EP1101944A3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP1101944A3
EP1101944A3 EP00124676A EP00124676A EP1101944A3 EP 1101944 A3 EP1101944 A3 EP 1101944A3 EP 00124676 A EP00124676 A EP 00124676A EP 00124676 A EP00124676 A EP 00124676A EP 1101944 A3 EP1101944 A3 EP 1101944A3
Authority
EP
European Patent Office
Prior art keywords
molecular pump
turbo molecular
disk
pump
stator disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00124676A
Other languages
English (en)
French (fr)
Other versions
EP1101944B1 (de
EP1101944A2 (de
Inventor
Heinrich Lotz
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1101944A2 publication Critical patent/EP1101944A2/de
Publication of EP1101944A3 publication Critical patent/EP1101944A3/de
Application granted granted Critical
Publication of EP1101944B1 publication Critical patent/EP1101944B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Abstract

Die Erfindung betrifft eine Turbomolekularpumpe mit Rotor (10) und Statorscheiben (14). Das zylindrische Gehäuse der Pumpe besteht aus mindestens zwei entlang der Zylinderachse (5) getrennten Teilen, welche mit den entsprechend getrennten Teilen der Statorscheiben (14) jeweils eine einstückige Baueinheit (12, 12') bilden.
EP00124676A 1999-11-22 2000-11-11 Turbomolekularpumpe Expired - Lifetime EP1101944B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19956015 1999-11-22
DE19956015A DE19956015A1 (de) 1999-11-22 1999-11-22 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1101944A2 EP1101944A2 (de) 2001-05-23
EP1101944A3 true EP1101944A3 (de) 2001-10-17
EP1101944B1 EP1101944B1 (de) 2006-07-19

Family

ID=7929835

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00124676A Expired - Lifetime EP1101944B1 (de) 1999-11-22 2000-11-11 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US6561755B1 (de)
EP (1) EP1101944B1 (de)
JP (1) JP2001153088A (de)
AT (1) ATE333590T1 (de)
DE (2) DE19956015A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10351451A1 (de) * 2003-11-04 2005-06-16 Friesen, Waldemar NDM - Neue Dimension für Motoren
DE202008011489U1 (de) 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
CN110043485A (zh) * 2019-05-16 2019-07-23 江苏博联硕焊接技术有限公司 一种涡轮分子泵转子及其扩散焊接方法
CN114673671B (zh) * 2020-12-25 2024-04-02 广东美的白色家电技术创新中心有限公司 风机和吸尘装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
US3947193A (en) * 1973-03-30 1976-03-30 Compagnie Industrielle Des Telecommunications Cit-Alcatel Molecular vacuum pump structure
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH0242195A (ja) * 1988-07-31 1990-02-13 Shimadzu Corp ターボ分子ポンプ
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
US5063661A (en) * 1990-07-05 1991-11-12 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating a split compressor case
US5104288A (en) * 1990-12-10 1992-04-14 Westinghouse Electric Corp. Dual plane bolted joint for separately-supported segmental stationary turbine blade assemblies
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (de) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe mit rotor und stator
US3947193A (en) * 1973-03-30 1976-03-30 Compagnie Industrielle Des Telecommunications Cit-Alcatel Molecular vacuum pump structure
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH0242195A (ja) * 1988-07-31 1990-02-13 Shimadzu Corp ターボ分子ポンプ
US5722819A (en) * 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump

Also Published As

Publication number Publication date
JP2001153088A (ja) 2001-06-05
EP1101944B1 (de) 2006-07-19
US6561755B1 (en) 2003-05-13
ATE333590T1 (de) 2006-08-15
DE19956015A1 (de) 2001-05-23
DE50013185D1 (de) 2006-08-31
EP1101944A2 (de) 2001-05-23

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