US20100322799A1 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
US20100322799A1
US20100322799A1 US12/812,814 US81281408A US2010322799A1 US 20100322799 A1 US20100322799 A1 US 20100322799A1 US 81281408 A US81281408 A US 81281408A US 2010322799 A1 US2010322799 A1 US 2010322799A1
Authority
US
United States
Prior art keywords
rotor
stator
turbomolecular pump
annular groove
vanes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/812,814
Other languages
English (en)
Inventor
Heinrich Englaender
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ENGLAENDER, HEINRICH
Publication of US20100322799A1 publication Critical patent/US20100322799A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a turbomolecular pump.
  • Turbomolecular pumps comprise a rotor connected to a drive shaft and carrying a plurality of rotor vanes. Between the individual rotor vanes, stationary stator disks are arranged. In many cases, the stator disks are not directly connected to the pump housing but are supported by stator rings. In such arrangements, one stator ring is provided per rotor vane, wherein, for mounting the stator rings, the stator rings will be shifted over the rotor. Between the rotor vanes or rotor vane tips and the stationary housing or the stator rings, a gap has to be provided. This gap is required so that, in all operative conditions, the rotor vanes are prevented from contacting the stationary components, i.e. the housing or the stator rings.
  • the width of the gap must be sufficiently large to allow for the occurrence of thermal expansion of the rotor vanes in all operating conditions without causing a contact to the stationary components.
  • the width of the provided gap there has to be considered a possible occurrence of oblique orientations of the rotor due to the rotor dynamics.
  • consideration has to be given to excursion movements caused by tolerances relative to the safety bearings.
  • centrifugal forces will generate an expansion of the rotor, particularly in radial directions. Further to be considered are possible accumulations of tolerances.
  • the gap between the rotor vanes and the housing or the stator rings has a size of 2 mm. Due to the existing gap, a part of the pumped gas will flow back. This backflow causes a noticeable deterioration of the efficiency of the turbomolecular pump.
  • the turbomolecular pump according to the invention comprises a rotor with a plurality of rotor vanes.
  • the rotor is connected to a drive shaft and surrounded by a stator element.
  • the stator element preferably having a cylindrical shape, can be formed by the housing of the turbomolecular pump itself or by one or preferably a plurality of stator rings.
  • the stator element comprises at least one annular groove. This surrounding annular groove is assigned to a rotor vane and is arranged in the corresponding vane plane of this rotor. Thus, in the operational condition, the annular groove is arranged at the height of the assigned rotor vane.
  • the dimensions of the annular groove are herein selected in such a manner that, in all operating conditions, the rotor vane is prevented from contacting either the bottom or the side walls of the annular groove. Since, during operation of the turbomolecular pump, the tip of the annular groove extends into the annular groove, the gap at the tip of the rotor vane is provided with a U-shaped cross section. Thereby, the volume of the gas flowing back will be considerably reduced, resulting in an improved efficiency of the turbomolecular pump.
  • the rotor vanes are formed with a radial projection.
  • This projection pointing in the direction of the annular groove, is particularly of an annular shape.
  • the annular projection surrounds the individual blades of the rotor vanes so that, during operation, it is preferably exclusively the annular projection and not the blades that is inserted into the annular groove during operation.
  • each rotor vane has an annular groove assigned thereto, while preferably each rotor vane is formed with an annular projection.
  • annular grooves for a plurality of rotor vanes, particularly for at least two rotor blades, a further improvement of the sealing effect can be accomplished. Since, according to an especially preferred embodiment, respectively one annular groove is provided for each rotor vane, a meander-shaped gap is formed during operation, serving as a contactless labyrinth sealing, with a resultant considerable improvement of the efficiency of the turbomolecular pump.
  • the at least one annular groove can be provided on an inner side of a housing formed as a stator element.
  • a plurality of stator rings are provided within a pump housing.
  • one stator ring is provided per rotor vane, with the stator rings being arranged behind each other in the axial direction.
  • the stator rings are located behind each other in the direction of the drive shaft or the main conveying direction of the gas.
  • the inventive annular groove is arranged in one or a plurality of the stator rings.
  • all of the stator rings are provided with an annular groove which, specifically, is configured to be entered, during operation, by the annular projection connected to the corresponding rotor vanes.
  • the height of the annular grooves depends on the vane heights which decrease from the inlet side to the outlet side (corresponding to the condensation). Accordingly, the groove depth will vary from about 0.5 mm in small rotors to about 4 mm in large rotors.
  • the groove width will vary from 2 mm in flat vanes of small rotors to 15 mm in steep vanes of large rotors.
  • FIG. 1 is an enlarged schematic sectional view of a portion of a turbomolecular pump according to the state of the art
  • FIG. 2 is a schematic sectional view of a turbomolecular pump according to the invention.
  • FIG. 3 is an enlarged schematic sectional view of the portion III in FIG. 2 .
  • a drive shaft 10 ( FIG. 2 ) has a rotor 12 arranged thereon.
  • Rotor 12 is provided with rotor vanes 16 extending radially with respect to a longitudinal axis 14 and respectively the axis of rotation of shaft 10 .
  • Each rotor vane comprises rotor blades 18 which are suitably inclined to impart to the transported gas a main flow direction parallel to said longitudinal axis, i.e. in FIG. 1 in the downward direction marked by arrow 20 .
  • Rotor 12 is arranged in a housing 22 which, for accommodating the rotor, is formed with a cylindrical, optionally stepped chamber 24 .
  • stator rings 26 A part of the rotor vanes 16 is surrounded by stator rings 26 .
  • stator rings 26 When viewed in the longitudinal direction 14 , the stator rings 26 are arranged behind each other and thus cover an inner side of said cylindrical chamber 24 of housing 22 .
  • stator disks 28 Provided between adjacent stator rings 26 are stator disks 28 facing inward in the direction of the rotor.
  • each stator disk 28 is arranged between two adjacent rotor vanes 16 .
  • a gap a is formed between the radial ends of rotor vanes 16 and the inner sides, i.e. the sides 30 facing towards the rotor vanes 16 . Gas which is to be conveyed during operation will flow, against the conveying direction 20 , through this gap a back into a suction chamber from which the gas is to be sucked.
  • the turbomolecular pump of the invention comprises a drive shaft 10 carrying the rotor 12 .
  • rotor 12 comprises rotor vanes 16 carrying rotor blades 18 .
  • stator rings 26 are arranged within housing 22 .
  • stator disks 28 are arranged between adjacent rotor vanes 16 .
  • stator rings 26 in the illustrated embodiment are provided, on their inner sides facing towards rotor 12 , with an annular groove 32 .
  • the annular groove 32 is closed in itself and extends along the whole inner side of each individual stator ring 26 .
  • the rotor vanes 16 are respectively formed with an annular projection 34 on their outer ends facing towards the stator rings 26 .
  • said annular projection 34 will be displaced into the respective annular groove 32 under the effect of the thermal expansion, the centrifugal forces etc.
  • each rotor vane the annular grooves 32 and the annular projections 34 are located on a common vane plane 36 extending respectively horizontally in FIG. 3 , only one such vane plane 36 being shown in FIG. 3 for reasons of clarity.
  • the upper rotor vane 16 in FIG. 3 is not surrounded by a stator ring.
  • an annular groove 38 is provided in housing 22 .
  • a projection 34 of upper rotor vane 16 will extend also into this annular groove 38 .
  • a mounting gap b exists between the radial ends of the rotor vanes 16 and an inner side of the stator rings 26 . Said gap is necessitated to allow the stator rings 26 to be shifted over rotor 12 for mounting them.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US12/812,814 2008-01-15 2008-11-27 Turbomolecular pump Abandoned US20100322799A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008004297.8 2008-01-15
DE102008004297A DE102008004297A1 (de) 2008-01-15 2008-01-15 Turbomolekularpumpe
PCT/EP2008/066309 WO2009089958A1 (de) 2008-01-15 2008-11-27 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
US20100322799A1 true US20100322799A1 (en) 2010-12-23

Family

ID=40405030

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/812,814 Abandoned US20100322799A1 (en) 2008-01-15 2008-11-27 Turbomolecular pump

Country Status (7)

Country Link
US (1) US20100322799A1 (ja)
EP (1) EP2235377B1 (ja)
JP (1) JP5546464B2 (ja)
CN (1) CN101952602A (ja)
DE (1) DE102008004297A1 (ja)
TW (1) TW200934957A (ja)
WO (1) WO2009089958A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8444127B2 (en) * 2009-12-14 2013-05-21 The Boeing Company High temperature composite patch tool
DE202011002809U1 (de) * 2011-02-17 2012-06-12 Oerlikon Leybold Vacuum Gmbh Statorelement sowie Hochvakuumpumpe

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842902A (en) * 1973-07-05 1974-10-22 Hayes Albion Corp Labyrinthian fan
US5374160A (en) * 1992-04-29 1994-12-20 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5695316A (en) * 1993-05-03 1997-12-09 Leybold Aktiengesellschaft Friction vacuum pump with pump sections of different designs
US20010016160A1 (en) * 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump
US20020164247A1 (en) * 2001-05-02 2002-11-07 Sylvain Nadeau Turbomachine with double-faced rotor-shroud seal structure
US6705844B2 (en) * 2000-02-01 2004-03-16 Leybold Vakuum Gmbh Dynamic seal
US6832888B2 (en) * 2001-10-24 2004-12-21 Boc Edwards Technologies Limited Molecular pump for forming a vacuum
US20050031710A1 (en) * 2003-08-08 2005-02-10 D'adamo Peter James Method of personal care and cosmetic product preparation and composition using human blood type
US20050042118A1 (en) * 2003-08-21 2005-02-24 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
JPS6314893U (ja) * 1986-07-11 1988-01-30
JPH0687691U (ja) * 1993-05-28 1994-12-22 セイコー精機株式会社 ターボ分子ポンプ
DE10331932B4 (de) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3842902A (en) * 1973-07-05 1974-10-22 Hayes Albion Corp Labyrinthian fan
US5374160A (en) * 1992-04-29 1994-12-20 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5482430A (en) * 1992-04-29 1996-01-09 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5695316A (en) * 1993-05-03 1997-12-09 Leybold Aktiengesellschaft Friction vacuum pump with pump sections of different designs
US20010016160A1 (en) * 1997-06-27 2001-08-23 Ebara Corporation Turbo-molecular pump
US6705844B2 (en) * 2000-02-01 2004-03-16 Leybold Vakuum Gmbh Dynamic seal
US20020164247A1 (en) * 2001-05-02 2002-11-07 Sylvain Nadeau Turbomachine with double-faced rotor-shroud seal structure
US6832888B2 (en) * 2001-10-24 2004-12-21 Boc Edwards Technologies Limited Molecular pump for forming a vacuum
US20050031710A1 (en) * 2003-08-08 2005-02-10 D'adamo Peter James Method of personal care and cosmetic product preparation and composition using human blood type
US20050042118A1 (en) * 2003-08-21 2005-02-24 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same

Also Published As

Publication number Publication date
TW200934957A (en) 2009-08-16
JP2011510201A (ja) 2011-03-31
EP2235377A1 (de) 2010-10-06
CN101952602A (zh) 2011-01-19
DE102008004297A1 (de) 2009-07-16
EP2235377B1 (de) 2014-12-31
WO2009089958A1 (de) 2009-07-23
JP5546464B2 (ja) 2014-07-09

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AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ENGLAENDER, HEINRICH;REEL/FRAME:024923/0838

Effective date: 20100824

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION