EP1101944A3 - Pompe turbo-moléculaire - Google Patents
Pompe turbo-moléculaire Download PDFInfo
- Publication number
- EP1101944A3 EP1101944A3 EP00124676A EP00124676A EP1101944A3 EP 1101944 A3 EP1101944 A3 EP 1101944A3 EP 00124676 A EP00124676 A EP 00124676A EP 00124676 A EP00124676 A EP 00124676A EP 1101944 A3 EP1101944 A3 EP 1101944A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- molecular pump
- turbo molecular
- disk
- pump
- stator disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Steroid Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19956015 | 1999-11-22 | ||
DE19956015A DE19956015A1 (de) | 1999-11-22 | 1999-11-22 | Turbomolekularpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1101944A2 EP1101944A2 (fr) | 2001-05-23 |
EP1101944A3 true EP1101944A3 (fr) | 2001-10-17 |
EP1101944B1 EP1101944B1 (fr) | 2006-07-19 |
Family
ID=7929835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00124676A Expired - Lifetime EP1101944B1 (fr) | 1999-11-22 | 2000-11-11 | Pompe turbo-moléculaire |
Country Status (5)
Country | Link |
---|---|
US (1) | US6561755B1 (fr) |
EP (1) | EP1101944B1 (fr) |
JP (1) | JP2001153088A (fr) |
AT (1) | ATE333590T1 (fr) |
DE (2) | DE19956015A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10142567A1 (de) * | 2001-08-30 | 2003-03-20 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
DE10351451A1 (de) * | 2003-11-04 | 2005-06-16 | Friesen, Waldemar | NDM - Neue Dimension für Motoren |
DE202008011489U1 (de) | 2008-08-28 | 2010-01-07 | Oerlikon Leybold Vacuum Gmbh | Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe |
GB2568066A (en) * | 2017-11-02 | 2019-05-08 | Edwards Ltd | Stator blade unit for a turbomolecular pump |
CN110043485A (zh) * | 2019-05-16 | 2019-07-23 | 江苏博联硕焊接技术有限公司 | 一种涡轮分子泵转子及其扩散焊接方法 |
CN114673671B (zh) * | 2020-12-25 | 2024-04-02 | 广东美的白色家电技术创新中心有限公司 | 风机和吸尘装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2218615A1 (de) * | 1972-04-18 | 1973-10-31 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe mit rotor und stator |
US3947193A (en) * | 1973-03-30 | 1976-03-30 | Compagnie Industrielle Des Telecommunications Cit-Alcatel | Molecular vacuum pump structure |
JPH01190990A (ja) * | 1988-01-26 | 1989-08-01 | Osaka Shinku Kiki Seisakusho:Kk | 真空ポンプ |
JPH0242195A (ja) * | 1988-07-31 | 1990-02-13 | Shimadzu Corp | ターボ分子ポンプ |
US5722819A (en) * | 1995-06-30 | 1998-03-03 | Alcatel Cit | Molecular drag pump |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4579508A (en) * | 1982-04-21 | 1986-04-01 | Hitachi, Ltd. | Turbomolecular pump |
JPH0689756B2 (ja) * | 1986-05-02 | 1994-11-14 | 株式会社日立製作所 | ドライ真空ポンプ |
JPS6412123A (en) * | 1987-07-03 | 1989-01-17 | Ebara Corp | Rotary machine |
US5063661A (en) * | 1990-07-05 | 1991-11-12 | The United States Of America As Represented By The Secretary Of The Air Force | Method of fabricating a split compressor case |
US5104288A (en) * | 1990-12-10 | 1992-04-14 | Westinghouse Electric Corp. | Dual plane bolted joint for separately-supported segmental stationary turbine blade assemblies |
JPH05141389A (ja) * | 1991-11-15 | 1993-06-08 | Vacuum Prod Kk | 真空ポンプ |
-
1999
- 1999-11-22 DE DE19956015A patent/DE19956015A1/de not_active Withdrawn
-
2000
- 2000-11-08 JP JP2000340217A patent/JP2001153088A/ja active Pending
- 2000-11-11 DE DE50013185T patent/DE50013185D1/de not_active Expired - Lifetime
- 2000-11-11 EP EP00124676A patent/EP1101944B1/fr not_active Expired - Lifetime
- 2000-11-11 AT AT00124676T patent/ATE333590T1/de not_active IP Right Cessation
- 2000-11-21 US US09/718,147 patent/US6561755B1/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2218615A1 (de) * | 1972-04-18 | 1973-10-31 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe mit rotor und stator |
US3947193A (en) * | 1973-03-30 | 1976-03-30 | Compagnie Industrielle Des Telecommunications Cit-Alcatel | Molecular vacuum pump structure |
JPH01190990A (ja) * | 1988-01-26 | 1989-08-01 | Osaka Shinku Kiki Seisakusho:Kk | 真空ポンプ |
JPH0242195A (ja) * | 1988-07-31 | 1990-02-13 | Shimadzu Corp | ターボ分子ポンプ |
US5722819A (en) * | 1995-06-30 | 1998-03-03 | Alcatel Cit | Molecular drag pump |
Also Published As
Publication number | Publication date |
---|---|
DE50013185D1 (de) | 2006-08-31 |
ATE333590T1 (de) | 2006-08-15 |
US6561755B1 (en) | 2003-05-13 |
EP1101944B1 (fr) | 2006-07-19 |
JP2001153088A (ja) | 2001-06-05 |
DE19956015A1 (de) | 2001-05-23 |
EP1101944A2 (fr) | 2001-05-23 |
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