DE69827553D1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
DE69827553D1
DE69827553D1 DE69827553T DE69827553T DE69827553D1 DE 69827553 D1 DE69827553 D1 DE 69827553D1 DE 69827553 T DE69827553 T DE 69827553T DE 69827553 T DE69827553 T DE 69827553T DE 69827553 D1 DE69827553 D1 DE 69827553D1
Authority
DE
Germany
Prior art keywords
molecular pump
turbo molecular
turbo
pump
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69827553T
Other languages
English (en)
Other versions
DE69827553T2 (de
Inventor
Tetsuma Ikegami
Matsutaro Miymoto
Hiroyuki Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26367314&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69827553(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69827553D1 publication Critical patent/DE69827553D1/de
Publication of DE69827553T2 publication Critical patent/DE69827553T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE69827553T 1997-06-27 1998-06-26 Turbomolekularpumpe Expired - Lifetime DE69827553T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP18768197 1997-06-27
JP18768197 1997-06-27
JP2916098 1998-01-27
JP2916098 1998-01-27

Publications (2)

Publication Number Publication Date
DE69827553D1 true DE69827553D1 (de) 2004-12-23
DE69827553T2 DE69827553T2 (de) 2005-12-08

Family

ID=26367314

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69827553T Expired - Lifetime DE69827553T2 (de) 1997-06-27 1998-06-26 Turbomolekularpumpe

Country Status (4)

Country Link
US (2) US6332752B2 (de)
EP (1) EP0887556B1 (de)
KR (1) KR100408113B1 (de)
DE (1) DE69827553T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
US6926493B1 (en) * 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
KR100724048B1 (ko) * 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
JP4004779B2 (ja) * 2001-11-16 2007-11-07 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP3950323B2 (ja) 2001-11-19 2007-08-01 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
JP4147042B2 (ja) * 2002-03-12 2008-09-10 エドワーズ株式会社 真空ポンプ
FR2850714B1 (fr) * 2003-02-03 2005-04-29 Cit Alcatel Pompe turbomoleculaire a entretoises multietagees de stator
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
DE10331932B4 (de) 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
DE102007051988A1 (de) * 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008004297A1 (de) * 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
CN101981321B (zh) * 2008-03-31 2014-05-28 株式会社岛津制作所 涡轮式分子泵
DE202008011489U1 (de) * 2008-08-28 2010-01-07 Oerlikon Leybold Vacuum Gmbh Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe
DE102008058151A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5532051B2 (ja) 2009-11-02 2014-06-25 株式会社島津製作所 真空ポンプ
KR101647879B1 (ko) * 2014-04-15 2016-08-12 한밭대학교 산학협력단 터보분자식 수증기 압축장치
JP6433812B2 (ja) * 2015-02-25 2018-12-05 エドワーズ株式会社 アダプタ及び真空ポンプ
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US998820A (en) * 1908-05-13 1911-07-25 George Westinghouse Turbine-blading.
US1925898A (en) * 1931-07-23 1933-09-05 Goodrich Co B F Fluid seal for relatively rotating parts
FR2086525A5 (de) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
DE2214702A1 (de) * 1972-03-25 1973-09-27 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
IT1032818B (it) 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
DE2654055B2 (de) 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
US4289360A (en) 1979-08-23 1981-09-15 General Electric Company Bearing damper system
FR2476407A1 (fr) * 1980-02-19 1981-08-21 Europ Propulsion Dispositif de centrage d'un rotor
JPS57212395A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Molecular pump
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
US4579508A (en) 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
US4449888A (en) * 1982-04-23 1984-05-22 Balje Otto E Free spool inducer pump
JPS59153988A (ja) 1983-02-21 1984-09-01 Toshiba Corp 真空回転機器の据付装置
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS6110994A (ja) 1984-06-25 1986-01-18 Copal Denshi Kk ステツプモ−タの駆動方法
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
JPS62261696A (ja) 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
JPS63255594A (ja) 1987-04-13 1988-10-21 Ebara Corp タ−ボ分子ポンプ
JPS6429695A (en) 1987-07-22 1989-01-31 Mitsubishi Electric Corp Turbo molecular pump
JPH0674796B2 (ja) 1987-08-07 1994-09-21 日本原子力研究所 マルチチヤンネル型真空ポンプ
JPH01113191A (ja) 1987-10-23 1989-05-01 Mitsubishi Electric Corp レーザビーム位置検出装置
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH01190991A (ja) 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
JPH0466395A (ja) 1990-07-05 1992-03-02 Mitsubishi Heavy Ind Ltd 航空機のパイロン
JPH0536094A (ja) 1991-04-17 1993-02-12 Seiko Epson Corp 光学ヘツド駆動装置
JPH04330397A (ja) 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
GB2265418B (en) * 1992-03-26 1995-03-08 Rolls Royce Plc Gas turbine engine casing
JPH064392A (ja) 1992-06-24 1994-01-14 Canon Inc 情報処理システム
WO1994007033A1 (en) 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower
JP3419052B2 (ja) * 1993-12-17 2003-06-23 日本精工株式会社 複列玉軸受と予圧を付与された複列玉軸受の製造方法
JP3399106B2 (ja) 1994-08-30 2003-04-21 株式会社島津製作所 分子ポンプ
JP3427950B2 (ja) 1994-11-17 2003-07-22 株式会社島津製作所 モレキュラドラッグポンプ
JP3879169B2 (ja) 1997-03-31 2007-02-07 株式会社島津製作所 ターボ分子ポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JPH1193889A (ja) 1997-07-25 1999-04-06 Ebara Corp ターボ分子ポンプ
JP3469055B2 (ja) 1997-08-20 2003-11-25 三菱重工業株式会社 ターボ分子ポンプ

Also Published As

Publication number Publication date
DE69827553T2 (de) 2005-12-08
US6332752B2 (en) 2001-12-25
KR19990007502A (ko) 1999-01-25
EP0887556A1 (de) 1998-12-30
US6953317B2 (en) 2005-10-11
KR100408113B1 (ko) 2004-03-24
US20020028132A1 (en) 2002-03-07
US20010016160A1 (en) 2001-08-23
EP0887556B1 (de) 2004-11-17

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Legal Events

Date Code Title Description
8363 Opposition against the patent