EP1101944B1 - Pompe turbo-moléculaire - Google Patents

Pompe turbo-moléculaire Download PDF

Info

Publication number
EP1101944B1
EP1101944B1 EP00124676A EP00124676A EP1101944B1 EP 1101944 B1 EP1101944 B1 EP 1101944B1 EP 00124676 A EP00124676 A EP 00124676A EP 00124676 A EP00124676 A EP 00124676A EP 1101944 B1 EP1101944 B1 EP 1101944B1
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
pump according
constructional elements
stator
seals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00124676A
Other languages
German (de)
English (en)
Other versions
EP1101944A2 (fr
EP1101944A3 (fr
Inventor
Heinrich Lotz
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1101944A2 publication Critical patent/EP1101944A2/fr
Publication of EP1101944A3 publication Critical patent/EP1101944A3/fr
Application granted granted Critical
Publication of EP1101944B1 publication Critical patent/EP1101944B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first claim.
  • the active pumping elements of a turbomolecular pump consist of rotor blades and stator disks provided with blades, which are arranged alternately one behind the other.
  • the rotor and stator generally each have an inner support ring which is equipped on the outside with blades.
  • the blades of the rotor disks which revolve at high speed, produce the pumping effect in cooperation with the stator blades.
  • spacer rings which lie on the outer circumference between the rotor disks, they are kept at a distance, that the rotor disks can rotate without contact between them.
  • Stator discs and spacers together so form the stator, which is centered by the inner wall of the pump housing and z. B. additionally compressed axially with springs so that stator discs and spacers form a solid composite.
  • turbomolecular pump which consists of a stator arranged in a housing and a cooperating therewith Rotor consists, wherein the stator is composed of two cylindrical shells.
  • the disadvantage here is that the stator must be mounted in a separate housing and radial centering and axial fixation must be made. This means high production costs and assembly times as well as expensive maintenance work. Inevitable gaps between stator and housing lead to disturbing backflow. Furthermore, the removal of the heat generated during pump operation inside heat is hindered by insufficient heat conduction to the outside.
  • EP 07 51 297 A1 shows a turbomolecular pump whose stator consists of two parts. This pump is designed without housing. It is intended to immerse directly in a recipient. Should it be provided with a housing, the problems described above occur.
  • the invention has for its object to present a turbomolecular pump in which the number of components compared to conventional constructions is significantly reduced. This should reduce manufacturing costs and assembly times and simplify maintenance. An improvement in the heat conduction is sought, which contributes to the safety of the pump operation. Furthermore, backflow within the pump should be reduced.
  • the number of components of a turbomolecular pump is significantly reduced.
  • Spacers which lie in conventional construction on the outer circumference between the stator, eliminated entirely.
  • the production can be simplified and a lighter, time-saving installation can be made possible.
  • Compliance with the necessary tolerances is greatly facilitated by the reduced number of components.
  • the radial centering and the axial fixation are given by the invention itself and require no further adjustment work. Internal leaks, which are caused by gaps between the numerous stator components, omitted, so that disturbing backflow in this area are largely avoided.
  • the transport of the heat generated during operation of the pump to the outside can be significantly improved by the compact design and by avoiding heat conduction-inhibiting transitions between the parts of conventional design.
  • cooling or heating elements in the region of the stator components, a very effective temperature control of the entire pump structure, but especially the pump-active parts, depending on the operating conditions of the pump.
  • FIG. 1 shows a section of the arrangement according to the invention according to A - A from FIG. 2.
  • Figure 2 shows a plan view of the arrangement according to the invention.
  • the intake opening is denoted by 1 and the gas outlet opening by 2.
  • the rotor shaft 4 is fixed in bearings 8 and 9 and is driven by the motor 6.
  • Rotor disks 10 are fastened on the rotor shaft 4.
  • the two shell-shaped housing parts each form two integral structural units 12 and 12 'with the two halves of the stator disks 14. These two units are connected by tangential connecting elements 18 with each other. Between the connecting elements seals 26 are mounted in the axial direction.
  • the assemblies 12 and 12 ' can also be glued or welded together vacuum-tight together.
  • seals 28 and 30 are mounted. These seals 28 and 30 may be formed with the axial seals 26 as a continuous one-piece sealing element.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)

