EP2565464A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2565464A3
EP2565464A3 EP12180605.3A EP12180605A EP2565464A3 EP 2565464 A3 EP2565464 A3 EP 2565464A3 EP 12180605 A EP12180605 A EP 12180605A EP 2565464 A3 EP2565464 A3 EP 2565464A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
shaft
sleeve
hub
concentric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12180605.3A
Other languages
German (de)
French (fr)
Other versions
EP2565464A2 (en
EP2565464B1 (en
Inventor
Jan Hofmann
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012193203A priority Critical patent/JP5683544B2/en
Publication of EP2565464A2 publication Critical patent/EP2565464A2/en
Publication of EP2565464A3 publication Critical patent/EP2565464A3/en
Application granted granted Critical
Publication of EP2565464B1 publication Critical patent/EP2565464B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe, insbesondere Molekularvakuumpumpe, mit einem Rotor, welcher eine Welle, eine mit der Welle verbundene Nabe und eine mit einer ersten Seite der Nabe verbundene und zur Welle konzentrische erste Hülse aufweist, wobei wenigstens eine zweite Hülse konzentrisch zur Welle auf einer in einer axialen Richtung der ersten Seite gegenüberliegenden zweiten Seite der Nabe mit dieser verbunden und die erste Hülse im Gasstrom der zweiten Hülse nachfolgend angeordnet ist. (Fig. 1).

Figure imgaf001
The invention relates to a vacuum pump, in particular molecular vacuum pump, having a rotor, which has a shaft, a hub connected to the shaft and a first sleeve connected to a first side of the hub and concentric with the shaft, wherein at least one second sleeve concentric with the shaft on a in an axial direction of the first side opposite the second side of the hub connected thereto and the first sleeve is arranged in the gas flow of the second sleeve below. (Fig. 1).
Figure imgaf001
EP12180605.3A 2011-09-05 2012-08-16 Vacuum pump Active EP2565464B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012193203A JP5683544B2 (en) 2011-09-05 2012-09-03 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011112689.2A DE102011112689B4 (en) 2011-09-05 2011-09-05 vacuum pump

Publications (3)

Publication Number Publication Date
EP2565464A2 EP2565464A2 (en) 2013-03-06
EP2565464A3 true EP2565464A3 (en) 2015-04-15
EP2565464B1 EP2565464B1 (en) 2019-04-24

Family

ID=46963391

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12180605.3A Active EP2565464B1 (en) 2011-09-05 2012-08-16 Vacuum pump

Country Status (3)

Country Link
EP (1) EP2565464B1 (en)
JP (1) JP5683544B2 (en)
DE (1) DE102011112689B4 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013009462U1 (en) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Carrier element for tubular elements of a Holweck stage
DE102013114290A1 (en) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh vacuum pump
EP3907406B1 (en) * 2021-04-16 2023-05-03 Pfeiffer Vacuum Technology AG Vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB180991A (en) * 1921-06-01 1923-08-07 Fernand Hippolyte Louis Holweck
DE1010235B (en) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molecular pump
EP1067290A2 (en) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Vacuum pump
DE102009035332A1 (en) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4427154A1 (en) 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Friction pump with magnetic bearings
DE102009021620B4 (en) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vacuum pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB180991A (en) * 1921-06-01 1923-08-07 Fernand Hippolyte Louis Holweck
DE1010235B (en) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molecular pump
EP1067290A2 (en) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Vacuum pump
DE102009035332A1 (en) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh vacuum pump

Also Published As

Publication number Publication date
EP2565464A2 (en) 2013-03-06
JP2013053626A (en) 2013-03-21
DE102011112689B4 (en) 2024-03-21
DE102011112689A1 (en) 2013-03-07
JP5683544B2 (en) 2015-03-11
EP2565464B1 (en) 2019-04-24

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