DE69823932D1 - Turbomolekularpumpe - Google Patents
TurbomolekularpumpeInfo
- Publication number
- DE69823932D1 DE69823932D1 DE69823932T DE69823932T DE69823932D1 DE 69823932 D1 DE69823932 D1 DE 69823932D1 DE 69823932 T DE69823932 T DE 69823932T DE 69823932 T DE69823932 T DE 69823932T DE 69823932 D1 DE69823932 D1 DE 69823932D1
- Authority
- DE
- Germany
- Prior art keywords
- molecular pump
- turbo molecular
- turbo
- pump
- molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F04D29/524—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps shiftable members for obturating part of the flow path
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21564597 | 1997-07-25 | ||
JP21564597 | 1997-07-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69823932D1 true DE69823932D1 (de) | 2004-06-24 |
DE69823932T2 DE69823932T2 (de) | 2005-05-12 |
Family
ID=16675843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69823932T Expired - Fee Related DE69823932T2 (de) | 1997-07-25 | 1998-07-24 | Turbomolekularpumpe |
Country Status (4)
Country | Link |
---|---|
US (1) | US6217278B1 (de) |
EP (1) | EP0893604B1 (de) |
KR (1) | KR19990014135A (de) |
DE (1) | DE69823932T2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000337289A (ja) * | 1999-05-24 | 2000-12-05 | Seiko Seiki Co Ltd | ねじ溝式真空ポンプ、複合真空ポンプ、及び真空ポンプシステム |
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
JP6427963B2 (ja) * | 2014-06-03 | 2018-11-28 | 株式会社島津製作所 | 真空ポンプ |
GB2575450B (en) * | 2018-07-09 | 2022-01-26 | Edwards Ltd | A variable inlet conductance vacuum pump, vacuum pump arrangement and method |
JP7345300B2 (ja) * | 2019-07-11 | 2023-09-15 | エドワーズ株式会社 | 真空ポンプ装置 |
FR3101683B1 (fr) * | 2019-10-03 | 2021-10-01 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire |
JP7356869B2 (ja) * | 2019-11-05 | 2023-10-05 | エドワーズ株式会社 | 真空ポンプ |
GB2591814A (en) * | 2020-02-10 | 2021-08-11 | Edwards Vacuum Llc | Housing for a vacuum pump |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4926648A (en) * | 1988-03-07 | 1990-05-22 | Toshiba Corp. | Turbomolecular pump and method of operating the same |
JP2538796B2 (ja) * | 1989-05-09 | 1996-10-02 | 株式会社東芝 | 真空排気装置および真空排気方法 |
JP3309229B2 (ja) * | 1992-07-16 | 2002-07-29 | アルバック・クライオ株式会社 | ターボ分子ポンプ付クライオポンプ装置 |
-
1998
- 1998-07-23 US US09/120,469 patent/US6217278B1/en not_active Expired - Fee Related
- 1998-07-24 DE DE69823932T patent/DE69823932T2/de not_active Expired - Fee Related
- 1998-07-24 KR KR1019980029812A patent/KR19990014135A/ko not_active Application Discontinuation
- 1998-07-24 EP EP98113886A patent/EP0893604B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0893604B1 (de) | 2004-05-19 |
US6217278B1 (en) | 2001-04-17 |
KR19990014135A (ko) | 1999-02-25 |
EP0893604A1 (de) | 1999-01-27 |
DE69823932T2 (de) | 2005-05-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |