embodiment of the invention provides that the piston ring seals are arranged adjacent to each other at a distance from each other. By this embodiment, a sufficient sealing effect can be achieved.
  • the lip direction is arranged on the pump chamber side. This ensures that impurities in the medium to be pumped, which is located in the pump chamber, do not enter the seal chamber or in the direction of the bearing or gear compartment. As a result, lubricant in the bearing or gear chamber is not or not so quickly contaminated, so that the lubricant has a longer life.
  • the second sealing arrangement is advantageously arranged on the storage space side.
  • This sealing arrangement serves primarily to form a relatively small gap with the sealing gas inlet, so that not the entire bearing or gear chamber must be filled with sealing gas. If the entire bearing or gear chamber to fill with sealing gas, as provided in the prior art, the consumption of sealing gas is very high.
  • the sealing gas arranged behind the lip seal builds up a pressure in the direction of the pumping chamber, so that less gas moves from the pumping chamber in the direction of the storage space.
  • the lip seal is advantageously arranged such that the lip seal is pressed against the shaft or a bushing on the shaft by a higher pressure in the pump chamber.
  • a lip of the lip seal is arranged pointing in the direction of the suction chamber. This ensures that at a higher pressure in the pump chamber with respect to the space with the sealing gas, the lip seal is pressed against shaft or socket and thereby the throttle effect is increased.
  • a possible embodiment of the invention provides that the shaft or the bush is coated at least in the region of the system of the lip seal. This makes it possible to reduce the friction between the shaft or bushing and the lip seal, so that less heat is generated.
  • the lip seal has the advantage that it is process gas tight by the sealing gas.
  • the barrier gas stream also cools the lip seal, which heats up during operation due to friction.
  • a further advantageous embodiment of the invention provides that a mating surface of the lip seal has a twist. This will be a corresponding Gas flow achieved, so that the throttling effect of the lip seal is reinforced.
  • the vacuum pump according to the invention is advantageously designed as Roots piston pump.
  • the invention can also be used with other pumps, for example turbomolecular pumps or the like.
  • Fields of application are shaft feedthroughs through the pump chamber and storage room.
  • Fig. 1 shows a Roots vacuum pump with a housing 1.
  • the pump chamber 2 is penetrated by a first shaft 10 and a second shaft 14.
  • Shaft axes of the pump chamber is limited by a first bearing plate 4 and a second bearing plate 5.
  • a first piston 12 with the first shaft 10 and a second piston 16 with the second shaft 14 are connected.
  • Both shafts 10, 14 are supported by bearing arrangements rotatably in the end shields 4, 5 from.
  • first bearing plate 4 In the first bearing plate 4 are a floating bearing 22 of the first shaft 10 and a floating bearing 26 of the second shaft 14.
  • second bearing plate 5 In the second bearing plate 5 are a fixed bearing 24 of the first shaft 10 and a bearing 28 of the second shaft 14th
  • a gear chamber 3 On a side facing away from the pump chamber 2 of the first bearing plate 4, a gear chamber 3 is provided, in which the ends of the first and second shafts 10, 14 protrude. On the shaft ends sit a first and a second synchronous wheel 18, 20, which transmits the rotation of the first shaft 10 to the second shaft 14 so that it rotates at the same speed, but in opposite directions.
  • a first centrifugal disc 30 dips into a lubricant reservoir and distributes the lubricant in the gear chamber 3.
  • a gap 8 On the side facing away from the pump chamber 2 of the second bearing plate 5 is a gap 8. This is penetrated by the first shaft 10, while the second shaft 14 terminates in it.
  • a second centrifugal disc 32 On the end of the second shaft 14, a second centrifugal disc 32 is arranged, which also dips into a lubricant reservoir and causes a distribution of the lubricant in the intermediate space.
  • the intermediate space passing through the end of the first shaft 10 terminates in a motor housing 6.
  • the shaft end with the inner magnet 44 is surrounded by a split pot 40 which is mounted airtight by means of a split-top flange on the housing 6.
  • a magnet carrier 48 carries outer magnets 46, which cooperate with the inner magnet 44 to transmit force and rotation.
  • the magnet carrier 48 is arranged on a motor shaft 50, which is mounted in an engine mount 52.
  • the motor magnets 54 which are likewise arranged on the motor shaft 50, interact with coils 56 in order to convert electrical energy into mechanical rotation. Coils and motor magnets form the drive of the Roots pump 100.
  • the shaft passages 34, 36, 38, 42 are of identical construction.
  • the shaft passage 34 is in Fig. 2 shown.
  • a bush 58 is arranged on the shaft 14.
  • the pump chamber is shown on the left and the gear compartment 3 on the right. It could be in the Fig. 2 also act around the shaft leadthrough 38 or 42. Then the pump chamber 2 would be on the left and the intermediate space 8 on the right.
  • the shaft leadthrough 34 has on the one side a lip seal 60 on the pump chamber side and two piston ring seals 62, 64 on the piston chamber or piston chamber side.
  • the piston ring seals 62, 64 are designed as rectangular seals and are correspondingly arranged in rectangular grooves 66 of the shaft passage 34.
  • a barrier gas inlet 68 is provided to fill a space 70 between lip seal 60 and piston ring seal 62 with barrier gas.
  • the lip seal 60 which is arranged on the pump chamber side, is insensitive to dust particles and has a good throttling action with respect to condensate and gases, which form part of the medium to be pumped in the pump chamber 2.
  • the sealing gas has the advantage that it also prevents gas from the pumping chamber 2 from wandering in the direction of bearing or gear chamber 3.
  • the space 70 is relatively small compared to the transmission and storage space 3, so that the space 70, which is filled with sealing gas, has a smaller volume than the transmission or storage space 3. As a result, the consumption of sealing gas is significantly reduced.
  • the lip seal 60 has a very good throttle effect. Behind the lip seal 60 in the direction of bearing or gear chamber 3, the sealing gas is arranged, which builds up a pressure in the direction of the pump chamber, so that little gas migrates from the pump chamber in the direction of bearing or gear chamber 3.
  • the lip seal 60 is arranged such that the lip seal 60 is pressed against the bush 58 due to the higher pressure in the pump chamber 2.
  • the piston rings 62, 64 delimit on the other side, that is, the storage and drive chamber side, the space which is filled with sealing gas.
  • the piston ring seals 62, 64 produce the required throttle effect.
  • the piston rings 62, 64 also have emergency running properties. They also have the advantage that they are easy to assemble.
  • the barrier gas stream cools the lip seal 60, since by rotation of the shaft 14 frictional heat is generated.
  • a lip 72 of the lip seal is arranged pointing in the direction of the suction chamber 2. This ensures that gas from the pump chamber 2, which would like to reach in the direction of the space 70 and thus in the direction of the transmission or storage space 3, the lip 72 of the lip seal 60 presses against the shaft 14 or bushing 58, whereby the throttling effect of the lip seal 60 is increased.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe mit einer ein- oder mehrstückigen Welle gemäß dem Oberbegriff des Anspruches 1.The invention relates to a vacuum pump with a single or multi-piece shaft according to the preamble of claim 1.

Vakuumpumpen, insbesondere Wälzkolbenvakuumpumpen sind aus vielen industriellen Anwendungen nicht mehr wegzudenken. Beispielhaft seien für diese Anwendungen Metallurgie, Vakuumtrocknung und Chemietechnik genannt.Vacuum pumps, in particular Roots vacuum pumps, have become indispensable in many industrial applications. Examples of such applications include metallurgy, vacuum drying and chemical engineering.

Der Grundaufbau dieser Wälzkolbenvakuumpumpen sieht vor, zwei Wellen gegenläufig mit gleicher Drehzahl zu betreiben. Dies wird beispielsweise durch ein mechanisches Synchrongetriebe gewährleistet. Auf diesen Wellen sind Kolben vorgesehen, die zusammenwirken, Gasvolumina einschließen und vom Pumpeneinlass zum Pumpenauslass transferieren.The basic structure of these Roots vacuum pumps provides to operate two waves in opposite directions at the same speed. This is ensured for example by a mechanical synchromesh. On these waves are pistons which cooperate, include gas volumes and transfer from the pump inlet to the pump outlet.

Zum Stand der Technik ( DE 10 2008 060 540 A1 ) gehört eine Wälzkolbenvakuumpumpe, die einen Schöpfraum mit zwei sich gegeneinander drehenden Kolben aufweist sowie zwei Lagerräume, in denen Lager zur drehbaren Lagerung wenigstens einer Welle vorgesehen sind.The prior art ( DE 10 2008 060 540 A1 ) includes a Roots vacuum pump having a suction chamber with two mutually rotating pistons and two storage spaces in which bearings are provided for rotatably supporting at least one shaft.

Die zum Stand der Technik gehörenden Wälzkolbenvakuumpumpen verfügen üblicherweise über zwei Rotoren, deren Wellen auf beiden Seiten gelagert sind. Die pumpwirksamen Kolben, die Teil des Rotors sind, drehen sich dabei im Schöpfraum und sind räumlich von der Lagerung getrennt. Die Ausführung der Wellendurchführung und ihre Abdichtung zwischen Schöpfraum und Lagerraum ist für diese Pumpen dabei von hoher Bedeutung. Sie bestimmt unter anderem die eingebrachte Reibungswärme und die sich einstellende Betriebs- und Öltemperatur. Je nach Ausführung unterscheidet sich der erreichbare Enddruck und die Dauer, bis die Pumpe diesen erreicht. Eine korrekte Abdichtung schützt das Betriebsmittel vor Prozessgas, mitgeförderten Verunreinigungen und verhindert die Anreicherung von Kondensat. Damit bestimmen diese Faktoren maßgeblich die Lebensdauer der Pumpe und die Kundenzufriedenheit.The Roots vacuum pumps belonging to the prior art usually have two rotors whose shafts are mounted on both sides. The pump-effective pistons, which are part of the rotor, thereby rotate in the pump chamber and are spatially separated from the storage. The execution of the shaft passage and its seal between the pump chamber and storage space is of great importance for these pumps. Among other things, it determines the applied frictional heat and the resulting operating and oil temperature. Depending on the version, the achievable final pressure and the duration differ until the pump reaches it. Correct sealing protects the equipment from process gas, impurities conveyed and prevents the accumulation of condensate. Thus, these factors significantly determine the life of the pump and customer satisfaction.

Aus der Praxis sind Kolbenringdichtungen bekannt, die im Bereich der Wellendurchführung angeordnet sind. Kolbenringdichtungen weisen jedoch den Nachteil auf, dass Verunreinigungen in dem zu fördernden Gas, beispielsweise Staubpartikel, die Kolbenringdichtungen beschädigen. In dem zu fördernden Medium, welches sich im Schöpfraum befindet, sind häufig Gase enthalten, die Schmiermittel verändern und die eventuell Staubpartikel mit sich führen. Darüber hinaus ist in den zu fördernden Medien häufig Kondensat enthalten. Durch diese Stoffe verändern sich die Schmiermittel chemisch, wodurch diese nach relativ kurzer Zeit getauscht werden müssen, wodurch es wiederum zu einem Betriebsausfall der Pumpe kommt.From practice piston ring seals are known, which are arranged in the shaft passage. However, piston ring seals have the disadvantage that impurities in the gas to be conveyed, for example dust particles, damage the piston ring seals. In the medium to be pumped, which is located in the pump chamber, often contain gases that change lubricants and possibly carry dust particles with it. In addition, condensate is often contained in the media to be conveyed. Through these substances, the lubricants change chemically, so they must be replaced after a relatively short time, which in turn comes to a breakdown of the pump.

