FR3101683B1 - Pompe à vide turbomoléculaire - Google Patents

Pompe à vide turbomoléculaire Download PDF

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Publication number
FR3101683B1
FR3101683B1 FR1910941A FR1910941A FR3101683B1 FR 3101683 B1 FR3101683 B1 FR 3101683B1 FR 1910941 A FR1910941 A FR 1910941A FR 1910941 A FR1910941 A FR 1910941A FR 3101683 B1 FR3101683 B1 FR 3101683B1
Authority
FR
France
Prior art keywords
vacuum pump
turbomolecular vacuum
stator
regulating valve
turbomolecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1910941A
Other languages
English (en)
Other versions
FR3101683A1 (fr
Inventor
Hisanori Kambara
Nicolas Varennes
Gilles Richier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR1910941A priority Critical patent/FR3101683B1/fr
Priority to TW109131696A priority patent/TW202130914A/zh
Priority to CN202080059612.1A priority patent/CN114286895A/zh
Priority to US17/642,543 priority patent/US20220325718A1/en
Priority to JP2022520168A priority patent/JP2022552791A/ja
Priority to KR1020227010652A priority patent/KR20220066901A/ko
Priority to PCT/EP2020/076796 priority patent/WO2021063805A1/fr
Publication of FR3101683A1 publication Critical patent/FR3101683A1/fr
Application granted granted Critical
Publication of FR3101683B1 publication Critical patent/FR3101683B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/524—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps shiftable members for obturating part of the flow path
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0253—Surge control by throttling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2210/00—Working fluids
    • F05D2210/10—Kind or type
    • F05D2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Une pompe à vide (1) turbomoléculaire comporte un stator (2), un rotor (3) configuré pour tourner dans le stator (2) autour d’un axe de rotation (I-I) et une vanne de régulation (13) configurée pour modifier la conductance d’entrée de ladite pompe à vide (1) par déplacement axial vers ou à l’écart d’un orifice d’aspiration (6) de ladite pompe à vide (1). La face (15) de la vanne de régulation (13) en regard de l’orifice d’aspiration (6) présente une forme en creux. Figure d’abrégé : Figure 1
FR1910941A 2019-10-03 2019-10-03 Pompe à vide turbomoléculaire Active FR3101683B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR1910941A FR3101683B1 (fr) 2019-10-03 2019-10-03 Pompe à vide turbomoléculaire
TW109131696A TW202130914A (zh) 2019-10-03 2020-09-15 渦輪分子真空泵
US17/642,543 US20220325718A1 (en) 2019-10-03 2020-09-24 Turbomolecular vacuum pump
JP2022520168A JP2022552791A (ja) 2019-10-03 2020-09-24 ターボ分子真空ポンプ
CN202080059612.1A CN114286895A (zh) 2019-10-03 2020-09-24 涡轮分子真空泵
KR1020227010652A KR20220066901A (ko) 2019-10-03 2020-09-24 터보 몰레큘러 진공 펌프
PCT/EP2020/076796 WO2021063805A1 (fr) 2019-10-03 2020-09-24 Pompe à vide turbomoléculaire

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1910941A FR3101683B1 (fr) 2019-10-03 2019-10-03 Pompe à vide turbomoléculaire
FR1910941 2019-10-03

Publications (2)

Publication Number Publication Date
FR3101683A1 FR3101683A1 (fr) 2021-04-09
FR3101683B1 true FR3101683B1 (fr) 2021-10-01

Family

ID=69024401

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1910941A Active FR3101683B1 (fr) 2019-10-03 2019-10-03 Pompe à vide turbomoléculaire

Country Status (7)

Country Link
US (1) US20220325718A1 (fr)
JP (1) JP2022552791A (fr)
KR (1) KR20220066901A (fr)
CN (1) CN114286895A (fr)
FR (1) FR3101683B1 (fr)
TW (1) TW202130914A (fr)
WO (1) WO2021063805A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7419976B2 (ja) 2020-06-03 2024-01-23 株式会社島津製作所 真空バルブ、ターボ分子ポンプおよび真空容器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3604228B2 (ja) * 1996-02-02 2004-12-22 アネルバ株式会社 真空排気装置
US6217278B1 (en) * 1997-07-25 2001-04-17 Ebara Corporation Turbomolecular pump
JP3415402B2 (ja) * 1997-08-15 2003-06-09 株式会社荏原製作所 ターボ分子ポンプ
JP2003269370A (ja) * 2002-03-12 2003-09-25 Boc Edwards Technologies Ltd ポンプ装置
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
JP2006307823A (ja) * 2005-03-31 2006-11-09 Shimadzu Corp ターボ分子ポンプ
JP5250201B2 (ja) * 2006-12-07 2013-07-31 エドワーズ株式会社 真空ポンプ
JP4891178B2 (ja) * 2007-08-13 2012-03-07 ルネサスエレクトロニクス株式会社 真空装置
JP2009212177A (ja) * 2008-03-03 2009-09-17 Hitachi High-Technologies Corp 真空処理装置
JP5161694B2 (ja) * 2008-08-05 2013-03-13 株式会社日立ハイテクノロジーズ 真空処理装置
JP5865596B2 (ja) * 2011-03-25 2016-02-17 東京エレクトロン株式会社 粒子捕捉ユニット、該粒子捕捉ユニットの製造方法及び基板処理装置
JP2013167207A (ja) * 2012-02-15 2013-08-29 Ebara Corp ターボ分子ポンプ
JP5944883B2 (ja) * 2013-12-18 2016-07-05 東京エレクトロン株式会社 粒子逆流防止部材及び基板処理装置
CN105526180A (zh) * 2016-01-29 2016-04-27 天津飞旋科技研发有限公司 磁悬浮复合分子泵
JP7419976B2 (ja) * 2020-06-03 2024-01-23 株式会社島津製作所 真空バルブ、ターボ分子ポンプおよび真空容器

Also Published As

Publication number Publication date
KR20220066901A (ko) 2022-05-24
US20220325718A1 (en) 2022-10-13
CN114286895A (zh) 2022-04-05
TW202130914A (zh) 2021-08-16
WO2021063805A1 (fr) 2021-04-08
JP2022552791A (ja) 2022-12-20
FR3101683A1 (fr) 2021-04-09

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