EP2565464A3 - Vakuumpumpe - Google Patents
Vakuumpumpe Download PDFInfo
- Publication number
- EP2565464A3 EP2565464A3 EP12180605.3A EP12180605A EP2565464A3 EP 2565464 A3 EP2565464 A3 EP 2565464A3 EP 12180605 A EP12180605 A EP 12180605A EP 2565464 A3 EP2565464 A3 EP 2565464A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- shaft
- sleeve
- hub
- concentric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012193203A JP5683544B2 (ja) | 2011-09-05 | 2012-09-03 | 真空ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011112689.2A DE102011112689B4 (de) | 2011-09-05 | 2011-09-05 | Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2565464A2 EP2565464A2 (de) | 2013-03-06 |
EP2565464A3 true EP2565464A3 (de) | 2015-04-15 |
EP2565464B1 EP2565464B1 (de) | 2019-04-24 |
Family
ID=46963391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12180605.3A Active EP2565464B1 (de) | 2011-09-05 | 2012-08-16 | Vakuumpumpe |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2565464B1 (de) |
JP (1) | JP5683544B2 (de) |
DE (1) | DE102011112689B4 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202013009462U1 (de) * | 2013-10-28 | 2015-01-29 | Oerlikon Leybold Vacuum Gmbh | Trägerelement für Rohrelemente einer Holweckstufe |
DE102013114290A1 (de) | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP3907406B1 (de) * | 2021-04-16 | 2023-05-03 | Pfeiffer Vacuum Technology AG | Vakuumpumpe |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB180991A (de) * | 1921-06-01 | 1923-08-07 | Fernand Hippolyte Louis Holweck | |
DE1010235B (de) * | 1955-04-22 | 1957-06-13 | Arthur Pfeiffer Fa | Molekularpumpe |
EP1067290A2 (de) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Vakuumpumpe |
DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4427154A1 (de) | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Reibungspumpe mit Magnetlagerung |
DE102009021620B4 (de) | 2009-05-16 | 2021-07-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
2011
- 2011-09-05 DE DE102011112689.2A patent/DE102011112689B4/de active Active
-
2012
- 2012-08-16 EP EP12180605.3A patent/EP2565464B1/de active Active
- 2012-09-03 JP JP2012193203A patent/JP5683544B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB180991A (de) * | 1921-06-01 | 1923-08-07 | Fernand Hippolyte Louis Holweck | |
DE1010235B (de) * | 1955-04-22 | 1957-06-13 | Arthur Pfeiffer Fa | Molekularpumpe |
EP1067290A2 (de) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Vakuumpumpe |
DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Also Published As
Publication number | Publication date |
---|---|
EP2565464B1 (de) | 2019-04-24 |
JP2013053626A (ja) | 2013-03-21 |
JP5683544B2 (ja) | 2015-03-11 |
DE102011112689A1 (de) | 2013-03-07 |
DE102011112689B4 (de) | 2024-03-21 |
EP2565464A2 (de) | 2013-03-06 |
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