EP1096152A3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP1096152A3
EP1096152A3 EP00122662A EP00122662A EP1096152A3 EP 1096152 A3 EP1096152 A3 EP 1096152A3 EP 00122662 A EP00122662 A EP 00122662A EP 00122662 A EP00122662 A EP 00122662A EP 1096152 A3 EP1096152 A3 EP 1096152A3
Authority
EP
European Patent Office
Prior art keywords
discs
stator
turbo molecular
molecular pump
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00122662A
Other languages
English (en)
French (fr)
Other versions
EP1096152B1 (de
EP1096152A2 (de
Inventor
Heinrich Lotz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1096152A2 publication Critical patent/EP1096152A2/de
Publication of EP1096152A3 publication Critical patent/EP1096152A3/de
Application granted granted Critical
Publication of EP1096152B1 publication Critical patent/EP1096152B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Steroid Compounds (AREA)

Abstract

Die Erfindung beschreibt eine Turbomolekularpumpe mit Rotor- (10) und Statorscheiben (14), welche abwechselnd hintereinander angeordnet sind und durch ihr Zusammenwirken einen Pumpeffekt erzeugen. Jeweils eine Statorscheibe (14) bildet mit einem Distanzring (16), welcher den Abstand zwischen den Statorscheiben fixiert, und einem Teil (17) des zylindrischen Gehäuses ein einstückiges Statorelement (12). Die Rotorscheiben (10) werden mit Klemmvorrichtungen (24) auf der Rotorwelle (4) befestigt. Dadurch wird eine Montage mit ungeteilten Statorscheiben ermöglicht.
EP00122662A 1999-10-28 2000-10-18 Turbomolekularpumpe Expired - Lifetime EP1096152B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19951954 1999-10-28
DE19951954A DE19951954A1 (de) 1999-10-28 1999-10-28 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1096152A2 EP1096152A2 (de) 2001-05-02
EP1096152A3 true EP1096152A3 (de) 2001-10-17
EP1096152B1 EP1096152B1 (de) 2008-04-23

Family

ID=7927176

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00122662A Expired - Lifetime EP1096152B1 (de) 1999-10-28 2000-10-18 Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US6461123B1 (de)
EP (1) EP1096152B1 (de)
JP (1) JP2001153087A (de)
AT (1) ATE393314T1 (de)
DE (2) DE19951954A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10331932B4 (de) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE202008011489U1 (de) 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102008058149A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
JP6113071B2 (ja) * 2011-06-03 2017-04-12 エドワーズ株式会社 真空ポンプ
US9512848B2 (en) * 2011-09-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US9512853B2 (en) * 2013-03-14 2016-12-06 Texas Capital Semiconductor, Inc. Turbine cap for turbo-molecular pump
US11274671B2 (en) 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US9083212B2 (en) * 2012-09-11 2015-07-14 Concepts Eti, Inc. Overhung turbine and generator system with turbine cartridge
DE102014100622A1 (de) 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe
CN114593075B (zh) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 一种分子泵

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168978A (en) * 1961-08-04 1965-02-09 Snecma Turbomolecular vacuum pump

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH618893A5 (de) * 1977-04-29 1980-08-29 Buehler Ag Geb
US4562368A (en) * 1982-05-26 1985-12-31 Board Of Regents Brush mechanism for a homopolar generator
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS61275594A (ja) * 1985-05-29 1986-12-05 Nippon Soken Inc タ−ボ分子ポンプ
JPS61283794A (ja) * 1985-06-10 1986-12-13 Nippon Soken Inc タ−ボ分子ポンプ
JPS62173594U (de) * 1986-03-22 1987-11-04
JPS63227991A (ja) * 1987-03-13 1988-09-22 Mitsubishi Electric Corp タ−ボ分子ポンプ
JPS6412123A (en) * 1987-07-03 1989-01-17 Ebara Corp Rotary machine
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
JPH05141389A (ja) * 1991-11-15 1993-06-08 Vacuum Prod Kk 真空ポンプ
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
FR2736103B1 (fr) * 1995-06-30 1997-08-08 Cit Alcatel Pompe turbomoleculaire
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
JP3400924B2 (ja) * 1997-03-05 2003-04-28 東芝テック株式会社 電動ポンプ
JP3452468B2 (ja) * 1997-08-15 2003-09-29 株式会社荏原製作所 ターボ分子ポンプ
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
FR2776029B1 (fr) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel Pompe turbomoleculaire
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168978A (en) * 1961-08-04 1965-02-09 Snecma Turbomolecular vacuum pump

Also Published As

Publication number Publication date
EP1096152B1 (de) 2008-04-23
DE50015120D1 (de) 2008-06-05
JP2001153087A (ja) 2001-06-05
DE19951954A1 (de) 2001-05-03
EP1096152A2 (de) 2001-05-02
US6461123B1 (en) 2002-10-08
ATE393314T1 (de) 2008-05-15

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