DE69827553D1 - Turbomolekularpumpe - Google Patents
TurbomolekularpumpeInfo
- Publication number
- DE69827553D1 DE69827553D1 DE69827553T DE69827553T DE69827553D1 DE 69827553 D1 DE69827553 D1 DE 69827553D1 DE 69827553 T DE69827553 T DE 69827553T DE 69827553 T DE69827553 T DE 69827553T DE 69827553 D1 DE69827553 D1 DE 69827553D1
- Authority
- DE
- Germany
- Prior art keywords
- molecular pump
- turbo molecular
- turbo
- pump
- molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18768197 | 1997-06-27 | ||
JP18768197 | 1997-06-27 | ||
JP2916098 | 1998-01-27 | ||
JP2916098 | 1998-01-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69827553D1 true DE69827553D1 (de) | 2004-12-23 |
DE69827553T2 DE69827553T2 (de) | 2005-12-08 |
Family
ID=26367314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69827553T Expired - Lifetime DE69827553T2 (de) | 1997-06-27 | 1998-06-26 | Turbomolekularpumpe |
Country Status (4)
Country | Link |
---|---|
US (2) | US6332752B2 (de) |
EP (1) | EP0887556B1 (de) |
KR (1) | KR100408113B1 (de) |
DE (1) | DE69827553T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6332752B2 (en) * | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
US6926493B1 (en) * | 1997-06-27 | 2005-08-09 | Ebara Corporation | Turbo-molecular pump |
KR100724048B1 (ko) * | 1999-02-19 | 2007-06-04 | 가부시키가이샤 에바라 세이사꾸쇼 | 터보 분자 펌프 |
US6485254B1 (en) * | 2000-10-19 | 2002-11-26 | Applied Materials, Inc. | Energy dissipating coupling |
JP2002327698A (ja) * | 2001-04-27 | 2002-11-15 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP2003129991A (ja) * | 2001-10-24 | 2003-05-08 | Boc Edwards Technologies Ltd | 分子ポンプ |
JP4004779B2 (ja) * | 2001-11-16 | 2007-11-07 | Bocエドワーズ株式会社 | 真空ポンプ |
JP3950323B2 (ja) | 2001-11-19 | 2007-08-01 | Bocエドワーズ株式会社 | 真空ポンプ |
JP4156830B2 (ja) * | 2001-12-13 | 2008-09-24 | エドワーズ株式会社 | 真空ポンプ |
JP4147042B2 (ja) * | 2002-03-12 | 2008-09-10 | エドワーズ株式会社 | 真空ポンプ |
FR2850714B1 (fr) * | 2003-02-03 | 2005-04-29 | Cit Alcatel | Pompe turbomoleculaire a entretoises multietagees de stator |
JP2005042709A (ja) * | 2003-07-10 | 2005-02-17 | Ebara Corp | 真空ポンプ |
DE10331932B4 (de) | 2003-07-15 | 2017-08-24 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
US7021888B2 (en) * | 2003-12-16 | 2006-04-04 | Universities Research Association, Inc. | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump |
KR100610012B1 (ko) * | 2004-08-16 | 2006-08-09 | 삼성전자주식회사 | 터보 펌프 |
FR2893094B1 (fr) * | 2005-11-10 | 2011-11-11 | Cit Alcatel | Dispositif de fixation pour une pompe a vide |
DE102007051988A1 (de) * | 2007-10-31 | 2009-05-07 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
DE102008004297A1 (de) * | 2008-01-15 | 2009-07-16 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
CN101981321B (zh) * | 2008-03-31 | 2014-05-28 | 株式会社岛津制作所 | 涡轮式分子泵 |
DE202008011489U1 (de) * | 2008-08-28 | 2010-01-07 | Oerlikon Leybold Vacuum Gmbh | Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe |
DE102008058151A1 (de) * | 2008-11-20 | 2010-05-27 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
JP5532051B2 (ja) | 2009-11-02 | 2014-06-25 | 株式会社島津製作所 | 真空ポンプ |
KR101647879B1 (ko) * | 2014-04-15 | 2016-08-12 | 한밭대학교 산학협력단 | 터보분자식 수증기 압축장치 |
JP6433812B2 (ja) * | 2015-02-25 | 2018-12-05 | エドワーズ株式会社 | アダプタ及び真空ポンプ |
GB2552793A (en) * | 2016-08-08 | 2018-02-14 | Edwards Ltd | Vacuum pump |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US998820A (en) * | 1908-05-13 | 1911-07-25 | George Westinghouse | Turbine-blading. |
US1925898A (en) * | 1931-07-23 | 1933-09-05 | Goodrich Co B F | Fluid seal for relatively rotating parts |
FR2086525A5 (de) * | 1970-04-01 | 1971-12-31 | Commissariat Energie Atomique | |
DE2214702A1 (de) * | 1972-03-25 | 1973-09-27 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe |
IT1032818B (it) | 1975-05-06 | 1979-06-20 | Rava E | Perfezionamento alle pompe turbomo lecolari |
DE2654055B2 (de) | 1976-11-29 | 1979-11-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Rotor- und Statorscheibe für Turbomolekularpumpe |
US4289360A (en) | 1979-08-23 | 1981-09-15 | General Electric Company | Bearing damper system |
FR2476407A1 (fr) * | 1980-02-19 | 1981-08-21 | Europ Propulsion | Dispositif de centrage d'un rotor |
JPS57212395A (en) * | 1981-06-24 | 1982-12-27 | Hitachi Ltd | Molecular pump |
DE3204750C2 (de) * | 1982-02-11 | 1984-04-26 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Magnetisch gelagerte Turbomolekularpumpe |
US4579508A (en) | 1982-04-21 | 1986-04-01 | Hitachi, Ltd. | Turbomolecular pump |
US4449888A (en) * | 1982-04-23 | 1984-05-22 | Balje Otto E | Free spool inducer pump |
JPS59153988A (ja) | 1983-02-21 | 1984-09-01 | Toshiba Corp | 真空回転機器の据付装置 |
DE3410905A1 (de) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken |
JPS6110994A (ja) | 1984-06-25 | 1986-01-18 | Copal Denshi Kk | ステツプモ−タの駆動方法 |
GB8507010D0 (en) * | 1985-03-19 | 1985-04-24 | Framo Dev Ltd | Compressor unit |
JPS62261696A (ja) | 1986-05-08 | 1987-11-13 | Mitsubishi Electric Corp | タ−ボ分子ポンプ装置 |
JPS63255594A (ja) | 1987-04-13 | 1988-10-21 | Ebara Corp | タ−ボ分子ポンプ |
JPS6429695A (en) | 1987-07-22 | 1989-01-31 | Mitsubishi Electric Corp | Turbo molecular pump |
JPH0674796B2 (ja) | 1987-08-07 | 1994-09-21 | 日本原子力研究所 | マルチチヤンネル型真空ポンプ |
JPH01113191A (ja) | 1987-10-23 | 1989-05-01 | Mitsubishi Electric Corp | レーザビーム位置検出装置 |
JPH01190990A (ja) * | 1988-01-26 | 1989-08-01 | Osaka Shinku Kiki Seisakusho:Kk | 真空ポンプ |
JPH01190991A (ja) | 1988-01-26 | 1989-08-01 | Osaka Shinku Kiki Seisakusho:Kk | 真空ポンプ |
JPH0466395A (ja) | 1990-07-05 | 1992-03-02 | Mitsubishi Heavy Ind Ltd | 航空機のパイロン |
JPH0536094A (ja) | 1991-04-17 | 1993-02-12 | Seiko Epson Corp | 光学ヘツド駆動装置 |
JPH04330397A (ja) | 1991-04-30 | 1992-11-18 | Fujitsu Ltd | ターボ分子ポンプ |
GB2265418B (en) * | 1992-03-26 | 1995-03-08 | Rolls Royce Plc | Gas turbine engine casing |
JPH064392A (ja) | 1992-06-24 | 1994-01-14 | Canon Inc | 情報処理システム |
WO1994007033A1 (en) | 1992-09-23 | 1994-03-31 | United States Of America As Represented By The Secretary Of The Air Force | Turbo-molecular blower |
JP3419052B2 (ja) * | 1993-12-17 | 2003-06-23 | 日本精工株式会社 | 複列玉軸受と予圧を付与された複列玉軸受の製造方法 |
JP3399106B2 (ja) | 1994-08-30 | 2003-04-21 | 株式会社島津製作所 | 分子ポンプ |
JP3427950B2 (ja) | 1994-11-17 | 2003-07-22 | 株式会社島津製作所 | モレキュラドラッグポンプ |
JP3879169B2 (ja) | 1997-03-31 | 2007-02-07 | 株式会社島津製作所 | ターボ分子ポンプ |
US6332752B2 (en) * | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
JPH1193889A (ja) | 1997-07-25 | 1999-04-06 | Ebara Corp | ターボ分子ポンプ |
JP3469055B2 (ja) | 1997-08-20 | 2003-11-25 | 三菱重工業株式会社 | ターボ分子ポンプ |
-
1998
- 1998-06-25 US US09/104,171 patent/US6332752B2/en not_active Expired - Lifetime
- 1998-06-26 DE DE69827553T patent/DE69827553T2/de not_active Expired - Lifetime
- 1998-06-26 EP EP98111911A patent/EP0887556B1/de not_active Revoked
- 1998-06-27 KR KR10-1998-0026536A patent/KR100408113B1/ko not_active IP Right Cessation
-
2001
- 2001-10-31 US US09/984,773 patent/US6953317B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69827553T2 (de) | 2005-12-08 |
US6332752B2 (en) | 2001-12-25 |
KR19990007502A (ko) | 1999-01-25 |
EP0887556A1 (de) | 1998-12-30 |
US6953317B2 (en) | 2005-10-11 |
KR100408113B1 (ko) | 2004-03-24 |
US20020028132A1 (en) | 2002-03-07 |
US20010016160A1 (en) | 2001-08-23 |
EP0887556B1 (de) | 2004-11-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent |