EP0856108A1 - Pompe a vide a friction a admission intermediaire - Google Patents

Pompe a vide a friction a admission intermediaire

Info

Publication number
EP0856108A1
EP0856108A1 EP96928437A EP96928437A EP0856108A1 EP 0856108 A1 EP0856108 A1 EP 0856108A1 EP 96928437 A EP96928437 A EP 96928437A EP 96928437 A EP96928437 A EP 96928437A EP 0856108 A1 EP0856108 A1 EP 0856108A1
Authority
EP
European Patent Office
Prior art keywords
ring
spacer
stator
rings
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96928437A
Other languages
German (de)
English (en)
Other versions
EP0856108B1 (fr
Inventor
Thomas Böhm
Ralf Hirche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0856108A1 publication Critical patent/EP0856108A1/fr
Application granted granted Critical
Publication of EP0856108B1 publication Critical patent/EP0856108B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the invention relates to a friction vacuum pump with the features of the preamble of claim 1.
  • a friction pump of this type is known from DE-A-31 24 205. To design the opening of the intermediate inlet into the delivery chamber of the friction vacuum pump, it is stated that it is advantageous to provide an annular channel.
  • the present invention has for its object to make the confluence of the intermediate inlet in the delivery chamber of the friction vacuum pump expedient in two respects.
  • the components forming the stator in the region of the ring channel should be designed in such a way that they hinder the gases entering the delivery chamber as little as possible.
  • simple manufacture of the components located in the area of the ring channel should be ensured.
  • a stator of the type according to the invention differs only slightly from a stator for a friction vacuum pump without an intermediate inlet. It is only necessary to equip a spacer ring, which is located at the level of the ring channel, with passage openings - bores, millings or the like. There are no other differences with regard to the manufacture of the stator or its assembly, so that the effort for the manufac tion of a friction vacuum pump with an intermediate inlet is only insignificantly higher than the effort for the production of a friction vacuum pump without an intermediate inlet.
  • a spacer ring can be equipped with a large number of passage openings.
  • the spacer ring has several sections with a reduced height.
  • the sum of these sections can extend over a total of 20 to 80% of the circumference of the spacer ring, so that the conductance of the passage openings can be selected to be very high without impairing the stability of the stator.
  • FIG. 1 shows an exemplary embodiment of a friction vacuum pump according to the invention
  • FIG. 2 shows a further exemplary embodiment
  • Figure 3 is a plan view of a spacer ring of the stator of the embodiment of Figure 2 and
  • Figure 4 shows a section through the stator ring of Figure 3 along the line IV-IV.
  • the outer housing is designated by 1. It is equipped with a central, inwardly projecting bearing bush 2, in which a shaft 3 is supported by means of a spindle bearing 4.
  • the drive motor 5, the rotor 6 of a molecular pump stage and the rotor 7 of a turbomolecular pump stage are coupled to the shaft 3.
  • the rotor 7 is equipped with the rotor blades 8 which, together with the stator blades 9 held in the housing 1, form the turbomolecular pump stage.
  • the respective pump is connected to the recipient to be evacuated by means of the flange 11.
  • the molecular pump (or pump stage) comprises the bell-shaped rotor 6 which overlaps the storage space 12 and is equipped on its outside with thread-like grooves 13 in which the gas is pumped from the high vacuum side to the fore vacuum side during operation of the pump.
  • An axially approximately the same length stator is assigned to the rotor 6.
  • the gap 10 is located between the stator 14 and the rotor 6. This must be as small as possible in order to achieve a good seal between the thread grooves.
  • the forevacuum connector 20 is connected to the forevacuum space 19.
  • the stator blades 9 of the turbomolecular pump stage include the stator blades 9 and spacer rings 22 to 24.
  • the stator blades 9 are, in a manner known per se, components of blade rings or blade ring sections 25 with outer edges 26, which are located in the assembled condition of the stator between the spacer rings .
  • the stator which is made up of spacer rings 22 and vane rings 25 arranged one above the other, is centered by the outer housing 1.
  • the turbomolecular pump stage 8, 9 is equipped with an intermediate inlet 28, which can serve different purposes - for example, vacuum generation with a higher pressure level than the pressure in the vacuum chamber connected to the flange 11, not shown, or the test gas inlet when using the pump in a counterflow leak detector.
  • the spacer rings 23, 24 located at the level of the intermediate inlet 28 are modified compared to the other spacer rings 22.
  • One or both spacer rings 23 and 24 have a reduced outer diameter and, together with the housing 1, form the circumferential ring channel 31, into which the intermediate inlet 28 opens.
  • the one or more spacer rings 23 and 24 with a reduced outer diameter also have openings 32, via which the connection of the delivery chamber of the turbomolecular pump stage to the intermediate inlet 28 is established.
  • openings can be, for example, several bores, as shown in the case of the spacer ring 24.
  • Another possibility is to mill out a spacer ring 23 in such a way that it has a reduced (axial) height in sections. This makes it possible to produce breakthroughs with a high conductance.
  • FIGS. 2 to 4 show an embodiment in which the spacer rings 22 to 24 are equipped with centering means. These consist of an outer circumferential recess 34 on one side and an axially directed edge 35 on the other side of the spacer rings. The dimensions are chosen so that the edge 35 on the one hand encompasses and centers the outer edge 26 of the adjacent vane ring disk 25. Furthermore, the outer edge 35 engages in the recess 34 of the adjacent spacer ring, as a result of which the entire stator 21 is centered.
  • the ring channel 31 is formed as a circumferential groove in the housing 1, so that it is not necessary to give the or the spacer rings 23 and 24 a reduced outer diameter.
  • the openings in the spacer ring 24 are again designed as bores, for example.
  • the spacer ring 23 is shown again in FIGS. 3 and 4. It has the centering means (outer edge 35, recess 34).
  • the openings 32 are formed in that several sections of the ring have a reduced height to have. In the exemplary embodiment shown, there are four sections of this type which are distributed uniformly over the circumference and each extend over 10% of the circumference.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Rotary Pumps (AREA)

Abstract

L'invention concerne une pompe à vide à friction (1) comprenant une admission (11), une sortie (20), un rotor (6, 7) et un stator (14, 21) disposés entre l'admission (11) et la sortie (20) et porteurs d'ailettes de rotor et de stator respectivement (7 et 8). Dans le but de réaliser, d'une manière simple et fonctionnelle, une admission intermédiaire (28) débouchant dans un conduit annulaire (31) entourant les ailettes de rotor et de stator (7 et 8), la pompe selon l'invention est caractérisée en ce que le stator (21) est formé de bagues ou de segments de bague (25) et de bagues d'écartement (22, 23, 24), en ce que les bagues ou les segments de bague (25) présentent des bords extérieurs (26) disposés entre les bagues d'écartement (22, 23, 24), et en ce qu'au moins une bague d'écartement (23, 24) se trouvant au niveau du conduit annulaire (31) présente des perforations (32).
EP96928437A 1995-10-20 1996-08-09 Pompe a vide a friction a admission intermediaire Expired - Lifetime EP0856108B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE29516599U DE29516599U1 (de) 1995-10-20 1995-10-20 Reibungsvakuumpumpe mit Zwischeneinlaß
DE29516599U 1995-10-20
PCT/EP1996/003524 WO1997015760A1 (fr) 1995-10-20 1996-08-09 Pompe a vide a friction a admission intermediaire

Publications (2)

Publication Number Publication Date
EP0856108A1 true EP0856108A1 (fr) 1998-08-05
EP0856108B1 EP0856108B1 (fr) 2002-07-03

Family

ID=8014363

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96928437A Expired - Lifetime EP0856108B1 (fr) 1995-10-20 1996-08-09 Pompe a vide a friction a admission intermediaire

Country Status (5)

Country Link
US (1) US6030189A (fr)
EP (1) EP0856108B1 (fr)
JP (1) JP3939352B2 (fr)
DE (2) DE29516599U1 (fr)
WO (1) WO1997015760A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10337517B2 (en) 2012-01-27 2019-07-02 Edwards Limited Gas transfer vacuum pump

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE59912626D1 (de) * 1998-05-26 2006-02-16 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
JP3038432B2 (ja) 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
JP3010529B1 (ja) * 1998-08-28 2000-02-21 セイコー精機株式会社 真空ポンプ、及び真空装置
US6193461B1 (en) 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10008691B4 (de) 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10032607B4 (de) * 2000-07-07 2004-08-12 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät
DE10111603A1 (de) * 2001-03-10 2002-09-12 Pfeiffer Vacuum Gmbh Gasreibungspumpe mit zusätzlichem Gaseinlass
EP1249613B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0124731D0 (en) 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
JP2007071139A (ja) * 2005-09-08 2007-03-22 Osaka Vacuum Ltd 複合真空ポンプのロータ
US20080066859A1 (en) * 2006-08-30 2008-03-20 Michiaki Kobayashi Plasma processing apparatus capable of adjusting pressure within processing chamber
JP5190214B2 (ja) * 2007-03-29 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
DE102008013142A1 (de) * 2008-03-07 2009-09-10 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5486184B2 (ja) * 2008-12-10 2014-05-07 エドワーズ株式会社 真空ポンプ
DE102009011082A1 (de) 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
EP2757265B1 (fr) * 2013-01-22 2016-05-18 Agilent Technologies, Inc. Étage de pompage en spiral et pompe à vide intégrant un tel étage de pompage
DE202013010204U1 (de) * 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
EP3133290B1 (fr) * 2015-08-20 2021-06-09 Pfeiffer Vacuum Gmbh Pompe à vide
CN108474383B (zh) * 2016-02-12 2020-12-11 埃地沃兹日本有限公司 真空泵及用于该真空泵的挠性罩及转子
GB2601515B (en) 2020-12-02 2022-12-28 Agilent Technologies Inc Vacuum pump with elastic spacer

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1403493A1 (de) * 1961-01-20 1969-01-30 Akad Wissenschaften Ddr Molekularpumpe
DE2119857A1 (de) * 1971-04-23 1972-11-02 Leybold-Heraeus GmbH & Co KG, 5000 Köln Einrichtung zur Ölversorgung von Lagerstellen
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
DE2442614A1 (de) * 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
DE3124205A1 (de) * 1981-06-19 1982-12-30 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Lecksuchanordnung
US4472962A (en) * 1981-08-03 1984-09-25 Balzers Aktiengesellschaft Low pressure leak detector
DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
EP0344345B1 (fr) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Système à pompe pour un appareil de détection de fuite
DE58905785D1 (de) * 1989-07-20 1993-11-04 Leybold Ag Gasreibungspumpe mit mindestens einer auslassseitigen gewindestufe.
DE9013671U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE9304435U1 (de) * 1993-03-24 1993-06-09 Leybold AG, 6450 Hanau Hochvakuumpumpe mit Einlaßflansch
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9715760A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10337517B2 (en) 2012-01-27 2019-07-02 Edwards Limited Gas transfer vacuum pump

Also Published As

Publication number Publication date
DE59609415D1 (de) 2002-08-08
WO1997015760A1 (fr) 1997-05-01
JPH11513775A (ja) 1999-11-24
DE29516599U1 (de) 1995-12-07
EP0856108B1 (fr) 2002-07-03
JP3939352B2 (ja) 2007-07-04
US6030189A (en) 2000-02-29

Similar Documents

Publication Publication Date Title
WO1997015760A1 (fr) Pompe a vide a friction a admission intermediaire
EP0697069B1 (fr) Pompe a vide rotative a friction comportant des sections de conception differente
EP1252445B1 (fr) Pompe turbo-moléculaire
EP1090231B2 (fr) Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
WO1993023672A1 (fr) Pompe a friction a vide a gaz
DE102009035332A1 (de) Vakuumpumpe
EP1067290B1 (fr) Pompe à vide
DE102012003680A1 (de) Vakuumpumpe
WO2009141222A1 (fr) Pompe à vide multiétagée
DE3506299A1 (de) Turbo-molekularpumpe
WO2005047707A1 (fr) Pompe à vide à frottement à plusieurs étages
WO2013107667A1 (fr) Pompe turbomoléculaire
EP0283736A2 (fr) Pompe à vide poussé avec rotor en forme de cloche
EP2863063B1 (fr) Pompe à vide
EP3851680B1 (fr) Pompe à vide moléculaire et procédé d'influence de la capacité d'aspiration d'une telle pompe
EP2990656A2 (fr) Pompe à vide
DE19901340B4 (de) Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
DE102011108115A1 (de) Turbomolekularpumpe
DE2218615A1 (de) Turbomolekularpumpe mit rotor und stator
EP0052251A1 (fr) Compresseur à canaux latéraux
DE2542336C3 (de) Mehrstufiger Radialverdichter
DE2046692A1 (de) Schaufelrad fur eine Turbomole kularpumpe
EP3032106A1 (fr) Pompe à vide
DE102008013142A1 (de) Turbomolekularpumpe
DE102008004297A1 (de) Turbomolekularpumpe

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19980203

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): CH DE FR GB IT LI

17Q First examination report despatched

Effective date: 20000726

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 59609415

Country of ref document: DE

Date of ref document: 20020808

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: ISLER & PEDRAZZINI AG

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)
ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20030404

REG Reference to a national code

Ref country code: CH

Ref legal event code: PCAR

Free format text: ISLER & PEDRAZZINI AG;POSTFACH 1772;8027 ZUERICH (CH)

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20110824

Year of fee payment: 16

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20110824

Year of fee payment: 16

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20120809

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120809

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20150824

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20150827

Year of fee payment: 20

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20151019

Year of fee payment: 20

REG Reference to a national code

Ref country code: DE

Ref legal event code: R071

Ref document number: 59609415

Country of ref document: DE