FR2776029B1 - Pompe turbomoleculaire - Google Patents

Pompe turbomoleculaire

Info

Publication number
FR2776029B1
FR2776029B1 FR9803191A FR9803191A FR2776029B1 FR 2776029 B1 FR2776029 B1 FR 2776029B1 FR 9803191 A FR9803191 A FR 9803191A FR 9803191 A FR9803191 A FR 9803191A FR 2776029 B1 FR2776029 B1 FR 2776029B1
Authority
FR
France
Prior art keywords
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9803191A
Other languages
English (en)
Other versions
FR2776029A1 (fr
Inventor
Andre Bouille
Jean Francois Guilbert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Alsthom Compagnie Generale dElectricite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Alsthom Compagnie Generale dElectricite filed Critical Alcatel Alsthom Compagnie Generale dElectricite
Priority to FR9803191A priority Critical patent/FR2776029B1/fr
Priority to JP11051084A priority patent/JPH11303791A/ja
Priority to EP99400484A priority patent/EP0943807B1/fr
Priority to DE69910475T priority patent/DE69910475T2/de
Priority to US09/266,729 priority patent/US6186749B1/en
Publication of FR2776029A1 publication Critical patent/FR2776029A1/fr
Application granted granted Critical
Publication of FR2776029B1 publication Critical patent/FR2776029B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Sliding Valves (AREA)
FR9803191A 1998-03-16 1998-03-16 Pompe turbomoleculaire Expired - Fee Related FR2776029B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9803191A FR2776029B1 (fr) 1998-03-16 1998-03-16 Pompe turbomoleculaire
JP11051084A JPH11303791A (ja) 1998-03-16 1999-02-26 タ―ボ分子ポンプ
EP99400484A EP0943807B1 (fr) 1998-03-16 1999-03-01 Pompe turbomoléculaire
DE69910475T DE69910475T2 (de) 1998-03-16 1999-03-01 Turbomolekularpumpe
US09/266,729 US6186749B1 (en) 1998-03-16 1999-03-12 Molecular drag pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9803191A FR2776029B1 (fr) 1998-03-16 1998-03-16 Pompe turbomoleculaire

Publications (2)

Publication Number Publication Date
FR2776029A1 FR2776029A1 (fr) 1999-09-17
FR2776029B1 true FR2776029B1 (fr) 2000-06-23

Family

ID=9524085

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9803191A Expired - Fee Related FR2776029B1 (fr) 1998-03-16 1998-03-16 Pompe turbomoleculaire

Country Status (5)

Country Link
US (1) US6186749B1 (fr)
EP (1) EP0943807B1 (fr)
JP (1) JPH11303791A (fr)
DE (1) DE69910475T2 (fr)
FR (1) FR2776029B1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP4672204B2 (ja) * 2001-08-03 2011-04-20 エドワーズ株式会社 真空ポンプの接続構造及び真空ポンプ
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
DE102016114983A1 (de) * 2016-08-12 2018-02-15 Pfeiffer Vacuum Gmbh Vakuumsystem
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
JP6951640B2 (ja) * 2017-05-29 2021-10-20 株式会社島津製作所 真空排気装置、真空ポンプおよび真空バルブ
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
GB2591814A (en) * 2020-02-10 2021-08-11 Edwards Vacuum Llc Housing for a vacuum pump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
JP3309229B2 (ja) * 1992-07-16 2002-07-29 アルバック・クライオ株式会社 ターボ分子ポンプ付クライオポンプ装置

Also Published As

Publication number Publication date
DE69910475T2 (de) 2004-06-17
EP0943807B1 (fr) 2003-08-20
EP0943807A1 (fr) 1999-09-22
FR2776029A1 (fr) 1999-09-17
JPH11303791A (ja) 1999-11-02
DE69910475D1 (de) 2003-09-25
US6186749B1 (en) 2001-02-13

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Legal Events

Date Code Title Description
CD Change of name or company name
ST Notification of lapse

Effective date: 20071130