Zum Stand der Technik ( DE 195 44 994 A1 ) gehört eine Mehrwellenvakuumpumpe, mit der eine wirkungsvolle Abdichtung zwischen Getriebe, beziehungsweise Lagerräumen und Schöpfräumen erzielt werden soll. Diese Pumpe sieht zwei Lippendichtungen vor, so dass die Lippen der einen Dichtung in Richtung Schöpfraum und die Lippen der anderen Dichtung in Richtung Getriebe beziehungsweise Lagerraum weisen. Hierdurch ergeben sich eine Reihe von Vorteilen, beispielsweise dass Verschmutzungen in den Ecken, Hinterschneidungen und Vertiefungen im unmittelbaren Dichtbereich der Dichtungen durch Ansammeln von Stoffen aus dem Schöpfraum und aus dem Getriebe, beziehungsweise Lagerraum vermieden werden. Diese zum Stand der Technik gehörende Dichtungsanordnung kann weiter verbessert werden.The prior art ( DE 195 44 994 A1 ) includes a multi-shaft vacuum pump, with which an effective seal between the gearbox, or storage rooms and storage spaces is to be achieved. This pump provides two lip seals so that the lips face one seal towards the suction chamber and the lips of the other seal towards the gearbox or storage space. This results in a number of advantages, for example, that contamination in the corners, undercuts and depressions in the immediate sealing region of the seals by accumulating substances from the pump chamber and from the transmission, or storage space can be avoided. This prior art seal assembly can be further improved.

Weiterhin gehört zum Stand der Technik ( EP 0 859 154 A1 ) ein Schraubenverdichter mit einer Wellenabdichtung. Der Schraubenverdichter sieht ebenfalls zwei Lippendichtungen vor. Zwischen den Lippendichtungen ist ein Gaseinlass vorgesehen. Beidseitig neben den Lippendichtungen ist jeweils eine Spiraldichtung angeordnet. Die beiden Lippendichtungen mit dem Sperrgaseinlass dazwischen haben die Aufgabe, Öl, welches zum Schmieren eines Kugellagers auf der einen Seite, und ein Fluid, beispielsweise Wasser, welches zum Schmieren des Rotors auf der anderen Seite dient, voneinander zu trennen, damit sich das Öl nicht mit dem Wasser vermischt. Diese Dichtungsanordnung weist vier Dichtelemente auf und ist aus diesem Grunde sehr aufwendig.Furthermore belongs to the state of the art ( EP 0 859 154 A1 ) a screw compressor with a shaft seal. The screw compressor also provides two lip seals. Between the lip seals a gas inlet is provided. On both sides next to the lip seals a spiral seal is arranged in each case. The two lip seals with the sealing gas inlet in between have the task of oil, which is used to lubricate a ball bearing on the one hand, and a fluid, such as water, which serves to lubricate the rotor on the other side, to separate so that the oil does not mixed with the water. This seal assembly has four sealing elements and is very expensive for this reason.

Das der Erfindung zugrunde liegende technische Problem besteht darin, eine Vakuumpumpe anzugeben, bei der eine Abdichtung der Wellendurchführung vorgesehen ist, die unempfindlich gegen Gase, die Schmiermittel verändern, Staubpartikel und/oder Kondensat ist.The technical problem underlying the invention is to provide a vacuum pump in which a seal of the shaft passage is provided, which is insensitive to gases that change lubricant, dust particles and / or condensate.

Dieses technische Problem wird durch eine Vakuumpumpe mit den Merkmalen gemäß Anspruch 1 gelöst.This technical problem is solved by a vacuum pump having the features according to claim 1.

Die erfindungsgemäße Vakuumpumpe mit wenigstens einer ein- oder mehrstückigen Welle, welche mit wenigstens einer Lageranordnung drehbar gelagert ist, einem Schöpfraum und einem Lager- oder Getrieberaum zur Anordnung der wenigstens einen Lageranordnung mit einer Dichtungsanordnung zur Durchführung der ein- oder mehrstückigen Welle zwischen Schöpfraum und Lager- oder Getrieberaum, wobei die Dichtungsanordnung zur Durchführung der wenigstens einen ein- oder mehrstückigen Welle eine erste Dichtung aufweist, die als Lippendichtung ausgebildet ist, wobei eine zweite Dichtungsanordnung vorgesehen ist, zeichnet sich dadurch aus, dass in dem Raum zwischen der ersten Lippendichtung und der zweiten Dichtungsanordnung ein Sperrgaseinlass vorgesehen ist und dass die zweite Dichtungsanordnung wenigstens eine Kolbenringdichtung aufweist.The vacuum pump according to the invention with at least one single- or multi-piece shaft which is rotatably mounted with at least one bearing assembly, a pump chamber and a bearing or gear room for arranging the at least one bearing assembly with a seal assembly for performing the single or multi-piece shaft between pump chamber and bearing - Or gear chamber, wherein the seal assembly for carrying out the at least one single- or multi-piece shaft having a first seal, which is formed as a lip seal, wherein a second sealing arrangement is provided, characterized in that in the space between the first lip seal and the second sealing arrangement, a sealing gas inlet is provided and that the second sealing arrangement has at least one piston ring seal.

Die erfindungsgemäße Vakuumpumpe weist den Vorteil auf, dass die Lippendichtung minimale Spalte mit hohem Drosseleffekt für das Sperrgas aufweist, das heißt einen geringen Sperrgasstrom trotz eines hohen Druckes gestattet.The vacuum pump according to the invention has the advantage that the lip seal has minimal gaps with high throttling effect for the sealing gas, that is, allows a small sealing gas flow despite a high pressure.

Die erfindungsgemäße Anordnung weist den Vorteil auf, dass die Lippendichtung eine gute Abdichtung gegen Staubpartikel, Kondensat und Gase gewährleistet. Kolbenringdichtungen, beispielsweise in Rechteckform arbeiten relativ unabhängig von der Drehzahl und gestatten einen im Vergleich zur Lippendichtung schnelleren Druckausgleich (geringerer Drosseleffekt). Darüber hinaus verfügen diese Ringdichtungen über Notlaufeigenschaften und arbeiten verschleißarm und sie haben weniger Wärmeeintrag und eine geringere Leistungsaufnahme.The arrangement according to the invention has the advantage that the lip seal ensures a good seal against dust particles, condensate and gases. Piston ring seals, for example in a rectangular shape, operate relatively independently of the rotational speed and permit a pressure equalization which is faster compared to the lip seal (lower throttle effect). In addition, these ring seals have emergency running properties and work wear-resistant and they have less heat input and a lower power consumption.

Die erfindungsgemäße Vakuumpumpe weist den Vorteil auf, dass gegenüber dem Stand der Technik eine bessere Abdichtung durch höhere Sperrgasdrücke in Folge eines erhöhten Drosseleffektes erzielt wird. Dadurch, dass ein Sperrgaseinlass zwischen der ersten Lippendichtung und der zweiten Dichtungsanordnung vorgesehen ist, kann dieser relativ kleine Raum mit Sperrgas gefüllt werden. Der Sperrgasbedarf ist gegenüber dem Stand der Technik verringert, da gemäß dem Stand der Technik in der Regel der gesamte Lagerraum mit Sperrgas gefüllt wurde.The vacuum pump according to the invention has the advantage that over the prior art, a better seal is achieved by higher sealing gas pressures due to an increased throttle effect. By providing a barrier gas inlet between the first lip seal and the second seal assembly, this relatively small space can be filled with barrier gas. The sealing gas requirement is reduced compared with the prior art since, according to the prior art, the entire storage space has generally been filled with sealing gas.

Trotz eines minimalen Sperrgasstroms in Richtung Schöpfraum erhält man einen verbesserten Enddruck des Pumpstandes. Darüber hinaus erfolgt lediglich eine minimale Verdünnung oder Verunreinigung des Prozessgases mit Sperrgas, insbesondere wenn gemäß einer bevorzugten Ausführungsform die erste Lippendichtung schöpfraumseitig angeordnet ist.Despite a minimal sealing gas flow in the direction of the suction chamber, an improved end pressure of the pumping station is obtained. In addition, only a minimal dilution or contamination of the process gas with sealing gas, especially when according to a preferred embodiment, the first lip seal is arranged on the pumping chamber side.

Wie schon ausgeführt, arbeiten die Kolbenringdichtungen, beispielsweise Rechteckringe relativ unabhängig von der Drehzahl und verfügen über Notlaufeigenschaften.As already stated, the piston ring seals, for example rectangular rings, work relatively independently of the rotational speed and have runflat properties.

Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung besteht die zweite Dichtungsanordnung aus zwei Kolbenringdichtungen. Zwei Kolbenringdichtungen weisen gegenüber einer Kolbenringdichtung den Vorteil auf, dass die Dichtwirkung verbessert ist.According to a further advantageous embodiment of the invention, the second sealing arrangement consists of two piston ring seals. Two piston ring seals have the advantage over a piston ring seal that the sealing effect is improved.

Eine weitere vorteilhafte Ausführungsform der Erfindung sieht vor, dass die Kolbenringdichtungen nebeneinanderliegend mit Abstand zueinander angeordnet sind. Durch diese Ausführungsform ist ein ausreichender Dichteffekt erzielbar.A further advantageous embodiment of the invention provides that the piston ring seals are arranged adjacent to each other at a distance from each other. By this embodiment, a sufficient sealing effect can be achieved.

Wie schon ausgeführt, ist es vorteilhaft, wenn die Lippenrichtung schöpfraumseitig angeordnet ist. Hierdurch ist gewährleistet, dass Verunreinigungen in dem zu fördernden Medium, welches sich im Schöpfraum befindet, nicht in den Dichtungsraum oder in Richtung Lager- oder Getrieberaum gelangen. Hierdurch wird Schmiermittel im Lager- oder Getrieberaum nicht oder nicht so schnell verunreinigt, so dass das Schmiermittel eine längere Lebensdauer aufweist.As already stated, it is advantageous if the lip direction is arranged on the pump chamber side. This ensures that impurities in the medium to be pumped, which is located in the pump chamber, do not enter the seal chamber or in the direction of the bearing or gear compartment. As a result, lubricant in the bearing or gear chamber is not or not so quickly contaminated, so that the lubricant has a longer life.

Die zweite Dichtungsanordnung ist vorteilhaft lagerraumseitig angeordnet. Diese Dichtungsanordnung dient in erster Linie dazu, einen relativ kleinen Zwischenraum mit dem Sperrgaseinlass zu bilden, so dass nicht der gesamte Lager- oder Getrieberaum mit Sperrgas gefüllt werden muss. Ist der gesamte Lager- oder Getrieberaum mit Sperrgas zu füllen, wie es gemäß dem Stand der Technik vorgesehen ist, ist der Verbrauch an Sperrgas sehr hoch.The second sealing arrangement is advantageously arranged on the storage space side. This sealing arrangement serves primarily to form a relatively small gap with the sealing gas inlet, so that not the entire bearing or gear chamber must be filled with sealing gas. If the entire bearing or gear chamber to fill with sealing gas, as provided in the prior art, the consumption of sealing gas is very high.

Das hinter der Lippendichtung angeordnete Sperrgas baut in Richtung des Schöpfraumes einen Druck auf, so dass aus dem Schöpfraum weniger Gas in Richtung Lagerraum wandert. Die Lippendichtung ist vorteilhaft derart angeordnet, dass durch einen höheren Druck im Schöpfraum die Lippendichtung gegen die Welle oder eine Buchse auf der Welle gedrückt wird.The sealing gas arranged behind the lip seal builds up a pressure in the direction of the pumping chamber, so that less gas moves from the pumping chamber in the direction of the storage space. The lip seal is advantageously arranged such that the lip seal is pressed against the shaft or a bushing on the shaft by a higher pressure in the pump chamber.

Gemäß einer vorteilhaften Ausführungsform der Erfindung ist eine Lippe der Lippendichtung in Richtung Schöpfraum weisend angeordnet. Hierdurch wird erreicht, dass bei einem höheren Druck im Schöpfraum gegenüber dem Raum mit dem Sperrgas die Lippendichtung gegen Welle oder Buchse gedrückt wird und hierdurch die Drosselwirkung erhöht wird.According to an advantageous embodiment of the invention, a lip of the lip seal is arranged pointing in the direction of the suction chamber. This ensures that at a higher pressure in the pump chamber with respect to the space with the sealing gas, the lip seal is pressed against shaft or socket and thereby the throttle effect is increased.

Eine mögliche Ausführungsform der Erfindung sieht vor, dass die Welle oder die Buchse wenigstens im Bereich der Anlage der Lippendichtung beschichtet ist. Hierdurch besteht die Möglichkeit, die Reibung zwischen Welle oder Buchse und der Lippendichtung zu verringern, so dass weniger Wärme erzeugt wird.A possible embodiment of the invention provides that the shaft or the bush is coated at least in the region of the system of the lip seal. This makes it possible to reduce the friction between the shaft or bushing and the lip seal, so that less heat is generated.

Die Lippendichtung weist den Vorteil auf, dass sie prozessgasdicht durch das Sperrgas wird. Der Sperrgasstrom kühlt darüber hinaus die Lippendichtung, die sich im Betrieb durch die Reibung erhitzt.The lip seal has the advantage that it is process gas tight by the sealing gas. The barrier gas stream also cools the lip seal, which heats up during operation due to friction.

Mit der erfindungsgemäßen Anordnung ist es möglich, die Sperrgasmenge auf circa ein Zehntel im Vergleich zum Stand der Technik oder noch weniger zu reduzieren.With the arrangement according to the invention, it is possible to reduce the amount of sealing gas to about one tenth compared to the prior art or even less.

Eine weitere vorteilhafte Ausführungsform der Erfindung sieht vor, dass eine Gegenlauffläche der Lippendichtung einen Drall aufweist. Hierdurch wird eine entsprechende Gasströmung erzielt, so dass die Drosselwirkung der Lippendichtung noch verstärkt wird.A further advantageous embodiment of the invention provides that a mating surface of the lip seal has a twist. This will be a corresponding Gas flow achieved, so that the throttling effect of the lip seal is reinforced.

Die erfindungsgemäße Vakuumpumpe ist vorteilhaft als Wälzkolbenpumpe ausgebildet. Die Erfindung ist jedoch auch bei anderen Pumpen, beispielsweise bei Turbomolekularpumpen oder dergleichen, einsetzbar. Einsatzgebiete sind Wellendurchführungen durch Schöpfraum und Lagerraum.The vacuum pump according to the invention is advantageously designed as Roots piston pump. However, the invention can also be used with other pumps, for example turbomolecular pumps or the like. Fields of application are shaft feedthroughs through the pump chamber and storage room.

Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der mehrere Ausführungsbeispiele einer erfindungsgemäßen Vakuumpumpe mit Wellendurchführung nur beispielhaft dargestellt sind. In der Zeichnung zeigen:

Fig. 1
einen Schnitt durch eine Wälzkolbenvakuumpumpe;
Fig. 2
einen Längsschnitt durch eine erfindungsgemäße Wellendurchführung.
Further features and advantages of the invention will become apparent from the accompanying drawings, in which several embodiments of a vacuum pump according to the invention with shaft passage are shown only by way of example. In the drawing show:
Fig. 1
a section through a Roots vacuum pump;
Fig. 2
a longitudinal section through a shaft passage according to the invention.

Fig. 1 zeigt eine Wälzkolbenvakuumpumpe mit einem Gehäuse 1. Im Gehäuse 1 der Vakuumpumpe 100 befindet sich ein Pumpraum 2. Der Pumpraum 2 wird von einer ersten Welle 10 und einer zweiten Welle 14 durchsetzt. Von Wellenachsen ist der Pumpraum durch ein erstes Lagerschild 4 und ein zweites Lagerschild 5 begrenzt. In dem Bereich der Wellen 10, 14, der den Pumpraum 2 durchsetzt, sind ein erster Kolben 12 mit der ersten Welle 10 und ein zweiter Kolben 16 mit der zweiten Welle 14 verbunden. Fig. 1 shows a Roots vacuum pump with a housing 1. In the housing 1 of the vacuum pump 100 is a pump chamber 2. The pump chamber 2 is penetrated by a first shaft 10 and a second shaft 14. Shaft axes of the pump chamber is limited by a first bearing plate 4 and a second bearing plate 5. In the region of the shafts 10, 14, which passes through the pump chamber 2, a first piston 12 with the first shaft 10 and a second piston 16 with the second shaft 14 are connected.

