EP2565464A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP2565464A3
EP2565464A3 EP12180605.3A EP12180605A EP2565464A3 EP 2565464 A3 EP2565464 A3 EP 2565464A3 EP 12180605 A EP12180605 A EP 12180605A EP 2565464 A3 EP2565464 A3 EP 2565464A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
shaft
sleeve
hub
concentric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12180605.3A
Other languages
German (de)
French (fr)
Other versions
EP2565464B1 (en
EP2565464A2 (en
Inventor
Jan Hofmann
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012193203A priority Critical patent/JP5683544B2/en
Publication of EP2565464A2 publication Critical patent/EP2565464A2/en
Publication of EP2565464A3 publication Critical patent/EP2565464A3/en
Application granted granted Critical
Publication of EP2565464B1 publication Critical patent/EP2565464B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Vakuumpumpe, insbesondere Molekularvakuumpumpe, mit einem Rotor, welcher eine Welle, eine mit der Welle verbundene Nabe und eine mit einer ersten Seite der Nabe verbundene und zur Welle konzentrische erste Hülse aufweist, wobei wenigstens eine zweite Hülse konzentrisch zur Welle auf einer in einer axialen Richtung der ersten Seite gegenüberliegenden zweiten Seite der Nabe mit dieser verbunden und die erste Hülse im Gasstrom der zweiten Hülse nachfolgend angeordnet ist. (Fig. 1).

Figure imgaf001
The invention relates to a vacuum pump, in particular molecular vacuum pump, having a rotor, which has a shaft, a hub connected to the shaft and a first sleeve connected to a first side of the hub and concentric with the shaft, wherein at least one second sleeve concentric with the shaft on a in an axial direction of the first side opposite the second side of the hub connected thereto and the first sleeve is arranged in the gas flow of the second sleeve below. (Fig. 1).
Figure imgaf001
EP12180605.3A 2011-09-05 2012-08-16 Vacuum pump Active EP2565464B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012193203A JP5683544B2 (en) 2011-09-05 2012-09-03 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011112689.2A DE102011112689B4 (en) 2011-09-05 2011-09-05 vacuum pump

Publications (3)

Publication Number Publication Date
EP2565464A2 EP2565464A2 (en) 2013-03-06
EP2565464A3 true EP2565464A3 (en) 2015-04-15
EP2565464B1 EP2565464B1 (en) 2019-04-24

Family

ID=46963391

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12180605.3A Active EP2565464B1 (en) 2011-09-05 2012-08-16 Vacuum pump

Country Status (3)

Country Link
EP (1) EP2565464B1 (en)
JP (1) JP5683544B2 (en)
DE (1) DE102011112689B4 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013009462U1 (en) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Carrier element for tubular elements of a Holweck stage
DE102013114290A1 (en) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh vacuum pump
EP3907406B1 (en) * 2021-04-16 2023-05-03 Pfeiffer Vacuum Technology AG Vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB180991A (en) * 1921-06-01 1923-08-07 Fernand Hippolyte Louis Holweck
DE1010235B (en) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molecular pump
EP1067290A2 (en) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Vacuum pump
DE102009035332A1 (en) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4427154A1 (en) 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Friction pump with magnetic bearings
DE102009021620B4 (en) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vacuum pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB180991A (en) * 1921-06-01 1923-08-07 Fernand Hippolyte Louis Holweck
DE1010235B (en) * 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molecular pump
EP1067290A2 (en) * 1999-07-05 2001-01-10 Pfeiffer Vacuum GmbH Vacuum pump
DE102009035332A1 (en) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh vacuum pump

Also Published As

Publication number Publication date
DE102011112689B4 (en) 2024-03-21
EP2565464B1 (en) 2019-04-24
DE102011112689A1 (en) 2013-03-07
JP2013053626A (en) 2013-03-21
EP2565464A2 (en) 2013-03-06
JP5683544B2 (en) 2015-03-11

Similar Documents

Publication Publication Date Title
EP2921702A3 (en) Engine-pump unit
EP2905492A3 (en) Coupling assembly and method for producing the same
EP2628958A3 (en) Diffuser for an impeller pump and impeller pump
EP2787172A3 (en) Blade grid with side wall contours and turbomachine
EP1956245A3 (en) Screw pump rotor and method of reducing slip flow
EP2772688A3 (en) A vane structure and a method of manufacturing a vane structure
DE102014219821A1 (en) Return step
EP2565464A3 (en) Vacuum pump
EP2728171A3 (en) A wind turbine rotor blade assembly with a ring insert in the blade root
EP2851566A3 (en) Internal gear pump and hydraulic circuit for a motor vehicle drive train
EP2743525A3 (en) Disc assembly for an axial bearing assembly
DE102014205235A1 (en) Blade row group
EP2378065A3 (en) Method for repairing a rotor assembly of a turbo engine, ring element for a rotor assembly of a turbo engine and rotor assembly for a turbo engine
EP2484871A3 (en) Turbomachine with a flow path having a circumferentially varying outer periphery
EP2505851A3 (en) Stator stage of an axial compressor for a turbomachine
EP2811117A3 (en) Shroud assembly for a turbo engine
EP2706237A3 (en) Vacuum pump
EP2514975A3 (en) Flow engine
EP2597313A3 (en) High speed rotor for a vacuum pump
EP2410131A3 (en) Rotor of a turbomachine
EP2505850A3 (en) Bearing bushing
EP2896837A3 (en) Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump
EP2636904A3 (en) Pump
EP3007329A3 (en) End turn support and cooling fixture
EP2921715A1 (en) Stator blade group

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 19/04 20060101AFI20150311BHEP

17P Request for examination filed

Effective date: 20150928

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20181120

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1124483

Country of ref document: AT

Kind code of ref document: T

Effective date: 20190515

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502012014648

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20190424

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190824

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190724

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190724

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190725

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190824

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502012014648

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

26N No opposition filed

Effective date: 20200127

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190831

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190816

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20190831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190831

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190831

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 1124483

Country of ref document: AT

Kind code of ref document: T

Effective date: 20190816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190816

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20120816

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20190424

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CZ

Payment date: 20240625

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240523

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240625

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20240709

Year of fee payment: 13