EP0942172B1 - Vacuum pump with multiple driven shafts - Google Patents
Vacuum pump with multiple driven shafts Download PDFInfo
- Publication number
- EP0942172B1 EP0942172B1 EP99101291A EP99101291A EP0942172B1 EP 0942172 B1 EP0942172 B1 EP 0942172B1 EP 99101291 A EP99101291 A EP 99101291A EP 99101291 A EP99101291 A EP 99101291A EP 0942172 B1 EP0942172 B1 EP 0942172B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- pump
- shaft
- vacuum pump
- bell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/023—Lubricant distribution through a hollow driving shaft
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
Definitions
- the invention relates to a multi-shaft vacuum pump according to the preamble of first claim.
- Multi-shaft vacuum pumps of the type described here are considered dry Pump systems especially in the chemical industry and in semiconductor technology a wide range of applications. Dry pump systems are characterized by that their scoops no oil for lubrication and sealing, reduction of Dead volume or included for other purposes. This enables them to to create a completely hydrocarbon-free vacuum. To achieve optimal Pump properties can have several pump stages connected in series in one Housing.
- the drive motor is mounted outside the pump housing.
- a shaft bushing For that Coupling to the main shaft requires a shaft bushing.
- the shaft bushing Corresponding When using the pump, the shaft bushing must have a more or less expensive sealing.
- GB 809,445 describes a multi-shaft vacuum pump, where two rotors work together in a pump housing. Through their Non-contact movement creates scoops in which the pumped Medium is promoted.
- the rotor has a bell-shaped design.
- the drive system is designed as an external rotor motor, such that its Rotor parts are attached to the inner surface of the bell-shaped rotor and the stator parts are fixedly mounted opposite those within the bell-shaped rotor are.
- the gas is conveyed perpendicular to the axis direction.
- There are bearings and gear components are not separated from the pumping chamber, so that dry gas production is excluded.
- the invention has set itself the task of a dry multi-shaft vacuum pump to develop, which no longer has the disadvantages mentioned. In front everything should be aimed at a compact design with optimal pump properties which is space-saving and enables easy assembly. Other components, such as seals, sealing gas devices and oil supplies, are to be optimally adapted to the new pump concept.
- the rotors fill up a large part of the pump volume. This room is not used due to the massive construction of the rotors since then.
- Through the bell-shaped design of at least one rotor it becomes possible to drive the system fully integrated into the interior of a rotor and the one that has not been used since Recycle space. This reduces the geometric dimensions of the Pump considerably.
- the bearings are encapsulated from the scooping area, and no shaft bushings are required.
- the Supply pressure is above the range in which the sealing material blocks occurs. Because the gas is distributed in the seal and on the internal surface flows out into the gap between the sealing body and the rotor, creates a gas cushion, which causes gas exchange between the gearbox and Scooping space is prevented.
- the pump according to the invention has a compact design with optimal pump properties Construction, which is space-saving and enables easy assembly.
- Other components such as power supply, seals, coolant supply, Purge gas equipment and oil supply were the pump concept optimally adapted.
- the one wave is a working wave, hereinafter referred to as the main rotor ", and the second shaft as the control shaft, hereinafter Called "control rotor”.
- Figure 1 shows a cross section through the pump system.
- Figure 2 shows a section along the two rotors of a four-stage pump.
- a pump housing 1 which has an intake flange 2 and a gas outlet opening 3 is provided, the main rotor 4, the control rotor 5 in bearings 31, 33 and 32, 34 worn.
- the outer profile of the main rotor 4 is designed that it has two working pistons 6 which rotate in the scooping chamber 8.
- the profile of the control rotor 5 corresponds to these working pistons 6 two recesses 7.
- the rotor parts 13 are on the inner surface of the bell-shaped Main rotor 4 attached.
- the stator parts 12 of the drive system are fixedly mounted inside the rotor opposite the rotor shaft 13. Camps 31, 33 and 32, 34 are mounted on pins 9 and 10 inside the rotors. These pins are firmly connected to the housing 1 via flanges 17 and 18.
- a gear arrangement consisting of gears 14 and 15, which in Gearbox 19 are housed, the rotor movement of the main rotor 4th transferred to the control rotor 5.
- non-contact seals 22 available. These are called threaded shaft pumps designed to counteract the backflows between the stages.
- sealing gas seals are made of porous Material and allow through the material selection and shape a metered Supply of sealing gas.
- Oil is delivered to the bearing points 31, 33 and 32, 34 with the help of Threaded shaft pumps 20 and 21, which on the inside of the control rotor 5th are attached and designed symmetrically so that they are in the axial direction pump in the opposite direction and the oil is discharged in the middle. About drilling 42 and 43 in the pins 9 and 10, the oil is fed to the bearings.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Die Erfindung betrifft eine Mehrwellenvakuumpumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a multi-shaft vacuum pump according to the preamble of first claim.
Mehrwellenvakuumpumpen der hier beschriebenen Art finden als trockene Pumpsysteme besonders in der chemischen Industrie und in der Halbleitertechnik ein breites Einsatzgebiet. Trockene Pumpsysteme zeichnen sich dadurch aus, daß ihre Schöpfräume kein Öl zur Schmierung und Abdichtung, Reduzierung von Totvolumen oder zu sonstigen Zwecken enthalten. Dadurch sind sie in der Lage, ein völlig kohlenwasserstofffreies Vakuum zu erzeugen. Zum Erreichen optimaler Pumpeigenschaften können mehrere, in Serie geschaltete Pumpstufen, in einem Gehäuse untergebracht sein.Multi-shaft vacuum pumps of the type described here are considered dry Pump systems especially in the chemical industry and in semiconductor technology a wide range of applications. Dry pump systems are characterized by that their scoops no oil for lubrication and sealing, reduction of Dead volume or included for other purposes. This enables them to to create a completely hydrocarbon-free vacuum. To achieve optimal Pump properties can have several pump stages connected in series in one Housing.
Dem Stand der Technik entsprechend, rotieren bei Mehrwellenvakuumpumpen zwei oder mehr Kolben in einem Pumpengehäuse. Die Kolben befinden sich auf Wellen, die in Lagerschilden beiderseits der Wellenenden oder auch nur auf einer Seite der Wellenenden fixiert sind. Die Drehbewegung der Kolben wird über Getriebe so synchronisiert, daß ein gleichmäßiges Abwälzen ohne Berührung unter gleichzeitiger Einhaltung von minimalen Spalten erfolgen kann. Die Lagerstellen und Getriebe müssen durch geeignete Abdichtungen vom Schöpfraum getrennt sein, um zu verhindern, daß zum einen Öl oder sonstige Betriebsmittel in den Schöpfraum gelangen und zum anderen, daß abzupumpende schädliche Gase in die Getriebe und Lagerräume strömen und dort Schmiermittel verunreinigen oder zersetzen können. Durch die Verwendung von Sperrgas kann die Abdichtung noch effektiver gestaltet werden.According to the state of the art, rotate in multi-shaft vacuum pumps two or more pistons in one pump housing. The pistons are on Shafts in end shields on either side of the shaft ends or only on one Side of the shaft ends are fixed. The rotary motion of the pistons is controlled by gears synchronized so that even rolling without touching under minimal columns can be observed at the same time. The bearings and gearbox must be separated from the scooping chamber by suitable seals to prevent oil or other equipment from entering the Reach the other and that harmful gases to be pumped out the gearboxes and storage areas flow and contaminate lubricants or can decompose. By using sealing gas, the seal can be made even more effective.
Der Antriebsmotor ist außerhalb des Pumpengehäuses angebracht. Für dessen Ankopplung an die Hauptwelle ist eine Wellendurchführung erforderlich. Entsprechend dem Einsatz der Pumpe muss die Wellendurchführung mit einer mehr oder weniger aufwendigen Abdichtung versehen sein.The drive motor is mounted outside the pump housing. For that Coupling to the main shaft requires a shaft bushing. Corresponding When using the pump, the shaft bushing must have a more or less expensive sealing.
Ein wesentlicher Nachteil der seither bekannten Pumpen dieser Art besteht in der aufwendigen Bauweise. Dies kommt besonders in der Baugröße, der großen Anzahl von Gehäuseteilen und in einer komplizierten Montage zum Ausdruck. Aber auch weitere wichtige Bauteile, wie Abdichtungen zwischen den einzelnen Stufen, Sperrgaseinrichtungen und Ölversorgungen, weisen bei den herkömmlichen Bauweisen oft Unzulänglichkeiten auf und sind verbesserungsbedürftig.A major disadvantage of the pumps of this type known since then is that complex construction. This comes especially in the size, the large number of housing parts and in a complicated assembly. But also other important components, such as seals between the individual stages, Purge gas devices and oil supplies, show in the conventional designs often shortcomings and need improvement.
In der GB-Patentschrift 809,445 wird eine Mehrwellenvakuumpumpe beschrieben, bei der in einem Pumpengehäuse zwei Rotoren zusammenwirken. Durch deren berührungslose Bewegung entstehen Schöpfräume, in welchen das zu pumpende Medium gefördert wird. Dabei weist der Rotor eine glockenförmige Bauweise auf. Das Antriebssystem ist als Außenläufermotor ausgebildet, derart, dass dessen Rotorteile an der Innenfläche des glockenförmigen Rotors angebracht sind und die Statorteile jenen gegenüber innerhalb des glockenförmigen Rotors fest montiert sind. Die Gasförderung erfolgt senkrecht zur Achsrichtung. Dabei sind Lager und Getriebebauteile nicht vom Schöpfraum getrennt, so dass eine trockene Gasförderung ausgeschlossen ist.GB 809,445 describes a multi-shaft vacuum pump, where two rotors work together in a pump housing. Through their Non-contact movement creates scoops in which the pumped Medium is promoted. The rotor has a bell-shaped design. The drive system is designed as an external rotor motor, such that its Rotor parts are attached to the inner surface of the bell-shaped rotor and the stator parts are fixedly mounted opposite those within the bell-shaped rotor are. The gas is conveyed perpendicular to the axis direction. There are bearings and gear components are not separated from the pumping chamber, so that dry gas production is excluded.
Die Erfindung hat sich die Aufgabe gestellt, eine trockene Mehrwellenvakuumpumpe zu entwickeln, welche die angeführten Nachteile nicht mehr aufweist. Vor allem soll bei optimalen Pumpeigenschaften eine kompaktere Bauweise angestrebt werden, welche platzsparend ist und eine einfache Montage ermöglicht. Weitere Bauteile, wie Abdichtungen, Sperrgaseinrichtungen und Ölversorgungen, sollen dem neuen Pumpenkonzept optimal angepasst werden.The invention has set itself the task of a dry multi-shaft vacuum pump to develop, which no longer has the disadvantages mentioned. In front everything should be aimed at a compact design with optimal pump properties which is space-saving and enables easy assembly. Other components, such as seals, sealing gas devices and oil supplies, are to be optimally adapted to the new pump concept.
Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 - 5 stellen weitere Ausgestaltungsformen der Erfindung dar. The task is characterized by the characterizing features of the first claim solved. Claims 2-5 represent further embodiments of the invention represents.
Die Rotoren füllen einen großen Teil des Pumpenvolumens aus. Dieser Raum wird durch die seitherige massive Bauweise der Rotoren nicht genutzt. Durch die glockenförmige Bauart mindestens eines Rotors wird es möglich, das Antriebssystem vollständig in das Innere eines Rotors zu integrieren und den seither ungenutzten Raum zu verwerten. Dies reduziert die geometrischen Abmessungen der Pumpe erheblich. Die Lagerstellen sind gegenüber dem Schöpfraum abgekapselt, und es werden keine Wellendurchführungen benötigt. Außerdem ergibt sich eine Anzahl zusätzlicher Vorteile, welche durch weitere erfindungsgemäße Merkmale charakterisiert sind. So können der elektrische Anschluß für das Antriebssystem und die Kühlmittelversorgung durch Bohrungen in den Zapfen des Hauptrotors erfolgen. The rotors fill up a large part of the pump volume. This room is not used due to the massive construction of the rotors since then. Through the bell-shaped design of at least one rotor, it becomes possible to drive the system fully integrated into the interior of a rotor and the one that has not been used since Recycle space. This reduces the geometric dimensions of the Pump considerably. The bearings are encapsulated from the scooping area, and no shaft bushings are required. There is also a Number of additional advantages, which are further features of the invention are characterized. So the electrical connection for the drive system and the coolant supply through holes in the pin of the main rotor respectively.
Die glockenförmige Bauweise bedingt eine Konstruktion, die große Rotordurchmesser zur Folge hat. Im Falle einer mehrstufigen Pumpe, bei der die Stufen axial hintereinander angeordnet sind, stellt sich das Problem der Abdichtung zwischen den einzelnen Stufen. Zum Beispiel scheiden Radialwellendichtungen aus, da wegen der großen Durchmesser hohe Geschwindigkeiten an den Grenzflächen auftreten, was zu unzulässigen Temperaturen und Verschleißerscheinungen führt. Außerdem ist es wünschenswert, der Rückströmung zwischen den Stufen entgegenzuwirken. Um diesen Umständen Rechnung zu tragen, werden zwischen den Stufen berührungsfreie Dichtungen eingesetzt. Diese sind als Gewindewellenpumpen ausgebildet und haben so die Eigenschaft, ein Druckverhältnis zu erzeugen, welches der Rückströmung entgegenwirkt.The bell-shaped construction requires a construction, the large rotor diameter has the consequence. In the case of a multi-stage pump in which the stages are axial are arranged one behind the other, the problem of sealing arises between the individual levels. For example, radial shaft seals are ruled out because because of the large diameter, high speeds at the interfaces occur, which leads to impermissible temperatures and signs of wear. It is also desirable to counteract the backflow between the stages. In order to take these circumstances into account, between the Non-contact seals are used. These are called threaded shaft pumps trained and thus have the property of generating a pressure ratio which counteracts the backflow.
Um sicherzustellen, daß kein Öl in den Schöpfraum und, umgekehrt, kein Prozeßgas in den Getrieberaum gelangt, ist es erforderlich, Sperrgas zwischen Getrieberaum und angrenzendem Schöpfraum einzulassen. Ein kritisches Problem ist hierbei die Dosierung. Da als Sperrgas in der Regel Inertgas verwendet wird, ist man bemüht, den Gasverbrauch niedrig zu halten. Andererseits soll kein Risiko eingegangen werden, durch zu geringe Gasmengen die Absperrfunktion zu gefährden. Um diese Forderungen zu erfüllen, waren bisher aufwendige Inertgasaufbereitungseinrichtungen (Druckregelung, Einstellung und Überwachung) notwendig. Erfindungsgemäß kann durch die Verwendung von porösem Material als Werkstoff für die Dichtkörper der Sperrgasdichtungen der Sperrgasverbrauch optimal eingestellt werden. Dieser ist von der Wandstärke der Dichtung und von der Permeabilität des Werkstoffes abhängig. Dabei muß beachtet werden, daß der Versorgungsdruck oberhalb des Bereiches liegt, in dem im Dichtwerkstoff Verblockung auftritt. Dadurch, daß sich das Gas in der Dichtung verteilt und auf der inneren Oberfläche in den Spalt zwischen Dichtungskörper und Rotor ausströmt, entsteht ein Gaspolster, wodurch ein Gasaustausch zwischen Getrieberaum und Schöpfraum verhindert wird. To ensure that no oil enters the scoop and, conversely, no process gas enters the gear compartment, it is necessary to use sealing gas between the gear compartment and admit the adjoining creative space. A critical problem is the dosage. Since inert gas is generally used as the sealing gas, one tries to keep gas consumption low. On the other hand, there is no risk be entered into, jeopardizing the shut-off function by insufficient gas quantities. In order to meet these requirements, complex inert gas processing devices have so far been used (Pressure control, setting and monitoring) necessary. According to the invention, the use of porous material as Material for the sealing body of the sealing gas seals the sealing gas consumption optimal can be set. This depends on the wall thickness of the seal and the Permeability of the material depends. It must be noted that the Supply pressure is above the range in which the sealing material blocks occurs. Because the gas is distributed in the seal and on the internal surface flows out into the gap between the sealing body and the rotor, creates a gas cushion, which causes gas exchange between the gearbox and Scooping space is prevented.
Für die Versorgung der Lagerstellen mit Öl werden symmetrisch gestaltete Gewindewellenpumpen, welche auf der Innenseite des Steuerrotors angebracht sind, verwendet. Zur weiteren Beförderung des Öles sind erfindungsgemäß Bohrungen innerhalb der Zapfen angebracht. Dadurch wird auch für diese Bauteile eine optimale Raumausnutzung bewirkt.To supply the bearings with oil, symmetrically designed threaded shaft pumps, which are attached to the inside of the control rotor, used. According to the invention, holes are provided for the further transportation of the oil mounted inside the peg. This also makes it an optimal one for these components Space utilization causes.
Die erfindungsgemäße Pumpe weist bei optimalen Pumpeigenschaften eine kompakte Bauweise auf, welche platzsparend ist und eine einfache Montage ermöglicht. Weitere Bauteile, wie Stromversorgung, Abdichtungen, Kühlmittelversorgung, Sperrgaseinrichtungen und Ölversorgung, wurden dem Pumpenkonzept optimal angepaßt.The pump according to the invention has a compact design with optimal pump properties Construction, which is space-saving and enables easy assembly. Other components, such as power supply, seals, coolant supply, Purge gas equipment and oil supply were the pump concept optimally adapted.
Anhand der Abbildungen 1 und 2 soll die Erfindung am Beispiel einer Zweiwellenvakuumpumpe näher erläutert werden. Dabei ist die eine Welle als Arbeitswelle, im folgenden Hauptrotor" genannt, und die zweite Welle als Steuerwelle, im folgenden "Steuerrotor" genannt, ausgebildet.On the basis of Figures 1 and 2, the invention using the example of a two-shaft vacuum pump are explained in more detail. The one wave is a working wave, hereinafter referred to as the main rotor ", and the second shaft as the control shaft, hereinafter Called "control rotor".
Abbildung 1 zeigt einen Querschnitt durch das Pumpsystem.Figure 1 shows a cross section through the pump system.
Abbildung 2 zeigt einen Schnitt längs der beiden Rotoren einer vierstufigen Pumpe.Figure 2 shows a section along the two rotors of a four-stage pump.
In einem Pumpengehäuse 1, welches mit einem Ansaugflansch 2 und einer Gasaustrittsöffnung
3 versehen ist, werden der Hauptrotor 4 der Steuerrotor 5 in Lagern
31, 33 und 32, 34 getragen. Das äußere Profil des Hauptrotors 4 ist so gestaltet,
daß es zwei Arbeitskolben 6 aufweist, welche im Schöpfraum 8 umlaufen.
Korrespondierend zu diesen Arbeitskolben 6 bildet das Profil des Steuerrotors 5
zwei Ausnehmungen 7. Durch das Zusammenwirken von Hauptrotor 4 und Steuerrotor
5 entsteht auf an sich bekannte Art und Weise der Pumpeffekt. Beide Rotoren
sind als glockenförmige Hohlkörper ausgebildet. Diese Bauweise ermöglicht
das Unterbringen von weiteren Bauteilen im Inneren der Rotoren. So ist das Antriebssystem
im Inneren des Hauptrotors 4 installiert. Dieses ist als Außenläufermotor
ausgebildet. Dabei sind dessen Rotorteile 13 an der Innenfläche des glokkenförmigen
Hauptrotors 4 angebracht. Die Statorteile 12 des Antriebssystems
sind innerhalb des Rotors gegenüber der Rotorwelle 13 fest montiert. Die Lager
31, 33 und 32, 34 sind im Inneren der Rotoren auf Zapfen 9 und 10 angebracht.
Diese Zapfen sind über Flansche 17 und 18 mit dem Gehäuse 1 fest verbunden.
Durch eine Getriebeanordnung, bestehend aus Zahnrädern 14 und 15, welche im
Getrieberaum 19 untergebracht sind, wird die Rotorbewegung vom Hauptrotor 4
auf den Steuerrotor 5 übertragen. Die elektrischen Versorgungsleitungen 37 für
die Statorteile 12 des Antriebssystems sowie die Versorgung des Kühlsystems 38
mit Kühlmittel erfolgen durch eine Bohrungen im Zapfen 9 des Hauptrotors 4.In a
Im Falle einer mehrstufigen Ausführung, welche in Abbildung 2 dargestellt ist,
sind zwischen den einzelnen Pumpstufen, die axial hintereinander angeordnet
sind, berührungsfreie Dichtungen 22 vorhanden. Diese sind als Gewindewellenpumpen
so ausgebildet, daß sie den Rückströmungen zwischen den Stufen entgegenwirken.In the case of a multi-stage version, which is shown in Figure 2,
are arranged axially one after the other between the individual pump stages
are
Zur Abdichtung zwischen Getrieberaum 19 und angrenzendem Schöpfraum 8 wird
Sperrgas über den Sperrgaseinlaß 23, die Ringkanäle 24 und 25 und die Sperrgasdichtungen
26 und 27 zugeführt. Die Sperrgasdichtungen sind aus porösem
Material und gestatten durch die Materialauswahl und die Formgebung eine dosierte
Zuführung von Sperrgas.For sealing between the
Die Förderung von Öl zu den Lagerstellen 31, 33 und 32, 34 erfolgt mit Hilfe von
Gewindewellenpumpen 20 und 21, welche auf der Innenseite des Steuerrotors 5
angebracht sind und symmetrisch gestaltet sind, so daß sie in axialer Richtung
entgegengesetzt pumpen und der Ölaustritt jeweils in der Mitte erfolgt. Über Bohrungen
42 und 43 in den Zapfen 9 und 10 wird das Öl den Lagerstellen zugeführt.Oil is delivered to the bearing points 31, 33 and 32, 34 with the help of
Threaded shaft pumps 20 and 21, which on the inside of the control rotor 5th
are attached and designed symmetrically so that they are in the axial direction
pump in the opposite direction and the oil is discharged in the middle. About drilling
42 and 43 in the
Claims (5)
- Multiple-shaft vacuum pump, in which in a pump housing (1) at least two rotors (4 and 5) interact in such a way that their contact-free motion leads to the formation of pump chambers (8), in which the medium to be pumped is delivered, and that at least one rotor (4) is of a bell-shaped design, wherein the drive system is designed as an external-rotor motor, such that its rotor parts (13) are provided on the inner surface of the bell-shaped rotor (4) and the stator parts (12) are mounted opposite them in a fixed manner inside the bell-shaped rotor (4), characterized in that the pump comprises a plurality of stages, which are disposed successively in axial direction.
- Multiple-shaft vacuum pump according to claim 1, characterized in that between the pump stages contact-free seals (22) in the form of threaded-shaft pumps are provided in such a way that they counteract the back flows between the stages.
- Multiple-shaft vacuum pump according to one of the preceding claims, characterized in that disposed between the gearing chamber (19) and the adjoining pump chamber (9) is a sealing gas inlet (23), which is connected by ring channels (24 and 25) to sealing gas seals (26 and 27), the material of which is a porous material.
- Multiple-shaft vacuum pump according to one of the preceding claims, characterized in that for delivering oil to the bearing points on the inner side of the control rotor (5) threaded-shaft pumps (20 and 21) are provided, which are fashioned symmetrically, so that they pump oppositely in axial direction and emergence of the oil occurs in the middle of the respective threaded-shaft pump.
- Multiple-shaft vacuum pump according to one of the preceding claims, characterized in that the oil supply to the bearing points is effected through bores (42 and 43) in the journals (9 and 10).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19809957A DE19809957A1 (en) | 1998-03-07 | 1998-03-07 | Multi-shaft vacuum pump |
| DE19809957 | 1998-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0942172A1 EP0942172A1 (en) | 1999-09-15 |
| EP0942172B1 true EP0942172B1 (en) | 2004-09-29 |
Family
ID=7860157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP99101291A Expired - Lifetime EP0942172B1 (en) | 1998-03-07 | 1999-01-25 | Vacuum pump with multiple driven shafts |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6241490B1 (en) |
| EP (1) | EP0942172B1 (en) |
| JP (1) | JP4282809B2 (en) |
| AT (1) | ATE278110T1 (en) |
| DE (2) | DE19809957A1 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6729863B2 (en) * | 1999-03-22 | 2004-05-04 | Werner Rietschle Gmbh & Co. Kg | Rotary pump having high and low pressure ports in the housing cover |
| US20050095160A1 (en) * | 2003-10-29 | 2005-05-05 | Heng-I Lin | Pump |
| US20140161655A1 (en) * | 2011-07-08 | 2014-06-12 | Edward L. Simonds | Pump |
| JP6418838B2 (en) * | 2014-07-31 | 2018-11-07 | エドワーズ株式会社 | Dry pump and exhaust gas treatment method |
| EP3580460A4 (en) | 2017-04-07 | 2020-11-04 | Stackpole International Engineered Products, Ltd. | Epitrochoidal vacuum pump |
| DE102018001519A1 (en) * | 2018-02-27 | 2019-08-29 | Ralf Steffens | Storage and drive for an R718 compressor |
| WO2019210053A1 (en) | 2018-04-27 | 2019-10-31 | Carrier Corporation | Screw compressor with external motor rotor |
| KR102453438B1 (en) * | 2020-06-15 | 2022-10-12 | 주식회사 한중엔시에스 | Vacuum pump with integrated reservoir |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB809445A (en) * | 1954-02-27 | 1959-02-25 | Heraeus Gmbh W C | Improvements in or relating to rotary high vacuum pumps |
| DE2359456A1 (en) * | 1973-11-29 | 1975-06-05 | Leybold Heraeus Gmbh & Co Kg | TURBOMOLECULAR VACUUM PUMP WITH GAS BEARED ROTOR |
| GB2088957B (en) * | 1980-12-05 | 1984-12-12 | Boc Ltd | Rotary positive-displacement fluidmachines |
| SE424760B (en) * | 1980-12-12 | 1982-08-09 | Sullair Tech Ab | METHOD OF AN OIL INJECTED SCREW COMPRESSOR FOR BALANCING AXIAL FORCES OF ATMINSTONE ONE OF THE COMPRESSOR'S ROTORS, FOR SEALING THE SPACES BETWEEN ROTOR HOUSES AND ROTORS 'SHOES, AND FOR COOLING AND LUBRICATION. |
| US4551073A (en) * | 1982-05-12 | 1985-11-05 | Walter Schwab | Pump for liquid and gaseous fluids, especially blood |
| US4457680A (en) * | 1983-04-27 | 1984-07-03 | Paget Win W | Rotary compressor |
| JPS62243982A (en) * | 1986-04-14 | 1987-10-24 | Hitachi Ltd | 2-stage vacuum pump and operating method thereof |
| EP0408792B1 (en) * | 1989-07-20 | 1993-09-29 | Leybold Aktiengesellschaft | Drag vacuum pump with at least one helical stage at the discharge end |
| DE69132867T2 (en) * | 1990-08-01 | 2002-09-12 | Matsushita Electric Industrial Co., Ltd. | Rotary lobe system for liquid media |
| FR2668209B1 (en) * | 1990-10-18 | 1994-11-18 | Hitachi Koki Kk | MOLECULAR SUCTION PUMP. |
| DE4238271A1 (en) * | 1992-11-13 | 1994-05-19 | Leybold Ag | Twin-shaft vacuum pump |
| DE4244063A1 (en) * | 1992-12-24 | 1994-06-30 | Balzers Pfeiffer Gmbh | Roots vacuum pump |
| US5346361A (en) * | 1993-04-15 | 1994-09-13 | Goulds Pumps, Incorporated | Air seal for pump with vertical shaft |
| JPH0828471A (en) * | 1994-07-11 | 1996-01-30 | Matsushita Electric Ind Co Ltd | Positive displacement pump |
| BE1010822A3 (en) * | 1996-12-23 | 1999-02-02 | Atlas Copco Airpower Nv | MACHINE WITH LIQUID AND ROTORS bearing lubrication of the bearings. |
-
1998
- 1998-03-07 DE DE19809957A patent/DE19809957A1/en not_active Withdrawn
-
1999
- 1999-01-25 EP EP99101291A patent/EP0942172B1/en not_active Expired - Lifetime
- 1999-01-25 DE DE59910616T patent/DE59910616D1/en not_active Expired - Lifetime
- 1999-01-25 AT AT99101291T patent/ATE278110T1/en not_active IP Right Cessation
- 1999-02-10 JP JP03269599A patent/JP4282809B2/en not_active Expired - Fee Related
- 1999-03-03 US US09/262,141 patent/US6241490B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP4282809B2 (en) | 2009-06-24 |
| EP0942172A1 (en) | 1999-09-15 |
| DE19809957A1 (en) | 1999-09-09 |
| US6241490B1 (en) | 2001-06-05 |
| DE59910616D1 (en) | 2004-11-04 |
| JPH11294358A (en) | 1999-10-26 |
| ATE278110T1 (en) | 2004-10-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69607718T2 (en) | Rolling bearings with dynamic, oil-supplied drainage | |
| DE3714536C2 (en) | ||
| DE2639174C2 (en) | ||
| DE2441520C2 (en) | Shaft seal for the rotors of a screw compressor using water injection | |
| EP0290662B1 (en) | Positive-displacement two-shaft vacuum pump | |
| DE2801206A1 (en) | SPIRAL DEVICE WITH A FIXED CRANE DRIVE MECHANISM | |
| EP1108143A1 (en) | Dry-compressing screw pump | |
| DE29904409U1 (en) | Screw compressor | |
| DE3127323A1 (en) | SCREW COMPRESSOR WITH CLOSED GAS SYSTEM WITH OIL MIST LUBRICATION | |
| EP0166807A2 (en) | Rotary vane vacuum pump | |
| EP0955466B1 (en) | Annular gap seal | |
| EP0569455B1 (en) | Dry-running twin-shaft vacuum pump | |
| EP0942172B1 (en) | Vacuum pump with multiple driven shafts | |
| DE60300051T2 (en) | shaft seal | |
| WO2012097839A1 (en) | Water turbine or water pump or other hydraulic machine | |
| DE69716552T2 (en) | SEAL / BEARING DEVICE | |
| EP0030275A1 (en) | Compressor, especially screw compressor with lubrication circuit | |
| DE20302989U1 (en) | Rotary pump | |
| EP2348219A1 (en) | Coolant pump system | |
| EP2949938B1 (en) | Vacuum pump | |
| EP0038306A1 (en) | Hydrostatic hydrodynamic bearing | |
| DE3124247C1 (en) | Screw compressor | |
| DD147567A5 (en) | ROTARY MACHINING MACHINE, ESPECIALLY FOR MACHINING VISCOSER PLASTIC OR POLYMERMATERIALS | |
| WO2000053931A1 (en) | Rotary helical screw-type compressor | |
| EP0198936A1 (en) | Multistage vacuum pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT CH DE FR GB IT LI NL |
|
| AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
| 17P | Request for examination filed |
Effective date: 19991220 |
|
| AKX | Designation fees paid |
Free format text: AT CH DE FR GB IT LI NL |
|
| 17Q | First examination report despatched |
Effective date: 20030630 |
|
| GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
| GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
| GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
| AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT CH DE FR GB IT LI NL |
|
| REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D Free format text: NOT ENGLISH |
|
| REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
| REF | Corresponds to: |
Ref document number: 59910616 Country of ref document: DE Date of ref document: 20041104 Kind code of ref document: P |
|
| REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: PFEIFFER VACUUM (SCHWEIZ) AG |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20050131 |
|
| GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 20050228 |
|
| PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
| ET | Fr: translation filed | ||
| 26N | No opposition filed |
Effective date: 20050630 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20081203 Year of fee payment: 11 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20081128 Year of fee payment: 11 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20090128 Year of fee payment: 11 |
|
| REG | Reference to a national code |
Ref country code: NL Ref legal event code: V1 Effective date: 20100801 |
|
| REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100801 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100131 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100131 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20100125 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20120124 Year of fee payment: 14 |
|
| REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20130930 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20130131 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20140116 Year of fee payment: 16 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20140110 Year of fee payment: 16 |
|
| REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 59910616 Country of ref document: DE |
|
| GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20150125 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150801 Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20150125 |