Claims (8)

  1. Pompe turbomoléculaire comprenant des disques de rotor (10) et de stator (14) agencés en alternance les uns derrière les autres à l'intérieur d'un carter cylindrique et dont la coopération produit l'effet de pompage, caractérisée en ce que le carter cylindrique est composé d'au moins deux parties séparées le long de l'axe (5) du cylindre, chacune de ces parties constituant avec les différents éléments correspondants des disques de stator (14) un ensemble monobloc (12, 12').
  2. Pompe turbomoléculaire selon la revendication 1, caractérisée en ce que les ensembles (12, 12') sont reliés entre eux par des éléments de jonction (18) tangentiels.
  3. Pompe turbomoléculaire selon la revendication 1 et 2, caractérisée en ce que des joints d'étanchéité (26) sont agencés entre les ensembles (12, 12'), dans le sens axial.
  4. Pompe turbomoléculaire selon la revendication 1, caractérisée en ce que les ensembles (12, 12') sont assemblés par collage étanche au vide.
  5. Pompe turbomoléculaire selon la revendication 1, caractérisée en ce que les ensembles (12, 12') sont assemblés par soudage.
  6. Pompe turbomoléculaire selon l'une quelconque des revendications précédentes, caractérisée en ce que les ensembles (12, 12') sont reliés par des connexions à vis (20) à la bride d'admission (22) et à la partie inférieure (24) de la pompe.
  7. Pompe turbomoléculaire selon l'une quelconque des revendications précédentes, caractérisée en ce que des joints d'étanchéité (28, 30) sont agencés entre les ensembles (12, 12') et la bride d'admission (22) d'une part, et la partie inférieure (24) d'autre part.
  8. Pompe turbomoléculaire selon l'une quelconque des revendications 3 ou 7, caractérisée en ce que les joints d'étanchéité (26), (28) et (30) constituent un seul élément d'étanchéité continu.
EP00124676A 1999-11-22 2000-11-11 Pompe turbo-moléculaire Expired - Lifetime EP1101944B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19956015A DE19956015A1 (de) 1999-11-22 1999-11-22 Turbomolekularpumpe
DE19956015 1999-11-22

Publications (3)

Publication Number Publication Date
EP1101944A2 EP1101944A2 (fr) 2001-05-23
EP1101944A3 EP1101944A3 (fr) 2001-10-17
EP1101944B1 true EP1101944B1 (fr) 2006-07-19

Family

ID=7929835

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00124676A Expired - Lifetime EP1101944B1 (fr) 1999-11-22 2000-11-11 Pompe turbo-moléculaire

Country Status (5)

Country Link
US (1) US6561755B1 (fr)
EP (1) EP1101944B1 (fr)
JP (1) JP2001153088A (fr)
AT (1) ATE333590T1 (fr)
DE (2) DE19956015A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10351451A1 (de) * 2003-11-04 2005-06-16 Friesen, Waldemar NDM - Neue Dimension für Motoren
DE202008011489U1 (de) 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
CN110043485B (zh) * 2019-05-16 2024-07-19 江苏博联硕焊接技术有限公司 一种涡轮分子泵转子及其扩散焊接方法
CN114673671B (zh) * 2020-12-25 2024-04-02 广东美的白色家电技术创新中心有限公司 风机和吸尘装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
FR2224009A5 (fr) * 1973-03-30 1974-10-25 Cit Alcatel
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH0242195A (ja) * 1988-07-31 1990-02-13 Shimadzu Corp ターボ分子ポンプ
US5063661A (en) * 1990-07-05 1991-11-12 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating a split compressor case
US5104288A (en) * 1990-12-10 1992-04-14 Westinghouse Electric Corp. Dual plane bolted joint for separately-supported segmental stationary turbine blade assemblies
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire

Also Published As

Publication number Publication date
EP1101944A2 (fr) 2001-05-23
DE19956015A1 (de) 2001-05-23
ATE333590T1 (de) 2006-08-15
JP2001153088A (ja) 2001-06-05
EP1101944A3 (fr) 2001-10-17
DE50013185D1 (de) 2006-08-31
US6561755B1 (en) 2003-05-13

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