Beide Wellen 10, 14 stützen sich durch Lageranordnungen drehbar in den Lagerschilden 4, 5 ab. Im ersten Lagerschild 4 befinden sich ein Loslager 22 der ersten Welle 10 und ein Loslager 26 der zweiten Welle 14. Im zweiten Lagerschild 5 befinden sich ein Festlager 24 der ersten Welle 10 und ein Festlager 28 der zweiten Welle 14.Both shafts 10, 14 are supported by bearing arrangements rotatably in the end shields 4, 5 from. In the first bearing plate 4 are a floating bearing 22 of the first shaft 10 and a floating bearing 26 of the second shaft 14. In the second bearing plate 5 are a fixed bearing 24 of the first shaft 10 and a bearing 28 of the second shaft 14th

Auf einer dem Pumpraum 2 abgewandten Seite des ersten Lagerschildes 4 ist ein Getrieberaum 3 vorgesehen, in den die Enden von erster und zweiter Welle 10, 14 hineinragen. Auf den Wellenenden sitzen ein erstes und ein zweites Synchronrad 18, 20, welches die Drehung der ersten Welle 10 auf die zweite Welle 14 überträgt, so dass diese sich mit gleicher Drehzahl, aber gegenläufig dreht. Eine erste Schleuderscheibe 30 taucht in einen Schmiermittelvorrat und verteilt das Schmiermittel im Getrieberaum 3.On a side facing away from the pump chamber 2 of the first bearing plate 4, a gear chamber 3 is provided, in which the ends of the first and second shafts 10, 14 protrude. On the shaft ends sit a first and a second synchronous wheel 18, 20, which transmits the rotation of the first shaft 10 to the second shaft 14 so that it rotates at the same speed, but in opposite directions. A first centrifugal disc 30 dips into a lubricant reservoir and distributes the lubricant in the gear chamber 3.

Auf der dem Pumpraum 2 abgewandten Seite des zweiten Lagerschilds 5 befindet sich ein Zwischenraum 8. Dieser wird von der ersten Welle 10 durchsetzt, während die zweite Welle 14 in ihm endet. Auf dem Ende der zweiten Welle 14 ist eine zweite Schleuderscheibe 32 angeordnet, die ebenfalls in einem Schmiermittelvorrat eintaucht und eine Verteilung des Schmiermittels im Zwischenraum bewirkt.On the side facing away from the pump chamber 2 of the second bearing plate 5 is a gap 8. This is penetrated by the first shaft 10, while the second shaft 14 terminates in it. On the end of the second shaft 14, a second centrifugal disc 32 is arranged, which also dips into a lubricant reservoir and causes a distribution of the lubricant in the intermediate space.

Das den Zwischenraum durchsetzende Ende der ersten Welle 10 endet in einem Motorgehäuse 6. Dort sind auf dem Wellenende Innenmagnete 44 befestigt. Das Wellenende mit den Innenmagneten 44 ist von einem Spalttopf 40 umgeben, der mittels eines Spalttopfflansches am Gehäuse 6 luftdicht angebracht ist. Ein Magnetträger 48 trägt Außenmagnete 46, die mit den Innenmagneten 44 kraft- und drehungsübertragend zusammenwirken. Der Magnetträger 48 ist auf einer Motorwelle 50 angeordnet, welche in einem Motorlager 52 gelagert ist. Die ebenfalls auf der Motorwelle 50 angeordneten Motormagnete 54 wirken mit Spulen 56 zusammen, um elektrische Energie in mechanische Drehung umzusetzen. Spulen und Motormagnete bilden den Antrieb der Wälzkolbenpumpe 100.The intermediate space passing through the end of the first shaft 10 terminates in a motor housing 6. There are mounted on the shaft end inner magnets 44. The shaft end with the inner magnet 44 is surrounded by a split pot 40 which is mounted airtight by means of a split-top flange on the housing 6. A magnet carrier 48 carries outer magnets 46, which cooperate with the inner magnet 44 to transmit force and rotation. The magnet carrier 48 is arranged on a motor shaft 50, which is mounted in an engine mount 52. The motor magnets 54, which are likewise arranged on the motor shaft 50, interact with coils 56 in order to convert electrical energy into mechanical rotation. Coils and motor magnets form the drive of the Roots pump 100.

In den Lagerschilden 4, 5 sind Wellendurchführungen 34, 36, 38, 42 vorgesehen, die in Fig. 1 nicht näher dargestellt sind.In the bearing plates 4, 5 shaft passages 34, 36, 38, 42 are provided, which in Fig. 1 are not shown in detail.

Die Wellendurchführungen 34, 36, 38, 42 sind gleich aufgebaut. Die Wellendurchführung 34 ist in Fig. 2 dargestellt.The shaft passages 34, 36, 38, 42 are of identical construction. The shaft passage 34 is in Fig. 2 shown.

Auf der Welle 14 ist eine Buchse 58 angeordnet. In der Fig. 2 ist links der Schöpfraum dargestellt und rechts der Getrieberaum 3. Es könnte sich in der Fig. 2 auch um die Wellendurchführung 38 oder 42 handeln. Dann wäre links der Schöpfraum 2 und rechts der Zwischenraum 8 angeordnet.On the shaft 14, a bush 58 is arranged. In the Fig. 2 The pump chamber is shown on the left and the gear compartment 3 on the right. It could be in the Fig. 2 also act around the shaft leadthrough 38 or 42. Then the pump chamber 2 would be on the left and the intermediate space 8 on the right.

Die Wellendurchführung 34 weist zum einen schöpfraumseitig eine Lippendichtung 60 auf und getrieberaum- oder lagerraumseitig zwei Kolbenringdichtungen 62, 64. Die Kolbenringdichtungen 62, 64 sind als rechteckförmige Dichtungen ausgebildet und sind entsprechend in rechteckförmigen Nuten 66 der Wellendurchführung 34 angeordnet.The shaft leadthrough 34 has on the one side a lip seal 60 on the pump chamber side and two piston ring seals 62, 64 on the piston chamber or piston chamber side. The piston ring seals 62, 64 are designed as rectangular seals and are correspondingly arranged in rectangular grooves 66 of the shaft passage 34.

Zusätzlich ist ein Sperrgaseinlass 68 vorgesehen, um einen Raum 70, der zwischen Lippendichtung 60 und Kolbenringdichtung 62 liegt, mit Sperrgas zu füllen.In addition, a barrier gas inlet 68 is provided to fill a space 70 between lip seal 60 and piston ring seal 62 with barrier gas.

Die Lippendichtung 60, die schöpfraumseitig angeordnet ist, ist unempfindlich gegenüber Staubpartikeln und weist eine gute Drosselwirkung gegenüber Kondensat und Gasen auf, die Bestandteil des zu fördernden Mediums in dem Schöpfraum 2 sind.The lip seal 60, which is arranged on the pump chamber side, is insensitive to dust particles and has a good throttling action with respect to condensate and gases, which form part of the medium to be pumped in the pump chamber 2.

Das Sperrgas hat den Vorteil, dass es darüber hinaus Gas aus dem Schöpfraum 2 daran hindert, in Richtung Lager- oder Getrieberaum 3 zu wandern.The sealing gas has the advantage that it also prevents gas from the pumping chamber 2 from wandering in the direction of bearing or gear chamber 3.

Der Raum 70 ist relativ klein ausgebildet im Vergleich zu dem Getriebe- und Lagerraum 3, so dass der Raum 70, der mit Sperrgas gefüllt wird, ein kleineres Volumen als der Getriebe- oder Lagerraum 3 aufweist. Hierdurch wird der Verbrauch an Sperrgas deutlich reduziert.The space 70 is relatively small compared to the transmission and storage space 3, so that the space 70, which is filled with sealing gas, has a smaller volume than the transmission or storage space 3. As a result, the consumption of sealing gas is significantly reduced.

Die Lippendichtung 60 weist eine sehr gute Drosselwirkung auf. Hinter der Lippendichtung 60 in Richtung Lager- oder Getrieberaum 3 ist das Sperrgas angeordnet, welches in Richtung des Schöpfraumes einen Druck aufbaut, so dass aus dem Schöpfraum wenig Gas in Richtung Lager- oder Getrieberaum 3 wandert.The lip seal 60 has a very good throttle effect. Behind the lip seal 60 in the direction of bearing or gear chamber 3, the sealing gas is arranged, which builds up a pressure in the direction of the pump chamber, so that little gas migrates from the pump chamber in the direction of bearing or gear chamber 3.

Die Lippendichtung 60 ist derart angeordnet, dass durch den höheren Druck im Schöpfraum 2 die Lippendichtung 60 gegen die Buchse 58 gedrückt wird.The lip seal 60 is arranged such that the lip seal 60 is pressed against the bush 58 due to the higher pressure in the pump chamber 2.

Die Kolbenringe 62, 64 begrenzen auf der anderen Seite, das heißt lager- und getrieberaumseitig den Raum, der mit Sperrgas gefüllt ist. Die Kolbenringdichtungen 62, 64 erzeugen die erforderliche Drosselwirkung.The piston rings 62, 64 delimit on the other side, that is, the storage and drive chamber side, the space which is filled with sealing gas. The piston ring seals 62, 64 produce the required throttle effect.

Die Kolbenringe 62, 64 weisen darüber hinaus Notlaufeigenschaften auf. Sie weisen weiterhin den Vorteil auf, dass sie einfach zu montieren sind.The piston rings 62, 64 also have emergency running properties. They also have the advantage that they are easy to assemble.

Der Sperrgasstrom kühlt die Lippendichtung 60, da durch Drehung der Welle 14 Reibungswärme entsteht.The barrier gas stream cools the lip seal 60, since by rotation of the shaft 14 frictional heat is generated.

Durch die erfindungsgemäße Anordnung wird wirksam vermieden, dass Staubpartikel, Gase oder Kondensat aus dem Schöpfraum 2 in den Getriebe- und Lagerraum 3 gelangen, in dem sich Schmiermittel befinden, die sich chemisch durch Kondensat und Gase verändern oder durch Staubpartikel verunreinigt werden können.By the arrangement according to the invention is effectively avoided that dust particles, gases or condensate from the pump chamber 2 in the transmission and storage room 3 reach, in which there are lubricants that change chemically by condensate and gases or can be contaminated by dust particles.

Eine Lippe 72 der Lippendichtung ist in Richtung Schöpfraum 2 weisend angeordnet. Hierdurch ist gewährleistet, dass Gas aus dem Schöpfraum 2, welches in Richtung des Raumes 70 und damit in Richtung des Getriebe- oder Lagerraumes 3 gelangen möchte, die Lippe 72 der Lippendichtung 60 an die Welle 14 oder Buchse 58 presst, wodurch die Drosselwirkung der Lippendichtung 60 erhöht wird.A lip 72 of the lip seal is arranged pointing in the direction of the suction chamber 2. This ensures that gas from the pump chamber 2, which would like to reach in the direction of the space 70 and thus in the direction of the transmission or storage space 3, the lip 72 of the lip seal 60 presses against the shaft 14 or bushing 58, whereby the throttling effect of the lip seal 60 is increased.

Bezugszahlenreference numerals

11
Gehäusecasing
22
Pumpenraumpump room
33
Getrieberaumgear compartment
44
Lagerschildend shield
55
Lagerschildend shield
66
Motorgehäusemotor housing
88th
Zwischenraumgap
1010
Wellewave
1212
Kolbenpiston
1414
Wellewave
1616
Kolbenpiston
1818
SynchronradSynchronrad
2020
SynchronradSynchronrad
2222
Loslagermovable bearing
2424
Festlagerfixed bearing
2626
Loslagermovable bearing
2828
Festlagerfixed bearing
3030
Schleuderscheibeslinger
3232
Schleuderscheibeslinger
3434
WellendurchführungShaft bushing
3636
WellendurchführungShaft bushing
3838
WellendurchführungShaft bushing
4040
Spalttopfcontainment shell
4242
WellendurchführungShaft bushing
4444
Innenmagneteinside magnets
4646
Außenmagneteoutside magnets
4848
Magnetträgermagnet carrier
5050
Motorwellemotor shaft
5252
Motorlagermotor bearings
5454
Motormagnetemotor magnets
5656
SpulenDo the washing up
5858
BuchseRifle
6060
Lippendichtunglip seal
6262
KolbenringdichtungPiston ring seal
6464
KolbenringdichtungPiston ring seal
6666
Nutengroove
6868
SperrgaseinlassSealing gas inlet
7070
Raumroom
7272
Lippelip
100100
Pumpepump

Claims (11)

  1. A vacuum pump with at least one single- or multiple-part shaft (10), which is rotatably mounted by at least one bearing arrangement (22, 24, 26, 28), a pump chamber (2) and a bearing and/or gear chamber (3) for the arrangement of the at least one bearing arrangement (22, 24, 26, 28), with a sealing arrangement (60, 62, 64) for leading through the single- or multiple-part shaft (10) between pump chamber (2) and bearing or gear chamber (3), wherein the sealing arrangement (60, 62, 64) for leading through the single- or multiple-part shaft (10, 14) comprises a first seal, which is formed as a lip seal (60), wherein there is provided a second sealing arrangement (62, 64),
    characterised in that
    in a space (70) between the first lip seal (60) and the second sealing arrangement (62, 64) there is provided a sealing gas inlet and in that the second sealing arrangement (62, 64) comprises at least one piston ring seal (62, 64).
  2. A vacuum pump according to claim 1, characterised in that the second sealing arrangement is formed of two piston ring seals (62, 64).
  3. A vacuum pump according to either one of the preceding claims, characterised in that the piston ring seals (62, 64) are arranged mutually adjacent at a spacing from each other.
  4. A vacuum pump according to any one of the preceding claims, characterised in that the lip seal (60) is arranged at the vacuum chamber side.
  5. A vacuum pump according to any of the preceding claims, characterised in that the second sealing arrangement (62, 64) is arranged at the bearing or gear chamber side.
  6. A vacuum pump according to any of the preceding claims, characterised in that the lip seal (60) is configured to abut the shaft (10, 14) or a bushing (58) arranged on the shaft (10, 14).
  7. A vacuum pump according to any of the preceding claims, characterised in that a lip (72) of the lip seal (60) is arranged to be oriented in the direction of the vacuum chamber (2).
  8. A vacuum pump according to any of the preceding claims, characterised in that the shaft (10, 14) is coated at least in the region of the abutting of the lip seal (60).
  9. A vacuum pump according to claim 6, characterised in that the bushing (58) is coated at least in the region of the abutting of the lip seal (60).
  10. A vacuum pump according to any of the preceding claims, characterised in that a counter face of the lip seal (60) comprises a twist.
  11. A vacuum pump according to any of the preceding claims, characterised in that the vacuum pump (100) is formed as a Roots pump.
EP15151656.4A 2014-05-28 2015-01-19 Vacuum pump Active EP2949938B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014107536.6A DE102014107536A1 (en) 2014-05-28 2014-05-28 vacuum pump

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EP2949938B1 true EP2949938B1 (en) 2018-10-03

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210372404A1 (en) * 2019-01-10 2021-12-02 Raymond Zhou Shaw Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11619231B1 (en) * 2021-12-28 2023-04-04 Elvac Co., Ltd Complete bearing-sealed root vacuum pump system capable of promoting vacuum ability of condenser of power plant

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Publication number Priority date Publication date Assignee Title
DE102016218239A1 (en) 2016-09-22 2018-03-22 MTU Aero Engines AG Sealing arrangement for a turbine intermediate housing of a gas turbine

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Publication number Priority date Publication date Assignee Title
DE19544994A1 (en) * 1995-12-02 1997-06-05 Balzers Pfeiffer Gmbh Multiple-shaft vacuum pump with gears divided off from pumping space
BE1010915A3 (en) * 1997-02-12 1999-03-02 Atlas Copco Airpower Nv DEVICE FOR SEALING A rotor shaft AND SCREW COMPRESSOR PROVIDED WITH SUCH DEVICE.
GB9708397D0 (en) * 1997-04-25 1997-06-18 Boc Group Plc Improvements in vacuum pumps
DE102008060540A1 (en) 2008-12-04 2010-06-10 Pfeiffer Vacuum Gmbh Roots
DE102010045881A1 (en) * 2010-09-17 2012-03-22 Pfeiffer Vacuum Gmbh vacuum pump

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210372404A1 (en) * 2019-01-10 2021-12-02 Raymond Zhou Shaw Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
US11619231B1 (en) * 2021-12-28 2023-04-04 Elvac Co., Ltd Complete bearing-sealed root vacuum pump system capable of promoting vacuum ability of condenser of power plant

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