JP2011510201A - ターボ分子ポンプ - Google Patents
ターボ分子ポンプ Download PDFInfo
- Publication number
- JP2011510201A JP2011510201A JP2010541731A JP2010541731A JP2011510201A JP 2011510201 A JP2011510201 A JP 2011510201A JP 2010541731 A JP2010541731 A JP 2010541731A JP 2010541731 A JP2010541731 A JP 2010541731A JP 2011510201 A JP2011510201 A JP 2011510201A
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- blade
- annular groove
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000694 effects Effects 0.000 description 6
- 238000007789 sealing Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Claims (8)
- 駆動軸(10)に設けられ、複数の動翼(16)を含むロータ(12)と、
該ロータ(12)を囲むステータ要素とを備えたターボ分子ポンプにおいて、
前記ステータ要素は、前記動翼(16)の夫々に対応する少なくとも1つの囲む環状溝(32,38) を含んでおり、
動作中における前記動翼(16)の径方向の膨張を可能にするために、前記環状溝は、前記対応する動翼(16)の翼面(36)に配置されていることを特徴とするターボ分子ポンプ。 - 少なくとも1つの前記動翼(16)は、前記環状溝(32,38) に向かう方向に径方向に延びる好ましくは環状の突起(34)を含んでいることを特徴とする請求項1に記載のターボ分子ポンプ。
- 前記複数の動翼、特には少なくとも2つの動翼(16)に、少なくとも1つの前記環状溝(32,38) が対応していることを特徴とする請求項1又は2に記載のターボ分子ポンプ。
- 前記ステータ要素は、ハウジング(22)により形成されており、前記少なくとも1つの環状溝(38)は、前記ロータ(12)の方に面する前記ハウジングの内側に設けられていることを特徴とする請求項1乃至3のいずれかに記載のターボ分子ポンプ。
- 前記ステータ要素は、複数のステータリング(26)を含んでおり、該複数のステータリング(26)は、該ステータリングの軸方向(14)に、一列に配置されており、
前記少なくとも1つの環状溝(32)は、前記ステータリング(26)の内の1つに設けられていることを特徴とする請求項1乃至4のいずれかに記載のターボ分子ポンプ。 - 各ステータリング(26)は、隣り合う2つの動翼(16)間に配置されたステータディスク(28)に接続されていることを特徴とする請求項5に記載のターボ分子ポンプ。
- 前記ステータリング(26)は、動翼(16)毎に1つずつ設けられており、
各ステータリング(26)は、好ましくは環状溝(32)を含んでいることを特徴とする請求項5又は6に記載のターボ分子ポンプ。 - 取り付けられた状態では、前記ステータリング(26)の内径が、前記動翼(16)の外径より取付間隙の幅分大きいことを特徴とする請求項5乃至7のいずれかに記載のターボ分子ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008004297.8 | 2008-01-15 | ||
DE102008004297A DE102008004297A1 (de) | 2008-01-15 | 2008-01-15 | Turbomolekularpumpe |
PCT/EP2008/066309 WO2009089958A1 (de) | 2008-01-15 | 2008-11-27 | Turbomolekularpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011510201A true JP2011510201A (ja) | 2011-03-31 |
JP5546464B2 JP5546464B2 (ja) | 2014-07-09 |
Family
ID=40405030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010541731A Active JP5546464B2 (ja) | 2008-01-15 | 2008-11-27 | ターボ分子ポンプ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100322799A1 (ja) |
EP (1) | EP2235377B1 (ja) |
JP (1) | JP5546464B2 (ja) |
CN (1) | CN101952602A (ja) |
DE (1) | DE102008004297A1 (ja) |
TW (1) | TW200934957A (ja) |
WO (1) | WO2009089958A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170116182A (ko) * | 2009-12-14 | 2017-10-18 | 더 보잉 컴파니 | 복합 구조물의 재작업 영역에 패치를 전달하고 처리하기 위한 방법 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202011002809U1 (de) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Statorelement sowie Hochvakuumpumpe |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6314893U (ja) * | 1986-07-11 | 1988-01-30 | ||
JPH0687691U (ja) * | 1993-05-28 | 1994-12-22 | セイコー精機株式会社 | ターボ分子ポンプ |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3842902A (en) * | 1973-07-05 | 1974-10-22 | Hayes Albion Corp | Labyrinthian fan |
DE3032967A1 (de) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
US6332752B2 (en) * | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
DE10004263A1 (de) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Dynamische Dichtung |
US6508624B2 (en) * | 2001-05-02 | 2003-01-21 | Siemens Automotive, Inc. | Turbomachine with double-faced rotor-shroud seal structure |
JP2003129991A (ja) * | 2001-10-24 | 2003-05-08 | Boc Edwards Technologies Ltd | 分子ポンプ |
DE10331932B4 (de) | 2003-07-15 | 2017-08-24 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
US20050031710A1 (en) * | 2003-08-08 | 2005-02-10 | D'adamo Peter James | Method of personal care and cosmetic product preparation and composition using human blood type |
US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
-
2008
- 2008-01-15 DE DE102008004297A patent/DE102008004297A1/de not_active Withdrawn
- 2008-11-27 WO PCT/EP2008/066309 patent/WO2009089958A1/de active Application Filing
- 2008-11-27 EP EP08870887.0A patent/EP2235377B1/de active Active
- 2008-11-27 JP JP2010541731A patent/JP5546464B2/ja active Active
- 2008-11-27 CN CN2008801248308A patent/CN101952602A/zh active Pending
- 2008-11-27 US US12/812,814 patent/US20100322799A1/en not_active Abandoned
-
2009
- 2009-01-07 TW TW098100324A patent/TW200934957A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6314893U (ja) * | 1986-07-11 | 1988-01-30 | ||
JPH0687691U (ja) * | 1993-05-28 | 1994-12-22 | セイコー精機株式会社 | ターボ分子ポンプ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170116182A (ko) * | 2009-12-14 | 2017-10-18 | 더 보잉 컴파니 | 복합 구조물의 재작업 영역에 패치를 전달하고 처리하기 위한 방법 |
Also Published As
Publication number | Publication date |
---|---|
US20100322799A1 (en) | 2010-12-23 |
EP2235377A1 (de) | 2010-10-06 |
JP5546464B2 (ja) | 2014-07-09 |
CN101952602A (zh) | 2011-01-19 |
EP2235377B1 (de) | 2014-12-31 |
TW200934957A (en) | 2009-08-16 |
DE102008004297A1 (de) | 2009-07-16 |
WO2009089958A1 (de) | 2009-07-23 |
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